JP4809006B2 - 着色感光性樹脂組成物及びその硬化物 - Google Patents
着色感光性樹脂組成物及びその硬化物 Download PDFInfo
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- JP4809006B2 JP4809006B2 JP2005195626A JP2005195626A JP4809006B2 JP 4809006 B2 JP4809006 B2 JP 4809006B2 JP 2005195626 A JP2005195626 A JP 2005195626A JP 2005195626 A JP2005195626 A JP 2005195626A JP 4809006 B2 JP4809006 B2 JP 4809006B2
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- resin composition
- photosensitive resin
- pigment
- colored photosensitive
- polymerization initiator
- Prior art date
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- 239000011342 resin composition Substances 0.000 title claims description 35
- -1 olefin compound Chemical class 0.000 claims description 52
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims description 31
- 239000003505 polymerization initiator Substances 0.000 claims description 27
- 150000001875 compounds Chemical class 0.000 claims description 26
- 239000000178 monomer Substances 0.000 claims description 26
- 239000000049 pigment Substances 0.000 claims description 26
- 229920005989 resin Polymers 0.000 claims description 17
- 239000011347 resin Substances 0.000 claims description 17
- 239000004593 Epoxy Substances 0.000 claims description 16
- AUONHKJOIZSQGR-UHFFFAOYSA-N oxophosphane Chemical compound P=O AUONHKJOIZSQGR-UHFFFAOYSA-N 0.000 claims description 14
- 239000000203 mixture Substances 0.000 claims description 12
- 239000003513 alkali Substances 0.000 claims description 11
- 239000003999 initiator Substances 0.000 claims description 9
- 238000002156 mixing Methods 0.000 claims description 8
- 125000002091 cationic group Chemical group 0.000 claims description 7
- VFHVQBAGLAREND-UHFFFAOYSA-N diphenylphosphoryl-(2,4,6-trimethylphenyl)methanone Chemical compound CC1=CC(C)=CC(C)=C1C(=O)P(=O)(C=1C=CC=CC=1)C1=CC=CC=C1 VFHVQBAGLAREND-UHFFFAOYSA-N 0.000 claims description 5
- JRZJOMJEPLMPRA-UHFFFAOYSA-N olefin Natural products CCCCCCCC=C JRZJOMJEPLMPRA-UHFFFAOYSA-N 0.000 claims description 5
- 230000001590 oxidative effect Effects 0.000 claims description 5
- 239000001055 blue pigment Substances 0.000 claims description 4
- 239000001056 green pigment Substances 0.000 claims description 4
- 239000001057 purple pigment Substances 0.000 claims description 4
- 239000001054 red pigment Substances 0.000 claims description 4
- 239000001052 yellow pigment Substances 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 3
- 239000003822 epoxy resin Substances 0.000 description 21
- 229920000647 polyepoxide Polymers 0.000 description 21
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 18
- 230000018109 developmental process Effects 0.000 description 18
- 238000000034 method Methods 0.000 description 15
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 12
- 239000002253 acid Substances 0.000 description 10
- 238000000576 coating method Methods 0.000 description 10
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 10
- 239000011248 coating agent Substances 0.000 description 9
- 239000000126 substance Substances 0.000 description 9
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 8
- 150000008065 acid anhydrides Chemical class 0.000 description 8
- 229920000642 polymer Polymers 0.000 description 8
- 150000007519 polyprotic acids Polymers 0.000 description 7
- 239000000047 product Substances 0.000 description 7
- 229920006395 saturated elastomer Polymers 0.000 description 7
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 6
- KFSLWBXXFJQRDL-UHFFFAOYSA-N Peracetic acid Chemical compound CC(=O)OO KFSLWBXXFJQRDL-UHFFFAOYSA-N 0.000 description 6
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 6
- 239000007864 aqueous solution Substances 0.000 description 6
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 6
- 229920001577 copolymer Polymers 0.000 description 6
- 125000003700 epoxy group Chemical group 0.000 description 6
- LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 6
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 6
- 229910052753 mercury Inorganic materials 0.000 description 6
- 229920003986 novolac Polymers 0.000 description 6
- 239000003960 organic solvent Substances 0.000 description 6
- 238000000206 photolithography Methods 0.000 description 6
- 229960000834 vinyl ether Drugs 0.000 description 6
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 150000002148 esters Chemical class 0.000 description 5
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 5
- 150000003254 radicals Chemical class 0.000 description 5
- FNYWFRSQRHGKJT-UHFFFAOYSA-N 3-ethyl-3-[(3-ethyloxetan-3-yl)methoxymethyl]oxetane Chemical compound C1OCC1(CC)COCC1(CC)COC1 FNYWFRSQRHGKJT-UHFFFAOYSA-N 0.000 description 4
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 4
- 239000005062 Polybutadiene Substances 0.000 description 4
- 238000010538 cationic polymerization reaction Methods 0.000 description 4
- 150000001768 cations Chemical class 0.000 description 4
- 229910017052 cobalt Inorganic materials 0.000 description 4
- 239000010941 cobalt Substances 0.000 description 4
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 4
- 238000013329 compounding Methods 0.000 description 4
- 239000000945 filler Substances 0.000 description 4
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 4
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 4
- 229920002857 polybutadiene Polymers 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- KMOUUZVZFBCRAM-OLQVQODUSA-N (3as,7ar)-3a,4,7,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1C=CC[C@@H]2C(=O)OC(=O)[C@@H]21 KMOUUZVZFBCRAM-OLQVQODUSA-N 0.000 description 3
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 3
- VPWNQTHUCYMVMZ-UHFFFAOYSA-N 4,4'-sulfonyldiphenol Chemical compound C1=CC(O)=CC=C1S(=O)(=O)C1=CC=C(O)C=C1 VPWNQTHUCYMVMZ-UHFFFAOYSA-N 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- QYKIQEUNHZKYBP-UHFFFAOYSA-N Vinyl ether Chemical compound C=COC=C QYKIQEUNHZKYBP-UHFFFAOYSA-N 0.000 description 3
- 230000001476 alcoholic effect Effects 0.000 description 3
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 3
- QDOXWKRWXJOMAK-UHFFFAOYSA-N dichromium trioxide Chemical compound O=[Cr]O[Cr]=O QDOXWKRWXJOMAK-UHFFFAOYSA-N 0.000 description 3
- 239000002270 dispersing agent Substances 0.000 description 3
- 150000002921 oxetanes Chemical class 0.000 description 3
- 239000003208 petroleum Substances 0.000 description 3
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 3
- 229910000029 sodium carbonate Inorganic materials 0.000 description 3
- UNMJLQGKEDTEKJ-UHFFFAOYSA-N (3-ethyloxetan-3-yl)methanol Chemical compound CCC1(CO)COC1 UNMJLQGKEDTEKJ-UHFFFAOYSA-N 0.000 description 2
- MUTGBJKUEZFXGO-OLQVQODUSA-N (3as,7ar)-3a,4,5,6,7,7a-hexahydro-2-benzofuran-1,3-dione Chemical compound C1CCC[C@@H]2C(=O)OC(=O)[C@@H]21 MUTGBJKUEZFXGO-OLQVQODUSA-N 0.000 description 2
- SDRZFSPCVYEJTP-UHFFFAOYSA-N 1-ethenylcyclohexene Chemical compound C=CC1=CCCCC1 SDRZFSPCVYEJTP-UHFFFAOYSA-N 0.000 description 2
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 2
- YCCILVSKPBXVIP-UHFFFAOYSA-N 2-(4-hydroxyphenyl)ethanol Chemical compound OCCC1=CC=C(O)C=C1 YCCILVSKPBXVIP-UHFFFAOYSA-N 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- HEQOJEGTZCTHCF-UHFFFAOYSA-N 2-amino-1-phenylethanone Chemical compound NCC(=O)C1=CC=CC=C1 HEQOJEGTZCTHCF-UHFFFAOYSA-N 0.000 description 2
- UHFFVFAKEGKNAQ-UHFFFAOYSA-N 2-benzyl-2-(dimethylamino)-1-(4-morpholin-4-ylphenyl)butan-1-one Chemical compound C=1C=C(N2CCOCC2)C=CC=1C(=O)C(CC)(N(C)C)CC1=CC=CC=C1 UHFFVFAKEGKNAQ-UHFFFAOYSA-N 0.000 description 2
- LWRBVKNFOYUCNP-UHFFFAOYSA-N 2-methyl-1-(4-methylsulfanylphenyl)-2-morpholin-4-ylpropan-1-one Chemical compound C1=CC(SC)=CC=C1C(=O)C(C)(C)N1CCOCC1 LWRBVKNFOYUCNP-UHFFFAOYSA-N 0.000 description 2
- NJWGQARXZDRHCD-UHFFFAOYSA-N 2-methylanthraquinone Chemical compound C1=CC=C2C(=O)C3=CC(C)=CC=C3C(=O)C2=C1 NJWGQARXZDRHCD-UHFFFAOYSA-N 0.000 description 2
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 2
- LMIOYAVXLAOXJI-UHFFFAOYSA-N 3-ethyl-3-[[4-[(3-ethyloxetan-3-yl)methoxymethyl]phenyl]methoxymethyl]oxetane Chemical compound C=1C=C(COCC2(CC)COC2)C=CC=1COCC1(CC)COC1 LMIOYAVXLAOXJI-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- FBPFZTCFMRRESA-FSIIMWSLSA-N D-Glucitol Natural products OC[C@H](O)[C@H](O)[C@@H](O)[C@H](O)CO FBPFZTCFMRRESA-FSIIMWSLSA-N 0.000 description 2
- FBPFZTCFMRRESA-JGWLITMVSA-N D-glucitol Chemical compound OC[C@H](O)[C@@H](O)[C@H](O)[C@H](O)CO FBPFZTCFMRRESA-JGWLITMVSA-N 0.000 description 2
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
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- 206010034972 Photosensitivity reaction Diseases 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
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- DBHQYYNDKZDVTN-UHFFFAOYSA-N [4-(4-methylphenyl)sulfanylphenyl]-phenylmethanone Chemical compound C1=CC(C)=CC=C1SC1=CC=C(C(=O)C=2C=CC=CC=2)C=C1 DBHQYYNDKZDVTN-UHFFFAOYSA-N 0.000 description 2
- AUNAPVYQLLNFOI-UHFFFAOYSA-L [Pb++].[Pb++].[Pb++].[O-]S([O-])(=O)=O.[O-][Cr]([O-])(=O)=O.[O-][Mo]([O-])(=O)=O Chemical compound [Pb++].[Pb++].[Pb++].[O-]S([O-])(=O)=O.[O-][Cr]([O-])(=O)=O.[O-][Mo]([O-])(=O)=O AUNAPVYQLLNFOI-UHFFFAOYSA-L 0.000 description 2
- 125000002723 alicyclic group Chemical group 0.000 description 2
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 2
- 150000001412 amines Chemical class 0.000 description 2
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- 239000012965 benzophenone Substances 0.000 description 2
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- 238000004040 coloring Methods 0.000 description 2
- XCJYREBRNVKWGJ-UHFFFAOYSA-N copper(II) phthalocyanine Chemical compound [Cu+2].C12=CC=CC=C2C(N=C2[N-]C(C3=CC=CC=C32)=N2)=NC1=NC([C]1C=CC=CC1=1)=NC=1N=C1[C]3C=CC=CC3=C2[N-]1 XCJYREBRNVKWGJ-UHFFFAOYSA-N 0.000 description 2
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- 238000011156 evaluation Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- HEQBUZNAOJCRSL-UHFFFAOYSA-N iron(ii) chromite Chemical compound [O-2].[O-2].[O-2].[Cr+3].[Fe+3] HEQBUZNAOJCRSL-UHFFFAOYSA-N 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- QQVIHTHCMHWDBS-UHFFFAOYSA-N isophthalic acid Chemical compound OC(=O)C1=CC=CC(C(O)=O)=C1 QQVIHTHCMHWDBS-UHFFFAOYSA-N 0.000 description 2
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- 150000002762 monocarboxylic acid derivatives Chemical class 0.000 description 2
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- 125000002080 perylenyl group Chemical group C1(=CC=C2C=CC=C3C4=CC=CC5=CC=CC(C1=C23)=C45)* 0.000 description 2
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- 230000036211 photosensitivity Effects 0.000 description 2
- XNGIFLGASWRNHJ-UHFFFAOYSA-N phthalic acid Chemical compound OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 description 2
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- 239000007870 radical polymerization initiator Substances 0.000 description 2
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- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 2
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- SKYXLDSRLNRAPS-UHFFFAOYSA-N 1,2,4-trifluoro-5-methoxybenzene Chemical compound COC1=CC(F)=C(F)C=C1F SKYXLDSRLNRAPS-UHFFFAOYSA-N 0.000 description 1
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- AITKNDQVEUUYHE-UHFFFAOYSA-N 1,3-bis(ethenoxy)-2,2-dimethylpropane Chemical compound C=COCC(C)(C)COC=C AITKNDQVEUUYHE-UHFFFAOYSA-N 0.000 description 1
- FRFLNVQKHZGFAS-UHFFFAOYSA-N 1,3-bis(ethenoxy)but-1-ene Chemical compound C=COC(C)C=COC=C FRFLNVQKHZGFAS-UHFFFAOYSA-N 0.000 description 1
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- Materials For Photolithography (AREA)
- Polymerisation Methods In General (AREA)
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| CN2006100984114A CN1892425B (zh) | 2005-07-05 | 2006-07-05 | 着色感光性树脂组合物及其固化物 |
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| JP2007322485A (ja) * | 2006-05-30 | 2007-12-13 | Nippon Sheet Glass Co Ltd | 遮光隔壁形成用のアルカリ現像型黒色感光性樹脂組成物 |
| JP4994923B2 (ja) * | 2007-04-06 | 2012-08-08 | 太陽ホールディングス株式会社 | 黒色ソルダーレジスト組成物およびその硬化物 |
| JP5291893B2 (ja) * | 2007-05-08 | 2013-09-18 | 太陽ホールディングス株式会社 | 光硬化性樹脂組成物およびその硬化物 |
| JP4663679B2 (ja) * | 2007-05-08 | 2011-04-06 | 太陽ホールディングス株式会社 | 光硬化性樹脂組成物、ドライフィルム、硬化物、及びプリント配線板 |
| CN100554335C (zh) * | 2007-10-17 | 2009-10-28 | 太阳油墨（苏州）有限公司 | 用于印刷电路板的外观检查的树脂组合物 |
| KR101607705B1 (ko) * | 2007-11-22 | 2016-03-30 | 토요잉크Sc홀딩스주식회사 | 컬러 필터용 녹색 착색 조성물, 및 컬러 필터 |
| JP2009157235A (ja) * | 2007-12-27 | 2009-07-16 | Sanyo Chem Ind Ltd | 感光性樹脂組成物 |
| JP4998293B2 (ja) * | 2008-01-31 | 2012-08-15 | Ｊｓｒ株式会社 | 着色層形成用感放射線性組成物、カラーフィルタおよびカラー液晶表示素子 |
| TWI408150B (zh) * | 2008-10-17 | 2013-09-11 | Taiyo Ink Mfg Co Ltd | A solder resist composition and a printed circuit board using the same |
| KR101486692B1 (ko) | 2009-06-08 | 2015-01-29 | 산요가세이고교 가부시키가이샤 | 감광성 조성물 |
| CN102792224A (zh) * | 2010-03-08 | 2012-11-21 | 株式会社Lg化学 | 具有优良耐热性和机械性能的光敏树脂组合物及印刷电路板用保护膜 |
| JP5744528B2 (ja) * | 2011-01-11 | 2015-07-08 | 東京応化工業株式会社 | タッチパネル用着色感光性樹脂組成物、タッチパネル、及び表示装置 |
| KR101666263B1 (ko) * | 2011-03-07 | 2016-10-13 | 산요가세이고교 가부시키가이샤 | 감광성 조성물, 경화물, 및, 활성 광선 경화물의 제조 방법 |
| JP5417364B2 (ja) * | 2011-03-08 | 2014-02-12 | 富士フイルム株式会社 | 固体撮像素子用硬化性組成物、並びに、これを用いた感光層、永久パターン、ウエハレベルレンズ、固体撮像素子、及び、パターン形成方法 |
| JP5663506B2 (ja) * | 2012-02-06 | 2015-02-04 | 太陽ホールディングス株式会社 | ソルダーレジスト組成物 |
| CN104204945B (zh) * | 2012-03-26 | 2017-10-03 | 东丽株式会社 | 感光性黑色树脂组合物及树脂黑色矩阵基板 |
| JP5526248B2 (ja) * | 2013-02-13 | 2014-06-18 | 太陽ホールディングス株式会社 | 光硬化性樹脂組成物およびその硬化物 |
| CN104049457B (zh) * | 2013-03-11 | 2016-01-27 | 太阳油墨制造株式会社 | 光固化性树脂组合物、其干膜和固化物、以及具有使用它们形成的固化皮膜的印刷电路板 |
| US9932439B2 (en) * | 2013-09-18 | 2018-04-03 | Daicel Corporation | Photosensitive resin composition and cured article of same, and optical component |
| JP6536578B2 (ja) * | 2014-07-18 | 2019-07-03 | Ａｇｃ株式会社 | ネガ型感光性樹脂組成物、樹脂硬化膜、隔壁、光学素子および光学素子の製造方法 |
| JP6748419B2 (ja) * | 2014-11-19 | 2020-09-02 | 三洋化成工業株式会社 | 感光性樹脂組成物 |
| EP3085661B1 (en) * | 2015-04-21 | 2017-12-27 | JSR Corporation | Method of producing microfluidic device |
| JP2020166254A (ja) * | 2019-03-29 | 2020-10-08 | 日鉄ケミカル＆マテリアル株式会社 | 感光性樹脂組成物、感光性樹脂組成物を硬化してなる硬化膜、硬化膜付き基板および硬化膜付き基板の製造方法 |
| CN111752101A (zh) * | 2019-03-29 | 2020-10-09 | 日铁化学材料株式会社 | 感光性树脂组合物、硬化膜、带有硬化膜的基板及带有硬化膜的基板的制造方法 |
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| JP3698499B2 (ja) * | 1996-09-20 | 2005-09-21 | 日本化薬株式会社 | 樹脂組成物、永久レジスト樹脂組成物及びこれらの硬化物 |
| JP3674888B2 (ja) * | 1996-10-11 | 2005-07-27 | 日本化薬株式会社 | 樹脂組成物、レジスト樹脂組成物及びこれらの硬化物 |
| JP3674889B2 (ja) * | 1996-10-30 | 2005-07-27 | 日本化薬株式会社 | 樹脂組成物、永久レジスト樹脂組成物及びこれらの硬化物 |
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| JP3731778B2 (ja) * | 1997-06-17 | 2006-01-05 | 日本化薬株式会社 | 樹脂組成物、永久レジスト樹脂組成物及びこれらの硬化物 |
| JP2000029212A (ja) * | 1998-07-10 | 2000-01-28 | Taiyo Ink Mfg Ltd | 光硬化性・熱硬化性樹脂組成物及び樹脂絶縁パターン形成方法 |
| US6100007A (en) * | 1998-04-06 | 2000-08-08 | Ciba Specialty Chemicals Corp. | Liquid radiation-curable composition especially for producing cured articles by stereolithography having high heat deflection temperatures |
| US6762002B2 (en) * | 1998-07-10 | 2004-07-13 | Dsm Desotech, Inc. | Solid imaging compositions for preparing polypropylene-like articles |
| JP2000230034A (ja) * | 1999-02-09 | 2000-08-22 | Toppan Printing Co Ltd | 絶縁層用樹脂組成物 |
| US6630242B1 (en) * | 1999-07-30 | 2003-10-07 | Dsm N.V. | Radiation-curable composition with simultaneous color formation during cure |
| JP2001228610A (ja) * | 2000-02-15 | 2001-08-24 | Showa Denko Kk | 感光性樹脂組成物及び硬化皮膜の製造方法 |
| US6579914B1 (en) * | 2000-07-14 | 2003-06-17 | Alcatel | Coating compositions for optical waveguides and optical waveguides coated therewith |
| JP2002040632A (ja) * | 2000-07-21 | 2002-02-06 | Showa Denko Kk | レジストインキ組成物 |
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| JP2007017458A (ja) | 2007-01-25 |
| CN1892425A (zh) | 2007-01-10 |
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