CN1249426C - Detecting method and device for display board - Google Patents
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Abstract
Description
技术领域Technical field
本发明是有关于液晶显示面板及玻璃基板等的显示板的检查方法及装置。The present invention relates to a method and device for inspecting display panels such as liquid crystal display panels and glass substrates.
背景技术 Background technique
如液晶显示面板的显示板,将会被进行闪光检查其含有液晶组件的画素是否正确。就此种自动闪光检查方法及装置之一而言,已知有专利文献1所揭示的技术。For example, the display panel of the liquid crystal display panel will be flashed to check whether the pixels containing the liquid crystal components are correct. As one of such automatic flash inspection methods and devices, the technology disclosed in Patent Document 1 is known.
专利文献1:日本特开平10-160628号公报。Patent Document 1: Japanese Patent Application Laid-Open No. 10-160628.
在此现有技术中,是在将可变更偏光方向的偏光滤镜予以配置于CCD照相机与显示板之间,使透过显示板的光通过偏光滤镜并以CCD照相机进行检测之际,通过将偏光滤镜所导致的偏光方向予以依序变更,而检测出易于看出的突起及异物等的偏光依存性部。In this prior art, a polarizing filter capable of changing the polarization direction is arranged between the CCD camera and the display panel, and when the light transmitted through the display panel passes through the polarizing filter and is detected by the CCD camera, the The polarization direction caused by the polarizing filter is changed sequentially, and the polarization-dependent parts such as protrusions and foreign objects that are easy to be seen are detected.
发明内容Contents of Invention
在此现有技术中,由于经常须使透过显示板的光通过偏光滤镜,故在以CCD照相机获得画像信息之际必须变更因偏光滤镜造成的偏光角度,同时检测出显示板本身的缺陷。因此,使得偏光滤镜本身或该驱动机构的构造复杂并且价格高昂。In this prior art, since the light passing through the display panel is often required to pass through a polarizing filter, it is necessary to change the polarization angle caused by the polarizing filter when obtaining image information with a CCD camera, and at the same time detect the polarity of the display panel itself. defect. Therefore, the configuration of the polarizing filter itself or the driving mechanism is complicated and expensive.
本发明的目的,是在于毋须使用复杂的构造的偏光滤镜或驱动机构即可检测出显示板的缺陷。The purpose of the present invention is to detect the defect of the display panel without using a complicated polarizing filter or a driving mechanism.
有关本发明的检查方法,是包含:采用由显示板朝向光检测装置的第1光所形成的第1画像信号;以及相对于前述显示板所形成的偏光角度,将前述第1光予以通过具有90°不同的偏光角度的偏光滤镜的第2光所形成的第2画像信号,而获得前述显示板的真实的缺陷信息。The inspection method of the present invention includes: adopting the first image signal formed by the first light directed from the display panel to the light detection device; and passing the first light with respect to the polarization angle formed by the display panel. The second image signal formed by the second light of the polarizing filter with different polarization angles of 90° is used to obtain the real defect information of the aforementioned display panel.
有关本发明的检查装置,是包含:接受应检查的显示板的夹座顶部(chuck top);备有通电至前述显示板的数个探针的探测单元;将来自前述显示板的光检测出作为电气信号的光检测装置;相对于前述显示板所形成的偏光角度具有90°不同偏光角度,并配置成可在从前述显示板朝向前述光检测装置的光的通路中进出的偏光滤镜;以及使用来自前述显示板的光中不透过前述偏光滤镜的第1光所形成的第1画像信号与透过前述偏光滤镜的第2光所形成的第2画像信号,而获得前述显示板的真实的缺陷信息的画像处理装置。The inspection device related to the present invention comprises: a chuck top that accepts the display panel to be inspected; a detection unit equipped with several probes that are energized to the aforementioned display panel; and detects light from the aforementioned display panel. A photodetection device as an electrical signal; a polarization filter with a different polarization angle of 90° relative to the polarization angle formed by the aforementioned display panel, and configured as a polarizing filter that can enter and exit the path of light from the aforementioned display panel toward the aforementioned photodetection device; And using the first image signal formed by the first light that does not pass through the aforementioned polarizing filter and the second image signal formed by the second light that passes through the aforementioned polarizing filter among the lights from the aforementioned display panel to obtain the aforementioned display An image processing device for real defect information of boards.
第1光,是可通过使偏光滤镜置换至第1光的通路外的位置获得。相对于此,第2光,则是可通过使偏光滤镜置换至此将第1光的通路遮断的位置获得。第1及第2画像信号,是可分别通过如CCD照相机般的光检测装置以检测第1及第2光的方式获得。The first light can be obtained by replacing the polarizing filter to a position outside the path of the first light. On the other hand, the second light can be obtained by replacing the position where the passage of the first light has been blocked by the polarizing filter. The first and second image signals are obtained by detecting the first and second light, respectively, by a light detection device such as a CCD camera.
以未经偏光滤镜的第1光所形成的第1画像信号,是含有显现显示板本身的状态的基板信号(包含真实的缺陷信号);以及显现导致光的乱反射的尘埃及伤痕等异物存在的异物信号。但是,经由偏光滤镜的第2光所形成的第2画像信号,虽含有异物信号,但不含基板信号。The first image signal formed by the first light without a polarizing filter contains the substrate signal (including the real defect signal) showing the state of the display panel itself; and the presence of foreign objects such as dust and scratches that cause random reflection of light foreign body signal. However, the second image signal formed by the second light passing through the polarizing filter contains foreign object signals but does not contain substrate signals.
因此,显示板的真实的缺陷信息,是可通过采用第2画像信号中的异物信号并去除第1画像信号中的异物信号而获得。Therefore, the real defect information of the display panel can be obtained by using the foreign object signal in the second image signal and removing the foreign object signal in the first image signal.
根据本发明,仅须使偏光滤镜选择性地在形成第1光的通路外的位置与遮断第1光的位置间置换即可,故不须采用复杂结构的偏光滤镜及驱动机构即可检测出显示板的真实的缺陷。According to the present invention, it is only necessary to selectively replace the polarizing filter between the position outside the path forming the first light and the position blocking the first light, so it is not necessary to use a polarizing filter and a driving mechanism with a complicated structure. Real defects of the display panel are detected.
前述真实的缺陷信息,是可通过以前述第1画像信号与第2画像信号的减除处理而获得。前述显示板,可为含有液晶组件,也可以是不含液晶组件的玻璃基板,以及含有相对向于该玻璃基板的偏光板。The aforementioned real defect information can be obtained by subtracting the first image signal and the second image signal. The aforementioned display panel may be a glass substrate with or without a liquid crystal component, and may contain a polarizer facing the glass substrate.
检查装置,又在前述第1光的通路上,包含使前述偏光滤镜选择性地在不位于该通路上的第1位置、以及位于该通路上的第2位置间置换的置换机构。此外,夹座顶部,也可具有对所接受的显示板予以照射光的背光装置。The inspection device further includes a replacement mechanism for selectively replacing the polarizing filter between a first position not located on the path and a second position located on the path on the path of the first light. In addition, the top of the holder may also have a backlight device for irradiating light to the received display panel.
附图说明Description of drawings
图1是显示本发明的检查装置的一实施例图;Fig. 1 is a diagram showing an embodiment of the inspection device of the present invention;
图2是光的偏光状态的说明图;FIG. 2 is an explanatory diagram of a polarization state of light;
图3是光的偏光状态的另一说明图;Fig. 3 is another explanatory diagram of the polarization state of light;
图4是光的偏光状态的又一说明图。Fig. 4 is still another explanatory diagram of the polarization state of light.
具体实施方式 Detailed ways
参照图1以进行说明,检查装置10,是以封入液晶组件的液晶显示面板作为显示板12。显示板12,在以下说明中虽为具有矩形的平面形状,但也可以是具有其它平面形状。显示板12,在与矩形的至少2边对应所在位置具有实施驱动用的通电的数个电极。Referring to FIG. 1 for description, the
检查装置10,是包含:接受应检查的显示板12的夹座顶部14;使夹座顶部14置换的检查台16;与所接受的显示板12通电的探测单元18;将通过显示板12的光予以检测出作为电气信号的光检测器20;配置成可在显示板12与光检测器20之间的光路进出的偏光滤镜22;使偏光滤镜22可在显示板12与光检测器20之间的光路进出的驱动机构24;采用光检测器20的输出信号而获得显示板12的真实的缺陷信息的画像处理装置26;以及收容此等机械装置的遮蔽箱体(shield case)28。The
夹座顶部14,是已知的具备有真空吸附所接受的显示板12的数个吸附沟,且是在所接受的显示板12收容从下方照射白色光的背光装置。The
检查台16,除使基座顶部14向X、Y、Z的方向三次元移动外,并同时形成使其在向上下方向(Z方向)延伸的轴线θ的周围依角度旋转的X、Y、Z、θ的平台(stage)。The inspection table 16, in addition to three-dimensionally moving the
探测单元18,是将具有个别被按压至显示板12的电极的数个接触子30的数个探测块(probe block)32,配置在中央区域具有与显示板12的平面形状相对应的矩形的开口34的基板36。The
接触子30,在图式例中,虽是为探针型的探测器,但也可以是刀片型、弹性触针(pogopin)型、凸块(bump)型等任何其它形态。各探测块(probe block)32,是在接触子30的前端(针尖)贯通基板36的开口34而突出至基板36的下方的状态下,安装于基板36的上面。The
光检测器20,是如CCD照相机及线性感应器(line sensor)等已知的照相机,它是检测透过显示板12的光,而产生显现显示板12的画像的电气信号,以输出至画像处理装置26。The
偏光滤镜22,是相对于通过显示板12的光的偏光角度具有90°不同偏光角度(阻止与显示板12所形成的光的偏光角度相同方向振动的光的通过),它是从显示板12入射至光检测器20的光之中,使相对于显示板12通过的光的振动方向,向90°不同方向振动的光通过。The polarizing
偏光滤镜22,是通过驱动机构24,在不会遮断偏光滤镜22从显示板12朝向光检测器20的第1光的第1位置,以及会遮断其的第2位置间选择性地移动。The polarizing
检查时,显示板12,是载置于夹座顶部14,在来自背光装置单元的光通过显示板12状态并使各电极在维持背光装置单元的状态下按压至接触子30。在此状态下,偏光滤镜22即通过驱动机构24选择性地在第1以及第2位置间置换。During inspection, the
画像处理装置26,是以偏光滤镜22移动于第1位置时的光检测器20的输出信号;以及移动于第2位置时的光检测器20的输出信号为基础,产生第1以及第2画像信号,并采用两画像信号而求出显示板12的真实的缺陷信息。The
在当偏光滤镜22移动于第1位置时,从显示板12朝向光检测器20的第1光不用经过偏光滤镜22,即入射至光检测器20。因此,光检测器20的输出信号将成为不经由偏光滤镜22的第1光所形成的第1信号,而画像处理装置26将产生与第1信号对应的第1画像信号。When the polarizing
在当偏光滤镜22移动于第2位置时,由于从显示板12朝向光检测器20的第1光入射至偏光滤镜22,故通过光偏光滤镜22的第2光即入射至检测器20。因此,光检测器20的输出信号将成为由第2光所形成的第2信号,而画像处理装置26将产生与第2信号对应的第2画像信号。When the polarizing
不经过偏光滤镜22的第1光所形成的第1画像信号,是含有显现显示板12本身状态的基板信号(包含真实的缺陷信号);以及显现导致光的散射或乱反射的尘埃及伤痕等、异物的存在的异物信号。The first image signal formed by the first light that does not pass through the polarizing
但是,经过偏光滤镜22的第2光所形成的第2画像信号,虽允许偏光滤镜22相对于第1光的振动方向向90°不同方向振动的光的通过,但由于阻止与第1光振动方向相同方向振动的光的通过,故含有因光的散射或乱反射所导致的异物信号,但不含包括真实的缺陷信号的基板信号。But, the 2nd picture signal that the 2nd light that passes through polarizing
具体而言,如图2所示,就将许可光的通过的偏光角度相互为90°不同的2个偏光薄膜40以及42分别配置于液晶组件层44的下面以及上面的显示用面板12的情况进行以下说明。Specifically, as shown in FIG. 2 , in the case where two polarizing
首先,来自夹座顶部14内的背光装置单元的光46,为白色光之外,同时以光轴为中心包含向360°方向振动的光成分。First, the
当此光46在通向使水平方向振动的光成分通过的偏光薄膜40时,通过偏光薄膜40的光即成为向水平方向振动的成分的光。When the
其次,通过偏光薄膜40的光,是通过液晶组件层44而偏光为向垂直方向振动的光。Next, the light passing through the polarizing
其次,通过液晶组件层44的光,是穿过使垂直方向振动的光成分通过的偏光薄膜42。借此,通过显示板12的光48,即成垂直方向振动的光。Next, the light passing through the liquid
通过显示板12的光48,是因偏光滤镜22置换于第1以及第2位置的其中之一,而直接入射至光检测器20,或隔着阻止垂直方向振动的光(通过显示板12的光)通过的偏光滤镜22而入射至光检测器20。The light 48 passing through the
当偏光滤镜22置换至第1位置时,则由于光48不经过偏光滤镜22,故入射至光检测器20的光包含显现显示板12本身的状态的光。When the
此外,当导致光的乱反射的尘埃及伤痕等的异物50存在于显示板12时,将使通过显示板12的光或所通过的光由于异物50而散射或乱反射。因此,由异物50造成的散射或乱反射光52也入射至光检测器20。In addition, when
相对于此,当偏光滤镜22置换至第2位置时,朝向光检测器20的所有的光将会入射至偏光滤镜22,而且由于偏光滤镜22具有显示板12所形成的偏光角度与90°不同的偏光角度,故光48虽将因偏光滤镜22而被阻止通过,但散射或乱反射光52中水平方向振动的成分的光54将通过偏光滤镜22。因此,对于光检测器20,水平方向振动的光虽会入射,但通过显示板12而于垂直方向振动的光则不会入射。In contrast to this, when the
综上所述,画像处理装置26,是当偏光滤镜22置换于第1位置时,将产生包含显现显示板12本身状态的基板信号(包含真实的缺陷信号);以及显现导致光的乱反射的异物存在的异物信号的第1画像信号。相对于此,当偏光滤镜22置换于第2位置时,则画像处理装置26,虽会包含异物信号,但将会产生不包含基板信号的第2画像信号。To sum up, the
画像处理装置26,是采用第2画像信号中的异物信号,去除第1画像信号中的异物信号,借此求出显示板12的真实的缺陷信息。具体而言,画像处理装置26,是通过从第1画像信号扣除第2画像信号方式,而求出显示板12的真实的缺陷信息,并将所求出的缺陷信息储存于内存。The
换言之,从异物50直接入射至光检测器20的光52,与通过光52中的偏光滤镜22的光54,是存在于检查装置10以及两画像信号内的相同坐标位置。因此,如果从第1画像信号减除第2画像信号,则可去除异物信号而求出显现显示板12的真实的缺陷位置的缺陷信息。In other words, the light 52 directly incident on the
所获得的缺陷信息,在未图标的区隔装置中,将用以区分成为未具有缺陷处的正常的显示板;以及具有缺陷处的缺陷显示板。The acquired defect information will be used in the not-shown partitioning device to distinguish between normal display panels without defects and defective display panels with defects.
如上述所示根据检查装置10,通过使偏光滤镜22在形成从显示板12朝向光检测器20的光的通路外的第1位置;以及遮断该光的通路的第2位置间选择性地置换,而得以求出显示板12的真实的缺陷信息,故不须采用复杂构造的偏光滤镜及其驱动机构即可检测出显示板12的真实的缺陷。As described above, according to the
如图3所示,当仅于液晶组件层44的其中一方(在图中是为下面)具有偏光薄膜40的显示板时,纵横振动的光46,首先将通过偏光薄膜40去除垂直方向振动的光成分,并使水平方向振动的光成分的光通过偏光薄膜40。As shown in Figure 3, when only one side of the liquid crystal component layer 44 (being the bottom in the figure) has a display panel with a
其次,通过偏光薄膜40的光将在液晶组件层44偏光成垂直方向振动的光成分,而从显示板12指向至光检测器20。因此,画像处理装置26,如当偏光滤镜22移动于第1位置时,则将产生第1画像信号,如移动于第2位置时,则将产生第2画像信号。Secondly, the light passing through the
本发明,不仅不会受到存在于显示板12的表面的异物影响,也如图4所示,不会受到存在于显示板12的内部的异物,及光检测器20的光检测组件的缺陷等的影响而可获得真实的缺陷信息。The present invention is not only not affected by foreign matter existing on the surface of the
本发明,不仅可适用在采用将光照射在显示板12的背光装置单元的检查技术,也可适用在将反射镜配置在显示板12的背后而采用反射光的检查技术。The present invention is applicable not only to an inspection technique using a backlight unit that irradiates light onto the
本发明,并不以上述实施例为限,只要不悖离本发明的主旨均可作各种变更。The present invention is not limited to the above embodiments, and various changes can be made as long as they do not deviate from the gist of the present invention.
组件符号说明:Description of component symbols:
10检查装置 12显示板10
14夹座顶部 16检查台14 Top of
18探测单元 20光检测器18
22偏光滤镜 24驱动机构22
26画像处理装置 28遮蔽箱体26
30接触子 32探测块30
34开口 36基板34
40、42偏光薄膜 44液晶组件层40, 42
46、48、54光 50异物46, 48, 54 light 50 foreign matter
52乱反射光52 random reflection light
Claims (6)
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JP2002333450 | 2002-11-18 | ||
JP2002333450A JP2004170495A (en) | 2002-11-18 | 2002-11-18 | Display substrate inspection method and apparatus |
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CN1249426C true CN1249426C (en) | 2006-04-05 |
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JP (1) | JP2004170495A (en) |
KR (1) | KR20040044071A (en) |
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US7738102B2 (en) | 2006-01-11 | 2010-06-15 | Nitto Denko Corporation | Layered film fabrication method, layered film defect detection method, layered film defect detection device, layered film, and image display device |
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2002
- 2002-11-18 JP JP2002333450A patent/JP2004170495A/en active Pending
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2003
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Cited By (1)
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US7738102B2 (en) | 2006-01-11 | 2010-06-15 | Nitto Denko Corporation | Layered film fabrication method, layered film defect detection method, layered film defect detection device, layered film, and image display device |
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CN1501073A (en) | 2004-06-02 |
JP2004170495A (en) | 2004-06-17 |
TW571079B (en) | 2004-01-11 |
SG119174A1 (en) | 2006-02-28 |
TW200408800A (en) | 2004-06-01 |
KR20040044071A (en) | 2004-05-27 |
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