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KR970048830A - 박막트랜지스터 액정표시소자 및 그의 제조방법 - Google Patents

박막트랜지스터 액정표시소자 및 그의 제조방법 Download PDF

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Publication number
KR970048830A
KR970048830A KR1019950047896A KR19950047896A KR970048830A KR 970048830 A KR970048830 A KR 970048830A KR 1019950047896 A KR1019950047896 A KR 1019950047896A KR 19950047896 A KR19950047896 A KR 19950047896A KR 970048830 A KR970048830 A KR 970048830A
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South Korea
Prior art keywords
electrode
thin film
film transistor
data line
liquid crystal
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KR1019950047896A
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English (en)
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KR100218293B1 (ko
Inventor
권오경
정관열
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문정환
Lg 반도체 주식회사
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Priority to KR1019950047896A priority Critical patent/KR100218293B1/ko
Priority to US08/759,211 priority patent/US5835169A/en
Priority to JP32636496A priority patent/JPH09218424A/ja
Priority to DE19650787A priority patent/DE19650787C2/de
Publication of KR970048830A publication Critical patent/KR970048830A/ko
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Publication of KR100218293B1 publication Critical patent/KR100218293B1/ko

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136213—Storage capacitors associated with the pixel electrode
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1343—Electrodes
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/133308—Support structures for LCD panels, e.g. frames or bezels
    • G02F1/133334—Electromagnetic shields
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509—Filters, e.g. light shielding masks
    • G02F1/133512—Light shielding layers, e.g. black matrix

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Liquid Crystal (AREA)
  • Thin Film Transistor (AREA)

Abstract

본 발명의 박막트랜지스터 액정표시소자는, 구동전압을 인가하기 위한 게이트전극과, 상기 게이트 전극에 구동전압 인가시 채런을 형성하여 도통되는 소스/드레인 전극을 구비하는 박막트랜지스터를 스위칭 소자로 하고, 상기 소스전극과 일정거리 이격되어 절연되며 상기 드레인전극과는 접속되로록 형성된 데이타 라인을 구비하는 박막트랜지스터 액정표시소자에 있어서, 상기 데이타 라인과 게이트 라인을 완전히 덮으며, 또한 화소전극의 하부에 위치하며 상기 데이타 라인과 화소전극 사이 및 게이트 라인과 화소전극 사이에 빛을 차폐할 수 있는 도전성 물질로 축적전극을 개재(介在)시킴으로써, 상기 축적전극으로 상기 데이타 라인과 화소전극낙 및 게이트 라인과 화서전극 사이를 완전히 차폐시켜 그 사이에서 발생되는 기앳 캐패시턴스를 최소화하고, 이에 따라 앗기 기생캐패시턴스에 의한 크로스 토르를 방지하며, 빛 투과율의 저하없이 개구륭의 읒가시킴으로써 고도로 화일을 개선할 수 있는 효과가 있다.

Description

박막트랜지스터 액정표시소자 및 그의 제조방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제4도의 (가)도는 본 발명에 의한 박막따라랜지스터 액정표시소자를 평면도시한 것이며, 제4도의 (나)도는 (가)도의 박막트랜지스터 액정표시소자를 AA′선을 기준으로 자른 수직단면을 도시한 것이다.

Claims (2)

  1. 구동전압을 인가하기 위한 게이트전극과, 상기 게이트 전극에 구동전압 인가시 채널을 형성하여 도통되는 소스/드레인 전극을 구비하는 박막트랜지스터를 스위칭 소자로 하고, 상기 소스전극과 일정거리 이격되어 절연되며 상기 드레인전극과는 접속되도록 형성된 데이타 라인을 구비하는 박막트랜지스터 액정표시소자에 있어서, 상기 데이타 라인과 게이트 라인을 완전히 덮으며, 또한 화소전극의 하부에 위치하여 상기 데이타 라인과 화소전극 사이 및 게이트 라인과 화소전극 사이의 빛을 차단하기 위한 축적전극을 구비하여 이루어진 것을 특징으로 하는 박막트랜지스터 액정표시소자
  2. 구동전압을 인가하기 위한 게이트전극과, 상기 게이트전극에 구동전압 인가시 채런을 형성하여 도통되는 소스/드레인 전극을 구비하는 박막트랜지스터를 스위칭 소자로 하고, 상기 소스전극과 일정거리 이격되어 절연되며 상기 드레인전극과는 접속되도록 형성된 데이타 라인을 구비하는 박막트랜지스터 액정표시소자의 제조방법에 있어서, 상기 소스/드레인 전극과 데이타 라인이 형성된 구조물 전면에 절연물질을 증착시켜 제1절연막을 형성하는 공정과; 상기 제1절연막 위에 빛을 차단할 수 있는 도전성 물질을 증착시킨 후 패터닝하여 상기 게이트 전극과 대응되는 부분과 데이타 라인 상부에 축적전극을 형성하는 공정과; 상기 축적전극 형성 후 결과물 전면에 절연물질을 중착시켜 제2정연막을 형성하는 공정과; 상기 제2절연막과 제1절연막을 선택적으로 식각하여 상기 소스전극의 일부영역이 노출되도록 접촉부를 형성한 후 결과물 전면에 ITO를 증착시키고 상기 ITO를 패터닝하여 상기 소스전극의 일부영역과 데이타라인에 걸쳐 화소전극을 형성하는 공정을 포함하여 이루어진 것을 특징으로 하는 박막트랜지스터 액정표시소자의 제조방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019950047896A 1995-12-08 1995-12-08 박막트랜지스터 액정표시소자 및 그의 제조방법 KR100218293B1 (ko)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1019950047896A KR100218293B1 (ko) 1995-12-08 1995-12-08 박막트랜지스터 액정표시소자 및 그의 제조방법
US08/759,211 US5835169A (en) 1995-12-08 1996-12-05 Liquid crystal display device of thin film transistor and fabrication method thereof
JP32636496A JPH09218424A (ja) 1995-12-08 1996-12-06 薄膜トランジスタの液晶表示素子及びその製造方法
DE19650787A DE19650787C2 (de) 1995-12-08 1996-12-06 Flüssigkristall-Anzeigevorrichtung mit Dünnfilmtransistor und Verfahren zum Herstellen derselben

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Application Number Priority Date Filing Date Title
KR1019950047896A KR100218293B1 (ko) 1995-12-08 1995-12-08 박막트랜지스터 액정표시소자 및 그의 제조방법

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KR970048830A true KR970048830A (ko) 1997-07-29
KR100218293B1 KR100218293B1 (ko) 1999-09-01

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US (1) US5835169A (ko)
JP (1) JPH09218424A (ko)
KR (1) KR100218293B1 (ko)
DE (1) DE19650787C2 (ko)

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Publication number Publication date
US5835169A (en) 1998-11-10
KR100218293B1 (ko) 1999-09-01
JPH09218424A (ja) 1997-08-19
DE19650787C2 (de) 2000-04-13
DE19650787A1 (de) 1997-06-12

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