[go: up one dir, main page]

TWD147585S - 基板運送用固持具 - Google Patents

基板運送用固持具

Info

Publication number
TWD147585S
TWD147585S TW100302983F TW100302983F TWD147585S TW D147585 S TWD147585 S TW D147585S TW 100302983 F TW100302983 F TW 100302983F TW 100302983 F TW100302983 F TW 100302983F TW D147585 S TWD147585 S TW D147585S
Authority
TW
Taiwan
Prior art keywords
substrate
holding
transport
reference diagram
claw portion
Prior art date
Application number
TW100302983F
Other languages
English (en)
Inventor
Norifumi Sato
Original Assignee
東京威力科創股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東京威力科創股份有限公司 filed Critical 東京威力科創股份有限公司
Publication of TWD147585S publication Critical patent/TWD147585S/zh

Links

Abstract

【物品用途】;本創作係例如固持並運送如半導體晶圓等圓形基板之基板運送用固持具。如立體參考圖及使用狀態立體參考圖所示，藉由螺絲將基板固持構件固定於大致U字形的運送臂(C形部)。各基板保持構件設有往內側平延伸的固持爪部，在設於各固持爪部的貫穿孔上形成嵌裝有由O形環構成並用來保持基板的墊片。本創作利用墊片抵接支持基板底面，並於水平載置的狀態下進行運送。;【創作特點】;本創作之創作特徵在於物體的整體外形與構成。
TW100302983F 2010-12-14 2011-06-14 基板運送用固持具 TWD147585S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010029767 2010-12-14

Publications (1)

Publication Number Publication Date
TWD147585S true TWD147585S (zh) 2012-06-11

Family

ID=46641914

Family Applications (1)

Application Number Title Priority Date Filing Date
TW100302983F TWD147585S (zh) 2010-12-14 2011-06-14 基板運送用固持具

Country Status (2)

Country Link
US (1) USD665759S1 (zh)
TW (1) TWD147585S (zh)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP1546802S (zh) * 2015-06-17 2016-03-28
JP1546755S (zh) * 2015-07-30 2016-03-28
USD805044S1 (en) * 2015-10-30 2017-12-12 Hirata Corporation Adhesive sheet for substrate
USD811457S1 (en) * 2015-11-02 2018-02-27 Hirata Corporation Substrate conveyance arm
USD785578S1 (en) * 2016-03-22 2017-05-02 Asm Ip Holding B.V. Substrate supporting arm for semiconductor manufacturing apparatus
JP1584066S (zh) * 2017-01-18 2017-08-21
JP1584067S (zh) * 2017-01-18 2017-08-21
JP1584065S (zh) * 2017-01-18 2017-08-21
USD938373S1 (en) * 2019-10-25 2021-12-14 Applied Materials, Inc. Substrate transfer structure

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4230642B2 (ja) * 1999-07-08 2009-02-25 株式会社荏原製作所 基板搬送治具及び基板搬送装置
JP3888608B2 (ja) * 2001-04-25 2007-03-07 東京エレクトロン株式会社 基板両面処理装置
TWD114851S1 (zh) * 2005-06-29 2007-01-01 東京威力科創股份有限公司 被處理基板搬運用機械臂
US20070076345A1 (en) * 2005-09-20 2007-04-05 Bang Won B Substrate placement determination using substrate backside pressure measurement
USD614593S1 (en) * 2008-07-21 2010-04-27 Asm Genitech Korea Ltd Substrate support for a semiconductor deposition apparatus

Also Published As

Publication number Publication date
USD665759S1 (en) 2012-08-21

Similar Documents

Publication Publication Date Title
TWD147585S (zh) 基板運送用固持具
TWD153878S1 (zh) 基板運送用固持構件
TWD189313S (zh) 用於半導體製造設備的承載器
TWD165429S (zh) 半導體製造裝置用晶舟
TWD157629S (zh) 傳遞晶圓用保持件
TWD181303S (zh) 晶圓載具
WO2013029049A3 (en) Apparatus and methods for supporting an article
TWD161688S (zh) 半導體製造裝置用晶舟
TWD167988S (zh) 半導體製造裝置用晶舟
MY186210A (en) In-line metrology system and method
TWD167109S (zh) 基板保持環
TWD147588S (zh) 基板固持具
TWD179672S (zh) 基板保持環之部分
TWD159673S (zh) 基板處理裝置用廻轉器
TWD200220S (zh) 用於半導體基板支撐裝置的基座
TWD181304S (zh) 晶圓載具
TWD202463S (zh) 基板處理裝置用晶舟之部分
TWD126123S1 (zh) 晶圓保持具
TWD126122S1 (zh) 晶圓保持具
TWD159675S (zh) 基板處理裝置用廻轉器
TWD147587S (zh) 基板運送用固持具
USD666979S1 (en) Substrate holder
TWI456314B (zh) 背光模組
TWD170399S (zh) 晶舟用填縫構件
TWD162592S (zh) 基板保持具安裝用基座材