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KR920010888A - 입력보호회로를 갖춘 반도체 장치 - Google Patents

입력보호회로를 갖춘 반도체 장치 Download PDF

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Publication number
KR920010888A
KR920010888A KR1019910020872A KR910020872A KR920010888A KR 920010888 A KR920010888 A KR 920010888A KR 1019910020872 A KR1019910020872 A KR 1019910020872A KR 910020872 A KR910020872 A KR 910020872A KR 920010888 A KR920010888 A KR 920010888A
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South Korea
Prior art keywords
semiconductor
region
semiconductor device
semiconductor region
ground potential
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KR1019910020872A
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English (en)
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KR960002094B1 (ko
Inventor
미츠루 시미즈
슈소 후지이
겐지 누마타
Original Assignee
아오이 죠이치
가부시키가이샤 도시바
다케다이 마사다카
도시바 마이크로 일렉트로닉스 가부시키가이샤
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Application filed by 아오이 죠이치, 가부시키가이샤 도시바, 다케다이 마사다카, 도시바 마이크로 일렉트로닉스 가부시키가이샤 filed Critical 아오이 죠이치
Publication of KR920010888A publication Critical patent/KR920010888A/ko
Application granted granted Critical
Publication of KR960002094B1 publication Critical patent/KR960002094B1/ko

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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D89/00Aspects of integrated devices not covered by groups H10D84/00 - H10D88/00
    • H10D89/60Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD]
    • H10D89/601Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD] for devices having insulated gate electrodes, e.g. for IGFETs or IGBTs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01Manufacture or treatment
    • H10D84/0123Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
    • H10D84/0126Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
    • H10D84/0156Manufacturing their doped wells
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/80Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs
    • H10D84/82Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs of only field-effect components
    • H10D84/83Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs of only field-effect components of only insulated-gate FETs [IGFET]
    • H10D84/85Complementary IGFETs, e.g. CMOS
    • H10D84/859Complementary IGFETs, e.g. CMOS comprising both N-type and P-type wells, e.g. twin-tub

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  • Semiconductor Integrated Circuits (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)

Abstract

내용 없음

Description

입력보호회로를 갖춘 반도체 장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제3도는 본 발명의 제1실시예를 도시한 단면도, 제4도는 제3도에 도시된 입력보호회로부의 패턴 평면도, 제5도는 제3도에 도시된 입력보호회로부의 등가회로도.

Claims (13)

  1. 제1도전형의 반도체기판(11)과, 이 반도체기판(11)의 표면영역의 일부에 형성된 제2도전형의 웰영역(17), 이 웰영역(17)의 표면영역의 일부에 형성되어 외부신호가 입력되는 입력패드(18)에 접속된 제1도전형의 제1반도체영역(12) 및, 상기 웰영역(17)의 표면영역의 일부에 각각 형성되어 일정한 전위가 각각 인가되는 제1도전형의 제2반도체영역(13,14) 및 제2도전형의 제3반도체 영역(15)을 구비하고, 상기 웰영역(17)은 상기 제1과 제2 및 제3반도체영역(12,13,14,15)이외의 반도체 영역을 포함하지 않고 상기 반도체기판(11)내에 설치된 다른 반도체회로(MC)로부터 독립되어 있는 것을 특징으로 하는 반도체장치.
  2. 제1항에 있어서, 상기 제2반도체영역(13,14) 및 제3반도체영역(15)에는 각각 접지전위(Vss)가 인가되고, 상기 입력패드(18)와 접지전위(Vss)의 상호간에 기생트랜지스터(19)와 기생다이오드(10)의 병렬회로가 형성되는 것을 특징으로 하는 반도체 장치.
  3. 제2항에 있어서, 상기 제2반도체영역(13,14) 및 제3반도체영역(15)은 서로 접속되어 있는 것을 특징으로하는 반도체 장치.
  4. 제3항에 있어서, 상기 제2반도체영역(12)의 근방에 형성되고, 상기 제3반도체영역(15)은 상기 제2반도체영역(13,14)을 기준으로 상기 제1반도체영역(12)과는 반대측에 형성되어 있는 것을 특징으로 하는 반도체장치.
  5. 제4항에 있어서, 상기 제1반도체영역(12)은 상기 입력패드(18)의 근방에 설치되어 있는 것을 특징으로 하는 반도체장치.
  6. 제1항에 있어서, 상기 웰영역(17)의 내부에서 상기 제1반도체영역(12)의 바로 밑에는 제1도전형의 웰영역(30)이 형성되어 있는 것을 특징으로 하는 반도체장치.
  7. 제1항에 있어서, 상기 제2반도체영역(13,14)과 제3반도체영역(15)의 상호간격(a)은 상기 제1반도체영역(12)과 제2반도체영역(13,14)의 상호 간격(b)보다 길게 되어 있고, 상기 입력패드(18)과 접지전위(Vss)의 상호간에 기생트랜지스터(19)의 전류통로가 형성됨과 더불어 기생다이오드(10)과 기생저항(20)의 직렬회로가 형성되는 것을 특징으로 하는 반도체장치.
  8. 제1항에 있어서, 상기 제2반도체영역(13,14)은 접지전위(Vss)에 접속되고, 상기 제3반도체영역(15)은 저항소자(31,32)를 매개하여 접지전위(Vss)에 접속되어 있는 것을 특징으로 하는 반도체장치.
  9. 제1항에 있어서, 상기 제2반도체영역(13,14)은 접지전위(Vss)에 접속되고, 상기 제3반도체영역(15)은 접지전위(Vss)보다 낮은 백게이트바이어스전위(VBB)에 접속되어 있는 것을 특징으로 하는 반도체장치.
  10. 제9항에 있어서, 상기 백게이트바이어스전위(VBB)는 저항소자 (41,42)를 매개하여 상기 제3반도체영역(15)에 접속되어 있는 것을 특징으로 하는 반도체장치.
  11. 제1항에 있어서, 상기 제2반도체영역(13,14)은 접지전위(Vss)에 접속되고, 상기 제3반도체영역(15)은 접지전위(Vss)보다 낮은 제1의 백게이트바이어스전위(VBB1)에 접속되며, 상기 반도체기판(11)은 상기 제1의 백게이트바이어스전위(VBB1)와는 다른 제2의 백게이트바이어스전위(VBB2)에 접속되어 있는 것을 특징으로 하는 반도체장치.
  12. 제11항에 있어서, 상기 반도체기판(11)은 각각 상기 제1 및 제2의 백게이트전위(VBB1, VBB2)를 발생시키는 제1 및 제2의 전위발생회로(62,63)가 설치되어 있는 것을 특징으로 하는 반도체장치.
  13. 제1항에 있어서, 상기 제1도전형은 n형이고, 상기 제2도전형은 p형인 것을 특징으로 하는 반도체장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019910020872A 1990-11-30 1991-11-22 입력보호회로를 갖춘 반도체장치 KR960002094B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP90-340617 1990-11-30
JP34061890 1990-11-30
JP90-340618 1990-11-30
JP34061790 1990-11-30

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KR920010888A true KR920010888A (ko) 1992-06-27
KR960002094B1 KR960002094B1 (ko) 1996-02-10

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US (2) US5594265A (ko)
EP (1) EP0488340B1 (ko)
KR (1) KR960002094B1 (ko)
DE (1) DE69121845T2 (ko)

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Also Published As

Publication number Publication date
US5594265A (en) 1997-01-14
DE69121845D1 (de) 1996-10-10
US5949109A (en) 1999-09-07
KR960002094B1 (ko) 1996-02-10
DE69121845T2 (de) 1997-02-06
EP0488340A1 (en) 1992-06-03
EP0488340B1 (en) 1996-09-04

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