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TWD161688S - 半導體製造裝置用晶舟 - Google Patents

半導體製造裝置用晶舟

Info

Publication number
TWD161688S
TWD161688S TW102304386F TW102304386F TWD161688S TW D161688 S TWD161688 S TW D161688S TW 102304386 F TW102304386 F TW 102304386F TW 102304386 F TW102304386 F TW 102304386F TW D161688 S TWD161688 S TW D161688S
Authority
TW
Taiwan
Prior art keywords
manufacturing equipment
semiconductor manufacturing
wafer boat
semiconductor wafer
equipment wafer
Prior art date
Application number
TW102304386F
Other languages
English (en)
Inventor
Hidenari Yoshida
Tomoshi Taniyama
Original Assignee
日立國際電氣股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立國際電氣股份有限公司 filed Critical 日立國際電氣股份有限公司
Publication of TWD161688S publication Critical patent/TWD161688S/zh

Links

Abstract

【物品用途】;本設計的物品是半導體製造裝置用晶舟，通常是在對半導體晶圓上進行成膜時，為了在反應室內使半導體晶圓保持水平用的晶舟。;【設計說明】;如B-B放大剖面圖所示，半導體晶圓是被載置於形成在前方左右及後方左右的梳狀保持部。
TW102304386F 2012-12-27 2013-06-26 半導體製造裝置用晶舟 TWD161688S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012031874 2012-12-27

Publications (1)

Publication Number Publication Date
TWD161688S true TWD161688S (zh) 2014-07-11

Family

ID=53540387

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102304386F TWD161688S (zh) 2012-12-27 2013-06-26 半導體製造裝置用晶舟

Country Status (2)

Country Link
US (1) USD734730S1 (zh)
TW (1) TWD161688S (zh)

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USD748593S1 (en) * 2014-03-05 2016-02-02 Hzo, Inc. Boat for use in a material deposition apparatus
USD766850S1 (en) * 2014-03-28 2016-09-20 Tokyo Electron Limited Wafer holder for manufacturing semiconductor
JP1563649S (zh) * 2016-02-12 2016-11-21
JP1597807S (zh) * 2017-08-21 2018-02-19
USD846514S1 (en) * 2018-05-03 2019-04-23 Kokusai Electric Corporation Boat of substrate processing apparatus
USD847105S1 (en) * 2018-05-03 2019-04-30 Kokusai Electric Corporation Boat of substrate processing apparatus
JP1638282S (zh) * 2018-09-20 2019-08-05
USD908102S1 (en) * 2019-02-20 2021-01-19 Veeco Instruments Inc. Transportable semiconductor wafer rack
USD908103S1 (en) * 2019-02-20 2021-01-19 Veeco Instruments Inc. Transportable semiconductor wafer rack
KR102552458B1 (ko) * 2019-07-31 2023-07-06 가부시키가이샤 코쿠사이 엘렉트릭 기판 처리 장치, 기판 지지구 및 반도체 장치의 제조 방법
JP1658652S (zh) * 2019-08-07 2020-04-27
JP1678278S (ja) * 2020-03-19 2021-02-01 基板処理装置用ボート
US12080522B2 (en) 2020-04-22 2024-09-03 Applied Materials, Inc. Preclean chamber upper shield with showerhead
USD973609S1 (en) * 2020-04-22 2022-12-27 Applied Materials, Inc. Upper shield with showerhead for a process chamber
JP1731670S (zh) * 2022-03-04 2022-12-08
JP1741512S (zh) * 2022-09-14 2023-04-11

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USD655255S1 (en) * 2010-06-18 2012-03-06 Hitachi Kokusai Electric Inc. Boat of wafer processing apparatus
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Also Published As

Publication number Publication date
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