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JPS54161350A - Production of thin film optical element - Google Patents

Production of thin film optical element

Info

Publication number
JPS54161350A
JPS54161350A JP7026078A JP7026078A JPS54161350A JP S54161350 A JPS54161350 A JP S54161350A JP 7026078 A JP7026078 A JP 7026078A JP 7026078 A JP7026078 A JP 7026078A JP S54161350 A JPS54161350 A JP S54161350A
Authority
JP
Japan
Prior art keywords
film
light
waveguide
optical element
preset
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7026078A
Other languages
English (en)
Other versions
JPS5810721B2 (ja
Inventor
Hiroshi Terui
Morio Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP53070260A priority Critical patent/JPS5810721B2/ja
Publication of JPS54161350A publication Critical patent/JPS54161350A/ja
Publication of JPS5810721B2 publication Critical patent/JPS5810721B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Optical Integrated Circuits (AREA)
  • Surface Treatment Of Glass (AREA)
  • Glass Compositions (AREA)
JP53070260A 1978-06-10 1978-06-10 薄膜光素子の製造方法 Expired JPS5810721B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP53070260A JPS5810721B2 (ja) 1978-06-10 1978-06-10 薄膜光素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP53070260A JPS5810721B2 (ja) 1978-06-10 1978-06-10 薄膜光素子の製造方法

Publications (2)

Publication Number Publication Date
JPS54161350A true JPS54161350A (en) 1979-12-20
JPS5810721B2 JPS5810721B2 (ja) 1983-02-26

Family

ID=13426385

Family Applications (1)

Application Number Title Priority Date Filing Date
JP53070260A Expired JPS5810721B2 (ja) 1978-06-10 1978-06-10 薄膜光素子の製造方法

Country Status (1)

Country Link
JP (1) JPS5810721B2 (ja)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5562407A (en) * 1978-11-02 1980-05-10 Nec Corp Production of plane optical guide
JPS5863902A (ja) * 1981-10-12 1983-04-16 Fujitsu Ltd 光導波路の調整方法
JPS5971005A (ja) * 1982-10-18 1984-04-21 Canon Inc 光導波路の作成方法
JPS61200507A (ja) * 1985-03-01 1986-09-05 Mitsubishi Electric Corp 光導波路レンズ
JPS6377009A (ja) * 1986-09-20 1988-04-07 Fujitsu Ltd Y分岐導波路
US4762382A (en) * 1987-06-29 1988-08-09 Honeywell Inc. Optical interconnect circuit for GaAs optoelectronics and Si VLSI/VHSIC

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4879655A (ja) * 1972-01-28 1973-10-25
JPS50159626A (ja) * 1974-06-13 1975-12-24

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4879655A (ja) * 1972-01-28 1973-10-25
JPS50159626A (ja) * 1974-06-13 1975-12-24

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5562407A (en) * 1978-11-02 1980-05-10 Nec Corp Production of plane optical guide
JPS6161081B2 (ja) * 1978-11-02 1986-12-24 Nippon Electric Co
JPS5863902A (ja) * 1981-10-12 1983-04-16 Fujitsu Ltd 光導波路の調整方法
JPS5971005A (ja) * 1982-10-18 1984-04-21 Canon Inc 光導波路の作成方法
JPS61200507A (ja) * 1985-03-01 1986-09-05 Mitsubishi Electric Corp 光導波路レンズ
JPS6377009A (ja) * 1986-09-20 1988-04-07 Fujitsu Ltd Y分岐導波路
US4762382A (en) * 1987-06-29 1988-08-09 Honeywell Inc. Optical interconnect circuit for GaAs optoelectronics and Si VLSI/VHSIC

Also Published As

Publication number Publication date
JPS5810721B2 (ja) 1983-02-26

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