KR100356141B1 - 유기 전계 발광 장치와 그 제조 방법 - Google Patents
유기 전계 발광 장치와 그 제조 방법 Download PDFInfo
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- KR100356141B1 KR100356141B1 KR1020000051944A KR20000051944A KR100356141B1 KR 100356141 B1 KR100356141 B1 KR 100356141B1 KR 1020000051944 A KR1020000051944 A KR 1020000051944A KR 20000051944 A KR20000051944 A KR 20000051944A KR 100356141 B1 KR100356141 B1 KR 100356141B1
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- organic layer
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- 238000000034 method Methods 0.000 title claims description 14
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 239000012044 organic layer Substances 0.000 claims abstract description 53
- 239000010410 layer Substances 0.000 claims abstract description 44
- 239000000758 substrate Substances 0.000 claims abstract description 32
- 238000000151 deposition Methods 0.000 claims description 37
- 230000008021 deposition Effects 0.000 claims description 36
- 238000000059 patterning Methods 0.000 claims description 13
- 238000007740 vapor deposition Methods 0.000 claims description 11
- 239000004020 conductor Substances 0.000 claims description 9
- 230000005684 electric field Effects 0.000 claims description 2
- 238000005401 electroluminescence Methods 0.000 claims 1
- 239000000463 material Substances 0.000 abstract description 8
- 239000011521 glass Substances 0.000 abstract description 4
- 238000009413 insulation Methods 0.000 abstract description 4
- 239000011368 organic material Substances 0.000 abstract description 2
- 239000007769 metal material Substances 0.000 abstract 1
- 238000005192 partition Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 description 16
- 230000015572 biosynthetic process Effects 0.000 description 5
- 230000007547 defect Effects 0.000 description 4
- 238000010292 electrical insulation Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- IBHBKWKFFTZAHE-UHFFFAOYSA-N n-[4-[4-(n-naphthalen-1-ylanilino)phenyl]phenyl]-n-phenylnaphthalen-1-amine Chemical compound C1=CC=CC=C1N(C=1C2=CC=CC=C2C=CC=1)C1=CC=C(C=2C=CC(=CC=2)N(C=2C=CC=CC=2)C=2C3=CC=CC=C3C=CC=2)C=C1 IBHBKWKFFTZAHE-UHFFFAOYSA-N 0.000 description 3
- 150000002894 organic compounds Chemical class 0.000 description 3
- 229920001721 polyimide Polymers 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 239000004642 Polyimide Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- XCJYREBRNVKWGJ-UHFFFAOYSA-N copper(II) phthalocyanine Chemical compound [Cu+2].C12=CC=CC=C2C(N=C2[N-]C(C3=CC=CC=C32)=N2)=NC1=NC([C]1C=CC=CC1=1)=NC=1N=C1[C]3C=CC=CC3=C2[N-]1 XCJYREBRNVKWGJ-UHFFFAOYSA-N 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229920000553 poly(phenylenevinylene) Polymers 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- OHWIQIVPGPMWHV-UHFFFAOYSA-N 1,2-dihexyl-9h-fluorene Chemical compound C1=CC=C2C3=CC=C(CCCCCC)C(CCCCCC)=C3CC2=C1 OHWIQIVPGPMWHV-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 229910019015 Mg-Ag Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 239000007983 Tris buffer Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- REDXJYDRNCIFBQ-UHFFFAOYSA-N aluminium(3+) Chemical compound [Al+3] REDXJYDRNCIFBQ-UHFFFAOYSA-N 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000009849 deactivation Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- RBTKNAXYKSUFRK-UHFFFAOYSA-N heliogen blue Chemical compound [Cu].[N-]1C2=C(C=CC=C3)C3=C1N=C([N-]1)C3=CC=CC=C3C1=NC([N-]1)=C(C=CC=C3)C3=C1N=C([N-]1)C3=CC=CC=C3C1=N2 RBTKNAXYKSUFRK-UHFFFAOYSA-N 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- KKFHAJHLJHVUDM-UHFFFAOYSA-N n-vinylcarbazole Chemical compound C1=CC=C2N(C=C)C3=CC=CC=C3C2=C1 KKFHAJHLJHVUDM-UHFFFAOYSA-N 0.000 description 1
- 238000007645 offset printing Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/12—Light sources with substantially two-dimensional radiating surfaces
- H05B33/26—Light sources with substantially two-dimensional radiating surfaces characterised by the composition or arrangement of the conductive material used as an electrode
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/805—Electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/805—Electrodes
- H10K50/81—Anodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/805—Electrodes
- H10K50/81—Anodes
- H10K50/813—Anodes characterised by their shape
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/805—Electrodes
- H10K50/82—Cathodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/805—Electrodes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S428/00—Stock material or miscellaneous articles
- Y10S428/917—Electroluminescent
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
Description
Claims (5)
- 적어도 한쪽이 투명 전극으로 이루어진 한 쌍의 제 1 전극과 제 2 전극 사이에 발광층을 포함하는 유기층이 삽입되도록 상기 한 쌍의 전극 및 상기 유기층이 절연성을 갖는 기판 상에 적층, 형성되고, 상기 한 쌍의 전극사이에 삽입되는 상기 유기층의 부분이 일문자, 알파뉴메릭문자, 각종 고정 표시 패턴의 조합으로 이루어진 발광 표시부를 구성하는 유기 EL 장치에 있어서,상기 발광 표시부 이외의 상기 제 2 전극의 배선부에 상당하는 상기 기판상의 위치에 도전성재료로 이루어진 배선용 패드가 형성되고,공통 접속 대상이 되는 상기 제 2 전극의 사이가 상기 배선용 패드를 거쳐서 전기적으로 접속되어 있는 것을 특징으로 하는 유기 전계 발광 장치.
- 제 1항에 있어서,상기 제 1 전극과 상기 유기층의 계면에 유기절연층이 형성되어 있는 것을 특징으로 하는 유기 전계 발광 장치.
- 적어도 한쪽이 투명 전극으로 이루어진 한 쌍의 제 1 전극과 제 2 전극 사이에 발광층을 포함하는 유기층이 삽입되도록 상기 한 쌍의 전극 및 상기 유기층이 절연성을 갖는 기판 상에 적층, 형성되고, 상기 한 쌍의 전극사이에 삽입되는 상기 유기층의 부분이 일문자, 알파뉴메릭문자, 각종 고정 표시 패턴의 조합으로 이루어진 발광 표시부를 구성하는 유기 전계 장치의 제조 방법에 있어서,상기 제 1 전극을 상기 기판 상에 성막·패터닝하는 공정과,상기 발광 표시부 이외의 상기 제 2 전극의 배선부에 상당하는 상기 기판상의 위치에 도전성재료로 이루어진 배선용 패드를 성막·패터닝하는 공정과,상기 제 1 전극 상에서 상기 유기층을 성막하는 공정과,상기 유기층 상에서 상기 제 2 전극을 마스크 증착에 의해 성막·패터닝하는 공정을 포함하는 것을 특징으로 하는 유기 전계 발광 장치의 제조 방법.
- 적어도 한쪽이 투명 전극으로 이루어진 한 쌍의 제 1 전극과 제 2 전극 사이에 발광층을 포함하는 유기층이 삽입되도록 상기 한 쌍의 전극 및 상기 유기층이 절연성을 갖는 기판 위에 적층, 형성되고, 상기 한 쌍의 전극사이에 삽입되는 상기 유기층의 부분이 일문자, 알파뉴메릭문자, 각종 고정 표시 패턴의 조합으로 이루어진 발광 표시부를 구성하는 유기 전계 발광 장치의 제조 방법에 있어서,상기 제 1 전극의 성막·패터닝과 상기 발광 표시부 이외의 상기 제 2 전극의 배선부에 상당하는 상기 기판상의 위치에의 도전성재료로 이루어진 배선용 패드의 성막·패터닝을 동시에 행하는 공정과,상기 발광 표시부의 패턴형상에 상기 제 1 전극이 노출됨과 동시에, 상기 배선용 패드의 적어도 일부가 노출되도록 유기절연층을 성막· 패터닝하는 공정과,상기 유기절연층 상에서 상기 유기층을 성막하는 공정과,상기 유기층 상에서 상기 제 2 전극을 마스크 증착에 의해 성막· 패터닝하는 공정을 포함하는 것을 특징으로 하는 유기 전계 발광 장치의 제조 방법.
- 제 3 항 또는 제 4 항에 있어서,상기 제 2 전극의 마스크 증착에 사용하는 증착 마스크가 상기 배선용 패드에 상당하는 위치의 슬릿 부분에 브리지가 형성되어 있는 것을 특징으로 하는 유기 전계 발광 장치의 제조 방법.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25189399A JP4595143B2 (ja) | 1999-09-06 | 1999-09-06 | 有機elデバイスとその製造方法 |
JP1999-251893 | 1999-09-06 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20010050324A KR20010050324A (ko) | 2001-06-15 |
KR100356141B1 true KR100356141B1 (ko) | 2002-10-19 |
Family
ID=17229527
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020000051944A Expired - Fee Related KR100356141B1 (ko) | 1999-09-06 | 2000-09-04 | 유기 전계 발광 장치와 그 제조 방법 |
Country Status (4)
Country | Link |
---|---|
US (1) | US6686693B1 (ko) |
JP (1) | JP4595143B2 (ko) |
KR (1) | KR100356141B1 (ko) |
TW (1) | TW474112B (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7414362B2 (en) | 2004-07-02 | 2008-08-19 | Samsung Electronics Co., Ltd. | Display panel |
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US20020175620A1 (en) * | 2000-04-06 | 2002-11-28 | Osamu Yokoyama | Organic EL device and display panel incorporating the organic EL device |
JP3628997B2 (ja) * | 2000-11-27 | 2005-03-16 | セイコーエプソン株式会社 | 有機エレクトロルミネッセンス装置の製造方法 |
EP1374138A2 (de) * | 2001-03-26 | 2004-01-02 | Siemens Aktiengesellschaft | Gerät mit zumindest zwei organischen elektronischen bauteilen und verfahren zur herstellung dazu |
KR20030002947A (ko) * | 2001-07-03 | 2003-01-09 | 엘지전자 주식회사 | 풀칼라 유기 el 표시소자 및 제조방법 |
KR20030038522A (ko) * | 2001-11-09 | 2003-05-16 | 산요 덴키 가부시키가이샤 | 광학 소자의 휘도 데이터를 초기화하는 기능을 갖는 표시장치 |
JP2003186437A (ja) * | 2001-12-18 | 2003-07-04 | Sanyo Electric Co Ltd | 表示装置 |
JP2003255899A (ja) * | 2001-12-28 | 2003-09-10 | Sanyo Electric Co Ltd | 表示装置 |
JP3953330B2 (ja) * | 2002-01-25 | 2007-08-08 | 三洋電機株式会社 | 表示装置 |
JP3723507B2 (ja) * | 2002-01-29 | 2005-12-07 | 三洋電機株式会社 | 駆動回路 |
JP2003295825A (ja) * | 2002-02-04 | 2003-10-15 | Sanyo Electric Co Ltd | 表示装置 |
JP2003308030A (ja) | 2002-02-18 | 2003-10-31 | Sanyo Electric Co Ltd | 表示装置 |
JP2003257645A (ja) * | 2002-03-05 | 2003-09-12 | Sanyo Electric Co Ltd | 発光装置およびその製造方法 |
JP2003332058A (ja) * | 2002-03-05 | 2003-11-21 | Sanyo Electric Co Ltd | エレクトロルミネッセンスパネルおよびその製造方法 |
JP2003258094A (ja) * | 2002-03-05 | 2003-09-12 | Sanyo Electric Co Ltd | 配線構造、その製造方法、および表示装置 |
JP3671012B2 (ja) * | 2002-03-07 | 2005-07-13 | 三洋電機株式会社 | 表示装置 |
CN100517422C (zh) * | 2002-03-07 | 2009-07-22 | 三洋电机株式会社 | 配线结构、其制造方法、以及光学设备 |
JP3837344B2 (ja) | 2002-03-11 | 2006-10-25 | 三洋電機株式会社 | 光学素子およびその製造方法 |
KR20030086677A (ko) * | 2002-05-06 | 2003-11-12 | 한성엘컴텍 주식회사 | 2개의 분리된 배면전극층을 이용한 키패드용 이엘 소자 |
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JP2005019211A (ja) * | 2003-06-26 | 2005-01-20 | Casio Comput Co Ltd | El表示パネル及びel表示パネルの製造方法 |
KR100936908B1 (ko) | 2003-07-18 | 2010-01-18 | 삼성전자주식회사 | 전계발광 디바이스의 박막 트랜지스터, 이를 이용한전계발광 디바이스 및 이의 제조 방법 |
DE102005017655B4 (de) * | 2005-04-15 | 2008-12-11 | Polyic Gmbh & Co. Kg | Mehrschichtiger Verbundkörper mit elektronischer Funktion |
DE102005031448A1 (de) | 2005-07-04 | 2007-01-11 | Polyic Gmbh & Co. Kg | Aktivierbare optische Schicht |
DE102005035590A1 (de) * | 2005-07-29 | 2007-02-01 | Polyic Gmbh & Co. Kg | Elektronisches Bauelement |
DE102005035589A1 (de) | 2005-07-29 | 2007-02-01 | Polyic Gmbh & Co. Kg | Verfahren zur Herstellung eines elektronischen Bauelements |
DE102005042166A1 (de) * | 2005-09-06 | 2007-03-15 | Polyic Gmbh & Co.Kg | Organisches Bauelement und ein solches umfassende elektrische Schaltung |
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TWI331481B (en) * | 2006-08-16 | 2010-10-01 | Ritdisplay Corp | Organic light emitting device with lighting uniformity design |
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TWI776990B (zh) | 2017-11-14 | 2022-09-11 | 日商大日本印刷股份有限公司 | 用以製造蒸鍍罩之金屬板及金屬板之製造方法、以及蒸鍍罩及蒸鍍罩之製造方法 |
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JPS6235498A (ja) * | 1985-08-07 | 1987-02-16 | 日本電気株式会社 | 薄膜elパネルの製造方法 |
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JP2845233B2 (ja) * | 1997-01-29 | 1999-01-13 | 双葉電子工業株式会社 | 有機エレクトロルミネッセンス素子及びその製造方法 |
JP3570857B2 (ja) * | 1997-05-20 | 2004-09-29 | パイオニア株式会社 | 有機elディスプレイパネルとその製造方法 |
US6107736A (en) * | 1997-06-02 | 2000-08-22 | Motorola, Inc. | Organic electroluminescent display device and method of fabrication |
JPH1145781A (ja) * | 1997-07-28 | 1999-02-16 | Casio Comput Co Ltd | 配線の形成方法 |
US6191433B1 (en) * | 2000-03-17 | 2001-02-20 | Agilent Technologies, Inc. | OLED display device and method for patterning cathodes of the device |
-
1999
- 1999-09-06 JP JP25189399A patent/JP4595143B2/ja not_active Expired - Fee Related
-
2000
- 2000-09-01 US US09/654,430 patent/US6686693B1/en not_active Expired - Lifetime
- 2000-09-04 KR KR1020000051944A patent/KR100356141B1/ko not_active Expired - Fee Related
- 2000-09-05 TW TW089118145A patent/TW474112B/zh not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7414362B2 (en) | 2004-07-02 | 2008-08-19 | Samsung Electronics Co., Ltd. | Display panel |
Also Published As
Publication number | Publication date |
---|---|
KR20010050324A (ko) | 2001-06-15 |
JP4595143B2 (ja) | 2010-12-08 |
JP2001076869A (ja) | 2001-03-23 |
US6686693B1 (en) | 2004-02-03 |
TW474112B (en) | 2002-01-21 |
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