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TWD126123S1 - 晶圓保持具 - Google Patents

晶圓保持具

Info

Publication number
TWD126123S1
TWD126123S1 TW096306624F TW96306624F TWD126123S1 TW D126123 S1 TWD126123 S1 TW D126123S1 TW 096306624 F TW096306624 F TW 096306624F TW 96306624 F TW96306624 F TW 96306624F TW D126123 S1 TWD126123 S1 TW D126123S1
Authority
TW
Taiwan
Prior art keywords
wafer
article
creation
mechanical arm
bottom side
Prior art date
Application number
TW096306624F
Other languages
English (en)
Inventor
小笠原郁男
長旨俊
Original Assignee
東京威力科創股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東京威力科創股份有限公司 filed Critical 東京威力科創股份有限公司
Publication of TWD126123S1 publication Critical patent/TWD126123S1/zh

Links

Abstract

【物品用途】;本創作的物品是一種晶圓保持具,其主要用途乃如各使用狀態參考圖所示,將本物品配置在伸縮、旋轉、移動自如的機械臂(未圖示)的前端,隨著該機械臂的伸縮、旋轉、移動,將晶圓搬送到所要的位置。;【創作特點】;在底面側具有六個吸盤狀的吸附部,並且具有四個突起狀的墊片,用來保持直徑8吋(約20cm)之半導體裝置用的晶圓,本物品是藉由該吸附部來吸附晶圓,讓晶圓保持在底面側,又藉由抵接各墊片的側面和晶圓的外周來調整晶圓相對於本物品的相對位置;綜上所述,本創作確為一理想美觀之設計。;
TW096306624F 2007-06-06 2007-12-05 晶圓保持具 TWD126123S1 (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007015046 2007-06-06

Publications (1)

Publication Number Publication Date
TWD126123S1 true TWD126123S1 (zh) 2008-11-21

Family

ID=40513136

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096306624F TWD126123S1 (zh) 2007-06-06 2007-12-05 晶圓保持具

Country Status (2)

Country Link
US (1) USD589912S1 (zh)
TW (1) TWD126123S1 (zh)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG179020A1 (en) 2010-06-11 2012-04-27 Ricoh Co Ltd Information storage device, removable device, developer container, and image forming apparatus
USD766850S1 (en) * 2014-03-28 2016-09-20 Tokyo Electron Limited Wafer holder for manufacturing semiconductor
TWD172679S (zh) * 2014-06-09 2015-12-21 家登精密工業股份有限公司 晶圓盒之氣體擴散裝置
USD1046798S1 (en) * 2020-12-17 2024-10-15 Omron Corporation Gripper for semiconductor wafer housing cassette
USD1054388S1 (en) * 2021-10-15 2024-12-17 Shin-Etsu Chemical Co., Ltd. Carrier substrate for handling
JP1722253S (ja) * 2022-02-03 2022-08-12 半導体ウエハ収納カセット用把持機
JP1722252S (ja) * 2022-02-03 2022-08-12 半導体ウエハ収納カセット用把持機
USD1035600S1 (en) * 2022-02-23 2024-07-16 Rf Scientific, Llc Semiconductor test fixture
JP1762250S (ja) * 2023-06-22 2024-01-25 半導体ウエハ収納カセット用把持機

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5643366A (en) * 1994-01-31 1997-07-01 Applied Materials, Inc. Wafer handling within a vacuum chamber using vacuum
US5928427A (en) * 1994-12-16 1999-07-27 Hwang; Chul-Ju Apparatus for low pressure chemical vapor deposition
US6405610B1 (en) * 1995-11-14 2002-06-18 Nikon Corporation Wafer inspection apparatus
US6183183B1 (en) * 1997-01-16 2001-02-06 Asm America, Inc. Dual arm linear hand-off wafer transfer assembly
JPH11333778A (ja) * 1998-05-29 1999-12-07 Daihen Corp 搬送用ロボット装置
KR20010109748A (ko) * 2000-06-02 2001-12-12 윤종용 웨이퍼 이송 장치
US7066707B1 (en) * 2001-08-31 2006-06-27 Asyst Technologies, Inc. Wafer engine
JP3629244B2 (ja) * 2002-02-19 2005-03-16 本多エレクトロン株式会社 ウエーハ用検査装置
TWD112955S1 (zh) * 2005-08-12 2006-09-11 東京威力科創股份有限公司 半導體晶圓輸送裝置之平台臂

Also Published As

Publication number Publication date
USD589912S1 (en) 2009-04-07

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