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JPS53112679A - Manufacture for mis type semiconductor device - Google Patents

Manufacture for mis type semiconductor device

Info

Publication number
JPS53112679A
JPS53112679A JP2702277A JP2702277A JPS53112679A JP S53112679 A JPS53112679 A JP S53112679A JP 2702277 A JP2702277 A JP 2702277A JP 2702277 A JP2702277 A JP 2702277A JP S53112679 A JPS53112679 A JP S53112679A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
type semiconductor
mis type
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2702277A
Other languages
Japanese (ja)
Inventor
Yasuo Taira
Fujihiko Inomata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2702277A priority Critical patent/JPS53112679A/en
Publication of JPS53112679A publication Critical patent/JPS53112679A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To reduce the parasitic capacitance between the gate and drain and gate and source, and to prevent the short circuit between the source and drain, by forming the source and drain domains with diffusion in the condition that the etching mask of the photo resist used for the formation of the gate electrode is left on the gate electrode.
COPYRIGHT: (C)1978,JPO&Japio
JP2702277A 1977-03-14 1977-03-14 Manufacture for mis type semiconductor device Pending JPS53112679A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2702277A JPS53112679A (en) 1977-03-14 1977-03-14 Manufacture for mis type semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2702277A JPS53112679A (en) 1977-03-14 1977-03-14 Manufacture for mis type semiconductor device

Publications (1)

Publication Number Publication Date
JPS53112679A true JPS53112679A (en) 1978-10-02

Family

ID=12209452

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2702277A Pending JPS53112679A (en) 1977-03-14 1977-03-14 Manufacture for mis type semiconductor device

Country Status (1)

Country Link
JP (1) JPS53112679A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5677987U (en) * 1979-11-20 1981-06-24
JPS5685866A (en) * 1979-12-14 1981-07-13 Hitachi Ltd Mos semiconductor device and manufacture thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5677987U (en) * 1979-11-20 1981-06-24
JPS6127038Y2 (en) * 1979-11-20 1986-08-12
JPS5685866A (en) * 1979-12-14 1981-07-13 Hitachi Ltd Mos semiconductor device and manufacture thereof

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