TWI486707B - A photohardenable resin composition and a hardened product thereof - Google Patents
A photohardenable resin composition and a hardened product thereof Download PDFInfo
- Publication number
- TWI486707B TWI486707B TW102113955A TW102113955A TWI486707B TW I486707 B TWI486707 B TW I486707B TW 102113955 A TW102113955 A TW 102113955A TW 102113955 A TW102113955 A TW 102113955A TW I486707 B TWI486707 B TW I486707B
- Authority
- TW
- Taiwan
- Prior art keywords
- carboxylic acid
- compound
- resin composition
- unsaturated
- reacting
- Prior art date
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- 239000011342 resin composition Substances 0.000 title claims description 45
- 229920005989 resin Polymers 0.000 claims description 61
- 239000011347 resin Substances 0.000 claims description 61
- 150000001732 carboxylic acid derivatives Chemical class 0.000 claims description 53
- 150000001875 compounds Chemical class 0.000 claims description 43
- 229910000679 solder Inorganic materials 0.000 claims description 38
- -1 alkyl compound Chemical class 0.000 claims description 33
- 239000003086 colorant Substances 0.000 claims description 33
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 30
- 239000000758 substrate Substances 0.000 claims description 30
- 229910052802 copper Inorganic materials 0.000 claims description 28
- 239000010949 copper Substances 0.000 claims description 28
- 239000004593 Epoxy Substances 0.000 claims description 20
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 18
- 229920001187 thermosetting polymer Polymers 0.000 claims description 18
- 239000000047 product Substances 0.000 claims description 17
- 150000008065 acid anhydrides Chemical class 0.000 claims description 16
- 238000001035 drying Methods 0.000 claims description 13
- 150000007519 polyprotic acids Polymers 0.000 claims description 12
- 239000003513 alkali Substances 0.000 claims description 11
- 125000003700 epoxy group Chemical group 0.000 claims description 11
- 125000000751 azo group Chemical group [*]N=N[*] 0.000 claims description 10
- 229920006395 saturated elastomer Polymers 0.000 claims description 10
- 229910052736 halogen Inorganic materials 0.000 claims description 9
- 150000002367 halogens Chemical class 0.000 claims description 9
- 229920001577 copolymer Polymers 0.000 claims description 8
- 239000003999 initiator Substances 0.000 claims description 8
- 150000002762 monocarboxylic acid derivatives Chemical class 0.000 claims description 8
- 239000000038 blue colorant Substances 0.000 claims description 7
- 238000006243 chemical reaction Methods 0.000 claims description 7
- 239000001060 yellow colorant Substances 0.000 claims description 7
- XCJYREBRNVKWGJ-UHFFFAOYSA-N copper(II) phthalocyanine Chemical compound [Cu+2].C12=CC=CC=C2C(N=C2[N-]C(C3=CC=CC=C32)=N2)=NC1=NC([C]1C=CC=CC1=1)=NC=1N=C1[C]3C=CC=CC3=C2[N-]1 XCJYREBRNVKWGJ-UHFFFAOYSA-N 0.000 claims description 6
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 claims description 5
- 239000002253 acid Substances 0.000 claims description 5
- NYGZLYXAPMMJTE-UHFFFAOYSA-M metanil yellow Chemical group [Na+].[O-]S(=O)(=O)C1=CC=CC(N=NC=2C=CC(NC=3C=CC=CC=3)=CC=2)=C1 NYGZLYXAPMMJTE-UHFFFAOYSA-M 0.000 claims description 5
- 125000003566 oxetanyl group Chemical group 0.000 claims description 5
- 230000001476 alcoholic effect Effects 0.000 claims description 4
- PYKYMHQGRFAEBM-UHFFFAOYSA-N anthraquinone Natural products CCC(=O)c1c(O)c2C(=O)C3C(C=CC=C3O)C(=O)c2cc1CC(=O)OC PYKYMHQGRFAEBM-UHFFFAOYSA-N 0.000 claims description 4
- 150000004056 anthraquinones Chemical class 0.000 claims description 4
- 229920000642 polymer Polymers 0.000 claims description 4
- NRCMAYZCPIVABH-UHFFFAOYSA-N Quinacridone Chemical compound N1C2=CC=CC=C2C(=O)C2=C1C=C1C(=O)C3=CC=CC=C3NC1=C2 NRCMAYZCPIVABH-UHFFFAOYSA-N 0.000 claims description 3
- MYONAGGJKCJOBT-UHFFFAOYSA-N benzimidazol-2-one Chemical compound C1=CC=CC2=NC(=O)N=C21 MYONAGGJKCJOBT-UHFFFAOYSA-N 0.000 claims description 3
- 239000007795 chemical reaction product Substances 0.000 claims description 3
- 125000000664 diazo group Chemical group [N-]=[N+]=[*] 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- AHHWIHXENZJRFG-UHFFFAOYSA-N oxetane Chemical compound C1COC1 AHHWIHXENZJRFG-UHFFFAOYSA-N 0.000 claims description 3
- 150000002921 oxetanes Chemical class 0.000 claims description 2
- 125000000466 oxiranyl group Chemical group 0.000 claims description 2
- 239000000049 pigment Substances 0.000 description 42
- 229920000647 polyepoxide Polymers 0.000 description 38
- 239000003822 epoxy resin Substances 0.000 description 29
- 238000000576 coating method Methods 0.000 description 21
- 239000011248 coating agent Substances 0.000 description 18
- 239000000126 substance Substances 0.000 description 18
- 238000002845 discoloration Methods 0.000 description 15
- 239000000203 mixture Substances 0.000 description 15
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 12
- 229920002120 photoresistant polymer Polymers 0.000 description 12
- FVCSARBUZVPSQF-UHFFFAOYSA-N 5-(2,4-dioxooxolan-3-yl)-7-methyl-3a,4,5,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1C(C(OC2=O)=O)C2C(C)=CC1C1C(=O)COC1=O FVCSARBUZVPSQF-UHFFFAOYSA-N 0.000 description 11
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 11
- 229920003319 Araldite® Polymers 0.000 description 10
- 238000000034 method Methods 0.000 description 10
- 238000002156 mixing Methods 0.000 description 10
- KUBDPQJOLOUJRM-UHFFFAOYSA-N 2-(chloromethyl)oxirane;4-[2-(4-hydroxyphenyl)propan-2-yl]phenol Chemical compound ClCC1CO1.C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 KUBDPQJOLOUJRM-UHFFFAOYSA-N 0.000 description 9
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 9
- 238000011156 evaluation Methods 0.000 description 9
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 9
- 125000004122 cyclic group Chemical group 0.000 description 8
- 230000000873 masking effect Effects 0.000 description 8
- 239000000243 solution Substances 0.000 description 8
- XTQHKBHJIVJGKJ-UHFFFAOYSA-N sulfur monoxide Chemical group S=O XTQHKBHJIVJGKJ-UHFFFAOYSA-N 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 7
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 7
- 238000007747 plating Methods 0.000 description 7
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 6
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 6
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 6
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 6
- 239000011521 glass Substances 0.000 description 6
- 150000002576 ketones Chemical class 0.000 description 6
- 229920003986 novolac Polymers 0.000 description 6
- 229930185605 Bisphenol Natural products 0.000 description 5
- 239000007864 aqueous solution Substances 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 5
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 5
- 239000003054 catalyst Substances 0.000 description 5
- 238000004090 dissolution Methods 0.000 description 5
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 4
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 4
- DIOQZVSQGTUSAI-UHFFFAOYSA-N decane Chemical compound CCCCCCCCCC DIOQZVSQGTUSAI-UHFFFAOYSA-N 0.000 description 4
- 238000011161 development Methods 0.000 description 4
- 239000000945 filler Substances 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 229910001507 metal halide Inorganic materials 0.000 description 4
- 150000005309 metal halides Chemical class 0.000 description 4
- 239000003960 organic solvent Substances 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 238000007650 screen-printing Methods 0.000 description 4
- 238000003786 synthesis reaction Methods 0.000 description 4
- RIOQSEWOXXDEQQ-UHFFFAOYSA-N triphenylphosphine Chemical compound C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 RIOQSEWOXXDEQQ-UHFFFAOYSA-N 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- GDWGEKSAIQRMFC-UHFFFAOYSA-N CC1=C(C(=CC(=C1)C)C)CCCCCCCCCP(C1=CC=CC=C1)(C1=CC=CC=C1)=O Chemical compound CC1=C(C(=CC(=C1)C)C)CCCCCCCCCP(C1=CC=CC=C1)(C1=CC=CC=C1)=O GDWGEKSAIQRMFC-UHFFFAOYSA-N 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 150000001298 alcohols Chemical class 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 3
- 238000004040 coloring Methods 0.000 description 3
- 150000004294 cyclic thioethers Chemical group 0.000 description 3
- 150000002148 esters Chemical class 0.000 description 3
- 239000004744 fabric Substances 0.000 description 3
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 238000001764 infiltration Methods 0.000 description 3
- 230000008595 infiltration Effects 0.000 description 3
- ZFSLODLOARCGLH-UHFFFAOYSA-N isocyanuric acid Chemical compound OC1=NC(O)=NC(O)=N1 ZFSLODLOARCGLH-UHFFFAOYSA-N 0.000 description 3
- 229910052747 lanthanoid Inorganic materials 0.000 description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 3
- 229910052753 mercury Inorganic materials 0.000 description 3
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 3
- 230000035515 penetration Effects 0.000 description 3
- KCTAWXVAICEBSD-UHFFFAOYSA-N prop-2-enoyloxy prop-2-eneperoxoate Chemical compound C=CC(=O)OOOC(=O)C=C KCTAWXVAICEBSD-UHFFFAOYSA-N 0.000 description 3
- 239000001062 red colorant Substances 0.000 description 3
- 229910000029 sodium carbonate Inorganic materials 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- OUPZKGBUJRBPGC-UHFFFAOYSA-N 1,3,5-tris(oxiran-2-ylmethyl)-1,3,5-triazinane-2,4,6-trione Chemical compound O=C1N(CC2OC2)C(=O)N(CC2OC2)C(=O)N1CC1CO1 OUPZKGBUJRBPGC-UHFFFAOYSA-N 0.000 description 2
- YXIWHUQXZSMYRE-UHFFFAOYSA-N 1,3-benzothiazole-2-thiol Chemical compound C1=CC=C2SC(S)=NC2=C1 YXIWHUQXZSMYRE-UHFFFAOYSA-N 0.000 description 2
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- UHFFVFAKEGKNAQ-UHFFFAOYSA-N 2-benzyl-2-(dimethylamino)-1-(4-morpholin-4-ylphenyl)butan-1-one Chemical compound C=1C=C(N2CCOCC2)C=CC=1C(=O)C(CC)(N(C)C)CC1=CC=CC=C1 UHFFVFAKEGKNAQ-UHFFFAOYSA-N 0.000 description 2
- NLGDWWCZQDIASO-UHFFFAOYSA-N 2-hydroxy-1-(7-oxabicyclo[4.1.0]hepta-1,3,5-trien-2-yl)-2-phenylethanone Chemical compound OC(C(=O)c1cccc2Oc12)c1ccccc1 NLGDWWCZQDIASO-UHFFFAOYSA-N 0.000 description 2
- BHNHHSOHWZKFOX-UHFFFAOYSA-N 2-methyl-1H-indole Chemical compound C1=CC=C2NC(C)=CC2=C1 BHNHHSOHWZKFOX-UHFFFAOYSA-N 0.000 description 2
- LXBGSDVWAMZHDD-UHFFFAOYSA-N 2-methyl-1h-imidazole Chemical compound CC1=NC=CN1 LXBGSDVWAMZHDD-UHFFFAOYSA-N 0.000 description 2
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 2
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 2
- DLFVBJFMPXGRIB-UHFFFAOYSA-N Acetamide Chemical compound CC(N)=O DLFVBJFMPXGRIB-UHFFFAOYSA-N 0.000 description 2
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- ROSDSFDQCJNGOL-UHFFFAOYSA-N Dimethylamine Chemical compound CNC ROSDSFDQCJNGOL-UHFFFAOYSA-N 0.000 description 2
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 2
- GOOHAUXETOMSMM-UHFFFAOYSA-N Propylene oxide Chemical compound CC1CO1 GOOHAUXETOMSMM-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- UMLWXYJZDNNBTD-UHFFFAOYSA-N alpha-dimethylaminoacetophenone Natural products CN(C)CC(=O)C1=CC=CC=C1 UMLWXYJZDNNBTD-UHFFFAOYSA-N 0.000 description 2
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 2
- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 description 2
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 2
- WGQKYBSKWIADBV-UHFFFAOYSA-N benzylamine Chemical compound NCC1=CC=CC=C1 WGQKYBSKWIADBV-UHFFFAOYSA-N 0.000 description 2
- 229910000420 cerium oxide Inorganic materials 0.000 description 2
- 229920006026 co-polymeric resin Polymers 0.000 description 2
- 239000011889 copper foil Substances 0.000 description 2
- 229930003836 cresol Natural products 0.000 description 2
- 150000004292 cyclic ethers Chemical group 0.000 description 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- PODOEQVNFJSWIK-UHFFFAOYSA-N diphenylphosphoryl-(2,4,6-trimethoxyphenyl)methanone Chemical compound COC1=CC(OC)=CC(OC)=C1C(=O)P(=O)(C=1C=CC=CC=1)C1=CC=CC=C1 PODOEQVNFJSWIK-UHFFFAOYSA-N 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- VOZRXNHHFUQHIL-UHFFFAOYSA-N glycidyl methacrylate Chemical compound CC(=C)C(=O)OCC1CO1 VOZRXNHHFUQHIL-UHFFFAOYSA-N 0.000 description 2
- 125000005843 halogen group Chemical group 0.000 description 2
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 2
- 125000000623 heterocyclic group Chemical group 0.000 description 2
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 2
- 150000002460 imidazoles Chemical class 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 239000003112 inhibitor Substances 0.000 description 2
- 238000013508 migration Methods 0.000 description 2
- 230000005012 migration Effects 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 2
- FDPIMTJIUBPUKL-UHFFFAOYSA-N pentan-3-one Chemical compound CCC(=O)CC FDPIMTJIUBPUKL-UHFFFAOYSA-N 0.000 description 2
- 239000003208 petroleum Substances 0.000 description 2
- RMVRSNDYEFQCLF-UHFFFAOYSA-N phenyl mercaptan Natural products SC1=CC=CC=C1 RMVRSNDYEFQCLF-UHFFFAOYSA-N 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 238000006116 polymerization reaction Methods 0.000 description 2
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 2
- UOHMMEJUHBCKEE-UHFFFAOYSA-N prehnitene Chemical compound CC1=CC=C(C)C(C)=C1C UOHMMEJUHBCKEE-UHFFFAOYSA-N 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- WQGWDDDVZFFDIG-UHFFFAOYSA-N pyrogallol Chemical compound OC1=CC=CC(O)=C1O WQGWDDDVZFFDIG-UHFFFAOYSA-N 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 239000002966 varnish Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- RSHKWPIEJYAPCL-UHFFFAOYSA-N (3-ethyloxetan-3-yl)methyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC1(CC)COC1 RSHKWPIEJYAPCL-UHFFFAOYSA-N 0.000 description 1
- AQQRHHUDOXGLAC-UHFFFAOYSA-N (3-methyloxetan-3-yl) 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OC1(C)COC1 AQQRHHUDOXGLAC-UHFFFAOYSA-N 0.000 description 1
- CGILRHVKKLYKNE-UHFFFAOYSA-N (3-methyloxetan-3-yl)methyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC1(C)COC1 CGILRHVKKLYKNE-UHFFFAOYSA-N 0.000 description 1
- KMOUUZVZFBCRAM-OLQVQODUSA-N (3as,7ar)-3a,4,7,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1C=CC[C@@H]2C(=O)OC(=O)[C@@H]21 KMOUUZVZFBCRAM-OLQVQODUSA-N 0.000 description 1
- XKSUVRWJZCEYQQ-UHFFFAOYSA-N 1,1-dimethoxyethylbenzene Chemical compound COC(C)(OC)C1=CC=CC=C1 XKSUVRWJZCEYQQ-UHFFFAOYSA-N 0.000 description 1
- MSAHTMIQULFMRG-UHFFFAOYSA-N 1,2-diphenyl-2-propan-2-yloxyethanone Chemical compound C=1C=CC=CC=1C(OC(C)C)C(=O)C1=CC=CC=C1 MSAHTMIQULFMRG-UHFFFAOYSA-N 0.000 description 1
- VZXTWGWHSMCWGA-UHFFFAOYSA-N 1,3,5-triazine-2,4-diamine Chemical compound NC1=NC=NC(N)=N1 VZXTWGWHSMCWGA-UHFFFAOYSA-N 0.000 description 1
- YHMYGUUIMTVXNW-UHFFFAOYSA-N 1,3-dihydrobenzimidazole-2-thione Chemical compound C1=CC=C2NC(S)=NC2=C1 YHMYGUUIMTVXNW-UHFFFAOYSA-N 0.000 description 1
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- 125000004386 diacrylate group Chemical group 0.000 description 1
- GUJOJGAPFQRJSV-UHFFFAOYSA-N dialuminum;dioxosilane;oxygen(2-);hydrate Chemical compound O.[O-2].[O-2].[O-2].[Al+3].[Al+3].O=[Si]=O.O=[Si]=O.O=[Si]=O.O=[Si]=O GUJOJGAPFQRJSV-UHFFFAOYSA-N 0.000 description 1
- TYIXMATWDRGMPF-UHFFFAOYSA-N dibismuth;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Bi+3].[Bi+3] TYIXMATWDRGMPF-UHFFFAOYSA-N 0.000 description 1
- QGBSISYHAICWAH-UHFFFAOYSA-N dicyandiamide Chemical compound NC(N)=NC#N QGBSISYHAICWAH-UHFFFAOYSA-N 0.000 description 1
- GYZLOYUZLJXAJU-UHFFFAOYSA-N diglycidyl ether Chemical compound C1OC1COCC1CO1 GYZLOYUZLJXAJU-UHFFFAOYSA-N 0.000 description 1
- 125000005442 diisocyanate group Chemical group 0.000 description 1
- XXBDWLFCJWSEKW-UHFFFAOYSA-N dimethylbenzylamine Chemical compound CN(C)CC1=CC=CC=C1 XXBDWLFCJWSEKW-UHFFFAOYSA-N 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- ORBFAMHUKZLWSD-UHFFFAOYSA-N ethyl 2-(dimethylamino)benzoate Chemical compound CCOC(=O)C1=CC=CC=C1N(C)C ORBFAMHUKZLWSD-UHFFFAOYSA-N 0.000 description 1
- WHRIKZCFRVTHJH-UHFFFAOYSA-N ethylhydrazine Chemical compound CCNN WHRIKZCFRVTHJH-UHFFFAOYSA-N 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000003925 fat Substances 0.000 description 1
- 235000008434 ginseng Nutrition 0.000 description 1
- 239000000040 green colorant Substances 0.000 description 1
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- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 1
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- 150000002430 hydrocarbons Chemical class 0.000 description 1
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- 229960004657 indocyanine green Drugs 0.000 description 1
- 239000011256 inorganic filler Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 229940079865 intestinal antiinfectives imidazole derivative Drugs 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 239000012948 isocyanate Substances 0.000 description 1
- NIMLQBUJDJZYEJ-UHFFFAOYSA-N isophorone diisocyanate Chemical compound CC1(C)CC(N=C=O)CC(C)(CN=C=O)C1 NIMLQBUJDJZYEJ-UHFFFAOYSA-N 0.000 description 1
- 150000002602 lanthanoids Chemical class 0.000 description 1
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- JDSHMPZPIAZGSV-UHFFFAOYSA-N melamine Chemical compound NC1=NC(N)=NC(N)=N1 JDSHMPZPIAZGSV-UHFFFAOYSA-N 0.000 description 1
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- 229910052901 montmorillonite Inorganic materials 0.000 description 1
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- TVMXDCGIABBOFY-UHFFFAOYSA-N octane Chemical compound CCCCCCCC TVMXDCGIABBOFY-UHFFFAOYSA-N 0.000 description 1
- 238000006384 oligomerization reaction Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000012766 organic filler Substances 0.000 description 1
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- 150000002923 oximes Chemical class 0.000 description 1
- AFEQENGXSMURHA-UHFFFAOYSA-N oxiran-2-ylmethanamine Chemical compound NCC1CO1 AFEQENGXSMURHA-UHFFFAOYSA-N 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- NWVVVBRKAWDGAB-UHFFFAOYSA-N p-methoxyphenol Chemical compound COC1=CC=C(O)C=C1 NWVVVBRKAWDGAB-UHFFFAOYSA-N 0.000 description 1
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- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 1
- 229950000688 phenothiazine Drugs 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- WZESLRDFSNLECD-UHFFFAOYSA-N phenyl prop-2-eneperoxoate Chemical compound C=CC(=O)OOC1=CC=CC=C1 WZESLRDFSNLECD-UHFFFAOYSA-N 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000000016 photochemical curing Methods 0.000 description 1
- 239000003504 photosensitizing agent Substances 0.000 description 1
- XNGIFLGASWRNHJ-UHFFFAOYSA-L phthalate(2-) Chemical compound [O-]C(=O)C1=CC=CC=C1C([O-])=O XNGIFLGASWRNHJ-UHFFFAOYSA-L 0.000 description 1
- 229940099800 pigment red 48 Drugs 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 229920002857 polybutadiene Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 229920005862 polyol Polymers 0.000 description 1
- 150000003077 polyols Chemical class 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 229910000027 potassium carbonate Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000003449 preventive effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- QCTJRYGLPAFRMS-UHFFFAOYSA-N prop-2-enoic acid;1,3,5-triazine-2,4,6-triamine Chemical compound OC(=O)C=C.NC1=NC(N)=NC(N)=N1 QCTJRYGLPAFRMS-UHFFFAOYSA-N 0.000 description 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 1
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 1
- 229940079877 pyrogallol Drugs 0.000 description 1
- FYNROBRQIVCIQF-UHFFFAOYSA-N pyrrolo[3,2-b]pyrrole-5,6-dione Chemical compound C1=CN=C2C(=O)C(=O)N=C21 FYNROBRQIVCIQF-UHFFFAOYSA-N 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- GHMLBKRAJCXXBS-UHFFFAOYSA-N resorcinol Chemical compound OC1=CC=CC(O)=C1 GHMLBKRAJCXXBS-UHFFFAOYSA-N 0.000 description 1
- 229960001755 resorcinol Drugs 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000001509 sodium citrate Substances 0.000 description 1
- NLJMYIDDQXHKNR-UHFFFAOYSA-K sodium citrate Chemical compound O.O.[Na+].[Na+].[Na+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O NLJMYIDDQXHKNR-UHFFFAOYSA-K 0.000 description 1
- 239000001488 sodium phosphate Substances 0.000 description 1
- 229910000162 sodium phosphate Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- LJFWQNJLLOFIJK-UHFFFAOYSA-N solvent violet 13 Chemical compound C1=CC(C)=CC=C1NC1=CC=C(O)C2=C1C(=O)C1=CC=CC=C1C2=O LJFWQNJLLOFIJK-UHFFFAOYSA-N 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 125000004434 sulfur atom Chemical group 0.000 description 1
- 238000001308 synthesis method Methods 0.000 description 1
- 229920002994 synthetic fiber Polymers 0.000 description 1
- 239000012209 synthetic fiber Substances 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- MUQNAPSBHXFMHT-UHFFFAOYSA-N tert-butylhydrazine Chemical compound CC(C)(C)NN MUQNAPSBHXFMHT-UHFFFAOYSA-N 0.000 description 1
- 150000003512 tertiary amines Chemical class 0.000 description 1
- 238000001029 thermal curing Methods 0.000 description 1
- 125000000101 thioether group Chemical group 0.000 description 1
- 150000003573 thiols Chemical class 0.000 description 1
- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 1
- KHPCPRHQVVSZAH-UHFFFAOYSA-N trans-cinnamyl beta-D-glucopyranoside Natural products OC1C(O)C(O)C(CO)OC1OCC=CC1=CC=CC=C1 KHPCPRHQVVSZAH-UHFFFAOYSA-N 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- PYHOFAHZHOBVGV-UHFFFAOYSA-N triazane Chemical compound NNN PYHOFAHZHOBVGV-UHFFFAOYSA-N 0.000 description 1
- 150000003852 triazoles Chemical class 0.000 description 1
- YFDSDPIBEUFTMI-UHFFFAOYSA-N tribromoethanol Chemical compound OCC(Br)(Br)Br YFDSDPIBEUFTMI-UHFFFAOYSA-N 0.000 description 1
- RYFMWSXOAZQYPI-UHFFFAOYSA-K trisodium phosphate Chemical compound [Na+].[Na+].[Na+].[O-]P([O-])([O-])=O RYFMWSXOAZQYPI-UHFFFAOYSA-K 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Classifications
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2/00—Processes of polymerisation
- C08F2/46—Polymerisation initiated by wave energy or particle radiation
- C08F2/48—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light
- C08F2/50—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light with sensitising agents
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
- G03F7/029—Inorganic compounds; Onium compounds; Organic compounds having hetero atoms other than oxygen, nitrogen or sulfur
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
- G03F7/033—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
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- G—PHYSICS
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
- G03F7/0388—Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Materials For Photolithography (AREA)
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
- Macromonomer-Based Addition Polymer (AREA)
Description
本發明係關於一種不含鹵素之酞菁綠的著色光硬化性樹脂組成物。更詳細而言,本發明關於不含鹵素之酞菁綠的著色光硬化性樹脂組成物,尤其可提供對於因銅回路之氧化而變色之具掩蓋性優異的抗焊光阻層。
通常,抗焊光阻係形成為保護銅回路。其作用,於另一方面而言亦有使看不見因銅回路之熱或濕氣產生之變色、電變色、銅回路上之瑕疵、髒污等作用。
抗焊光阻係塗佈於銅回路所形成的玻璃環氧基材,藉由曝光而形成畫像,經由顯影、熱硬化,形成其皮膜圖型。由於基材上有銅回路形成,於此上塗佈或層合了抗焊光阻時,其光阻膜厚係於基材上為厚而於銅回路上為薄的,於銅回路之邊緣的部分甚至更薄。
在此種抗焊光阻之厚度不同的狀況中,難以從外觀上掩蓋銅回路。因此,對於抗焊光阻通常有摻合著色劑,藉著使其濃度變濃而使銅回路之變色等不易看見。
最近的抗焊光阻係以減輕環境負荷的觀點而言,取代以往之為綠色著色劑的氯化酞菁綠,而普遍使用不具鹵素
原子的酞菁藍與不具鹵素原子的黃色著色劑使成為綠色的抗焊光阻(例如,參照專利文獻1)。
又,使從外觀上可明確地知為無鹵素(halogen free)者,亦有單獨使用酞菁藍作為藍色的抗焊光阻來使用。
然而,與以酞菁綠而成之綠色相比,藍色的抗焊光阻或以藍色著色劑與黃色著色劑而成之綠色抗焊光阻係掩蓋性弱,且有使無法充分地實現作為使外觀不良不易看見的著色劑之功能的情形,如下說明即可明瞭。
亦即,現在的抗焊光阻係以光硬化形成畫像,最終施以熱硬化處理。此時之處理溫度一般以150℃進行約30~60分鐘,但依基板製造商而溫度或時間不一定。其結果,尤其處理溫度高之處理時間長的情形,掩蓋性差的藍色的抗焊光阻係無法掩蓋基板上之因銅回路之氧化而變色的問題。此問題於使用無鹵素的藍色著色劑與黃色著色劑的綠色抗焊光阻中亦為相同,且經發明人等確認為與酞菁綠相比係掩蓋性弱。
又,對基板上施予標記油墨(marking ink)時,係於抗焊光阻之硬化後,進而印刷標記且使之熱硬化,故銅回路之變色加速,外觀上的問題更為嚴重。
進而,為修正抗焊光阻之熱硬化之際時產生之基板的翹曲,有對基板全體施予壓力與熱的情形,同樣地銅回路之變色加速。
此種銅回路之變色中,最不好的現象係雖於同一銅回
路上,但僅回路之邊緣(光阻變薄的部分)為變色的狀態。此種情形,於基板之檢查或實際組裝之際,由於與檢查數據不一致,即使為良品也變成不良。相反地,於銅回路上可確認變色且均一地辨識其它部分的情形,就不會產生其般不佳的情形。
此種不適的情形係為依據之前報告指出,尤其取代酞菁綠而使用不具鹵素原子的酞菁藍等的著色劑的情形(著色劑之無鹵素化)為顯著。
〔專利文獻11〕日本特開2000-7974號公報(專利申請範圍,先前技術)
因此,本發明係以提供一種著色光硬化性樹脂組成物,其可形成對於因銅回路之氧化而變色等之具掩蓋性優異的抗焊光阻層為目的。
本發明人等專心研究之結果,發現若藉由作為著色劑之至少使用紅色著色劑成為的著色光硬化性樹脂組成物,可解決使用無鹵素之著色劑成為的以往之抗焊光阻之掩蓋性的上述問題,進而藉由使用無鹵素之紅色著色劑,可謀求不會使掩蓋性變差且於抗焊光阻層之鹵素含有量的減低,遂至完成本發明。
亦即,本發明為一種可以鹼水溶液顯影之光硬化性樹脂組成物,其特徵為含有(A)含有羧酸之樹脂,(B)光聚合起始劑,(C)分子中具有2個以上乙烯性不飽和基之化合物,及(D)紅色著色劑。
本發明之上述光硬化性樹脂組成物係於一態樣中,除紅色著色劑(D)以外可含有(E1)藍色著色劑(例如,酞菁藍)及/或(E2)黃色著色劑,其色調可得呈藍色、綠色、紫色或橙色。
又,本發明之光硬化性樹脂組成物係於一態樣中,紅色著色劑(D)為不含鹵素及偶氮基中任一者的紅色著色劑。
又,本發明之光硬化性樹脂組成物係於一態樣中,進而含有(F)熱硬化性成份。
又,本發明之光硬化性樹脂組成物係於一態樣中,為用於塗佈於銅上。
又,本發明係於其它態樣中,將上述光硬化性樹脂組成物塗佈於載體薄膜,並使其乾燥而得的光硬化性乾薄膜。
又,本發明係於其它態樣中,上述光硬化性樹脂組成物為藍色、綠色、紫色或橙色的硬化物。
又,本發明係於其它態樣中,上述乾薄膜為藍色、綠色、紫色或橙色的硬化物。
又,本發明係於其它態樣中,於形成銅回路之基板上,具有由上述硬化物所形成之抗焊光阻層的印刷配線
板。
依據本發明,可提供對於因銅回路之氧化而變色之具掩蓋性優異的藍色、綠色、紫色或橙色的著色抗焊光阻層。尤其作為替換於掩蓋性有問題之泛用藍色抗焊光阻的藍色抗焊光阻為有效。又,藉由本發明所求得之抗焊光阻層係鹵素含有量極低且塗膜燃燒時之鹵素氣體產生量顯著地減低。
以下,詳細地說明本發明。
如上述般地,本發明之光硬化性樹脂組成物,其特徵係作為著色劑之至少使用紅色著色劑(D)取代以往之含有鹵素之酞菁綠而成,於一態樣中,除紅色著色劑(D)以外,尚含有藍色著色劑(E1)及/或黃色著色劑(E2),其色調可得呈藍色、綠色、紫色或橙色的光硬化性樹脂組成物。
因此,首先就本發明之著色劑說明。本發明中,著色劑可使用習知者,可為顏料、染料、色素之任一者。但,以減輕環境負荷以及對人體的影響之觀點而言,以不含鹵素為佳。
作為紅色著色劑(D),單偶氮系、雙偶氮系、偶氮沈澱(azo lake)系、苯并咪唑酮系,苝系、二酮基吡咯并吡咯系、縮合偶氮系、蒽醌系、喹吖啶酮系等,具體地,可例舉附加為如下述的顏色指數(C.I.;The Society
of Dyers and Colourists公司發行)編號者。
- 單偶氮系:Pigment Red 1,2,3,4,5,6,8,9,12,14,15,16,17,21,22,23,31,32,112,114,146,147,151,170,184,187,188,193,210,245,253,258,266,267,268,269;- 雙偶氮系:Pigment Red 37,38,41;單偶氮沈澱(monoazo lake)):Pigment Red 48:1,48:2,48:3,48:4,49:1,49:2,50:1,52:1,52:2,53:1,53:2,57:1,58:4,63:1,63:2,64:1,68;- 苯并咪唑酮系:Pigment Red 171,175,176,185,208;- 苝系:Solvent Red 135,179;Pigment Red 123,149,166,178,179,190,194,224;- 二酮基吡咯并吡咯系:Pigment Red 254,255,264,270,272;- 縮合偶氮系:Pigment Red 220,144,166,214,220,221,242;- 蒽醌系:Pigment Red 168;177,216;Solvent Red 149,150,52,207;- 喹吖啶酮系:Pigment Red 122,202,206,207,209。
雖無特定限定者,但從安全性‧無害性之觀點而言,以不含偶氮基的紅色著色劑較適為使用。
作為藍色著色劑(E1)係有酞菁系、蒽醌系,顏料系為分類於顏料(Pigment)的化合物,具體地,可例舉附加為如下述的顏色指數(C.I.;The Society of Dyers andColourists公司發行)編號者。
- 顏料系:Pigment Blue 15,15:1,15:2,15:3,15:4,15:6,16,60;- 染料系:Solvent Blue 35,63,68,70,83,87,94,97,122,136,67,70。
上述以外亦可使用金屬取代或無取代的酞菁化合物。
作為黃色著色劑(E2),有單偶氮系、雙偶氮系、縮合偶氮系、苯并咪唑酮系、異吲哚滿系、蒽醌系等,具體地可例舉附加為如下述的顏色指數編號者。
- 蒽醌系:Solvent Yellow 163,Pigment Yellow 24,108,193,147,199,202;- 異吲哚滿系:Pigment Yellow 110,109,139,179,185;- 縮合偶氮系:Pigment Yellow 93,94,95,128,155,166,180;- 苯并咪唑酮系:Pigment Yellow 120,151,154,156,175,181;- 單偶氮系:Pigment Yellow1,2,3,4,5,6,9,10,12,61,62,62:1,65,73,74,75,97,100,104,105,111,116,167,168,169,182,183;- 雙偶氮系:Pigment Yellow 12,13,14,16,17,55,63,81,83,87,126,127,152,170,172,174,176,188,198。
雖無特定限定者,但從安全性‧無害性之觀點而言,以不含偶氮基的黃色著色劑較適為使用。
本發明中紅色著色劑、以及藍色著色劑及/或黃色著色劑摻合率係使所得之光硬化性樹脂組成物或由其硬化皮
膜所成的抗焊光阻層為所欲之色調,具體地使呈現藍色、綠色、紫色或橙色而可作充分的比例。
於本發明中,本發明之光硬化性樹脂組成物或其硬化皮膜呈現藍色、綠色、紫色及橙色係指經由觀察者以肉眼所觀察時,具有認知彼為藍色、綠色、紫色及橙色程度的色調者。具體地為藉由JISZ8721所規定之方法測定光硬化性樹脂組成物及其硬化皮膜之外觀色調‧顯示時、於蒙賽爾色相(Munsell hue)環(財團法人 日本色彩研究所監修 新基本色表系列2蒙賽爾系統 日本色研事業股份有限公司發行;參照圖1)上,屬於從5BG至未達3P(藍色)、從9Y至未達5BG(綠色)、從3P至未達7RP(紫色)、從9R至未達7YR(橙色)之色相範圍,且較佳係具有彩度為1以上未達16;亮度為1以上未達9、更佳係彩度為2以上未達15;亮度為2以上未達9者。
具體的摻合比例係亦被所使用之著色劑之種類或其它添加劑等之種類影響,無法一概論述,但一般,以質量比係紅色著色劑(D):藍色著色劑(E1):黃色著色劑(E2)=1:0~50:0~50。又,為進行充分的著色,以紅色著色劑(D)、藍色著色劑(E1)及黃色著色劑(E2)之合計量之組成物全體量的0.05~3.0質量%之比例進行摻合為佳。
本發明中除上述著色劑以外,以調整色調之目的亦可加入紫、橙、褐、黑等之著色劑,具體地可列舉Pigment Violet 19、23、29、32、36、38、42;Solvent Violet
13、36;C.I.顏料橙1、C.I.顏料橙5、C.I.顏料橙13、C.I.顏料橙14、C.I.顏料橙16、C.I.顏料橙17、C.I.顏料橙24、C.I.顏料橙34、C.I.顏料橙36、C.I.顏料橙38、C.I.顏料橙40、C.I.顏料橙43、C.I.顏料橙46、C.I.顏料橙49、C.I.顏料橙51、C.I.顏料橙61、C.I.顏料橙63、C.I.顏料橙64、C.I.顏料橙71、C.I.顏料橙73、C.I.顏料褐23、C.I.顏料褐25;C.I.顏料黑1、C.I,顏料黑7等。
接著,就含有羧酸之樹脂(A)進行說明。
作為本發明之光硬化性樹脂組成物中所含之含有羧酸之樹脂(A),可使用分子中含有羧酸的周知習用的樹脂化合物。進而,分子中具有乙烯性不飽和雙鍵的含有羧酸之感光性樹脂(A’)以光硬化性或耐顯影性層面而言為較佳。
具體地,可列舉下述列舉的樹脂。
可列舉如下述(1)~(9)等:(1)一種含有羧酸之共聚合樹脂,其為藉由將(甲基)丙烯酸等之不飽和羧酸、與1種以上之具有其它之不飽和雙鍵的化合物進行共聚合而求得,(2)一種含有羧酸之感光性樹脂,其於(甲基)丙烯酸等之不飽和羧酸、與1種以上之具有其它之不飽和雙鍵的化合物的共聚合物,藉由具有縮水甘油基(甲基)丙烯酸酯或3,4-環氧環己基甲基(甲基)丙烯酸酯等的環氧基與不飽和雙鍵的化合物、或(甲基)丙烯酸氯化物等,經由使乙烯性不飽和基作為側基(pendant)予以加成而
求得,(3)一種感光性之含有羧酸之共聚合樹脂,其為使具有縮水甘油基(甲基)丙烯酸酯或3,4-環氧環己基甲基(甲基)丙烯酸酯等的環氧基與不飽和雙鍵的化合物、與具有其它之不飽和雙鍵之化合物的共聚合物,以(甲基)丙烯酸等之不飽和羧酸反應,且使生成之二級羥基以多元酸酐反應而求得,(4)一種含有羧酸之感光性樹脂,其為使具有順丁烯二酸酐等之不飽和雙鍵的酸酐、與具有其它之不飽和雙鍵之化合物的共聚合物,以具有2-羥基乙基(甲基)丙烯酸酯等之羥基與不飽和雙鍵的化合物反應而求得,(5)一種含有羧酸之感光性樹脂,其為使多官能環氧化合物與不飽和單羧酸反應,且使生成之羥基以飽和或不飽和多元酸酐反應而求得,(6)一種含有羥基及羧酸之感光性樹脂,其為使聚乙烯醇衍生物等之含羥基之聚合物,以飽和或不飽和多元酸酐反應後,使生成之羧酸以一分子中具有環氧基與不飽和雙鍵的化合物反應而求得,(7)一種含有羧酸之感光性樹脂,其為使多官能環氧化合物、不飽和單羧酸、一分子中至少1個醇性羥基與環氧基反應之具有醇性羥基以外之1個反應性基之化合物的反應產物,以飽和或不飽和多元酸酐反應而求得,(8)一種含有羧酸之感光性樹脂,其為使一分子中具有至少2個氧雜環丁烷環的多官能氧雜環丁烷化合物,
以不飽和單羧酸反應,且對所得之改性氧雜環丁烷樹脂中的第一級羥基以飽和或不飽和多元酸酐反應而求得,及(9)一種含有羧酸之感光性樹脂,其為使多官能環氧樹脂以不飽和單羧酸反應後,使多元酸酐反應所得的含有羧酸之樹脂,進而以分子中具有1個環氧乙烷(oxirane)環與1個以上之乙烯性不飽和基的化合物反應而求得,但不限定於此些。
此等例示中較佳者為上述(2)、(5)、(7)的含有羧酸之樹脂,尤其上述(9)的含有羧酸之感光性樹脂以光硬化性、硬化塗膜特性之面而言為較佳。
又,本說明書中,(甲基)丙烯酸酯係總稱丙烯酸酯、甲基丙烯酸酯及彼等之混合物的用語,其它類似之表現亦相同。
如上述的含有羧酸之樹脂(A)係由於在主幹‧聚合物(backbone polymer)的側鏈具有多數游離的羧基,故可以鹼水溶液顯影。
又,上述含有羧酸之樹脂(A)的酸值較佳為40~200mgKOH/g的範圍、更佳為45~120mgKOH/g的範圍。含有羧酸之樹脂的酸值未達40mgKOH/g時,鹼顯影困難,另一方面,超過200mgKOH/g時,為使藉由顯影液之曝光部的溶解進行,還必需使線條變細,有時係沒有區別曝光部與未曝光部便於顯影液中溶解剝離,正常的光阻圖型之描繪變得困難,故不佳。
又,上述含有羧酸之樹脂(A)的重量平均分子量係
依樹脂骨架而不同,但一般為2,000~150,000、進而以5,000~100,000的範圍者為佳。重量平均分子量未達2,000時,無黏性之性能差,曝光後之塗膜的耐濕性差且顯影時膜減少,解像度很差。另一方面,重量平均分子量超過150,000時,有顯影性明顯變差、貯藏安定性差的情形。
此種含有羧酸之樹脂(A)的摻合量係於全組成物中,較佳為20~60質量%、更佳為30~50質量%。比上述範圍少的情形,塗膜強度降低故不佳。另一方面,比上述範圍多的情形,黏性變高且塗佈性等降低,故不佳。
接著,就光聚合起始劑(B)進行說明。
作為光聚合起始劑(B),可例舉如苯乙酮、2,2-二甲氧基-2-苯基苯乙酮、2,2-二乙氧基-2-苯基苯乙酮、p-二甲胺基苯丙酮、二氯苯乙酮、三氯苯乙酮、p-tert-丁基三氯苯乙酮、1-羥基環己基苯基酮、2-甲基-1-[4-(甲硫基)苯基]-2-嗎啉代-丙烷-1-酮、2-苄基-2-二甲胺基-1-(4-嗎啉代苯基)-丁酮-1、N,N-二甲胺基苯乙酮等的苯乙酮類;二苯基酮、甲基二苯基酮、2-氯二苯基酮、4,4’-二氯二苯基酮、4,4’-雙二甲胺基二苯基酮、4,4’-雙二乙胺基二苯基酮、米其勒酮(Michler's ketone)、4-苯甲醯基-4’-甲基二苯基硫化物等的二苯基酮類;苄基;苯甲醯基、苯偶因甲醚、苯偶因乙醚、苯偶因異丙基醚、苯偶因異丁醚等的苯偶因醚類;苯乙酮二甲基縮酮、苄基二甲基縮酮等的縮酮類;噻噸酮、2-氯噻噸酮、2,4-二甲基噻噸
酮、2,4-二乙基噻噸酮、2,4-二異丙基噻噸酮等的噻噸酮類;2-甲基蒽醌、2-乙基蒽醌、2-tert-丁基蒽醌、1-氯蒽醌、2-胺基蒽醌、2,3-二苯基蒽醌等的蒽醌類;苯甲醯基過氧化物、異丙苯過氧化物等的有機過氧化物;2,4,5-三芳基咪唑二聚物、核黃素四丁酸酯(riboflavin tetra butyrate)、2-巰基苯并咪唑、2-巰基苯并噁唑、2-巰基苯并噻唑等的硫醇基化合物;2,4,6-參-s-三、2,2,2-三溴乙醇、三溴甲基苯碸等的有機鹵素化合物;2,4,6-三甲基苯醯基二苯基膦氧化物、雙(2,4,6-三甲基苯醯基)-苯基膦氧化物)等。此等化合物可單獨使用,又亦可組合2種以上使用。
進而,上述光聚合起始劑(B)係可組合1種或2種以上之如N,N-二甲胺基苯甲酸乙基酯、N,N-二甲胺基苯甲酸異戊基酯、戊基-4-二甲胺基苯甲酸酯、三乙胺、三乙醇胺等的三級胺類、雙(η5-環戊二烯基)-雙(2,6-二氟-3-(1H-吡咯-1-基)苯基)鈦等的鈦烯(titanocene)類;2-(乙醯基肟基甲基)噻噸-9-酮、1,2-辛二酮,1-[4-(苯硫基)-,2-(O-苯甲醯基肟)]、乙酮,1-[9-乙基-6-(2-甲基苯醯基)-9H-咔唑-3-基]-,1-(O-乙醯基肟)等之肟酯類的光增感劑來使用。
前述光聚合起始劑(B)之較佳的組合係2-苄基-2-二甲胺基-1-(4-嗎啉代苯基)-丁酮-1(例如Ciba Specialty Chemicals公司製、IRGACURE 369:IRGACURE為註冊商標)與雙(η5-環戊二烯基)-雙(2,6-二氟-3-(1H-吡
咯-1-基)苯基)鈦(例如Ciba Specialty Chemicals公司製、IRGACURE 784)的組合;2,4,6-三甲基苯醯基二苯基膦氧化物(例如BASF製Lucirin TPO)與2-(乙醯基肟基甲基)噻噸-9-酮(例如Ciba Specialty Chemicals公司製、CGI-325)的組合;或2,4,6-三甲基苯醯基二苯基膦氧化物(例如BASF製Lucirin TPO)與雙(2,4,6-三甲基苯醯基)-苯基膦氧化物(例如Ciba Specialty Chemicals公司製、IRGACURE 819)等的組合。
又,如上述的光聚合起始劑(B)之使用量之較佳的範圍,係對於含有羧酸之樹脂(A)100質量份而言較佳為1~30質量份、更佳為5~25質量份的比例。光聚合起始劑之摻合比例比上述範圍還少的情形,所得之組成物的光硬化性變差。另一方面,比上述範圍還多時,所得之硬化塗膜的特性變差,且組成物之保存安定性變差,故不佳。
接著,對分子中具有2個以上乙烯性不飽和基的化合物進行說明。
本發明之光硬化性樹脂組成物中所使用之分子中具有2個以上乙烯性不飽和基的化合物(C)為藉由照射活性能量線,進行光硬化,使前述含有羧酸之樹脂(A)於鹼水溶液中為不溶化或幫助不溶化者。此種化合物可列舉乙二醇、甲氧基四乙二醇、聚乙二醇、丙二醇等之乙二醇的二丙烯酸酯類;己二醇、三羥甲基丙烷、季戊四醇、二季戊四醇、參-羥基乙基異三聚氰酸酯等的多元醇或此等的
環氧乙烷(ethylene oxide)加成物或環氧丙烷(propylene oxide)加成物等的多元丙烯酸酯類;苯氧基丙烯酸酯、雙酚A二丙烯酸酯、及此等之苯酚類的環氧乙烷(ethylene oxide)加成物或環氧丙烷(propylene oxide)加成物等的多元丙烯酸酯類;甘油二縮水甘油醚、甘油三縮水甘油醚、三羥甲基丙烷三縮水甘油醚、三縮水甘油基異三聚氰酸酯等之縮水甘油醚的多元丙烯酸酯類;及三聚氰胺丙烯酸酯、及/或對應上述丙烯酸酯的各甲基丙烯酸酯類等。
又,列舉可使甲酚酚醛清漆型環氧樹脂等的多官能環氧樹脂以丙烯酸反應的環氧丙烯酸酯樹脂、或進而使其環氧丙烯酸酯樹脂之羥基以季戊四醇三丙烯酸酯等的羥基丙烯酸酯與異佛酮二異氰酸酯等的二異氰酸酯的半胺基甲酸酯化合物反應的環氧胺基甲酸酯丙烯酸酯化合物等。此種環氧丙烯酸酯系樹脂係不會使指觸乾燥性降低且可使光硬化性提高。
此種分子中具有2個以上乙烯性不飽和基之化合物(C)的摻合比例,係對前述含有羧酸之樹脂(A)100質量份而言為5~100質量份、更佳為1~70質量份的比例。前述摻合量低於5質量份的情形,光硬化性降低且藉由照射活性能量線後之鹼顯影係難以形成圖型,故不佳。另一方面,超過100質量份時,因對鹼水溶液之溶解性降低且塗膜變脆,而不佳。
接著,對熱硬化性成份(F)進行說明。
為對本發明之光硬化性樹脂組成物賦予耐熱性,而可加入熱硬化性成份(F)。尤其佳者為分子中具有2個以上之環狀醚基及/或環狀硫醚基(以下,簡稱為環狀(硫代)醚基)的熱硬化性成份(F)。
此種分子中具有2個以上之環狀(硫代)醚基的熱硬化性成份(F),為分子中具有3、4或5員環的環狀醚基、或環狀硫醚基中之任一者,或者為具有2個以上之2種類的基的化合物,例如可列舉分子內至少具有2個以上之環氧基的化合物,亦即多官能環氧化合物(F-1);分子內至少具有2個以上之氧雜環丁基的化合物,亦即多官能氧雜環丁烷化合物(F-2);分子內至少具有2個以上之硫醚基的化合物,亦即表硫化物樹脂(episulfide resin)(F-3)等。
前述多官能環氧化合物(F-1),可列舉如Japan Epoxy Resins公司製之EPIKOTE 828、EPIKOTE 834、EPIKOTE 1001、EPIKOTE 1004,大日本油墨化學工業公司製之EPICLON 840、EPICLON 850、EPICLON 1050、EPICLON 2055,東都化成公司製之EPOTOHTO YD-011、YD-013、YD-127、YD-128,Dow Chemical公司製之D.E.R.317、D.E.R.331、D.E.R.661、D.E.R.664;Ciba Specialty Chemicals公司之Araldite 6071、Araldite 6084、Araldite GY250、Araldite GY260,住友化學工業公司製之Sumi-Epoxy ESA-011、ESA-014、ELA-115、ELA-128;旭化成工業公司製之A.E.R.330、A.E.R.331、
A.E.R.661、A.E.R.664等(皆商品名)的雙酚A型環氧樹脂;Japan Epoxy Resins公司製之EPIKOTE YL903,大日本油墨化學工業公司製之EPICLON 152、EPICLON 165,東都化成公司製之EPOTOHTO YDB-400、YDB-500,Dow Chemical公司製之D.E.R.542,Ciba Specialty Chemicals公司製之Araldite 8011,住友化學工業公司製之Sumi-Epoxy ESB-400、ESB-700,旭化成工業公司製之A.E.R.711、A.E.R.714等(皆商品名)的溴化環氧樹脂;Japan Epoxy Resins公司製之EPIKOTE 152、EPIKOTE 154、Dow Chemical公司製之D.E.N.431、D.E.N.438,大日本油墨化學工業公司製之EPICLON N-730、EPICLON N-770、EPICLON N-865,東都化成公司製之EPOTOHTO YDCN-701、YDCN-704,Ciba Specialty Chemicals公司製之Araldite ECN1235、Araldite ECN1273、Araldite ECN1299、Araldite XPY307,日本化藥公司製之EPPN-201、EOCN-1025、EOCN-1020、EOCN-104S、RE-306,住友化學工業公司製之Sumi-Epoxy ESCN-195X、ESCN-220,旭日化成工業公司製之A.E.R.ECN-235、ECN-299等(皆商品名)的酚醛清漆型環氧樹脂;大日本油墨化學工業公司製之EPICLON 830,JapanEpoxy Resins公司製之EPIKOTE 807,東都化成公司製之EPOTOHTO YDF-170、YDF-175、YDF-2004,Ciba Specialty Chemicals公司製之Araldite XPY306等(皆商品名)的雙酚F型環氧樹脂;東都化成公司製之EPOTOHTO ST-2004、ST-
2007、ST-3000(商品名)等的氫化雙酚A型環氧樹脂;Japan Epoxy Resins公司製之EPIKOTE 604,東都化成公司製之EPOTOHTO YH-434,Ciba Specialty Chemicals公司製之Araldite MY720,住友化學工業公司製之Sumi-Epoxy ELM-120等(皆商品名)的縮水甘油基胺型環氧樹脂;Ciba Specialty Chemicals公司製之Araldite CY-350(商品名)等的海因(hydantoin)型環氧樹脂;DAICEL化學工業公司製之CELLOXIDE 2021,Ciba Specialty Chemicals公司製之Araldite CY175、CY179等(皆商品名)的脂環式環氧樹脂;Japan Epoxy Resins公司製之YL-933,Dow Chemical公司製之T.E.N.、EPPN-501、EPPN-502等(皆商品名)的三羥基苯基甲烷型環氧樹脂;Japan Epoxy Resins公司製之YL-6056、YX-4000、YL-6121(皆商品名)等的聯二甲苯酚型或雙酚型環氧樹脂或彼等的混合物;日本化藥公司製EBPS-200,旭電化工業公司製EPX-30,大日本油墨化學工業公司製之EXA-1514(商品名)等的雙酚S型環氧樹脂;Japan Epoxy Resins公司製之EPIKOTE 157S(商品名)等的雙酚A酚醛清漆型環氧樹脂;Japan Epoxy Resins公司製之EPIKOTE YL-931,Ciba Specialty Chemicals公司製之Araldite 163等(皆商品名)的四酚乙烷型環氧樹脂;Ciba Specialty Chemicals公司製之Araldite PT810,日產化學工業公司製之TEPIC等(皆商品名)的雜環環氧樹脂;日本油脂公司製BLEMMER DGT等的二縮水甘油基
酞酸酯樹脂;東都化成公司製ZX-1063等的四縮水甘油基二甲苯酚乙烷(glycidyl xylenoyl ethane)樹脂;新日鐵化學公司製ESN-190、ESN-360,大日本油墨化學工業公司製HP-4032、EXA-4750、EXA-4700等的含有萘基之環氧樹脂;大日本油墨化學工業公司製HP-7200、HP-7200H等之具有二環戊二烯骨架的環氧樹脂;日本油脂公司製CP-50S、CP-50M等的縮水甘油基甲基丙烯酸酯共聚合系環氧樹脂;進而環己基順丁烯二醯亞胺與縮水甘油基甲基丙烯酸酯的共聚合環氧樹脂;環氧改性之聚丁二烯橡膠衍生物(例如DAICEL化學工業製PB-3600等)、CTBN改性環氧樹脂(例如東都化成公司製之YR-102、YR-450等)等,但不限定於此。此等環氧樹脂係可單獨或組合2種以上使用。此等之中尤其以酚醛清漆型環氧樹脂、雜環環氧樹脂、雙酚A型環氧樹脂或彼等之混合物為佳。
前述多官能氧雜環丁烷化合物(F-2),係可列舉雙[(3-甲基-3-氧雜環丁基甲氧基)甲基]醚、雙[(3-乙基-3-氧雜環丁基甲氧基)甲基]醚、1,4-雙[(3-甲基-3-氧雜環丁基甲氧基)甲基]苯、1,4-雙[(3-乙基-3-氧雜環丁基甲氧基)甲基]苯、(3-甲基-3-氧雜環丁基)甲基丙烯酸酯、(3-乙基-3-氧雜環丁基)甲基丙烯酸酯、(3-甲基-3-氧雜環丁基)甲基甲基丙烯酸酯、(3-乙基-3-氧雜環丁基)甲基甲基丙烯酸酯、或彼等之寡聚物或共聚合物等的多官能氧雜環丁烷類,其它還有氧雜環丁烷醇與酚醛清漆樹脂、聚(p-羥基苯乙烯)、卡魯特型(cardo type)型
雙酚類、杯芳烴(calixarene)類、杯間苯二酚芳烴(calixresorcinarene)類、或與具有倍半矽氧烷(silsesquioxane)等之羥基的樹脂的醚化物等。其它,亦可列舉具有氧雜環丁烷環的不飽和單體與烷基(甲基)丙烯酸酯的共聚合物等。
前述分子中具有2個以上之環狀硫醚基的化合物(F-3),係可列舉如Japan Epoxy Resins公司製之雙酚A型表硫化物樹脂YL7000等。又,使用同樣的合成方法,亦可使用酚醛清漆型環氧樹脂之環氧基的氧原子取代為硫原子的表硫化物樹脂。
前述分子中具有2個以上之環狀(硫代)醚基的熱硬化性成分(F)的摻合比例,係對於前述含有羧酸之樹脂(A)的羧基1當量,較佳為0.6~2.5當量、更佳為0.8~2.0當量的範圍。分子中具有2個以上之環狀(硫代)醚基的熱硬化性成分(F)的摻合量,未達0.6時抗焊光阻膜中有羧基殘留,且耐熱性、耐鹼性、電氣絕緣性等降低,故不佳。一方面,超過2.5當量時,因低分子量的環狀(硫代)醚基殘留在乾燥塗膜,塗膜的強度等降低,故不佳。
本發明之光硬化性樹脂中,使用上述分子中具有2個以上之環狀(硫代)醚基的熱硬化成分(F)時,以含有熱硬化觸媒(G)為佳。該種熱硬化觸媒(G),可列舉如咪唑、2-甲基咪唑、2-乙基咪唑、2-乙基-4-甲基咪唑、2-苯基咪唑、4-苯基咪唑、1-氰基乙基-2-苯基咪唑、1-
(2-氰基乙基)-2-乙基-4-甲基咪唑等的咪唑衍生物;二氰二胺(dicyandiamide)、苄基二甲胺、4-(二甲胺基)-N,N-二甲基苄胺、4-甲氧基-N,N-二甲基苄胺、4-甲基-N,N-二甲基苄胺等的胺化合物;己二酸二醯肼、癸二酸二醯肼等的肼化合物;三苯基膦等的磷化合物等,又市售品如四國化成工業公司製之2MZ-A、2MZ-OK、2PHZ、2P4BHZ、2P4MHZ(皆咪唑系化合物的商品名),SAN-APRO公司製之U-CAT3503N、U-CAT3502T(皆二甲胺之嵌段異氰酸酯化合物的商品名),DBU、DBN、U-CATSA102、U-CAT5002(皆雙環脒化合物及其鹽)等。尤其,不限定於此等的,亦可使用環氧樹脂或氧雜環丁烷化合物的熱硬化觸媒,或亦可為促進環氧基及/或氧雜環丁基基與羧基的反應者,單獨或混合2種以上使用亦無妨。又,亦可使用胍胺(guanamine)、乙醯胍胺、苯并胍胺、三聚氰胺、2,4-二胺基-6-甲基丙烯醯氧基乙基-S-三、2-乙烯基-4,6-二胺基-S-三、2-乙烯基-4,6-二胺基-S-三‧異三聚氰酸加成物、2,4-二胺基-6-甲基丙烯醯氧基乙基-S-三‧異三聚氰酸加成物等的S-三衍生物,較佳係將此等作為密著性賦予劑亦具機能的化合物與前述熱硬化觸媒併用。
此等熱硬化觸媒的摻合量係一般量的比例即足夠,例如,對於含有羧酸之樹脂(A)或分子中具有2個以上之環狀(硫代)醚基的熱硬化性成分(F)100質量份,較佳為0.1~20質量份、更佳為0.5~15.0質量份。
本發明之光硬化性樹脂組成物係為提高其塗膜的物理強度等,而視需要可摻合填充劑。此種填充劑,可使用周知習用的無機或有機填充劑,尤其較佳使用硫酸鋇、球狀二氧化矽及滑石。進而,亦可使用具有1個以上之乙烯性不飽和基的化合物或前述多官能環氧樹脂(E1)中分散奈米二氧化矽之Hanse-Chemie公司製的NANOCRYL(商品名)XP 0396、XP 0596、XP 0733、XP 0746、XP 0765、XP 0768、XP 0953、XP 0954、XP1045(皆製品等級名)或Hanse-Chemie公司製的NANOPOX(商品名)XP 0516、XP 0525、XP 0314(皆製品等級名)。此等可單獨或摻合2種以上。
此等填充劑的摻合量對於上述含有羧酸之樹脂(A)100質量份,較佳為300質量份以下、更佳為0.1~300質量份、特佳為0.1~150質量份。填充劑的摻合量超過300質量份時,感光性組成物的黏度變高且印刷性降低、硬化物變脆而不佳。
進而,本發明之光硬化性樹脂組成物係為上述含有羧酸之樹脂(A)的合成或組成物之調整、或為塗佈於基板、載體薄膜的黏度調整而可使用有機溶劑。
此種有機溶劑,可列舉酮類、芳香族烴類、乙二醇醚類、乙二醇醚醋酸酯類、酯類、醇類、脂肪族烴、石油系溶劑等。更具體地,甲基乙基酮、環己酮等的酮類;甲苯、二甲苯、四甲基苯等的芳香族烴類;溶纖劑、甲基溶纖劑、丁基溶纖劑、卡必醇、甲基卡必醇、丁基卡必醇、
丙二醇單甲基醚、二丙二醇單甲基醚、二丙二醇二乙基醚、三乙二醇單乙基醚等的乙二醇醚類;乙酸乙酯、乙酸丁酯、二丙二醇甲基醚醋酸酯、丙二醇甲基醚醋酸酯、丙二醇乙基醚醋酸酯、丙二醇丁基醚醋酸酯等的酯類;乙醇、丙醇、乙二醇、丙二醇等的醇類;辛烷、癸烷等的脂肪族烴;石油醚、石腦油、氫化石腦油、溶劑石腦油等的石油系溶劑等。此種有機溶劑可單獨或以2種以上的混合物被使用。
本發明之光硬化性樹脂組成物進而視需要可摻合對苯二酚、對苯二酚單甲基醚、第三丁基兒茶酚、焦棓酚、吩噻嗪等之周知習用的熱聚合禁止劑;微粉末二氧化矽、有機膨潤土、蒙脫石等之周知習用的增黏劑、聚矽氧烷系、氟系、高分子系等之消泡劑及/或調平劑、咪唑系、噻唑系、三唑系等的矽烷偶合劑、抗氧劑、防鏽劑等周知習用的添加劑類。
接著,對使用本發明之光硬化性樹脂組成物所得的乾薄膜、硬化物、以及具有由該硬化物所成之抗焊光阻層的印刷配線板進行說明。
本發明所述之光硬化性樹脂組成物係藉由常用手段經由塗佈於載體薄膜,並使其乾燥而可得光硬化性的乾薄膜。本發明所述之光硬化性樹脂組成物或此乾薄膜係於銅上經光硬化而得。光硬化係亦可以藉由紫外線曝光裝置來進行,雷射發射光源尤其藉由波長為350~410nm的雷射光使之硬化。本發明所述之印刷配線板係經此方式的光硬
化後,再經熱硬化而得。
具體地係進行如以下的方式,可形成乾薄膜、硬化物、印刷配線板。即亦,本發明之光硬化性樹脂組成物係例如以前述有機溶劑調整為適於塗佈方法的黏度,於基材上藉由浸塗法、流塗法、輥塗法、棒塗法、網版印刷法、簾塗法等方法進行塗佈,以約60~100℃的溫度使組成物中所含的有機溶劑揮發乾燥(假乾燥),可形成無黏性(tack-free)的塗膜。又,將上述組成物塗佈於載體薄膜上,藉由使之乾燥為薄膜型式而捲取貼合於基材上可形成樹脂絕緣層。其後,藉由接觸式(或非接觸方式),經由形成圖型的光罩,藉由活性能量線選擇性地曝光或藉由雷射直接(Laser direct)曝光機直接圖型曝光,而未曝光部分藉由稀鹼水溶液(例如0.3~3%碳酸鹼水溶液)予以顯影形成光阻圖型。進而含有熱硬化成分(F)之組成物的情形,例如於約140~180℃的溫度進行加熱藉由使其熱硬化,使前述含有羧酸之樹脂(A)的羧基與分子中具有2個以上環狀(硫代)醚基的熱硬化性成分(F)反應,可形成具耐熱性、耐藥品性、耐吸濕性、密著性、電氣特性等諸特性優異的硬化塗膜。
又,即使不含熱硬化性成分(F)的情形,經由熱處理,使曝光時未反應的狀態下而殘留之乙烯性不飽和鍵進行熱自由基聚合,且為提昇塗膜特性,亦可依目的‧用途來進行熱處理(熱硬化)。
上述基材,可列舉使用紙苯酚、紙環氧、玻璃布環
氧、玻璃聚醯亞胺、玻璃布/不織布環氧、玻璃布/紙環氧、合成纖維環氧、氟‧聚乙烯‧PPO‧氰酯(cyanate ester)等的高頻電路用覆銅層合版等材質者之所有的等級(FR-4等)的覆銅層合版、其它之聚醯亞胺薄膜、PET薄膜、玻璃基板、陶瓷基板、晶圓板等。
塗佈本發明之光硬化性樹脂組成物後進行之揮發乾燥,係可使用熱風循環式乾燥爐、IR爐、熱板、對流爐等(使用備有以蒸氣之空氣加熱方式的熱源且使乾燥機內的熱風向流接觸的方法及藉由噴嘴噴向支撐體的方式)來進行。
如以下方式地塗佈本發明的光硬化性樹脂組成物,於揮發乾燥後,對所得之塗膜,進行曝光(照射活性能量線)。塗膜係曝光部(藉由活性能量線所照射的部分)硬化。
照射上述活性能量線所使用的曝光機係可使用採用雷射直接描繪裝置(雷射直接成像(Laser direct imaging)裝置)、搭載金屬鹵化物燈的曝光機、搭載(超)高壓水銀燈的曝光機、搭載水銀短弧燈的曝光機、或(超)高壓水銀燈等的紫外線燈的直接描繪裝置。活性能量線若使用最大波長於350~410nm之範圍的雷射光,亦可為氣體雷射、固體雷射任一者。又,其曝光量依膜厚等而不同,一般可使為5~200mJ/cm2
、較佳為5~100mJ/cm2
、進而較佳為5~50mJ/cm2
的範圍內。上述直接描繪裝置,可使用例如日本Orbotech公司製、PENTAX公司製等商品,最
大波長若發射為350~410nm之雷射光的裝置,亦可使用任一之裝置。
前述顯影方法可藉由浸漬法、噴淋法、噴霧法、刷洗法等;作為顯影液,可使用氫氧化鉀、氫氧化鈉、碳酸鈉、碳酸鉀、磷酸鈉、矽酸鈉、氨、胺類等鹼水溶液。
〔圖1〕示蒙賽爾色相(Munsell hue)環的圖。
以下,示實施例及比較例對本發明具體地說明,本發明固然不限定於下述實施例。又,以下出現之「份」係無特別限定則全部表示「質量份」。
依照下述合成例製作本發明之含有羧酸之樹脂(A)。
將甲酚酚醛清漆型環氧樹脂(大日本油墨化學工業(股)製、“EPICLON”(註冊商標)N-695、環氧當量:220)220份倒入附攪拌機及回流冷卻器的四口燒瓶中,且加入卡必醇醋酸酯214份,進行加熱溶解。接著加入聚合抑制劑之對苯二酚0.46份、與反應觸媒之三苯基膦1.38份。將此混合物於95℃~105℃進行加熱,且徐緩地
滴下丙烯酸72份,使之反應16小時。冷卻此反應產物至80~90℃,且加入四氫鄰苯二甲酸酐106份,使之反應8小時,於冷卻後,取出反應溶液(稱作清漆(A-1))。如此進行所得之含有羧酸之樹脂係固形物之酸值為100mgKOH/g、不揮發份65%。
前述含有羧酸之樹脂的合成中所得的清漆(A-1),與表1示之成分,以同表中記載之摻合比例,以3支輥進行混練求得光硬化性樹脂組成物。
對實施例1~7及比較例1~2的光硬化性樹脂組成物,依照下述評估基準來評估性能及特性。結果示於表2。
拋光輥(buff roll)研磨銅厚35μm之回路圖型基板後,經水洗、乾燥後,藉由網版印刷法於其全面塗佈實施例1~7及比較例1~2之光硬化性樹脂組成物,於80℃之熱風循環式乾燥爐使其乾燥60分鐘。乾燥後,使用搭載金屬鹵化燈的曝光裝置,介由Step tablet(Kodak No.2)進行曝光,使以60秒進行顯影(30℃、0.2MPa、1質量%碳酸鈉水溶液)之際殘存之Step tablet的圖型為7段時作為最適曝光量。
拋光輥研磨線/距為300/300、銅厚35μm之回路圖型基板後,經水洗、乾燥後,藉由網版印刷法塗佈實施例1~7及比較例1~2之光硬化性樹脂組成物,於80℃之熱風循環式乾燥爐使其乾燥30分鐘。乾燥後,使用搭載金屬鹵化燈的曝光裝置,進行曝光。曝光圖型係使用於間距部描繪20/30/40/50/60/70/80/90/100μrn之線條的直描用數據或光罩。曝光量係使成為光硬化性樹脂組成物之最適曝光量地照射活性能量線。曝光後,藉由30℃之1質量%碳
酸鈉水溶液來進行顯影,描繪圖型,經由150℃×60分鐘的熱硬化處理求得硬化塗膜。
使用調整為200倍的光學顯微鏡來求出所得之抗焊光阻用感光性樹脂組成物之硬化塗膜的最小殘存線條。
(評價基板之製作)於形成有圖型之銅箔基板上,以網版印刷法全面塗佈上述實施例1~4及比較例1~2之組成物,於80℃進行20分鐘乾燥,且放冷至室溫。對此基板使用搭載金屬鹵化燈的曝光裝置,以最適曝光量曝光抗焊光阻圖型,將30℃之1%Na2
CO3
水溶液以噴壓2 kg/cm2
的條件進行60秒鐘顯影,得到光阻圖型。將此基板於UV輸送爐中以累積曝光量1000mJ/cm2
的條件照射紫外線後,於150℃加熱60分鐘後使之硬化。對所得之印刷基板(評價基板)如以下地進行評價特性。
對上述實施例及比較例之抗焊光阻,以目視判斷硬化物之顏色。
進而將評價基板於150℃加熱2小時,如以下地判斷銅回路上之變色程度。
○○:完全沒有變色。
○:與初期相比多少有變色,但完全沒有光阻之薄的部分與厚的部分的差別。
△:察見有變色,但沒有光阻之薄的部分與厚的部分的差別。
×:察見光阻之薄的部分有變色,與厚的部分差別顯著。
將已塗佈松香(rosin)系助焊劑(flux)的評價基板浸漬於事先設定在260℃的焊料槽,以變性酒精洗淨助焊劑後,對以目視觀察之光阻層的膨脹‧剝離進行評價。判定基準如下。
○:即使重複3次以上10秒鐘浸漬亦不見有剝離。
△:若重複3次以上10秒鐘浸漬則有少許剝離。
×:於3次以內10秒鐘浸漬則於光阻層有膨脹、剝離。
使用市售品之無電解鍍鎳浴及無電解鍍金浴,以鎳0.5μm、金0.03μm之條件進行鍍敷,藉由進行膠帶剝除以評價光阻層之剝離有無或鍍敷滲入有無,之後,以前述焊料耐熱性的試驗條件,浸漬於焊料槽10秒鐘,於洗淨、乾燥後,藉由進行膠帶剝除以評價光阻層之剝離有無。判定基準如下。
○:完全不見有變化。
△:鍍敷後察見些許滲入且察見焊料耐熱後之剝離。
×:鍍敷後有剝離。
取代銅箔基板而使用IPC B-25之梳型電極B試樣(coupon),以上述條件製作評價基板,對此梳型電極外加DC100V之偏壓電壓,於85℃、85%R.H.的恆溫恆濕槽中確認1,000小時後之遷移(migration)有無。判定基準如以下。
○:完全不見有變化者。
△:僅些許變化者。
×:遷移產生者。
將評價基板於室溫下浸漬於10vol%H2
SO4
水溶液中30分鐘,確認滲入或塗膜之溶出,進而確認以膠帶剝除之剝離。判定基準如下。
○:無滲入、溶出、剝離。
△:確認有少許滲入、溶出或剝離。
×:確認有大量滲入、溶出或剝離。
Claims (12)
- 一種光硬化性樹脂組成物,其係含有(A)含有羧酸之樹脂,(B)光聚合起始劑,(C)分子中具有2個以上乙烯性不飽和基之化合物,及(D)紅色著色劑之可以稀鹼溶液顯影之光硬化性樹脂組成物,其中前述紅色著色劑(D)為雙偶氮系、單偶氮沈澱(monoazo lake)系、苯并咪唑酮系、苝系、縮合偶氮系、蒽醌系、及喹吖啶酮系當中之任一種,前述(A)含有羧酸之樹脂,係(1)藉由將不飽和羧酸、與1種以上之其以外的具有不飽和雙鍵的化合物進行共聚合而得到的含有羧酸之共聚合樹脂、(2)藉由以具有環氧基與不飽和雙鍵的化合物或(甲基)丙烯酸氯化物,對不飽和羧酸、與1種以上之其以外的具有不飽和雙鍵的化合物的共聚物,加成乙烯性不飽和基作為側基(pendant)而得到的含有羧酸之感光性樹脂、(3)使不飽和羧酸,對具有環氧基與不飽和雙鍵的化合物與其以外的具有不飽和雙鍵的化合物的共聚物進行反應,再對所生成之二級羥基以多元酸酐進行反應所得到的感光性之含有羧酸之共聚合樹脂、(4)使具有羥基與不飽和雙鍵之化合物,對具有不飽和雙鍵之酸酐與其以外之具有不飽和雙鍵的化合物之共聚物反應而得到的含有羧酸之感光性樹脂、 (5)使多官能環氧化合物與不飽和單羧酸反應,再對所生成之羥基以飽和或不飽和多元酸酐進行反應所得到的含有羧酸之感光性樹脂、(6)以飽和或不飽和多元酸酐對含羥基之聚合物進行反應後,再對所生成之羧酸以一分子中具有環氧基與不飽和雙鍵的化合物進行反應而得到的含有羥基及羧酸之感光性樹脂、(7)以飽和或不飽和多元酸酐,對多官能環氧化合物、不飽和單羧酸、一分子中至少1個醇性羥基、及具有與環氧基反應之醇性羥基以外之1個反應性基之化合物的反應產物進行反應而得到的含有羧酸之感光性樹脂、(8)以不飽和單羧酸對一分子中具有至少2個氧雜環丁烷環的多官能氧雜環丁烷化合物進行反應,再對所得到之改性氧雜環丁烷樹脂中的第一級羥基,以飽和或不飽和多元酸酐反應而得到的含有羧酸之感光性樹脂、及(9)以不飽和單羧酸對多官能環氧樹脂反應後,使多元酸酐反應所得的含有羧酸之樹脂,再進而以分子中具有1個環氧乙烷(oxirane)環與1個以上之乙烯性不飽和基的化合物反應而得到的含有羧酸之感光性樹脂的任一種;且該光硬化性樹脂組成物係用於塗佈於銅上。
- 如申請專利範圍第1項之光硬化性樹脂組成物,其尚含有(E1)藍色著色劑。
- 如申請專利範圍第1項之光硬化性樹脂組成物,其 尚含有(E2)黃色著色劑。
- 如申請專利範圍第1至3項中任一項之光硬化性樹脂組成物,其中,色調為藍色、綠色、紫色或橙色。
- 如申請專利範圍第1項之光硬化性樹脂組成物,其中,紅色著色劑(D)為不含鹵素與偶氮基中任一者之紅色著色劑。
- 如申請專利範圍第2項之光硬化性樹脂組成物,其中,藍色著色劑(E1)為酞菁藍。
- 如申請專利範圍第1項之光硬化性樹脂組成物,其尚含有(F)熱硬化性成份。
- 一種光硬化性乾薄膜,其特徵為,將申請專利範圍第1至3項及第7項中任一項之光硬化性樹脂組成物塗佈於載體薄膜,其使其乾燥而得。
- 綠色、紫色或橙色之硬化物,其為申請專利範圍第1至3項及第7項中任一項之光硬化性樹脂組成物之硬化物。
- 綠色、紫色或橙色之硬化物,其為申請專利範圍第8項之乾薄膜之硬化物。
- 一種印刷配線板,其特徵為,於形成銅回路之基板上,具有由申請專利範圍第9項之硬化物所形成之抗焊光阻層。
- 一種印刷配線板,其特徵為,於形成銅回路之基板上,具有由申請專利範圍第10項之硬化物所形成之抗焊光阻層。
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TW200424773A (en) * | 2003-03-12 | 2004-11-16 | Mitsubishi Chem Corp | Photosensitive composition, photosensitive colored compositions, color filters, and liquid crystal displays |
CN1928714A (zh) * | 2005-09-05 | 2007-03-14 | 东京应化工业株式会社 | 黑色感光性树脂组合物 |
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TW201333629A (zh) | 2013-08-16 |
CN102419514A (zh) | 2012-04-18 |
CN101303528A (zh) | 2008-11-12 |
TW200921272A (en) | 2009-05-16 |
JP5291893B2 (ja) | 2013-09-18 |
KR101028604B1 (ko) | 2011-04-11 |
CN102419514B (zh) | 2014-05-28 |
CN101303528B (zh) | 2013-03-27 |
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