KR102169438B1 - 합착 장치 및 합착 방법 - Google Patents
합착 장치 및 합착 방법 Download PDFInfo
- Publication number
- KR102169438B1 KR102169438B1 KR1020180110331A KR20180110331A KR102169438B1 KR 102169438 B1 KR102169438 B1 KR 102169438B1 KR 1020180110331 A KR1020180110331 A KR 1020180110331A KR 20180110331 A KR20180110331 A KR 20180110331A KR 102169438 B1 KR102169438 B1 KR 102169438B1
- Authority
- KR
- South Korea
- Prior art keywords
- wall part
- bonding member
- bonding
- lower wall
- position information
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 claims abstract description 149
- 230000008569 process Effects 0.000 claims abstract description 110
- 230000008878 coupling Effects 0.000 claims abstract description 10
- 238000010168 coupling process Methods 0.000 claims abstract description 10
- 238000005859 coupling reaction Methods 0.000 claims abstract description 10
- 238000005304 joining Methods 0.000 claims description 35
- 239000011159 matrix material Substances 0.000 claims description 29
- 238000004458 analytical method Methods 0.000 claims description 13
- 238000003825 pressing Methods 0.000 claims description 11
- 238000007639 printing Methods 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 7
- 239000010453 quartz Substances 0.000 claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 7
- 239000000758 substrate Substances 0.000 description 34
- 230000008859 change Effects 0.000 description 15
- 230000003287 optical effect Effects 0.000 description 13
- 239000003550 marker Substances 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000007547 defect Effects 0.000 description 3
- 239000005357 flat glass Substances 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 239000006059 cover glass Substances 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229920000742 Cotton Polymers 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Images
Classifications
-
- H01L51/56—
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133308—Support structures for LCD panels, e.g. frames or bezels
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1339—Gaskets; Spacers; Sealing of cells
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/02—Details
- H05B33/04—Sealing arrangements, e.g. against humidity
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/50—Forming devices by joining two substrates together, e.g. lamination techniques
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133308—Support structures for LCD panels, e.g. frames or bezels
- G02F1/133322—Mechanical guidance or alignment of LCD panel support components
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133308—Support structures for LCD panels, e.g. frames or bezels
- G02F1/133325—Assembling processes
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133354—Arrangements for aligning or assembling substrates
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mathematical Physics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Liquid Crystal (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020180110331A KR102169438B1 (ko) | 2018-09-14 | 2018-09-14 | 합착 장치 및 합착 방법 |
JP2019145753A JP2020046660A (ja) | 2018-09-14 | 2019-08-07 | 貼り合わせ装置及び貼り合わせ方法 |
TW108128260A TW202011125A (zh) | 2018-09-14 | 2019-08-08 | 層壓設備以及層壓方法 |
CN201910800852.1A CN110911589B (zh) | 2018-09-14 | 2019-08-27 | 层压设备和层压方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020180110331A KR102169438B1 (ko) | 2018-09-14 | 2018-09-14 | 합착 장치 및 합착 방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20200031387A KR20200031387A (ko) | 2020-03-24 |
KR102169438B1 true KR102169438B1 (ko) | 2020-10-26 |
Family
ID=69814556
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020180110331A Active KR102169438B1 (ko) | 2018-09-14 | 2018-09-14 | 합착 장치 및 합착 방법 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP2020046660A (zh) |
KR (1) | KR102169438B1 (zh) |
CN (1) | CN110911589B (zh) |
TW (1) | TW202011125A (zh) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20220002774A (ko) * | 2020-06-30 | 2022-01-07 | 삼성디스플레이 주식회사 | 합착 장치 및 이의 동작 방법 |
KR102472252B1 (ko) * | 2020-12-28 | 2022-11-30 | 주식회사 테스 | 기판접합장치의 예비정렬장치 및 예비정렬방법 |
WO2023002550A1 (ja) * | 2021-07-20 | 2023-01-26 | 信越エンジニアリング株式会社 | 表示基板の貼り合わせ装置及び貼り合わせ方法 |
CN114203945B (zh) * | 2021-12-10 | 2023-12-01 | 武汉华星光电半导体显示技术有限公司 | 显示器盖板贴附方法和贴附装置 |
KR102786011B1 (ko) | 2023-02-24 | 2025-03-25 | 주식회사 지에스아이 | 커브드 디스플레이 패널용 합착장치 및 이를 이용한 합착방법 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3542956B2 (ja) * | 2000-10-30 | 2004-07-14 | 信越エンジニアリング株式会社 | 液晶パネル用基板の貼り合わせ装置 |
KR100710156B1 (ko) * | 2002-03-15 | 2007-04-20 | 엘지.필립스 엘시디 주식회사 | 액정표시소자의 진공 합착 장치 |
JP4234479B2 (ja) * | 2003-04-02 | 2009-03-04 | 富士通株式会社 | 貼合せ基板製造装置及び貼合せ基板製造方法 |
CN100420109C (zh) * | 2003-09-22 | 2008-09-17 | 株式会社村田制作所 | 用于安装发光元件的方法和设备 |
JP4935074B2 (ja) * | 2004-01-07 | 2012-05-23 | 株式会社ニコン | 積層装置及び集積回路素子の積層方法 |
JP2007012698A (ja) * | 2005-06-28 | 2007-01-18 | Sharp Corp | アライメントマーク付き基板、位置合わせ方法、プログラムおよび記録媒体 |
KR101367661B1 (ko) * | 2006-08-25 | 2014-02-27 | 엘아이지에이디피 주식회사 | 척의 평행도 및 평편도 조절유닛을 가진 기판 합착장치 |
KR101292803B1 (ko) * | 2006-12-06 | 2013-08-02 | 엘아이지에이디피 주식회사 | 기판 합착장치의 간격유지유닛 |
US20090133801A1 (en) * | 2007-11-23 | 2009-05-28 | Seok Hee Shim | Substrate attaching apparatus |
KR101073558B1 (ko) | 2009-10-08 | 2011-10-17 | 삼성모바일디스플레이주식회사 | 기판 합착 장치 및 기판 합착 방법 |
KR102173043B1 (ko) * | 2013-07-29 | 2020-11-03 | 삼성디스플레이 주식회사 | 기판 처리 시스템, 이에 포함된 라미네이팅 장치, 및 기판 처리 시스템을 이용한 기판 처리 방법 |
JP6311967B2 (ja) * | 2014-03-06 | 2018-04-18 | Tianma Japan株式会社 | 基板貼り合せ装置及び基板貼り合せ方法 |
KR20160006436A (ko) * | 2014-07-09 | 2016-01-19 | 안성룡 | 진공 합착장치 |
JP2016205958A (ja) * | 2015-04-21 | 2016-12-08 | 日置電機株式会社 | X−y基板検査装置の可動ヘッド位置補正方法およびx−y基板検査装置 |
JP6596330B2 (ja) * | 2015-12-25 | 2019-10-23 | 東京エレクトロン株式会社 | 接合装置、接合システム、接合方法、プログラム及びコンピュータ記憶媒体 |
KR101882395B1 (ko) * | 2016-11-16 | 2018-07-26 | 주식회사 엠에스텍 | 기판 위치정렬 방법 및 그 방법을 사용하는 합착기 |
KR101887394B1 (ko) * | 2016-12-20 | 2018-08-10 | 주식회사 에스에프에이 | 진공 라미네이터 |
-
2018
- 2018-09-14 KR KR1020180110331A patent/KR102169438B1/ko active Active
-
2019
- 2019-08-07 JP JP2019145753A patent/JP2020046660A/ja not_active Ceased
- 2019-08-08 TW TW108128260A patent/TW202011125A/zh unknown
- 2019-08-27 CN CN201910800852.1A patent/CN110911589B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
KR20200031387A (ko) | 2020-03-24 |
CN110911589A (zh) | 2020-03-24 |
JP2020046660A (ja) | 2020-03-26 |
CN110911589B (zh) | 2024-09-06 |
TW202011125A (zh) | 2020-03-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR102169438B1 (ko) | 합착 장치 및 합착 방법 | |
KR20210117959A (ko) | 비전 시스템의 3차원 교정을 위한 시스템 및 방법 | |
JP2008084938A (ja) | 基板処理装置に対する各種設定値の教示方法、教示用装置及びその校正治具 | |
KR20180126106A (ko) | 카메라 모듈 검사장치용 위치 정렬 장치 | |
WO2020153203A1 (ja) | 実装装置および実装方法 | |
KR102059437B1 (ko) | Z축 비틀림 보정이 포함된 기판과 마스크 정렬방법 | |
JPH1140996A (ja) | 部品装着装置およびその認識位置校正方法 | |
JP2003177411A (ja) | シール剤の塗布装置および塗布方法 | |
KR20040091562A (ko) | 기판 검사장치 및 기판 검사방법 | |
CN100401014C (zh) | 线宽测量装置 | |
CN108393212B (zh) | 分配装置 | |
JP2010019987A (ja) | 三次元画像表示装置の検査装置及び三次元画像表示装置の製造方法 | |
JP4288901B2 (ja) | 高さ測定方法 | |
US8303362B2 (en) | Manufacturing apparatus for three-dimensional image display and three-dimensional image display manufacturing method | |
JP2005274272A (ja) | ラインセンサカメラのキャリブレーション方法および外観検査装置 | |
KR20240103252A (ko) | Oled 패널 검사장치 및 그를 구비한 oled 패널 제조시스템 | |
CN112867386B (zh) | 自动贴片装置及其吸嘴和自动贴片方法 | |
JPH11274794A (ja) | 実装機の部品搭載状態検査方法及び部品搭載状態検査用ツール | |
JP5646288B2 (ja) | スクリーンマスクの観察装置および印刷装置 | |
KR100315117B1 (ko) | 글래스 얼라인먼트 검사 시스템 | |
KR20180087910A (ko) | 표시 패널 검사 장치 | |
KR101248136B1 (ko) | 프르브 카드 얼라인용 지그 장치 | |
CN114384084B (zh) | 调平检测平台的方法和检测系统 | |
CN113587854B (zh) | 裸眼3d光栅膜角度的检测系统和检测方法 | |
JP4895356B2 (ja) | 線幅測定装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PA0109 | Patent application |
Patent event code: PA01091R01D Comment text: Patent Application Patent event date: 20180914 |
|
PA0201 | Request for examination |
Patent event code: PA02012R01D Patent event date: 20190605 Comment text: Request for Examination of Application Patent event code: PA02011R01I Patent event date: 20180914 Comment text: Patent Application |
|
E902 | Notification of reason for refusal | ||
PE0902 | Notice of grounds for rejection |
Comment text: Notification of reason for refusal Patent event date: 20200323 Patent event code: PE09021S01D |
|
PG1501 | Laying open of application | ||
E90F | Notification of reason for final refusal | ||
PE0902 | Notice of grounds for rejection |
Comment text: Final Notice of Reason for Refusal Patent event date: 20200708 Patent event code: PE09021S02D |
|
E701 | Decision to grant or registration of patent right | ||
PE0701 | Decision of registration |
Patent event code: PE07011S01D Comment text: Decision to Grant Registration Patent event date: 20200717 |
|
GRNT | Written decision to grant | ||
PR0701 | Registration of establishment |
Comment text: Registration of Establishment Patent event date: 20201019 Patent event code: PR07011E01D |
|
PR1002 | Payment of registration fee |
Payment date: 20201020 End annual number: 3 Start annual number: 1 |
|
PG1601 | Publication of registration | ||
PR1001 | Payment of annual fee |
Payment date: 20240911 Start annual number: 5 End annual number: 5 |