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JPS57197505A - Thin film lens - Google Patents

Thin film lens

Info

Publication number
JPS57197505A
JPS57197505A JP8268081A JP8268081A JPS57197505A JP S57197505 A JPS57197505 A JP S57197505A JP 8268081 A JP8268081 A JP 8268081A JP 8268081 A JP8268081 A JP 8268081A JP S57197505 A JPS57197505 A JP S57197505A
Authority
JP
Japan
Prior art keywords
thin film
lens
layer
film lens
film thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8268081A
Other languages
Japanese (ja)
Inventor
Mamoru Miyawaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP8268081A priority Critical patent/JPS57197505A/en
Publication of JPS57197505A publication Critical patent/JPS57197505A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/124—Geodesic lenses or integrated gratings
    • G02B6/1245—Geodesic lenses

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

PURPOSE:To make a thin film lens with a convex lens, by constituting so that the film thickness is reduced in the distribution of axis symmetry from the circumference of the thin film lens to the center. CONSTITUTION:A low refractive index layer 11 of mound shape determining the film thickness distribution of a thin film lens is formed on a base 9, and a waveguide layer 10 is formed on it with the vacuum deposition method. As the film thickness of the layer 10 decreases, the effective refractive index for the transmitted light is decreased, resulting that the operation of a concave lens can be obtained. Or a waveguide layer 14 having concave can be formed directly on a base 14. In forming this thin film lens, the layer 14 is vacuum-deposited while a mask 19 with an opening 22 is rotated.
JP8268081A 1981-05-29 1981-05-29 Thin film lens Pending JPS57197505A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8268081A JPS57197505A (en) 1981-05-29 1981-05-29 Thin film lens

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8268081A JPS57197505A (en) 1981-05-29 1981-05-29 Thin film lens

Publications (1)

Publication Number Publication Date
JPS57197505A true JPS57197505A (en) 1982-12-03

Family

ID=13781129

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8268081A Pending JPS57197505A (en) 1981-05-29 1981-05-29 Thin film lens

Country Status (1)

Country Link
JP (1) JPS57197505A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0285026A2 (en) * 1987-03-27 1988-10-05 Hitachi, Ltd. Semiconductor laser device
JPH02176601A (en) * 1988-09-28 1990-07-09 Mitsubishi Electric Corp Projection lens and its manufacture

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0285026A2 (en) * 1987-03-27 1988-10-05 Hitachi, Ltd. Semiconductor laser device
JPH02176601A (en) * 1988-09-28 1990-07-09 Mitsubishi Electric Corp Projection lens and its manufacture

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