Summary of the invention
In this prior art, because the light that often must make the transmission display plate is by the polarisation filter, so obtaining must change the polarizing angle that causes because of the polarisation filter when the portrait information with the CCD camera, detect the defective of display board itself simultaneously.Therefore, make that the complex structure and the price of polarisation filter itself or this driving mechanism are high.
Purpose of the present invention is to be to use the polarisation filter of complicated structure or the defective that driving mechanism can detect display board.
Relevant inspection method of the present invention is to comprise: adopt by display board towards formed the 1st portrait signal of the 1st light of light detection means; And, aforementioned the 1st light is given formed the 2nd portrait signal of the 2nd light of the polarisation filter by having 90 ° of different polarizing angles with respect to the formed polarizing angle of aforementioned display board, and obtain the real defect information of aforementioned display board.
Relevant testing fixture of the present invention is to comprise: the holder top of the display board that acceptance should be checked (chuck top); Have the probe unit of several probes that are energized to aforementioned display board; To detect light detection means from the light of aforementioned display board as electric signal; Have 90 ° of different polarizing angles with respect to the formed polarizing angle of aforementioned display board, and be configured to the polarisation filter that can towards the path of the light of aforementioned lights detection means, pass in and out from aforementioned display board; And use from formed the 1st portrait signal of the 1st light that does not see through aforementioned polarisation filter in the light of aforementioned display board and formed the 2nd portrait signal of the 2nd light that sees through aforementioned polarisation filter, and obtain the portrait treating apparatus of the real defect information of aforementioned display board.
The 1st light is to obtain by making the position of polarisation filter displacement to the path of the 1st light.With respect to this, the 2nd light then is so far the position of the path blocking of the 1st light to be obtained by making polarisation filter displacement.The the 1st and the 2nd portrait signal is to obtain in the mode that detects the 1st and the 2nd light by the light detection means as the CCD camera respectively.
With without formed the 1st portrait signal of the 1st light of polarisation filter, be the substrate signal (comprising real flaw indication) that contains the state that manifests display board itself; And manifest the foreign matter signal that foreign matters such as the dust of the irregular reference that causes light and scar exist.But,,, do not contain substrate signal though contain the foreign matter signal via formed the 2nd portrait signal of the 2nd light of polarisation filter.
Therefore, the real defect information of display board is to obtain by the foreign matter signal that adopts the foreign matter signal in the 2nd portrait signal and remove in the 1st portrait signal.
According to the present invention, only must make the polarisation filter optionally in the outer position of the path that forms the 1st light and interdict to replace between the position of the 1st light and get final product, so must not adopt the polarisation filter of labyrinth and the real defective that driving mechanism can detect display board.
Aforementioned real defect information is to obtain by handling with the subduction of aforementioned the 1st portrait signal and the 2nd portrait signal.Aforementioned display board can be and contains Liquid crystal module, can be the glass substrate that does not contain Liquid crystal module also, and contains relatively in the Polarizer of this glass substrate.
Testing fixture again on the path of aforementioned the 1st light, comprises and makes aforementioned polarisation filter optionally not be positioned at the 1st position on this path and be positioned at the displacement mechanism that replaces between the 2nd position on this path.In addition, the holder top also can have the back lighting device that the display board of being accepted is given irradiates light.
Embodiment
Describing, testing fixture 10 is as display board 12 with the display panels of enclosing Liquid crystal module with reference to Fig. 1.Display board 12 is though in the following description for to have the flat shape of rectangle, also can be to have other flat shape.Display board 12 has several electrodes that enforcement drives the energising of usefulness with the corresponding position, at least 2 limits of rectangle.
Testing fixture 10 is to comprise: the holder top 14 of the display board 12 that acceptance should be checked; Make the inspecting stand 16 of holder top 14 displacements; Probe unit 18 with display board 12 energisings of being accepted; To be detected photodetector 20 by the light of display board 12 as electric signal; Being configured to can be at the polarisation filter 22 of the turnover of the light path between display board 12 and the photodetector 20; Make the polarisation filter 22 can be at the driving mechanism 24 of the light path between display board 12 and the photodetector 20 turnover; Adopt the output signal of photodetector 20 and obtain the portrait treating apparatus 26 of the real defect information of display board 12; And accommodate these mechanical hook-ups cover casing (shield case) 28.
Holder top 14 is several absorption ditches that known possessing has the display board 12 that vacuum suction accepts, and be the display board of being accepted 12 accommodate from below the back lighting device of irradiation white light.
Inspecting stand 16, except that the direction three-D that makes pedestal top 14 to X, Y, Z moves, and form simultaneously make its around axis theta that direction (Z direction) is up and down extended according to X, the Y of angle rotation, the platform (stage) of Z, θ.
Probe unit 18, be will have several of several contact shoes 30 of the electrode that is pressed into display board 12 individually survey pieces (probe block) 32, be configured in middle section and have substrate 36 with the opening 34 of the corresponding rectangle of flat shape of display board 12.
Contact shoe 30 in graphic example, though be detector for sonde-type, also can be any other forms such as blade type, elasticity contact pilotage (pogopin) type, projection (bump) type.Each surveys piece (probe block) 32, is to connect the opening 34 of substrate 36 and project under the state of below of substrate 36 at the front end (needle point) of contact shoe 30, be installed on substrate 36 above.
Photodetector 20 is as CCD camera and linear response device known cameras such as (line sensor), and it is the light that detects transmission display plate 12, and produces the electric signal of the portrait that manifests display board 12, to export portrait treating apparatus 26 to.
Polarisation filter 22, be that polarizing angle with respect to the light by display board 12 has 90 ° of different polarizing angles (stop with the light of the polarizing angle equidirectional vibration of display board 12 formed light pass through), it is among being incident to the light of photodetector 20 from display board 12, make the direction of vibration of the light that passes through with respect to display board 12, the light that vibrates to 90 ° of different directions passes through.
Polarisation filter 22 is by driving mechanism 24, can not interdict polarisation filter 22 from 1st position of display board 12 towards the 1st light of photodetector 20, and can interdict between its 2nd position and optionally move.
During inspection, display board 12, be mounting in holder top 14, from the light of back lighting device unit by display board 12 states and each electrode is being kept be pressed into contact shoe 30 under the state of back lighting device unit.Under this state, polarisation filter 22 is promptly optionally replaced between the 1st and the 2nd position by driving mechanism 24.
Portrait treating apparatus 26 is output signals of the photodetector 20 when being displaced into the 1st position with polarisation filter 22; And the output signal of the photodetector 20 when being displaced into the 2nd position is the basis, produces the 1st and the 2nd portrait signal, and adopts two portrait signals and obtain the real defect information of display board 12.
When polarisation filter 22 is displaced into the 1st position, need not pass through polarisation filter 22 from display board 12 towards the 1st light of photodetector 20, promptly be incident to photodetector 20.Therefore, the output signal of photodetector 20 will become not via formed the 1st signal of the 1st light of polarisation filter 22, and portrait treating apparatus 26 will produce the 1st portrait signal corresponding with the 1st signal.
When polarisation filter 22 is displaced into the 2nd position, owing to be incident to polarisation filter 22 towards the 1st light of photodetector 20 from display board 12, so promptly be incident to detecting device 20 by the 2nd light of light polarisation filter 22.Therefore, the output signal of photodetector 20 will become by formed the 2nd signal of the 2nd light, and portrait treating apparatus 26 will produce the 2nd portrait signal corresponding with the 2nd signal.
Without formed the 1st portrait signal of the 1st light of polarisation filter 22, be to contain the substrate signal (comprising real flaw indication) that manifests display board 12 states own; And the foreign matter signal that manifests the existence of the dust that causes scattering of light or irregular reference and scar etc., foreign matter.
But, through formed the 2nd portrait signal of the 2nd light of polarisation filter 22, though allow polarisation filter 22 with respect to the direction of vibration of the 1st light passing through to the light of 90 ° of different directions vibrations, but owing to stop and the passing through of the light of the 1st optical vibration direction equidirectional vibration, so contain the foreign matter signal that causes because of scattering of light or irregular reference, but do not contain the substrate signal that comprises real flaw indication.
Particularly, as shown in Figure 2, mutually 90 ° of different 2 polarizing films 40 and 42 situations that are disposed at the following and top display panel 12 of Liquid crystal module layer 44 are respectively carried out following explanation to the polarizing angle that passes through that just will permit light each other.
At first, from the light 46 of the back lighting device unit in the holder top 14, outside white light, be that the center comprises the light component to 360 ° of direction vibrations simultaneously with the optical axis.
When this light 46 when leading to the polarizing film 40 that the light component that makes horizontal direction vibration passes through, the light by polarizing film 40 promptly becomes the light to the composition of horizontal direction vibration.
Secondly, by the light of polarizing film 40, be that polarisation is the light to vertical vibration by Liquid crystal module layer 44.
Secondly, by the light of Liquid crystal module layer 44, be to pass the polarizing film 42 that the light component that makes vertical vibration passes through.Whereby, by the light 48 of display board 12, the light of vertical vibration.
Light 48 by display board 12, be to replace one of them in the 1st and the 2nd position because of polarisation filter 22, and directly into being incident upon photodetector 20, or the polarisation filter 22 that passes through across the light (by the light of display board 12) that stops vertical vibration is incident to photodetector 20.
When polarisation filter 22 displacement during, then because light 48 without polarisation filter 22, comprises the light that manifests the state of display board 12 own so be incident to the light of photodetector 20 to the 1st position.
In addition, when the foreign matter 50 of the dust of the irregular reference that causes light and scar etc. is present in display board 12, will make the light by display board 12 or the light that passed through because foreign matter 50 and scattering or irregular reference.Therefore, scattering or the random reflected light 52 that is caused by foreign matter 50 also is incident to photodetector 20.
With respect to this, when polarisation filter 22 is replaced to the 2nd position, all light towards photodetector 20 will be incident to polarisation filter 22, and because polarisation filter 22 has display board 12 formed polarizing angles and 90 ° of different polarizing angles, though so light 48 will because of polarisation filter 22 be prevented from by, the light 54 of the composition of horizontal direction vibration will be by polarisation filter 22 in scattering or the random reflected light 52.Therefore, for photodetector 20, though the light meeting incident of horizontal direction vibration, then can incident by display board 12 in the light of vertical vibration.
In sum, portrait treating apparatus 26 is when polarisation filter 22 is replaced in the 1st position, generation is comprised the substrate signal (comprising real flaw indication) that manifests display board 12 states own; And the 1st portrait signal of the foreign matter signal that exists of the foreign matter that manifests the irregular reference that causes light.With respect to this, when polarisation filter 22 is replaced in the 2nd position, then draw a portrait treating apparatus 26, though can comprise the foreign matter signal, will produce the 2nd portrait signal that does not comprise substrate signal.
Portrait treating apparatus 26 is the foreign matter signals that adopt in the 2nd portrait signal, removes the foreign matter signal in the 1st portrait signal, obtains the real defect information of display board 12 whereby.Particularly, portrait treating apparatus 26 is by deducting the 2nd portrait aspect from the 1st portrait signal, and obtains the real defect information of display board 12, and the defect information of being obtained is stored in internal memory.
In other words, directly into the light 52 that is incident upon photodetector 20,, be the same coordinate position that is present in testing fixture 10 and the two portrait signals from foreign matter 50 with light 54 by the polarisation filter 22 in the light 52.Therefore, if reduce the 2nd portrait signal, then can remove the foreign matter signal and obtain the defect information of the real defective locations that manifests display board 12 from the 1st portrait signal.
The defect information that is obtained separating in the device of icon not, will become the normal display board with fault location in order to differentiation; And defective display board with fault location.
As noted above according to testing fixture 10, forming from 1st position of display board 12 outside the path of the light of photodetector 20 by making polarisation filter 22; And interdict optionally displacement between the 2nd position of path of this light, and obtained the real defect information of display board 12, so must not adopt the polarisation filter of complex structure and the real defective that driving mechanism can detect display board 12 thereof.
As shown in Figure 3, when only in the wherein side (being in the drawings) of Liquid crystal module layer 44 when having the display board of polarizing film 40 for following, Zhen Dong light 46 in length and breadth, at first will remove the light component of vertical vibration, and make the light of the light component of horizontal direction vibration pass through polarizing film 40 by polarizing film 40.
Secondly, the light by polarizing film 40 will become the light component of vertical vibration at Liquid crystal module layer 44 polarisation, and point to photodetector 20 from display board 12.Therefore, portrait treating apparatus 26 as when polarisation filter 22 is displaced into the 1st position, then will produces the 1st and draw a portrait signal, as when being displaced into the 2nd position, then will produce the 2nd and draw a portrait signal.
The present invention not only can not be subjected to being present in the foreign matter influence on the surface of display board 12, as shown in Figure 4, can not be subjected to being present in the foreign matter of the inside of display board 12 yet, and the influence of the defective of the photodetection assembly of photodetector 20 etc. and can obtain real defect information.
The present invention, not only applicable the employing the inspection technology of rayed in the back lighting device unit of display board 12 also applicablely adopted catoptrical inspection technology with mirror arrangement in the behind of display board 12.
The present invention is not exceeded with the foregoing description, only otherwise all can do various changes departing from purport of the present invention.