JP6947885B2 - 色シフトのない多層構造 - Google Patents
色シフトのない多層構造 Download PDFInfo
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- 230000005670 electromagnetic radiation Effects 0.000 claims description 99
- 239000010409 thin film Substances 0.000 claims description 77
- 239000000463 material Substances 0.000 claims description 51
- 239000006096 absorbing agent Substances 0.000 claims description 36
- 229910045601 alloy Inorganic materials 0.000 claims description 11
- 239000000956 alloy Substances 0.000 claims description 11
- 229910052804 chromium Inorganic materials 0.000 claims description 8
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 6
- 229910021419 crystalline silicon Inorganic materials 0.000 claims description 6
- 229910052732 germanium Inorganic materials 0.000 claims description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 4
- 229910052759 nickel Inorganic materials 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 229910052721 tungsten Inorganic materials 0.000 claims description 4
- 229910052742 iron Inorganic materials 0.000 claims description 2
- LIKBJVNGSGBSGK-UHFFFAOYSA-N iron(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Fe+3].[Fe+3] LIKBJVNGSGBSGK-UHFFFAOYSA-N 0.000 claims description 2
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 243
- 230000002745 absorbent Effects 0.000 description 30
- 239000002250 absorbent Substances 0.000 description 30
- 239000011651 chromium Substances 0.000 description 30
- 230000005684 electric field Effects 0.000 description 26
- 238000010521 absorption reaction Methods 0.000 description 22
- 239000010949 copper Substances 0.000 description 13
- 238000000034 method Methods 0.000 description 13
- 239000003989 dielectric material Substances 0.000 description 12
- 239000000049 pigment Substances 0.000 description 10
- 239000010931 gold Substances 0.000 description 8
- 238000001228 spectrum Methods 0.000 description 8
- 229910052802 copper Inorganic materials 0.000 description 7
- 239000011135 tin Substances 0.000 description 7
- 239000010936 titanium Substances 0.000 description 7
- 238000001429 visible spectrum Methods 0.000 description 7
- 238000004364 calculation method Methods 0.000 description 6
- 239000003086 colorant Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 229910052737 gold Inorganic materials 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 229910052719 titanium Inorganic materials 0.000 description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 5
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 5
- 239000006185 dispersion Substances 0.000 description 5
- 239000003973 paint Substances 0.000 description 5
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 5
- 229910052718 tin Inorganic materials 0.000 description 5
- 229910052725 zinc Inorganic materials 0.000 description 5
- 239000011701 zinc Substances 0.000 description 5
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 4
- 239000010955 niobium Substances 0.000 description 4
- 238000004088 simulation Methods 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 229910010413 TiO 2 Inorganic materials 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052750 molybdenum Inorganic materials 0.000 description 3
- 229910052758 niobium Inorganic materials 0.000 description 3
- 229910052763 palladium Inorganic materials 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
- 229920006395 saturated elastomer Polymers 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 229910052715 tantalum Inorganic materials 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000012512 characterization method Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000010944 silver (metal) Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 229910052720 vanadium Inorganic materials 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- 229910000906 Bronze Inorganic materials 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000008199 coating composition Substances 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 239000012792 core layer Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000000313 electron-beam-induced deposition Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000002329 infrared spectrum Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 229910052950 sphalerite Inorganic materials 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000002211 ultraviolet spectrum Methods 0.000 description 1
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 1
- 229910052984 zinc sulfide Inorganic materials 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
- G02B5/085—Multilayer mirrors, i.e. having two or more reflecting layers at least one of the reflecting layers comprising metal
- G02B5/0858—Multilayer mirrors, i.e. having two or more reflecting layers at least one of the reflecting layers comprising metal the reflecting layers comprising a single metallic layer with one or more dielectric layers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/285—Interference filters comprising deposited thin solid films
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
- G02B5/085—Multilayer mirrors, i.e. having two or more reflecting layers at least one of the reflecting layers comprising metal
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/26—Reflecting filters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/285—Interference filters comprising deposited thin solid films
- G02B5/286—Interference filters comprising deposited thin solid films having four or fewer layers, e.g. for achieving a colour effect
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Filters (AREA)
- Laminated Bodies (AREA)
- Optical Elements Other Than Lenses (AREA)
- Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
Description
本出願は、2014年4月1日出願の米国特許出願第14/242429号明細書の優先権を主張するものであり、それは、2013年12月23日出願の米国特許出願第14/138499号明細書の一部継続出願(CIP)であり、これはさらに、2013年6月8日出願の米国特許出願第13/913402号明細書のCIPであり、これはさらに、2013年2月6日出願の米国特許出願第13/760699号明細書のCIPであり、これはさらに、2012年8月10日出願の第13/572071号明細書のCIPであり、これはさらに、2011年2月5日出願の米国特許出願第13/021730号明細書のCIPであり、これはさらに、2010年6月4日出願の第12/793772号明細書のCIPであり、これはさらに、2009年2月18日出願の米国特許出願第12/388395号明細書のCIPであり、これはさらに、2007年8月12日出願の米国特許出願第11/837529号明細書(米国特許第7903339号明細書)のCIPである。2013年6月8日出願の米国特許出願第13/913402号明細書は、2011年1月26日出願の第13/014398号明細書のCIPであり、これは、2010年6月4日出願の第12/793772号明細書のCIPである。2011年1月26日出願の米国特許出願第13/014398号明細書は、2010年1月13日出願の第12/686861号明細書(米国特許第8593728号明細書)のCIPであり、これは、2009年2月19日出願の第12/389256号明細書(米国特許第8329247号明細書)のCIPであり、これらのすべては、その全内容が参照により援用される。
ここで図2を参照すると、複数の誘電体層を有する多層薄膜の概略図が示される。加えて、入射電磁放射線の反射及び透過も概略的に示される。上述のように、典型的には、入射電磁放射線の透過は、その反射よりも非常に大きく、したがって、多くの層が必要とされる。
n0Sinθ0=nLSinθL=nHSinθH (1)
を用いると、角度θH及びθLは、屈折率nH及びnLが既知である場合に特定することができる。
ここで図7を参照すると、第二世代による説明のための構造/設計が示される。図7に示される多層構造は、複数の誘電体層、及び下地吸収層を有する。加えて、構造全体を透過する入射電磁放射線はなく、すなわち、入射電磁放射線のすべては、反射されるか、又は吸収される。図7に示されるそのような構造により、適切な量の反射を得るために必要とされる誘電体層の数を減少させることができる。
図10を参照すると、下地反射体層(RL)が、それにわたって延在している第一の誘電性材料層DL1、及びDL1層にわたって延在している選択的吸収層SALを有する第三世代設計が示される。加えて、別のDL1層が備えられて、選択的吸収層にわたって延在していてもよく、又は備えられていなくてもよい。この図にはさらに、すべての入射電磁放射線が、多層構造によって反射されるか、又は選択的に吸収されるかのいずれかであることの説明も示される。
s偏光の場合は、qs=nscosθs (42)
p偏光の場合は、qs=ns/cosθs (43)
s偏光の場合は、q=ncosθF (44)
p偏光の場合は、q=n/cosθF (45)
φ=k・n・dcos(θF) (46)
を用いることで、u(z)及びv(z)は、
α=nssinθs=nsinθF (51)
qs=ns/cosθs (52)及び
qs=n/cosθF (53)
である。
本発明に関連する発明の実施態様の一部を以下に示す。
[態様1]
基材を被覆するための全方向多層薄膜であって、前記多層薄膜は、
第一の材料の第一の層、及び前記第一の層にわたって延在している第二の材料の第二の層を有する多層積層体
を含んでおり、
前記多層積層体は、300nm未満の所定の半値全幅(FWHM)、及び前記多層積層体が広帯域電磁放射線に暴露され、0から45°の間の角度から観察された場合に30°未満の所定の色シフトを有する電磁放射線の帯域を反射する、全方向多層薄膜。
[態様2]
前記多層積層体が、2μm未満の総厚さを有する、態様1に記載の多層薄膜。
[態様3]
前記多層積層体の前記総厚さが、1.5μm未満である、態様2に記載の多層薄膜。
[態様4]
前記多層積層体の前記総厚さが、1.0μm未満である、態様3に記載の多層薄膜。
[態様5]
前記多層積層体が広帯域電磁放射線に暴露され、0から45°の間の角度から観察された場合の電磁放射線の前記反射狭帯域の前記色シフトが、25°未満である、態様1に記載の多層薄膜。
[態様6]
前記多層積層体が広帯域電磁放射線に暴露され、0から45°の間の角度から観察された場合の電磁放射線の前記反射狭帯域の前記色シフトが、30nm未満である、態様2に記載の多層薄膜。
[態様7]
前記第一の材料及び前記第二の材料が、誘電性材料である、態様1に記載の多層薄膜。
[態様8]
前記第一の材料が、誘電体層であり、前記第二の材料が、吸収性材料である、態様1に記載の多層薄膜。
[態様9]
前記第一の層が、30〜300nmの間の厚さを有する、態様8に記載の多層薄膜。
[態様10]
前記吸収性材料が、選択的吸収性材料である、態様8に記載の多層薄膜。
[態様11]
前記選択的吸収性材料が、Cu、Au、Zn、Sn、アモルファスSi、結晶Si、及びこれらの合金から成る群より選択される、態様10に記載の多層薄膜。
[態様12]
前記選択的吸収性材料が、Fe2O3、Cu2O、アモルファスSi、結晶Si、及びこれらの組み合わせから成る群より選択される、態様10に記載の多層薄膜。
[態様13]
前記選択的吸収性材料から作られる前記第二の層が、20〜80nmの間の厚さを有する、態様10に記載の多層薄膜。
[態様14]
前記吸収性材料が、非選択的吸収性材料である、態様8に記載の多層薄膜。
[態様15]
前記非選択的吸収性材料が、Cr、Ta、W、Mo、Ti、窒化Ti、Nb、Co、Si、Ge、Ni、Pd、V、酸化鉄(III)、アモルファスSi、結晶Si、及びこれらの組み合わせ又は合金から成る群より選択される、態様14に記載の多層薄膜。
[態様16]
前記非選択的吸収性材料から作られる前記第二の層が、5〜30nmの間の厚さを有する、態様14に記載の多層薄膜。
[態様17]
UV範囲の電磁放射線の帯域を反射する前記多層積層体をさらに含んでいる、態様1に記載の多層薄膜。
[態様18]
IR範囲の電磁放射線の帯域を反射する前記多層積層体をさらに含んでいる、態様1に記載の多層薄膜。
[態様19]
反射体層をさらに含んでおり、前記第一及び第二の層が、前記反射体層にわたって延在している、態様1に記載の多層薄膜。
[態様20]
前記反射体層が、Al、Ag、Pt、Cr、Cu、Zn、Au、Sn、アモルファスSi、結晶Si、及びこれらの合金から成る群より選択される金属から作られる、態様19に記載の多層薄膜。
[態様21]
前記反射体層が、50〜200nmの間の厚さを有する、態様20に記載の多層薄膜。
[態様22]
電磁放射線の前記反射狭帯域が、電磁放射線の可視スペクトル内の対称ピークである、態様1に記載の多層薄膜。
[態様23]
電磁放射線の前記反射狭帯域が、電磁放射線のUV範囲と接している、態様1に記載の多層薄膜。
[態様24]
電磁放射線の前記反射狭帯域が、電磁放射線のIR範囲と接している、態様1に記載の多層薄膜。
Claims (9)
- 全方向構造色多層薄膜であって、
反射体層、及び前記反射体層上に延在している誘電体層、前記誘電体層上に延在している吸収体層、及び前記吸収体層上に延在している外側誘電体層を有する多層積層体
を含んでおり、
前記多層積層体は、200nm未満の所定の半値全幅(FWHM)、及び前記多層積層体が広帯域電磁放射線に暴露され、0から45°の間の角度から観察された場合にa*b*カラーマップ上で30°未満の色相シフトの形態の所定の色シフトを有する可視電磁放射線の狭帯域を反射し、
反射される可視電磁放射線の前記狭帯域が、電磁放射線のIR範囲と接している可視電磁放射線の狭帯域であり、
前記吸収体層が、
Fe 2 O 3 、アモルファスSi、結晶Si、及びこれらの合金から成る群より選択される材料から作られた選択的吸収体層、及び
Cr、W、Si、Ge、Ni、酸化鉄(III)、アモルファスSi、結晶Si、及びこれらの組み合わせ又は合金から成る群より選択される材料から作られた非選択的吸収体層、
から選択される、
全方向構造色多層薄膜。 - 前記多層積層体が広帯域電磁放射線に暴露され、0から45°の間の角度から観察された場合に、反射される可視電磁放射線の前記狭帯域の色相シフトの形態の前記色シフトが、a*b*カラーマップ上で25°未満である、請求項1に記載の多層薄膜。
- 前記多層積層体が、2μm未満の総厚さを有する、請求項1又は2に記載の多層薄膜。
- 前記多層積層体の前記総厚さが、1.5μm未満である、請求項3に記載の多層薄膜。
- 前記多層積層体の前記総厚さが、1.0μm未満である、請求項4に記載の多層薄膜。
- 前記誘電体層が、30〜300nmの間の厚さを有する、請求項1〜5のいずれか一項に記載の多層薄膜。
- 前記吸収体層が、前記選択的吸収体層であり、かつ前記選択的吸収体層が、20〜80nmの間の厚さを有する、請求項1〜6のいずれか一項に記載の多層薄膜。
- 前記吸収体層が、前記非選択的吸収体層であり、かつ前記非選択的吸収体層が、5〜30nmの間の厚さを有する、請求項1〜6のいずれか一項に記載の多層薄膜。
- 前記多層積層体が、IR範囲の電磁放射線の帯域を反射することをさらに備える、請求項1〜8のいずれか一項に記載の多層薄膜。
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