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DE69729779T2 - Verfahren und Vorrichtung zum Polieren - Google Patents

Verfahren und Vorrichtung zum Polieren Download PDF

Info

Publication number
DE69729779T2
DE69729779T2 DE69729779T DE69729779T DE69729779T2 DE 69729779 T2 DE69729779 T2 DE 69729779T2 DE 69729779 T DE69729779 T DE 69729779T DE 69729779 T DE69729779 T DE 69729779T DE 69729779 T2 DE69729779 T2 DE 69729779T2
Authority
DE
Germany
Prior art keywords
polishing
workpiece
polishing medium
holding
arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69729779T
Other languages
German (de)
English (en)
Other versions
DE69729779D1 (de
Inventor
Shuji Kawasaki
Akitaka Matshushita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SHUJI KAWASAKI & BBF YAMATE CORP., HAMAMATSU-S, JP
Original Assignee
BBF YAMATE CORP HAMAMATSU
Kawasaki Shuji Hamamatsu
BBF Yamate Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP8332865A external-priority patent/JPH10156674A/ja
Priority claimed from JP8332866A external-priority patent/JPH10156700A/ja
Priority claimed from JP8358014A external-priority patent/JPH10193272A/ja
Priority claimed from JP8358015A external-priority patent/JPH10193251A/ja
Priority claimed from JP9047369A external-priority patent/JPH10225860A/ja
Priority claimed from JP9047370A external-priority patent/JPH10225859A/ja
Priority claimed from JP9231778A external-priority patent/JPH1158215A/ja
Application filed by BBF YAMATE CORP HAMAMATSU, Kawasaki Shuji Hamamatsu, BBF Yamate Corp filed Critical BBF YAMATE CORP HAMAMATSU
Publication of DE69729779D1 publication Critical patent/DE69729779D1/de
Application granted granted Critical
Publication of DE69729779T2 publication Critical patent/DE69729779T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B29/00—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B29/00—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
    • B24B29/02—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents designed for particular workpieces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
    • B24B31/003—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor whereby the workpieces are mounted on a holder and are immersed in the abrasive material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
    • B24B31/06—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving oscillating or vibrating containers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
    • B24B31/06—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving oscillating or vibrating containers
    • B24B31/064—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving oscillating or vibrating containers the workpieces being fitted on a support
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
    • B24B31/12—Accessories; Protective equipment or safety devices; Installations for exhaustion of dust or for sound absorption specially adapted for machines covered by group B24B31/00
    • B24B31/14—Abrading-bodies specially designed for tumbling apparatus, e.g. abrading-balls
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D13/00—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor
    • B24D13/20—Mountings for the wheels

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Electroplating Methods And Accessories (AREA)
DE69729779T 1996-11-27 1997-11-19 Verfahren und Vorrichtung zum Polieren Expired - Fee Related DE69729779T2 (de)

Applications Claiming Priority (14)

Application Number Priority Date Filing Date Title
JP8332865A JPH10156674A (ja) 1996-11-27 1996-11-27 ワークの研磨方法
JP33286596 1996-11-27
JP33286696 1996-11-27
JP8332866A JPH10156700A (ja) 1996-11-27 1996-11-27 湿式研磨方法
JP8358015A JPH10193251A (ja) 1996-12-31 1996-12-31 バレル研磨装置
JP35801496 1996-12-31
JP35801596 1996-12-31
JP8358014A JPH10193272A (ja) 1996-12-31 1996-12-31 ワークの研磨装置
JP9047370A JPH10225859A (ja) 1997-02-14 1997-02-14 バレル研磨装置用ワーク支持装置及び研磨媒体
JP4737097 1997-02-14
JP9047369A JPH10225860A (ja) 1997-02-14 1997-02-14 ワークの表面処理方法
JP4736997 1997-02-14
JP23177897 1997-08-12
JP9231778A JPH1158215A (ja) 1997-08-12 1997-08-12 バレル研磨装置用ワーク支持装置およびバレル研磨装置

Publications (2)

Publication Number Publication Date
DE69729779D1 DE69729779D1 (de) 2004-08-12
DE69729779T2 true DE69729779T2 (de) 2005-07-14

Family

ID=27564668

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69729779T Expired - Fee Related DE69729779T2 (de) 1996-11-27 1997-11-19 Verfahren und Vorrichtung zum Polieren

Country Status (10)

Country Link
EP (3) EP0956926A1 (fr)
KR (2) KR100310583B1 (fr)
CN (1) CN1078835C (fr)
AU (1) AU706377B2 (fr)
BR (1) BR9706040A (fr)
CA (3) CA2323328A1 (fr)
DE (1) DE69729779T2 (fr)
ES (1) ES2222494T3 (fr)
MY (1) MY123830A (fr)
TR (1) TR199701398A2 (fr)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0922530B1 (fr) * 1997-12-10 2005-03-23 Shuji Kawasaki Dispositif de tribofinition
US6261154B1 (en) * 1998-08-25 2001-07-17 Mceneny Jeffrey William Method and apparatus for media finishing
US20020088773A1 (en) * 2001-01-10 2002-07-11 Holland Jerry Dwayne Nonabrasive media with accelerated chemistry
CN101486158B (zh) * 2009-02-14 2012-05-30 陈炳巽 一种砂光拉丝机
US10179388B2 (en) * 2009-05-12 2019-01-15 Rem Technologies, Inc. High throughput finishing of metal components
EP2283969A1 (fr) * 2009-07-30 2011-02-16 REM Technologies, Inc. Finition à haut rendement de composants métalliques
CN102211307B (zh) * 2011-06-10 2012-10-03 湖南科技大学 便携式塑料模具随形抛光机的油石自动进给装置
CN103522171B (zh) * 2012-07-05 2016-04-06 上海华虹宏力半导体制造有限公司 一种用于抛光垫研磨盘的氮气输送装置
CN107030583A (zh) * 2017-03-21 2017-08-11 天津华海清科机电科技有限公司 硅衬底片抛光方法和装置
CN108356635A (zh) * 2017-09-26 2018-08-03 六和轻合金（昆山）有限公司 一种汽车轮毂精车件涂装工艺
CN108115499B (zh) * 2017-12-25 2023-08-22 中信戴卡股份有限公司 一种车轮随形刷毛刺装置
DE102018216615A1 (de) * 2018-09-17 2020-03-19 Aktiebolaget Skf Verfahren zum Bearbeiten einer Oberfläche eines Metallgegenstands
CN110039432B (zh) * 2019-04-22 2024-05-07 珠海广鑫厨卫科技有限公司 一种抛光机及抛光工艺
KR102528200B1 (ko) * 2021-03-19 2023-05-03 주식회사 기현테크 티타늄 합금 소재의 생체 친화형 부품의 가공 표면의 버 제거방법
CN114178935B (zh) * 2021-12-30 2022-11-29 无锡市夸克微智造科技有限责任公司 一种人工晶状体微加工设备及加工工艺
CN115213793A (zh) * 2022-07-19 2022-10-21 无锡汉瓷特种陶瓷技术有限公司 一种发动机陶瓷型芯生产用抛光装置及其抛光方法
CN115157018B (zh) * 2022-07-28 2023-12-12 九江德福科技股份有限公司 一种锂电铜箔解决箔面纹理不良的方法

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2660009A (en) * 1952-01-05 1953-11-24 Lyon Inc Abrading wheel
US2726495A (en) * 1952-10-04 1955-12-13 Field Albert Abrading implement
US3623278A (en) * 1969-12-03 1971-11-30 Teletype Corp Deburring process
JPS5111874A (ja) * 1974-07-19 1976-01-30 Adobansuto Mashin Puraningu In Jugohohooyobisorenimochiiru heisasochikei
JPS5256490A (en) * 1975-10-01 1977-05-09 Tipton Mfg Corp Frozen barrel processing method
US4205487A (en) * 1978-03-24 1980-06-03 King-Seeley Thermos Co. Workpiece holding apparatus for spindle finishing machines and the like
US4446656A (en) * 1979-04-09 1984-05-08 Kabushiki Kaisha Shikishima Chipton Long-travel annular vibratory barrel finishing apparatus for line-processing
DE3047088A1 (de) * 1980-12-13 1982-07-29 Estel Hoesch Werke Ag, 4600 Dortmund Verfahren und einrichtung zum entfernen der beschichtungen von zu verschweissenden oberflaechenveredelten baendern und blechen im schweissbereich
FR2511919B1 (fr) * 1981-08-27 1986-04-04 Parker Ste Continentale Machine de tribofinition a broches
JPS5947156A (ja) * 1982-09-10 1984-03-16 Shintou Bureetaa Kk 油圧振動式表面研摩方法およびその装置
JPS60242960A (ja) * 1984-05-17 1985-12-02 Tipton Mfg Corp 多孔質樹脂メデイアおよびその製造方法
DE3610341A1 (de) * 1986-03-26 1987-10-01 Spaleck Gmbh Max Schallschluckdeckel fuer trog- oder schuesselfoermige behaelter zum bearbeiten von werkstuecken
JPH0812158B2 (ja) * 1988-02-06 1996-02-07 株式会社マックサイエンス Ｘ線回折装置
JP2698623B2 (ja) * 1988-09-27 1998-01-19 松下電工株式会社 反射鏡
DE69132551T2 (de) * 1990-06-26 2001-10-18 Steve E. Hoffman Verfahren zum oberfläche-fertigbearbeiten von artikeln
JP2689706B2 (ja) * 1990-08-08 1997-12-10 上村工業株式会社 研磨方法
JP3253643B2 (ja) * 1991-03-19 2002-02-04 旭テック株式会社 バレル研摩装置
FR2675418B1 (fr) * 1991-04-16 1995-09-29 Perrot Yvan Procede d'ebavurage cryogenique sous vide d'air.
JPH05111874A (ja) * 1991-10-21 1993-05-07 Tsutsumi Seisakusho:Kk 研磨装置
US5507685A (en) * 1993-08-25 1996-04-16 Hoffman; Steve E. Method for surface finishing of difficult polish surfaces
DE4404123C1 (de) * 1994-02-09 1995-09-07 Dreher Manfrid Kg Dr Ing Verfahren zum Trockenschleifen und anschließenden Trockenpolieren von Gegenständen in rotierenden Fliehkraft-Gleitschleifmaschinen
JPH08144083A (ja) * 1994-11-17 1996-06-04 Taiyo Yuden Co Ltd 電子部品のメッキ後処理方法
JP2000507882A (ja) * 1995-11-30 2000-06-27 ラポイント，デーブ 自動車ホイール仕上げ装置
JPH09155724A (ja) * 1995-12-11 1997-06-17 B B F Yamate:Kk 湿式研磨方法

Also Published As

Publication number Publication date
CN1184018A (zh) 1998-06-10
CA2220820A1 (fr) 1998-05-27
EP0956925A1 (fr) 1999-11-17
EP0845327A2 (fr) 1998-06-03
KR19980042849A (ko) 1998-08-17
TR199701398A3 (tr) 1999-10-21
KR100318999B1 (ko) 2002-01-04
AU4517097A (en) 1998-06-04
MY123830A (en) 2006-06-30
CN1078835C (zh) 2002-02-06
TR199701398A2 (xx) 1999-10-21
CA2323328A1 (fr) 1998-05-27
EP0845327B1 (fr) 2004-07-07
BR9706040A (pt) 2001-11-27
EP0956926A1 (fr) 1999-11-17
CA2323335A1 (fr) 1998-05-27
ES2222494T3 (es) 2005-02-01
DE69729779D1 (de) 2004-08-12
AU706377B2 (en) 1999-06-17
CA2220820C (fr) 2002-05-07
KR100310583B1 (ko) 2003-03-15
EP0845327A3 (fr) 1998-09-30
MX9709152A (es) 1998-09-30

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: SHUJI KAWASAKI & BBF YAMATE CORP., HAMAMATSU-S, JP

8339 Ceased/non-payment of the annual fee