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KR900000685A - 필름의 두께 및 성분을 동시에 측정하는 방법 및 그의 장치 - Google Patents

필름의 두께 및 성분을 동시에 측정하는 방법 및 그의 장치 Download PDF

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Publication number
KR900000685A
KR900000685A KR1019880014877A KR880014877A KR900000685A KR 900000685 A KR900000685 A KR 900000685A KR 1019880014877 A KR1019880014877 A KR 1019880014877A KR 880014877 A KR880014877 A KR 880014877A KR 900000685 A KR900000685 A KR 900000685A
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film
thickness
rays
density
ray
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KR1019880014877A
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KR940002509B1 (ko
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쥰지 가와베
고이찌 하시구찌
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야기 야스히로
가와사끼 세이데쯔 가부시끼 가이샤
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/2206—Combination of two or more measurements, at least one measurement being that of secondary emission, e.g. combination of secondary electron [SE] measurement and back-scattered electron [BSE] measurement

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Electromagnetism (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)

Abstract

내용 없음

Description

필름의 두께 및 성분을 동시에 측정하는 방법 및 그의 장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는, 본발명을 실시하기 위한 측정장치의 1실시예를 나타내는, 블록다이어그램을 일부 포함한 단면도,
제2도는, 상기 실시예에서, 회절된 X레이가 검출도는 상태를 나타내는 단면도,
제3도는, 상기 실시예에서, 회절된 X레이를 검출하기 위한 기본 구성을 나타내는 블록 다이어그램도,
제4도는, 펄스고도와, 특성 X레이(회절된 X레이)의 계수된 비율, 및 형광 X레이 사이의 관계의 일예를 나타내는 챠아트로서, 본 발명의 원리를 설명하기 위한 도면,
제5도는, 본 발명의 유용한 효과를 도시하기 위하여, 본 발명의 방법에 따른 측정치, 및 피막 중량의 화학적 분석치 사이의 관계를 나타내는 챠아트도,
제6도는, 본 발명의 방법에 따른 측정치 및 Fe의 함량의 화학적 분석치사이의 관계를 나타내는 챠아트도이다.

Claims (6)

  1. 필름의 두께 및 성분을 동시에 측정하는 방법에 있어서, 측정 대상인 상기 필름(8)은 단일 X레이 광원(12)으로 부터의 X레이에 의하여 조사(照射)되며, 상기 필름(8)내의 결정물질의 회절 X레이의 밀도와, 상기 필름(8)을 구성하는 원소와 형광 X레이의 밀도가 각각 동시에, 적어도 2개의 X레이 밀도 검출수단(14A)내지 (14D)에 의하여 검출되며, 동일 측정위치에 있는 상기 필름(8)의 두께 및 성분이, 2개의 검출치로부터 동시에 결정되는 것을 특징으로 하는, 필름의 두께 및 성분을 동시에 측정하는 방법.
  2. 제1항에 있어서, 상기 필름의 두께 및 성분은, 이하의 식:
    Ci=F1(Id,Wi-1)
    Wi=F2(If,Ci-1)
    (식중 Ci 및 Ci-1은 반복 계산에 의하여 계산된 원소의 함량수 i 및 i-1이며, Wi-1 및 Wi은 반복계산에 의하여 계산된 피막 중량 수 i-1 및 i이다.)들에 관하여 반복 계산 함으로써 상호 교정을 통하여 결정되는 것을 특징으로 하는, 필름의 두께 및 성분을 동시에 측정하는 방법.
  3. 필름의 두께 및 성분을 동시에 측정하는 장치에 있어서 : 측정 대상인 상기 필름(8)상에 X레이를 조사하기 위한 단일 X레이 광원(12)과 ; 상기 X레이에 의하여 발생되는, 상기 필름(8)내에 포함된 결정물질의 회절 X레이의 밀도를 검출하기 위한 제1X레이 밀도 검출기(14C)와; 상기 X레이에 의하여 발생되는, 상기 필름(8)을 구성하는 원소의 형광 X레이의 밀도를 검출하기 위한 제2X레이 밀도 검출기(14A) 및 ; 양 검출치로부터, 동일 측정 위치에서, 상기 필름(8)의 두께 및 성분을 동시에 결정하기 위한 수단으로 구성되는 것을 특징으로 하는, 필름의 두게 및 성분을 동시에 측정하는 장치.
  4. 제3항에 있어서, 백그라운드 밀도를 검출하기 위한 제3X레이 밀도 검출기(14B) 및 (14D)를 더욱 포함하여 구성되는 것을 특징으로 하는, 필름의 두께 및 성분을 동시에 측정하는 장치.
  5. 제3항 또는 제4항에 있어서, 상기 X레이 광원(12) 및 모든 상기 X레이 밀도 검출기(14A) 내지 (14D)들은, 집적형 측정헤드(10) 내에 수납되는 것을 특징으로 하는, 필름의 두께 및 성분을 동시에 측정하는 장치.
  6. 제3항에 있어서, 상기 X레이 광원(12)은 Cr타게트 X레이관이며, 상기 X레이 밀도 검출기(14A) 내지 (14D) 들은 기체 밀봉형 비례 계수관들인 것을 특징으로 하는, 필름의 두께 및 성분을 동시에 측정하는 장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019880014877A 1988-06-28 1988-11-12 필름의 두께 및 조성을 동시에 측정하는 방법 및 그의장치 KR940002509B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP63-159956 1988-06-28
JP63159956A JPH0739987B2 (ja) 1988-06-28 1988-06-28 皮膜の厚みと組成の同時測定方法

Publications (2)

Publication Number Publication Date
KR900000685A true KR900000685A (ko) 1990-01-31
KR940002509B1 KR940002509B1 (ko) 1994-03-25

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KR1019880014877A KR940002509B1 (ko) 1988-06-28 1988-11-12 필름의 두께 및 조성을 동시에 측정하는 방법 및 그의장치

Country Status (6)

Country Link
EP (1) EP0348574B1 (ko)
JP (1) JPH0739987B2 (ko)
KR (1) KR940002509B1 (ko)
AU (1) AU603488B2 (ko)
CA (1) CA1320008C (ko)
DE (1) DE3887880T2 (ko)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3803424C2 (de) * 1988-02-05 1995-05-18 Gsf Forschungszentrum Umwelt Verfahren zur quantitativen, tiefendifferentiellen Analyse fester Proben
DE4021617C2 (de) * 1990-07-06 1993-12-02 Kugelfischer G Schaefer & Co Vorrichtung zum kontinuierlichen Messen des Eisengehaltes in Zinkschichten
GB9223592D0 (en) * 1992-11-11 1992-12-23 Fisons Plc X-ray analysis apparatus
SE513401C2 (sv) 1999-01-15 2000-09-11 Volvo Aero Corp Förfarande och anordning för att bestämma läget av ett långsträckt föremål i förhållande till ytan på en framförliggande kropp med hjälp av elektromagnetisk strålning
JP2002107134A (ja) * 2000-07-27 2002-04-10 Seiko Instruments Inc 蛍光ｘ線膜厚計
WO2002025257A1 (fr) * 2000-09-22 2002-03-28 Kawasaki Steel Corporation Methode de mesure quantitative, appareil de phase metallique utilisant un procede de diffraction de rayons x et procede de production d'une tole d'acier plaquee utilisant cette methode et cet appareil
JP2002357571A (ja) * 2001-05-31 2002-12-13 Rigaku Industrial Co 波長分散型蛍光ｘ線分析装置
JP2003050115A (ja) * 2001-08-07 2003-02-21 Seiko Instruments Inc Ｘ線膜厚計
WO2007034570A1 (ja) * 2005-09-22 2007-03-29 Jfe Steel Corporation 亜鉛系めっき鋼板のプレス成形性評価方法
GB2447252B (en) * 2007-03-06 2012-03-14 Thermo Fisher Scientific Inc X-ray analysis instrument
RU2727762C1 (ru) * 2020-03-05 2020-07-23 Федеральное государственное бюджетное образовательное учреждение высшего образования "Омский государственный технический университет"(ОмГТУ) Способ определения толщины тонких пленок
CN112014231B (zh) * 2020-10-17 2021-04-27 安徽宝耀门窗科技有限公司 一种铝合金门窗角强度检测试验机

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3686764A (en) * 1970-04-10 1972-08-29 William M Oesterritter Interpretation method for use in x-ray diffraction and x-ray fluorescense analysis
JPS54685A (en) * 1977-06-02 1979-01-06 Nippon Steel Corp Simultaneously measurement of florescent x ray and diffracted x ray of minute area
JPS5524680A (en) * 1978-08-11 1980-02-21 Sumitomo Metal Ind Ltd Measurement of thickness of metal coating and component of another metal in the coating film
US4263510A (en) * 1979-07-30 1981-04-21 General Electric Company Combined x-ray diffraction and fluorescence spectroscopy apparatus with environmentally controllable chamber
EP0108447A3 (en) * 1982-11-04 1985-07-17 North American Philips Corporation Simultaneous collection of diffraction and spectrographic data
JPS6014109A (ja) * 1983-07-06 1985-01-24 Kawasaki Steel Corp めつき鋼板のめつき付着量測定装置
JPS60104241A (ja) * 1983-11-11 1985-06-08 Sumitomo Metal Ind Ltd 螢光ｘ線分析方法
JPS60202339A (ja) * 1984-03-27 1985-10-12 Sumitomo Metal Ind Ltd 螢光ｘ線分析方法
KR900008955B1 (ko) * 1984-05-10 1990-12-15 가와사끼 세이데쓰 가부시끼 가이샤 합금피막의 피막두께 및 조성 측정방법
JPS6122241A (ja) * 1984-07-11 1986-01-30 Rigaku Denki Kk Ｘ線分析装置
DE3573316D1 (en) * 1984-10-22 1989-11-02 Siemens Ag Arrangement for x-ray analysis
DE3442722A1 (de) * 1984-10-22 1986-05-28 Siemens AG, 1000 Berlin und 8000 München Roentgenroehren fuer spektro- diffraktometer
JPS61148355A (ja) * 1984-12-21 1986-07-07 Kawasaki Steel Corp 合金化亜鉛めつき鋼板のめつき中鉄濃度の測定方法
JPS61259151A (ja) * 1985-05-14 1986-11-17 Rigaku Denki Kogyo Kk Ｘ線分析装置

Also Published As

Publication number Publication date
KR940002509B1 (ko) 1994-03-25
EP0348574A2 (en) 1990-01-03
EP0348574A3 (en) 1990-05-23
AU2447588A (en) 1990-01-04
DE3887880D1 (de) 1994-03-24
CA1320008C (en) 1993-07-06
DE3887880T2 (de) 1994-05-19
JPH0739987B2 (ja) 1995-05-01
AU603488B2 (en) 1990-11-15
JPH0210144A (ja) 1990-01-12
EP0348574B1 (en) 1994-02-16

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