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JPS5338272A - Production of schottky barrier gate type field effect transistor - Google Patents

Production of schottky barrier gate type field effect transistor

Info

Publication number
JPS5338272A
JPS5338272A JP11390676A JP11390676A JPS5338272A JP S5338272 A JPS5338272 A JP S5338272A JP 11390676 A JP11390676 A JP 11390676A JP 11390676 A JP11390676 A JP 11390676A JP S5338272 A JPS5338272 A JP S5338272A
Authority
JP
Japan
Prior art keywords
production
field effect
effect transistor
type field
gate type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11390676A
Other languages
Japanese (ja)
Inventor
Yasoo Harada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP11390676A priority Critical patent/JPS5338272A/en
Publication of JPS5338272A publication Critical patent/JPS5338272A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Junction Field-Effect Transistors (AREA)

Abstract

PURPOSE: To readily isolate and form source drain electrodes without undergoing mask alignment at the accuracy corresponding to photoetching and metal side etching techniques.
COPYRIGHT: (C)1978,JPO&Japio
JP11390676A 1976-09-20 1976-09-20 Production of schottky barrier gate type field effect transistor Pending JPS5338272A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11390676A JPS5338272A (en) 1976-09-20 1976-09-20 Production of schottky barrier gate type field effect transistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11390676A JPS5338272A (en) 1976-09-20 1976-09-20 Production of schottky barrier gate type field effect transistor

Publications (1)

Publication Number Publication Date
JPS5338272A true JPS5338272A (en) 1978-04-08

Family

ID=14624126

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11390676A Pending JPS5338272A (en) 1976-09-20 1976-09-20 Production of schottky barrier gate type field effect transistor

Country Status (1)

Country Link
JP (1) JPS5338272A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4404732A (en) * 1981-12-07 1983-09-20 Ibm Corporation Self-aligned extended epitaxy mesfet fabrication process

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4404732A (en) * 1981-12-07 1983-09-20 Ibm Corporation Self-aligned extended epitaxy mesfet fabrication process

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