JPS54161350A - Production of thin film optical element - Google Patents
Production of thin film optical elementInfo
- Publication number
- JPS54161350A JPS54161350A JP7026078A JP7026078A JPS54161350A JP S54161350 A JPS54161350 A JP S54161350A JP 7026078 A JP7026078 A JP 7026078A JP 7026078 A JP7026078 A JP 7026078A JP S54161350 A JPS54161350 A JP S54161350A
- Authority
- JP
- Japan
- Prior art keywords
- film
- light
- waveguide
- optical element
- preset
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title abstract 3
- 239000010409 thin film Substances 0.000 title abstract 2
- 239000010408 film Substances 0.000 abstract 5
- 239000011521 glass Substances 0.000 abstract 3
- 239000000758 substrate Substances 0.000 abstract 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 230000008020 evaporation Effects 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 239000000075 oxide glass Substances 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Landscapes
- Optical Integrated Circuits (AREA)
- Surface Treatment Of Glass (AREA)
- Glass Compositions (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP53070260A JPS5810721B2 (ja) | 1978-06-10 | 1978-06-10 | 薄膜光素子の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP53070260A JPS5810721B2 (ja) | 1978-06-10 | 1978-06-10 | 薄膜光素子の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54161350A true JPS54161350A (en) | 1979-12-20 |
JPS5810721B2 JPS5810721B2 (ja) | 1983-02-26 |
Family
ID=13426385
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP53070260A Expired JPS5810721B2 (ja) | 1978-06-10 | 1978-06-10 | 薄膜光素子の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5810721B2 (ja) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5562407A (en) * | 1978-11-02 | 1980-05-10 | Nec Corp | Production of plane optical guide |
JPS5863902A (ja) * | 1981-10-12 | 1983-04-16 | Fujitsu Ltd | 光導波路の調整方法 |
JPS5971005A (ja) * | 1982-10-18 | 1984-04-21 | Canon Inc | 光導波路の作成方法 |
JPS61200507A (ja) * | 1985-03-01 | 1986-09-05 | Mitsubishi Electric Corp | 光導波路レンズ |
JPS6377009A (ja) * | 1986-09-20 | 1988-04-07 | Fujitsu Ltd | Y分岐導波路 |
US4762382A (en) * | 1987-06-29 | 1988-08-09 | Honeywell Inc. | Optical interconnect circuit for GaAs optoelectronics and Si VLSI/VHSIC |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4879655A (ja) * | 1972-01-28 | 1973-10-25 | ||
JPS50159626A (ja) * | 1974-06-13 | 1975-12-24 |
-
1978
- 1978-06-10 JP JP53070260A patent/JPS5810721B2/ja not_active Expired
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4879655A (ja) * | 1972-01-28 | 1973-10-25 | ||
JPS50159626A (ja) * | 1974-06-13 | 1975-12-24 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5562407A (en) * | 1978-11-02 | 1980-05-10 | Nec Corp | Production of plane optical guide |
JPS6161081B2 (ja) * | 1978-11-02 | 1986-12-24 | Nippon Electric Co | |
JPS5863902A (ja) * | 1981-10-12 | 1983-04-16 | Fujitsu Ltd | 光導波路の調整方法 |
JPS5971005A (ja) * | 1982-10-18 | 1984-04-21 | Canon Inc | 光導波路の作成方法 |
JPS61200507A (ja) * | 1985-03-01 | 1986-09-05 | Mitsubishi Electric Corp | 光導波路レンズ |
JPS6377009A (ja) * | 1986-09-20 | 1988-04-07 | Fujitsu Ltd | Y分岐導波路 |
US4762382A (en) * | 1987-06-29 | 1988-08-09 | Honeywell Inc. | Optical interconnect circuit for GaAs optoelectronics and Si VLSI/VHSIC |
Also Published As
Publication number | Publication date |
---|---|
JPS5810721B2 (ja) | 1983-02-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US4022602A (en) | Method of fabricating low-loss channel optical waveguides | |
JPS54161350A (en) | Production of thin film optical element | |
GB1426086A (en) | Camera for making holograms | |
JPS5228338A (en) | High output light beam focusing lens system | |
JPS5746203A (en) | Optical switch | |
JPS5421747A (en) | Optical distributor | |
JPS5754939A (en) | Optical mask and its manufacture | |
JPS5420750A (en) | Photo coupler | |
JPS5532039A (en) | Photo switch | |
JPS54161348A (en) | Short wavelength optical filter | |
JPS5682423A (en) | Surface stress measuring device of vitreous coating | |
JPS54161349A (en) | Three-dimensional cross type waveguide passage | |
JPS55146404A (en) | Thin film optical device having lens part and its manufacture | |
JPS54161347A (en) | Te0 mode optical filter | |
JPS5590825A (en) | Reflection reference plate | |
JPS6057818A (ja) | レ−ザ−光用ビ−ムエクスパンダ | |
JPS5696876A (en) | Semiconductor light receiving element | |
JPS54157639A (en) | Pentagonal prism | |
JPS54107338A (en) | Focusing device of single-lens reflex camera | |
JPS5595912A (en) | Polarizing beam splitter | |
JPS5788404A (en) | Optical switch | |
JPS5624304A (en) | Element for photo-circuit | |
JPS5723971A (en) | Mechanism for variable power | |
SU549772A1 (ru) | Автоколлимационное устройство двойного изображени | |
JPS63220113A (ja) | 投影装置 |