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TWD147587S - 基板運送用固持具 - Google Patents

基板運送用固持具

Info

Publication number
TWD147587S
TWD147587S TW100303481F TW100303481F TWD147587S TW D147587 S TWD147587 S TW D147587S TW 100303481 F TW100303481 F TW 100303481F TW 100303481 F TW100303481 F TW 100303481F TW D147587 S TWD147587 S TW D147587S
Authority
TW
Taiwan
Prior art keywords
creation
arm
manufacturing semiconductor
reference diagram
use state
Prior art date
Application number
TW100303481F
Other languages
English (en)
Inventor
Hideki Kajiwara
Original Assignee
東京威力科創股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東京威力科創股份有限公司 filed Critical 東京威力科創股份有限公司
Publication of TWD147587S publication Critical patent/TWD147587S/zh

Links

Abstract

【物品用途】;本創作係用於半導體製造的晶圓運送之基板運送用固持具，其固持並運送例如半導體晶圓等圓形基板。如使用狀態立體參考圖所示，使用本創作時晶圓係置於共計三處之從不對稱U字形兩臂內側伸出的固持構件。本創作係如使用狀態立體參考圖所示，安裝於可令本創作垂直及水平移動之運送裝置，並用於運送半導體晶圓進出加工容器或半導體製造設備。;【創作特點】;本創作之特徵在於外觀形狀，尤其是俯視圖中顯現的形狀。
TW100303481F 2011-01-20 2011-07-07 基板運送用固持具 TWD147587S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011001005 2011-01-20

Publications (1)

Publication Number Publication Date
TWD147587S true TWD147587S (zh) 2012-06-11

Family

ID=47428205

Family Applications (1)

Application Number Title Priority Date Filing Date
TW100303481F TWD147587S (zh) 2011-01-20 2011-07-07 基板運送用固持具

Country Status (2)

Country Link
US (1) USD673923S1 (zh)
TW (1) TWD147587S (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112496211A (zh) * 2020-12-09 2021-03-16 雷雨洁 一种具有快速整理功能的吻合器钛钉制造设备及制造方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD797709S1 (en) * 2016-01-20 2017-09-19 World Products, Inc. Curved folded medical monopole antenna
JP1665227S (zh) * 2019-11-28 2020-08-03
JP1679706S (zh) * 2020-05-26 2021-02-22

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112496211A (zh) * 2020-12-09 2021-03-16 雷雨洁 一种具有快速整理功能的吻合器钛钉制造设备及制造方法

Also Published As

Publication number Publication date
USD673923S1 (en) 2013-01-08

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