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JPS551157A - Method of fabricating semiconductor device - Google Patents

Method of fabricating semiconductor device

Info

Publication number
JPS551157A
JPS551157A JP11079078A JP11079078A JPS551157A JP S551157 A JPS551157 A JP S551157A JP 11079078 A JP11079078 A JP 11079078A JP 11079078 A JP11079078 A JP 11079078A JP S551157 A JPS551157 A JP S551157A
Authority
JP
Japan
Prior art keywords
film
region
regions
adhere
wiring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11079078A
Other languages
English (en)
Inventor
Hiroshi Kawamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11079078A priority Critical patent/JPS551157A/ja
Publication of JPS551157A publication Critical patent/JPS551157A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP11079078A 1978-09-11 1978-09-11 Method of fabricating semiconductor device Pending JPS551157A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11079078A JPS551157A (en) 1978-09-11 1978-09-11 Method of fabricating semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11079078A JPS551157A (en) 1978-09-11 1978-09-11 Method of fabricating semiconductor device

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP48113934A Division JPS5746215B2 (ja) 1973-10-12 1973-10-12

Publications (1)

Publication Number Publication Date
JPS551157A true JPS551157A (en) 1980-01-07

Family

ID=14544690

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11079078A Pending JPS551157A (en) 1978-09-11 1978-09-11 Method of fabricating semiconductor device

Country Status (1)

Country Link
JP (1) JPS551157A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5278098A (en) * 1991-03-05 1994-01-11 Sgs-Thomson Microelectronics, Inc. Method for self-aligned polysilicon contact formation
JPH065792U (ja) * 1992-06-22 1994-01-25 石垣機工株式会社 濃縮装置付きスクリュープレス

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5278098A (en) * 1991-03-05 1994-01-11 Sgs-Thomson Microelectronics, Inc. Method for self-aligned polysilicon contact formation
JPH065792U (ja) * 1992-06-22 1994-01-25 石垣機工株式会社 濃縮装置付きスクリュープレス

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