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JPS54161350A - Production of thin film optical element - Google Patents

Production of thin film optical element

Info

Publication number
JPS54161350A
JPS54161350A JP7026078A JP7026078A JPS54161350A JP S54161350 A JPS54161350 A JP S54161350A JP 7026078 A JP7026078 A JP 7026078A JP 7026078 A JP7026078 A JP 7026078A JP S54161350 A JPS54161350 A JP S54161350A
Authority
JP
Japan
Prior art keywords
film
light
waveguide
optical element
preset
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7026078A
Other languages
Japanese (ja)
Other versions
JPS5810721B2 (en
Inventor
Hiroshi Terui
Morio Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP53070260A priority Critical patent/JPS5810721B2/en
Publication of JPS54161350A publication Critical patent/JPS54161350A/en
Publication of JPS5810721B2 publication Critical patent/JPS5810721B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Optical Integrated Circuits (AREA)
  • Surface Treatment Of Glass (AREA)
  • Glass Compositions (AREA)

Abstract

PURPOSE:To easily porduce a thin film optical element of high accuracy by forming a preset waveguide film on a glass substrate and by heating a preset portion therof thereby to reduce the refractive index thereof. CONSTITUTION:A waveguide film 11, which is made of oxide glass composed mainly of SiO2, Ta2O5 or the like, is formed by evaporation with a thcikness larger than a cut-off film thickness for a waveguide light upon the smooth surface of a glass substrate of Vycor glass. The laser beam 15 from a laser oscillator 14 of CO2 is deflected by a mirror 16 and changed into a laser beam 13 by means of a lens 17 of Ge, which is transparent for the light 15 and which has an excellent heat- resistivity, so that it is projected upon the film 11. The substrate 1 is either moved in the direction of x or y or turned in the direction theta, and the projected portion of the film 11 by the beam 13 so that a preset portion 12 is heated with the energy of the beam 13 in a desired shape. Incidentally, when a shutter 18 is turned into and out of the optical path of the light 15 thereby to stop the projection of the beam 13, the light 15 is shielded.
JP53070260A 1978-06-10 1978-06-10 Manufacturing method of thin film optical device Expired JPS5810721B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP53070260A JPS5810721B2 (en) 1978-06-10 1978-06-10 Manufacturing method of thin film optical device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP53070260A JPS5810721B2 (en) 1978-06-10 1978-06-10 Manufacturing method of thin film optical device

Publications (2)

Publication Number Publication Date
JPS54161350A true JPS54161350A (en) 1979-12-20
JPS5810721B2 JPS5810721B2 (en) 1983-02-26

Family

ID=13426385

Family Applications (1)

Application Number Title Priority Date Filing Date
JP53070260A Expired JPS5810721B2 (en) 1978-06-10 1978-06-10 Manufacturing method of thin film optical device

Country Status (1)

Country Link
JP (1) JPS5810721B2 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5562407A (en) * 1978-11-02 1980-05-10 Nec Corp Production of plane optical guide
JPS5863902A (en) * 1981-10-12 1983-04-16 Fujitsu Ltd Optical waveguide adjustment method
JPS5971005A (en) * 1982-10-18 1984-04-21 Canon Inc Forming method of optical waveguide
JPS61200507A (en) * 1985-03-01 1986-09-05 Mitsubishi Electric Corp Optical waveguide lens
JPS6377009A (en) * 1986-09-20 1988-04-07 Fujitsu Ltd Y branch waveguide
US4762382A (en) * 1987-06-29 1988-08-09 Honeywell Inc. Optical interconnect circuit for GaAs optoelectronics and Si VLSI/VHSIC

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4879655A (en) * 1972-01-28 1973-10-25
JPS50159626A (en) * 1974-06-13 1975-12-24

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4879655A (en) * 1972-01-28 1973-10-25
JPS50159626A (en) * 1974-06-13 1975-12-24

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5562407A (en) * 1978-11-02 1980-05-10 Nec Corp Production of plane optical guide
JPS6161081B2 (en) * 1978-11-02 1986-12-24 Nippon Electric Co
JPS5863902A (en) * 1981-10-12 1983-04-16 Fujitsu Ltd Optical waveguide adjustment method
JPS5971005A (en) * 1982-10-18 1984-04-21 Canon Inc Forming method of optical waveguide
JPS61200507A (en) * 1985-03-01 1986-09-05 Mitsubishi Electric Corp Optical waveguide lens
JPS6377009A (en) * 1986-09-20 1988-04-07 Fujitsu Ltd Y branch waveguide
US4762382A (en) * 1987-06-29 1988-08-09 Honeywell Inc. Optical interconnect circuit for GaAs optoelectronics and Si VLSI/VHSIC

Also Published As

Publication number Publication date
JPS5810721B2 (en) 1983-02-26

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