CN1690698A - Optical type appearance testing method and optical type appearance testing device - Google Patents
Optical type appearance testing method and optical type appearance testing device Download PDFInfo
- Publication number
- CN1690698A CN1690698A CNA2005100526357A CN200510052635A CN1690698A CN 1690698 A CN1690698 A CN 1690698A CN A2005100526357 A CNA2005100526357 A CN A2005100526357A CN 200510052635 A CN200510052635 A CN 200510052635A CN 1690698 A CN1690698 A CN 1690698A
- Authority
- CN
- China
- Prior art keywords
- mentioned
- plummer
- air
- thin plate
- plate substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95692—Patterns showing hole parts, e.g. honeycomb filtering structures
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
- B07C5/34—Sorting according to other particular properties
- B07C5/342—Sorting according to other particular properties according to optical properties, e.g. colour
- B07C5/3422—Sorting according to other particular properties according to optical properties, e.g. colour using video scanning devices, e.g. TV-cameras
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
- G06T7/0008—Industrial image inspection checking presence/absence
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/59—Transmissivity
- G01N21/5907—Densitometers
- G01N2021/5957—Densitometers using an image detector type detector, e.g. CCD
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Biochemistry (AREA)
- Pathology (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Immunology (AREA)
- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Quality & Reliability (AREA)
- Theoretical Computer Science (AREA)
- Multimedia (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Abstract
A film mask (1) is mounted on a mounting table (2), and air is ejected from an air blow block (6) provided to follow a photographing unit (3) through a nozzle (7) to the vicinity of a scanning position of the photographing unit (3). An inspection region of the film mask is photographed by scanning the film mask (1) with the photographing unit (3) while the vicinity of the scanning position on the film mask (1) is tightly pressed on to the mounting table (2) by the air ejected to the vicinity of the scanning position. With this arrangement a flexible thin sheet substrate like a film mask can be accurately inspected with a low cost apparatus.
Description
Technical field
The present invention relates to optical type appearance testing method and optical type appearance testing device, relate in particular to the optical type appearance testing method and the optical type appearance testing device of the thin plate substrate of the flexibility that is used to check printed base plate and film mask etc.
Background technology
As everyone knows, be on the surface of the printed base plate that electronic unit etc. is installed, the circuits needed conductor wirings that constitutes regulation is formed by figure.And whether the wiring graph of printed base plate etc. is existed the inspection of defective, for example can carry out according to following mode.At first, will form that face as the figure of inspection object, and printed base plate is carried on the plummer as upside.Above the printed base plate that is carried on the plummer, configuration CCD (charge-coupled device (CCD): the photographic camera of video camera etc. Charged Coupled Device).Then, plummer is moved horizontally on main scanning direction.With photographic camera made a video recording in the zone of the printed base plate of the below by photographic camera like this.And, whenever finish the scanning of a main scanning direction, photographic camera obtains the view data of the inspection area integral body of printed base plate at last just to the displacement of sub scanning direction order.This view data is applied the processing of pattern matching method etc., detect the defective of figure.
As mentioned above, for will as check to as the base plate carrying of thing on plummer and check, substrate need be fixed on the loading plate, make the medium substrate of shooting not be offset.As this substrate fixing method, available technology adopting be such method, promptly for example the non-inspection portion of the end sections of substrate is fixed on (for example Japanese Patent Application Laid-Open 2002-368378 communique) on the plummer with clamping unit etc.But, check that to being to be formed with under the situation of the low substrate of the film mask of wiring graph or the hardness the flexible thin plate substrate as thing this film mask equivalent-load on plummer the time, is had the situation that produces air layer between plummer and film mask etc.Therefore, in any case non-inspection portion is compressed, in the inspection of key to producing amount of deflection and bending because of air layer as portion.The result, even with being configured in inspection the photographic camera as the top of thing is photographed to above-mentioned film mask etc. for the defective that detects wiring graph, also there is such problem, promptly, cause defective to detect precision and reduce because above-mentioned amount of deflection and bending cause focal length (focus) to be offset.
For such problem, the such method of general employing in the prior art, promptly above as thing, displacement transducer is set in inspection, instrumentation is carried on the displacement of the upper surface of film mask on the plummer etc. before checking, perhaps in the displacement of the upper surface of instrumentation film mask etc., corresponding to the detecting the result of this displacement transducer photographic camera is moved up and down, focal length is being adjusted into the optimal while, film mask etc. is scanned.
In addition, also propose to have a kind of like this base board checking device, by printed base plate being remained on the plummer with electrostatic attraction, and roller cylindraceous is turned over the surface of printed base plate, make printed base plate closely be attached on the plummer, get rid of air layer, thereby avoided above-mentioned amount of deflection to check (for example, Japanese Patent Application Laid-Open 2002-76569 communique) with bending.
Yet, in above-mentioned such employing in the method for displacement transducer, especially in the inspection of the transparent thin plate substrate such, have following point to the film mask.That is to say, general displacement transducer, be to carry out rayed to the film mask, check the displacement of the upper surface of film mask according to its reflected light, and under the situation that has adopted the lower displacement transducer of resolution characteristic, in the scanning of film mask, when having film mask crooked, be distinguished as upper surface from the lower surface mistake of missing the film mask of scanning midway, and the displacement of lower surface is of common occurrence as the situation that detects result's output.Therefore, go out, need to use displacement transducer with very high resolution characteristic in order to prevent such flase drop.But its cost of sensor with high resolution capacity is also very high, and it becomes the main cause of the price rising that causes testing fixture self.And, because the resolution characteristic and the measurement range of displacement transducer generally are opposite relations, therefore have under the situation of displacement transducer of high resolution capacity in use, the measurement range that exceeds displacement transducer in the displacement meeting of the bigger position film mask upper surface of floating of film mask, as a result, cause to realize satisfied instrumentation.
And, though also useful vacuum adsorption force makes the whole lower surface of film mask and the method for plummer close attachment, need on loading end, form a large amount of attraction hole and groove in order to carry out vacuum suction.Therefore, when with transmitted light the so transparent thin plate substrate of film mask being checked, the transmitted light that is used to photograph produces refraction by attracting hole and groove, can not carry out correct photography.As a result, bring ill effect, produce the low problem of defect inspection precision to Flame Image Process.In addition, improving under the situation of absorption affinity etc., the part with attracting the hole to contact of film mask deforms, and also can produce the low problem of defect inspection precision of this part.
On the other hand, the base board checking device that in above-mentioned Japanese Patent Application Laid-Open 2002-76569 communique, discloses, the situation thicker to the line width of the distribution on the substrate is more effective.But, in recent years,, can not ignore the defective of this respect along with the densification of the distribution on the substrate.In other words, in the base board checking device that in above-mentioned Japanese Patent Application Laid-Open 2002-76569 communique, discloses, exist roller on substrate, to cause fine scar, perhaps be attached to fine rubbish on the roller to the possibility of substrate attachment, and in the inspection of high-accuracy distribution, such fine scar and rubbish also can produce ill effect to check result.
Summary of the invention
Therefore, the object of the present invention is to provide a kind of optical type appearance testing method and optical type appearance testing device that uses cheap device also can carry out correct inspection.
To achieve these goals, the present invention adopts following structures.
The 1st aspect of the present invention is a kind of optical type appearance testing method, checks the thin plate substrate of the flexibility of printed base plate and film mask etc., it is characterized in that having: the carrying step is carried on thin plate substrate on the plummer; The shooting step utilizes camera head to being carried on thin plate substrate on the plummer and scanning and making a video recording; Air ejection step, parallel with the scanning of shooting step, near the scanning position of thin plate substrate, spray air.
The 2nd aspect is characterised in that, aspect the above-mentioned the 1st in, also have the purifying step that purifies air, air ejection step, the air that ejection is purified by purifying step.
The 3rd aspect is characterised in that, in aspect the above-mentioned the 1st, also have non-inspection area fixing step, the part of the non-inspection area of this thin plate substrate is fixed on the plummer, make the thin plate substrate that in the carrying step, is carried on the plummer not produce skew with respect to plummer.
The 4th aspect is characterised in that, aspect the above-mentioned the 1st in, the shooting step is based on the data of the fluctuating of the base plate carrying face of expression plummer, and the loading end of camera head and plummer is remained equidistant while, and thin plate substrate is scanned.
The 5th aspect is a kind of optical type appearance testing device, checks the thin plate substrate of the flexibility of printed base plate and film mask etc., it is characterized in that having: plummer, and it carries thin plate substrate; Camera head, it is made a video recording to the thin plate substrate that is carried on the plummer; Drive unit, it moves camera head, thereby the thin plate substrate that is carried on the plummer is scanned; The air blowoff, it is followed camera head and moves, and sprays air near the scanning position of the thin plate substrate that camera head scans.
The 6th aspect is characterised in that, aspect the above-mentioned the 5th in, the filtrator that also has the usefulness of purifying air, the ejection of air blowoff sees through the air of filtrator.
The 7th aspect is characterised in that, aspect the above-mentioned the 5th in, also have non-inspection area stationary installation, its part with the non-inspection area of this thin plate substrate is fixed on the plummer, makes thin plate substrate not produce skew with respect to plummer.
The 8th aspect is characterised in that, in aspect the above-mentioned the 5th, also has the fluctuating data memory storage, the fluctuating data of the fluctuating of the loading end of its storage representation plummer, drive unit is based on the substrate fluctuating data, the loading end of camera head and plummer is remained equidistant while, camera head is moved.
The 9th aspect is characterised in that, aspect the above-mentioned the 5th in, the air blowoff is fixed on the camera head.
According to above-mentioned the 1st aspect and since by air (blast) with the thin plate substrate close attachment on plummer, can be as prior art, owing to causing scar with contacting of roller etc.In addition, even between thin plate substrate and plummer, produced air layer since by blast can remove this air layer and with the thin plate substrate close attachment on plummer, so can realize high-precision inspection.In addition, owing to do not need high performance displacement transducer, can control the cost of whole device.
According to the 2nd aspect,, can remove the rubbish on thin plate substrate etc. by the air that ejection has purified.As a result, in defect inspection etc., reduced the flase drop that causes by the rubbish on thin plate substrate etc. and looked into.
According to the 3rd aspect, by with the non-inspection partial fixing of thin plate substrate on plummer, can get rid of the time that thin plate substrate is whole, and the possibility that move on the plane takes place to thin plate substrate ejection air.
According to the 4th aspect, keep equidistant by the shooting step in plane degree and scan simultaneously with plummer, can make the focal length of shooting keep certain with respect to thin plate substrate with the plummer close attachment, can realize more correct defect inspection.In addition,,, not be used in the plane degree of all measuring plummer self in each inspection, can shorten the time of needs such as defect inspection so be ready to the displacement data of the plane degree of plummer self in advance because the plane degree of plummer is fixed.Especially, owing to do not need the determining displacement step of the plane degree of instrumentation thin plate substrate as prior art etc., this part just can reduce cost and the time that inspection method consumes.
In addition, according to the 5th～the 8th aspect, can obtain and the identical effect in above-mentioned 1-the 4th aspect.
According to the 9th aspect, because the air blowoff is fixed on the camera head, needn't be provided for the drive unit of the position of mobile air blowoff in addition, can reduce the cost of device.In addition because air ejection position and the relative position that reads between the position fix, can be more reliably with the air mortgage read the position near.
These and other purpose of the present invention, feature, aspect, effect, with reference to accompanying drawing, can be clearer from following detailed description.
Description of drawings
Fig. 1 is the outboard profile that the integral body of optical type appearance testing machine of the expression the invention process form of medelling constitutes.
Fig. 2 is the planimetric map that the integral body of optical type appearance testing machine of the expression the invention process form of medelling constitutes.
Fig. 3 is the expression image pickup part 3 of medelling, the stereographic map that air sprays the structure of parts 6 and nozzle 7.
Fig. 4 is the expression image pickup part 3 of medelling, the upward view that air sprays the structure of parts 6 and nozzle 7.
Fig. 5 be medelling expression line sensor 10, and read the stereographic map of the position relation between the position 11.
Embodiment
Below, to form of implementation of the present invention, describe with reference to accompanying drawing.Here, in order to make explanation concrete, be that example describes with the situation that the film mask that is formed with wiring graph is checked.This embodiment is used for the present invention is limited.That is, the invention is not restricted to the inspection of film mask, all is effective to the inspection of the thin plate substrate of flexibility.
Fig. 1 is the outboard profile that the integral body of optical type appearance testing device of the expression the invention process form of medelling constitutes.Fig. 2 observes the planimetric map of the structure of Fig. 1 from the device top.Among Fig. 1 and Fig. 2, optical type appearance testing device is made of plummer 2, image pickup part 3, Z axle pedestal 4, X-axis pedestal 5, air ejection parts 6 and nozzle 7.
Among Fig. 2, plummer 2 forms the structure that glass plate 9 is installed in rectangular frame 8.Bearing film mask 1 on the upper surface of this glass plate 9, and supporting by this glass plate 9.Plummer 2, by not shown drivings such as motor, Y moves horizontally along main scanning direction.In addition, below above-mentioned glass plate 9, dispose not shown transillumination light source.Above-mentioned transillumination light source shines illumination light the lower surface of film mask 1 by glass plate 9.
Fig. 3 is the expression image pickup part 3 of medelling, the stereographic map that air sprays the structure of parts 6 and nozzle 7.Fig. 4 is the expression image pickup part 3 of medelling, the upward view that air sprays the structure of parts 6 and nozzle 7.Fig. 5 be the expression image pickup part 3 of medelling line sensor 10, and film mask 1 on the stereographic map that reads the position relation between the position 11.
Among Fig. 3, air ejection parts 6 are installed on the lower flange of image pickup part 3, thereby can not shelter from the line sensor 10 of image pickup part 3 and read transmitted light between the position 11 (being the scanning position of line sensor 10).Nozzle 7 is installed on the air ejection parts 6, thereby can vertically sprays air with respect to the upper surface of film mask 1.In addition, nozzle 7 position that is installed in the upper surface of the film mask 1 that directly contacts from the air institute of air ejection parts 6 ejections becomes near the position of reading position 11.Air ejection parts 6 obtain the supply from the air of not shown air supply unit.And air ejection parts 6 are predefined via nozzle 7 ejections, have the pressure that makes the abundance of film mask 1 close attachment on glass plate 9 and the air of wind-force.The blast of above-mentioned air and the setting of wind-force can utilize not shown air adjusting gear to set arbitrarily by the user.
Then, the optical type appearance testing method that carries out in this form of implementation is described.At first, with the data of preprepared, be input to not shown shooting operation control part about the fluctuating of the loading end of plummer 2.This shooting operation control part is by Z axle pedestal 4 and X-axis pedestal 5, control image pickup part 3 self moving to directions X and Z direction.And image pickup part 3 according to the data of the thickness of having considered film mask 1 in the data about above-mentioned fluctuating, is set above-mentioned shooting operation control part when carrying out image acquisition process, and it is suitably moved on the Z direction.Like this, image pickup part 3 can suitably move to the Z direction corresponding to the fluctuating on the surface of the glass plate that moves horizontally on the Y direction 9 self.Here, by from nozzle 7 ejection air, can guarantee film mask 1 close attachment on glass plate 9, so image pickup part 3 can keep on the surface from film mask 1 making a video recording under equidistant state always.
After the setting of above-mentioned shooting operation control part finishes, will become the film mask 1 of checking object and be carried on the plummer 2.Then, the part (generally being the end sections at the film mask) of the non-inspection portion of film mask 1 is carried out vacuum suction with the not shown vacuum absorption device that is provided on the plummer 2.Like this, can make it on in-plane, can not move by fixed film mask 1.And the stationary installation of non-inspection portion can also use clamp device to compress and electrostatic adsorption device.And, after the fixedly end of above-mentioned non-inspection portion, from be arranged on above-mentioned transillumination on the plummer 2 with light source to film mask 1 irradiating illumination light.
After the above-mentioned illumination light irradiation, the image that image pickup part 3 moves to regulation reads the starting position.Then, air ejection parts 6 will have the air of predefined pressure, air quantity by nozzle 7 ejections.Make like this and closely contact with plummer 2 near the air ejection place on the film mask 1.Since the air of nozzle 7 ejection place read position 11 near, also contact with plummer 2 closely so read position 11.And the optical type appearance testing device of this form of implementation can utilize image pickup part 3 to carry out image and read processing when with not shown Y-axis transfer structure plummer 2 be moved horizontally on the Y direction.In other words, above-mentioned optical type appearance testing device, can utilize from the air of nozzle 7 ejections will as the present image reading object of image pickup part 3 read position 11 and plummer 2 tight contacts in, carry out image and read processing.That is to say that reading image position (reading position 11) on the film mask 1 that image pickup part 3 will read at once always is in and glass plate 9 tight state of contact at the time for reading point of image pickup part 3.And, as mentioned above, because the thickness of film mask 1 is the same, so as long as film mask 1 is contacted closely on the surface of glass plate 9, the focal position of image pickup part 3 is just always on the upper surface of film mask 1.As a result, image pickup part 3 can carry out the high-precision image that focal length do not depart from and reads.
As mentioned above, by making plummer 2 move horizontally on main scanning direction Y, image pickup part 3 carries out image from the end to end of the inspection area of film mask 1 and reads.When above-mentioned image read end, image pickup part 3 only moved the distance of regulation along sub scanning direction.Then, because plummer 2 is along moving horizontally on the Y direction of the direction opposite with last time, image pickup part 3 is with identical and carry out image from the end to end of the inspection area of film mask 1 and read before.The optical type appearance testing device of this form of implementation repeats above-mentioned image exactly and reads processing and read end up to the image of inspection area integral body.
Like this, cooperate the image of image pickup part 3 to read,, can eliminate and between film mask 1 and plummer 2, produce air layer (amount of deflection, bending) to as near the ejection air that reads position 11 of the image reading position of image pickup part 3 and film mask 1 is mortgaged from nozzle 7.As a result, can make and read position 11 and contact closely on plummer 2, it is chaotic to avoid focal length to take place, and the image that carries out that can be correct reads.In addition, because ejection air and film mask 1 is mortgaged (promptly contactless), also avoided surface with film mask 1 to come in contact and produced scar.Therefore, the wiring graph that reads film mask 1 that can be correct, the result can realize high-precision inspection.
And, from the air of nozzle 7 ejection, also can be for example by air strainer etc., become the very high air of cleanliness (air of purification).And, can also carry out static with ion generator etc. and remove processing.By the air of ejection high cleanliness, film mask 1 is mortgaged, can blow away film mask 1 lip-deep rubbish.As a result, can prevent that the flase drop that the lip-deep rubbish attached to film mask 1 causes from looking into.And blow away rubbish with the air of above-mentioned high cleanliness, not only in the thin plate substrate of flexibility, also such as also being effective when checking object with glass dry plate etc.
In addition, nozzle 7 is not limited to relative film mask 1 and vertically, also it can be installed on the air ejection parts 6, makes it possible to from the angle ejection air that tilts.As mentioned above, under the situation of the vertical ejection air of nozzle, be easy to rubbish to directly over blow away, the result, the rubbish that blows away might be attached to the line formula CCD of image pickup part 3 with on the lens.Therefore, the angle ejection air by from tilting can will blow away attached to the rubbish adipping on the film mask 1.Like this, compare during with vertical ejection air, can reduce adhering to the rubbish of lens towards the line formula CCD of image pickup part 3.In addition, if the interval between image pickup part 3 and the film mask 1 is very narrow, when being difficult to be arranged on nozzle 7 on the below of lower flange of image pickup part 3, if nozzle 7 is arranged on the side of lower flange, to spray near the inclination of reading position 11 from the air of nozzle 7, also can make near the close attachment that reads position 11 with air.
In addition, though adopted 3 pairs of film masks 1 of an image pickup part to scan in this form of implementation, the invention is not restricted to this, for example can on sub scanning direction (directions X), be set up in parallel two image pickup parts, twice the scanning of this form of implementation can be carried out simultaneously with two image pickup parts.At this moment, preferably two image pickup parts are provided with nozzle respectively.Image pickup part be provided with 3 also identical when above.
In addition,, the invention is not restricted to this, can also carry out main sweep on main scanning direction by image pickup part 3 is moved though be to carry out main sweep in this form of implementation by mobile plummer 2.Equally, replace making image pickup part 3 on sub scanning direction, to move, plummer 2 is moved on sub scanning direction.
Though nozzle 7 is fixed on the image pickup part 3 in this form of implementation, the invention is not restricted to this, can also nozzle driving be set in addition, make nozzle 7 can be independent of image pickup part 3 and move.
As mentioned above, the present invention is had been described in detail, aforesaid explanation all should be considered to illustration of the present invention on all points, rather than to the qualification of its scope.Do not say and brightly can carry out various improvement and distortion without departing from the scope of the invention.
Claims (9)
1, a kind of optical type appearance testing method, the thin plate substrate of the flexibility of inspection printed base plate and film mask etc. is characterized in that having:
The carrying step is carried on above-mentioned thin plate substrate on the plummer;
The shooting step utilizes camera head to being carried on above-mentioned thin plate substrate on the above-mentioned plummer and scanning and making a video recording;
Air ejection step, parallel with the scanning of above-mentioned shooting step, near the scanning position of above-mentioned thin plate substrate, spray air.
2, optical type appearance testing method as claimed in claim 1 is characterized in that, also has the purifying step that purifies air,
Above-mentioned air ejection step, the air that ejection is purified by above-mentioned purifying step.
3, optical type appearance testing method as claimed in claim 1, it is characterized in that, also has non-inspection area fixing step, the part of the non-inspection area of this thin plate substrate is fixed on the above-mentioned plummer, makes the above-mentioned thin plate substrate that in above-mentioned carrying step, is carried on the above-mentioned plummer not produce skew with respect to above-mentioned plummer.
4, optical type appearance testing method as claimed in claim 1, it is characterized in that, above-mentioned shooting step is based on the data of the fluctuating of the base plate carrying face of the above-mentioned plummer of expression, the loading end of above-mentioned camera head and above-mentioned plummer is remained equidistant while, above-mentioned thin plate substrate is scanned.
5, a kind of optical type appearance testing device, the thin plate substrate of the flexibility of inspection printed base plate and film mask etc. is characterized in that having:
Plummer, it carries above-mentioned thin plate substrate;
Camera head, it is made a video recording to the above-mentioned thin plate substrate that is carried on the above-mentioned plummer;
Drive unit, it moves above-mentioned camera head, thereby the above-mentioned thin plate substrate that is carried on the above-mentioned plummer is scanned;
The air blowoff, it is followed above-mentioned camera head and moves, and sprays air near the scanning position of the above-mentioned thin plate substrate that above-mentioned camera head scans.
6, optical type appearance testing device as claimed in claim 5 is characterized in that, also has the filtrator of the usefulness of purifying air,
Above-mentioned air blowoff ejection sees through the air of above-mentioned filtrator.
7, optical type appearance testing device as claimed in claim 5, it is characterized in that, also have non-inspection area stationary installation, its part with the non-inspection area of this thin plate substrate is fixed on the above-mentioned plummer, makes above-mentioned thin plate substrate not produce skew with respect to above-mentioned plummer.
8, optical type appearance testing device as claimed in claim 5 is characterized in that, also has the fluctuating data memory storage, the fluctuating data of the fluctuating of the loading end of the above-mentioned plummer of its storage representation,
Above-mentioned drive unit is based on the aforesaid substrate fluctuating data, and the loading end of above-mentioned camera head and above-mentioned plummer is remained equidistant while, and above-mentioned camera head is moved.
9, optical type appearance testing device as claimed in claim 5 is characterized in that, above-mentioned air blowoff is fixed on the above-mentioned camera head.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004128330 | 2004-04-23 | ||
| JP2004128330A JP2005308636A (en) | 2004-04-23 | 2004-04-23 | Optical visual examination method and optical visual examination device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1690698A true CN1690698A (en) | 2005-11-02 |
| CN100507529C CN100507529C (en) | 2009-07-01 |
Family
ID=35346286
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005100526357A Expired - Fee Related CN100507529C (en) | 2004-04-23 | 2005-03-07 | Optical type appearance testing method and optical type appearance testing device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2005308636A (en) |
| KR (1) | KR100737084B1 (en) |
| CN (1) | CN100507529C (en) |
| TW (1) | TWI253887B (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102095737A (en) * | 2010-12-23 | 2011-06-15 | 东莞市升力智能科技有限公司 | A single-table flexible printed circuit surface defect automatic detection machine |
| CN103376262A (en) * | 2012-04-26 | 2013-10-30 | 技佳唯斯股份有限公司 | Optical detection device |
| CN103376059A (en) * | 2012-04-26 | 2013-10-30 | 技佳唯斯股份有限公司 | Optical inspection device |
| CN107024832A (en) * | 2015-11-09 | 2017-08-08 | 艾斯迈科技股份有限公司 | Mask inspection device and method thereof |
| WO2017140069A1 (en) * | 2016-02-16 | 2017-08-24 | 京东方科技集团股份有限公司 | Substrate surface information detection apparatus and substrate surface information detection method |
| CN110178021A (en) * | 2017-12-19 | 2019-08-27 | 法国圣戈班玻璃厂 | Improved cleaning inspection system |
| CN110361395A (en) * | 2019-08-06 | 2019-10-22 | 天津日博工业技术有限公司 | A kind of waterproof ventilated membrane defect test method and apparatus based on machine vision |
| CN111487849A (en) * | 2020-05-14 | 2020-08-04 | Tcl华星光电技术有限公司 | Alignment system and alignment method of exposure machine |
| CN114252014A (en) * | 2021-12-24 | 2022-03-29 | 长飞光纤光缆股份有限公司 | System and method for testing mark size of photomask substrate |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100920222B1 (en) | 2007-09-12 | 2009-10-05 | 주식회사 아바코 | Film inspection device and film inspection method |
| KR100804033B1 (en) * | 2007-10-04 | 2008-02-18 | 주식회사 쓰리비 시스템 | Optical film inspection equipment |
| KR100937149B1 (en) * | 2008-01-15 | 2010-01-15 | 주식회사 쓰리비 시스템 | Optical film inspection equipment |
| JP5895575B2 (en) * | 2012-02-13 | 2016-03-30 | ダックエンジニアリング株式会社 | Quality inspection equipment for soft bags |
| KR200482654Y1 (en) * | 2014-11-27 | 2017-02-20 | 코오롱글로텍주식회사 | Row Hide Vision Examination Apparatus |
| CN104889520B (en) * | 2015-04-14 | 2017-08-22 | 东莞市合易自动化科技有限公司 | Intelligent AOI selective welding system and method |
| KR102401092B1 (en) * | 2015-11-11 | 2022-05-20 | 엘지디스플레이 주식회사 | Anti reflection film inspection apparatus and inspection methode for anti reflection film |
| CN112731762A (en) * | 2021-01-28 | 2021-04-30 | 长江存储科技有限责任公司 | Cleaning device for mask |
| KR102435450B1 (en) * | 2022-02-14 | 2022-08-24 | (주)넥스캠 | OCR inspection apparatus for wrapping paper |
| CN117969516B (en) * | 2024-03-28 | 2024-06-11 | 中航捷锐(西安)光电技术有限公司 | Optical detection device for material test block |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003279498A (en) * | 2002-03-20 | 2003-10-02 | Ushio Inc | Appearance inspection device |
| KR100589110B1 (en) * | 2002-09-26 | 2006-06-13 | 가부시키가이샤 히다치 고쿠사이 덴키 | Apparatus and method for inspecting pattern defect |
-
2004
- 2004-04-23 JP JP2004128330A patent/JP2005308636A/en not_active Abandoned
-
2005
- 2005-01-20 TW TW094101636A patent/TWI253887B/en not_active IP Right Cessation
- 2005-03-07 CN CNB2005100526357A patent/CN100507529C/en not_active Expired - Fee Related
- 2005-03-18 KR KR1020050022758A patent/KR100737084B1/en not_active IP Right Cessation
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102095737B (en) * | 2010-12-23 | 2012-09-05 | 东莞市升力智能科技有限公司 | Single-workbench automatic detection machine for surface defects of flexible printed circuit |
| CN102095737A (en) * | 2010-12-23 | 2011-06-15 | 东莞市升力智能科技有限公司 | A single-table flexible printed circuit surface defect automatic detection machine |
| CN103376262A (en) * | 2012-04-26 | 2013-10-30 | 技佳唯斯股份有限公司 | Optical detection device |
| CN103376059A (en) * | 2012-04-26 | 2013-10-30 | 技佳唯斯股份有限公司 | Optical inspection device |
| CN103376262B (en) * | 2012-04-26 | 2016-04-27 | 技佳唯斯股份有限公司 | Optical detection apparatus |
| CN107024832B (en) * | 2015-11-09 | 2020-09-15 | 艾斯迈科技股份有限公司 | Photomask detection device and method thereof |
| CN107024832A (en) * | 2015-11-09 | 2017-08-08 | 艾斯迈科技股份有限公司 | Mask inspection device and method thereof |
| WO2017140069A1 (en) * | 2016-02-16 | 2017-08-24 | 京东方科技集团股份有限公司 | Substrate surface information detection apparatus and substrate surface information detection method |
| US10184902B2 (en) | 2016-02-16 | 2019-01-22 | Boe Technology Group Co., Ltd. | Substrate surface information detection device and substrate surface information detection method |
| CN110178021A (en) * | 2017-12-19 | 2019-08-27 | 法国圣戈班玻璃厂 | Improved cleaning inspection system |
| CN110361395A (en) * | 2019-08-06 | 2019-10-22 | 天津日博工业技术有限公司 | A kind of waterproof ventilated membrane defect test method and apparatus based on machine vision |
| CN111487849A (en) * | 2020-05-14 | 2020-08-04 | Tcl华星光电技术有限公司 | Alignment system and alignment method of exposure machine |
| CN114252014A (en) * | 2021-12-24 | 2022-03-29 | 长飞光纤光缆股份有限公司 | System and method for testing mark size of photomask substrate |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20060044422A (en) | 2006-05-16 |
| JP2005308636A (en) | 2005-11-04 |
| TW200536450A (en) | 2005-11-01 |
| TWI253887B (en) | 2006-04-21 |
| KR100737084B1 (en) | 2007-07-06 |
| CN100507529C (en) | 2009-07-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100507529C (en) | Optical type appearance testing method and optical type appearance testing device | |
| US6610991B1 (en) | Electronics assembly apparatus with stereo vision linescan sensor | |
| JPH02251200A (en) | Board acsembling method, board inspection method and device | |
| KR100722102B1 (en) | Visual inspection apparatus and method | |
| CN1501073A (en) | Inspection method and device of display panel | |
| CN101038260A (en) | Base board checking device | |
| US6958769B2 (en) | High resolution sheet metal scanner with independent tracking light source | |
| JPH01310485A (en) | Defect information detecting device | |
| CN114585912A (en) | Calibration panel, calibration device for panel inspection, and calibration method for panel inspection device | |
| CN1703071A (en) | Substrate inspection apparatus | |
| CN1448043A (en) | Three-D inspection of leaded Ics | |
| JP2000039307A (en) | Semiconductor inspection equipment | |
| CN101048058A (en) | A component placement unit as well as a component placement device comprising such a component placement unit | |
| CN115372375A (en) | Wafer detection device and detection method | |
| CN202599864U (en) | Optical measuring equipment | |
| CN1470861A (en) | Lens detecting tool | |
| JPS63134940A (en) | Pattern inspection device | |
| CN1193584C (en) | Structure for fixing camera device, camera component and iamge read access device | |
| CN1251421A (en) | Device and apparatus for calibration of elements | |
| JPH0682732B2 (en) | IC package lead terminal floating amount inspection device | |
| WO2009122765A1 (en) | Side-viewing optical member and image processing system | |
| KR100576392B1 (en) | Vision inspection device | |
| KR102742003B1 (en) | Inspection apparatus and substrate processing apparatus | |
| JP2007303824A (en) | Method and device for fluorescent magnetic particle testing | |
| JP6469926B1 (en) | Chip backside imaging device and bonding device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090701 Termination date: 20110307 |