CN109632829A - Glass substrate macro inspection apparatus - Google Patents
Glass substrate macro inspection apparatus Download PDFInfo
- Publication number
- CN109632829A CN109632829A CN201811603534.8A CN201811603534A CN109632829A CN 109632829 A CN109632829 A CN 109632829A CN 201811603534 A CN201811603534 A CN 201811603534A CN 109632829 A CN109632829 A CN 109632829A
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- Prior art keywords
- frame
- glass substrate
- backlight
- inspection apparatus
- macro inspection
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
This disclosure relates to a kind of glass substrate macro inspection apparatus, including the first frame (1)；It is fixed on first frame (1) for carrying the platform (2) of glass substrate to be checked；It is set in parallel the backlight (3) on first frame (1) with the platform (2), backlight (3) can be rotated by axis of the normal of its end face；Be sticked the side towards glass substrate of the backlight (3) polaroid (31) and set on first frame (1) for drive backlight (3) rotate the first revolving part (4).It can only be through the principle of the light in specific direction using polaroid (31), as backlight (3) is rotated by axis of the normal of its end face, so as to irradiating the defect of different characteristic on glass substrate to be checked, the efficiency of defect inspection and comprehensive is improved.
Description
Technical field
This disclosure relates to FPD glass substrate detection field, and in particular, to a kind of glass substrate macro -graph dress
It sets.
Background technique
With the development of technology with the demand in market, pixel and aperture opening ratio for glass substrate require higher and higher, glass
Glass substrate, which is routed to miniaturization, the cellularised direction of glass substrate array, to be developed, and causes the inspection of glass substrate defect further difficult.
Currently, market top glass substrate flaw detection apparatus mostly uses the surface of backlight direct irradiation glass substrate, inspection
Survey personnel observe at station in the other side of glass substrate.Since glass substrate needs to undergo multiple tracks work during manufacture
Sequence, it is thus possible to have the defects that a variety of different characteristics, it can not be by different characteristic only with the mode of backlight direct irradiation
What defect was distinguished displays, not comprehensive so as to cause defect inspection, and defect rate increases.
Summary of the invention
Purpose of this disclosure is to provide a kind of glass substrate macro inspection apparatus, to solve existing glass substrate macro -graph
The incomplete problem of apparatus and defect inspection.
To achieve the goals above, the disclosure provides a kind of glass substrate macro inspection apparatus, comprising: the first frame；It is flat
Platform is fixed on first frame, for carrying glass substrate to be checked；Backlight is arranged with the platform parallel
On first frame, and it can be rotated by axis of the normal of its end face；Polaroid, the polaroid are sticked in the backlight
The side towards glass substrate of plate；First revolving part is arranged on first frame, for driving the backlight to turn
It is dynamic.
Optionally, first frame is configured to cuboid framework, and the platform is fixed on the outside of first frame,
The backlight is contained in the inside of first frame, and can rotate within the scope of 0 ° -360 °.
Optionally, the backlight is positive polygonal panel or circular slab, and the shaft of the backlight is at its geometric center
Vertical line.
Optionally, the glass substrate macro inspection apparatus further includes the second frame, and first frame is rotationally set
It sets on second frame, so that the glass substrate and the backlight can be towards multiple directions.
Optionally, the second revolving part is provided on second frame, first frame is connected to second rotation
On the output shaft of part.
Optionally, second frame is configured to U-frame frame, and first frame is connected to the two sides of the U-frame frame
Side, and can be rotated within the scope of 0 ° -360 °.
Optionally, the glass substrate macro inspection apparatus further includes pallet, and second frame is set in which can slide back and forth
It sets on the pallet.
Optionally, the sliding rail that front and back extends is provided on the pallet, second frame with the sliding rail by sliding
The sliding block of cooperation is arranged on the sliding rail, driven in translation part is additionally provided on the pallet, second frame is connected to institute
State the power output end of driven in translation part.
Optionally, the backlight includes LED light.
Optionally, the polaroid is removably mounted in the backlight.
Through the above technical solutions, the glass substrate macro inspection apparatus that the disclosure provides is provided with and glass to be checked
The backlight of substrate-parallel setting, and be sticked in the side towards glass substrate of backlight and have polaroid, utilize polaroid only
Can through specific direction light principle, with backlight using the normal of its end face be axis rotation, so as to irradiate to
The defect of different characteristic on the glass substrate of inspection improves the efficiency of defect inspection and comprehensive.
Other feature and advantage of the disclosure will the following detailed description will be given in the detailed implementation section.
Detailed description of the invention
Attached drawing is and to constitute part of specification for providing further understanding of the disclosure, with following tool
Body embodiment is used to explain the disclosure together, but does not constitute the limitation to the disclosure.In the accompanying drawings:
Fig. 1 is the structural schematic diagram for the glass substrate macro inspection apparatus that a kind of illustrative embodiments of the disclosure provide.
Fig. 2 is the front view of glass substrate macro inspection apparatus shown in fig. 1.
Fig. 3 is the structural schematic diagram of 90 ° of the first frame member of glass substrate macro inspection apparatus shown in fig. 1.
Fig. 4 is the structural schematic diagram for the backlight that a kind of illustrative embodiments of the disclosure provide.
Fig. 5 is the structural schematic diagram for the pallet that a kind of illustrative embodiments of the disclosure provide.
Description of symbols
1 first frame, 2 platform
21 3 backlights of buckle
31 polaroid, 4 first revolving part
41 mounting plate, 5 second frame
6 second revolving part, 61 shaft
7 pallet, 71 stop block
72 mounting bracket, 73 idler wheel
8 sliding rail, 9 driven in translation part
Specific embodiment
It is described in detail below in conjunction with specific embodiment of the attached drawing to the disclosure.It should be understood that this place is retouched
The specific embodiment stated is only used for describing and explaining the disclosure, is not limited to the disclosure.
In the disclosure, in the absence of explanation to the contrary, the noun of locality used such as " upper and lower " is according to respective drawings
What the direction of instruction was defined, with reference to attached drawing 1, the position of the first frame be it is upper, under the position of pallet is, " forward and backward " is root
It is defined on the basis of the direction that sliding rail translates according to use habit by glass substrate macro inspection apparatus.In addition, the disclosure uses
Term " first ", " second " etc. be not have succession and importance to distinguish an element and another element.Below
Description when being related to attached drawing, unless otherwise indicated, the same numbers in different drawings indicate the same or similar elements.
With reference to figures 1 through Fig. 3, the disclosure provides a kind of glass substrate macro inspection apparatus, including the first frame 1, platform
2, backlight 3 and the first revolving part 4, platform 2 is fixed on the first frame 1, for carrying glass substrate to be checked, backlight
3 settings parallel with platform 2 can be rotated by axis of the normal of its end face on the first frame 1, backlight 3 towards
The side of glass substrate, which is sticked, polaroid 31, the first revolving part 4 is additionally provided on the first frame 1, for driving backlight 3
Rotation.Specifically, can be set on the first frame 1 with the first revolving part mounting plate 41 disposed in parallel of platform 2, to
First revolving part 4 is installed, the first revolving part 4 can be used ordinary motor, stepper motor, servo motor or other can realize rotational work
Can mechanism, the power output shaft of the first revolving part 4 is connected with backlight 3, to realize that normal of the backlight 3 around its end face be
Axis rotation.
Polaroid 31 is also known as polarized light piece, has the function of changing light beam polarization direction.Natural light is penetrating polaroid 31
When, the direction of vibration light vertical with 31 transmission axis of polaroid will be absorbed, and only be left direction of vibration through light and polaroid penetrates
The parallel polarised light of axis.Since glass substrate needs to undergo multiple working procedure during manufacture, it is thus possible to there are it is a variety of not
With the defect of feature, the defect of these different characteristics need through different directions light just it is observed that.
It is as the first revolving part 4 drives the normal of backlight 3 and the polaroid 31 being attached in backlight 3 around its end face
When axis rotates, also changes therewith through the direction of the light of polaroid 31, inspection personnel is seen on the glass substrate
The defect for observing different characteristic improves the efficiency of defect inspection and comprehensive.
As depicted in figs. 1 and 2, the first frame structure 1 is it is so structured that cuboid framework, which can be with more
Crossbeam is that rib is configured to hollow frame.Platform 2 is fixed on the outside of the first frame 1, and backlight 3 is contained in the interior of the first frame 1
Side, and can be rotated within the scope of 0 ° -360 °, that is, so that backlight 3 is in rotation, edge will not be generated with the first frame 1
Interference, in addition 4 needs of the first revolving part one-directionally rotate.
Further, backlight 3 can be positive polygonal panel or circular slab, and the shaft of backlight 3 is at its geometric center
Vertical line, to guarantee balance of the backlight 3 in rotation, such as with reference to attached drawing 4, the backlight 3 in present embodiment can
Think regular polygon plate.
With reference to attached drawing 2, in an embodiment of the present disclosure, glass substrate macro inspection apparatus can also include second
Frame 5, the first frame 1 are rotatably arranged on the second frame 5, so that glass substrate and backlight 3 can be towards multiple sides
To facilitate defect of the inspection personnel from multiple and different directions on glass substrate.In this way, checking glass baseplate surface
Defect when, the angle of the first frame 1 can be adjusted first, make its face inspection personnel, pass through the first actuator 4 drive backlight
Plate 3 rotates, to observe different defects of the glass substrate under the illumination of different directions.
Buckle 21 can be set on the platform 2 for carrying glass substrate to be checked, by glass substrate locking flat
In platform 2, so that glass substrate will not be deviate from when the second frame 5 rotates out of platform 2.However the disclosure and unlimited
Glass substrate is limited in the concrete mode in platform 2 by system, for example, circlip is arranged on 2 inner wall of platform, glass substrate is limited
Making the other modes in platform 2 can be applied in the disclosure.
To realize the first frame 1 relative to the rotatable purpose of the second frame 5, the can be set on the second frame 5
Two revolving parts 6, the first frame 1 are connected on the output shaft of the second revolving part 6.It is similar with the first revolving part 4, the second revolving part
6 can also be used ordinary motor, stepper motor, servo motor or other can realize the mechanism of rotation function.
Further, as shown in Figure 1 to Figure 3, the second frame 5 is it is so structured that U-frame frame, the bottom of the U-frame frame are made
For supporting surface, the first frame 1 is connected to the two sides of U-frame frame.Specifically, the second revolving part 6 can be fixed on U-frame frame
A side, the first frame 1 are connected to its output shaft, shaft can be set between the other end of U-frame frame and the first frame 1
61, which can provide the support force to the first frame 1 in the case where not influencing the first frame 1 and rotating.Further,
Second revolving part 6 can drive the first frame 1 to rotate within the scope of 0 ° -360 °, interfere to avoid with the second frame 5, the second rotation
Turn the one-directional rotation of part 6.Such as in the embodiment shown in fig. 3, the bottom level of U-frame frame extends, and two sides are vertical
Extending, distance of second revolving part 6 apart from U-shaped base of frame is greater than the rotation center of backlight 3 and the longest distance of its edge,
The rotation center of backlight 3 at a distance from U-shaped frame sides also greater than the rotation center of backlight 3 and its edge longest away from
From in this way, edge will not contact U-frame frame always when backlight 3 rotates.
According to an embodiment of the present disclosure, glass substrate macro inspection apparatus further includes pallet 7, and the second frame 5 can
It is arranged on pallet 7 slidingly back and forth.So as to adjust glass substrate and inspection personnel to be checked as needed in front and back
The distance between direction.
Specifically, with reference to attached drawing 1 and 5, can be set the sliding rail 8 that front and back extends on pallet 7, the second frame 5 by with
The sliding block that sliding rail 8 is slidably matched is arranged on sliding rail 8, i.e. is fixed with the sliding block being slidably matched with sliding rail 8 on the second frame 5.Frame
Driven in translation part 9 is additionally provided on platform 7, the second frame 5 is connected to the power output end of driven in translation part 9, thus driving second
The anterior-posterior translation on sliding rail 8 of frame 5.It is also provided with stop block 71 at the both ends of sliding rail 8, to prevent the second frame 5 from moving
Inertia is larger and deviates from from sliding rail 8.It should be understood that sliding rail and sliding block cooperation are not that the disclosure realizes that the second frame 5 exists
The sole mode of anterior-posterior translation on pallet 7, other can realize the mode of identical purpose, such as the mode that setting pulley slides,
It can be applied in the disclosure.Driven in translation part 9 can be made of motor and speed reducer structure, and deceleration mechanism can use electric cylinders
Or the mechanisms such as ball-screw.
To make entire glass substrate macro inspection apparatus more firm at work, the frame surrounding of pallet 7 can
To be provided with multiple mounting brackets 72, mounting bracket 72 is equipped with threaded hole, and one end is connected on pallet 7, the other end and peace
Installed floor is connected.In addition, being provided in the bottom of bracket can contract for convenience of the movement of entire glass substrate macro inspection apparatus
Peace is fixed after glass substrate macro inspection apparatus is moved to installation site in the idler wheel 73 returned again after packing up idler wheel 73
Dress.
According to an embodiment of the present disclosure, backlight 3 can be with LED light, in other embodiments, not according to inspection
With the needs of defect, backlight 3 can also include that other can issue the lamp of natural light.
Further more comprehensively to check the defect on glass substrate, the replaceable polaroid with different polarizing properties
31, in addition, when glass substrate difference to be checked, it is also desirable to be adapted to corresponding polaroid 31.Polaroid 31 is removably pacified
In backlight 3, then make the above process convenient and efficient.
The preferred embodiment of the disclosure is described in detail in conjunction with attached drawing above, still, the disclosure is not limited to above-mentioned reality
The detail in mode is applied, in the range of the technology design of the disclosure, a variety of letters can be carried out to the technical solution of the disclosure
Monotropic type, these simple variants belong to the protection scope of the disclosure.
It is further to note that specific technical features described in the above specific embodiments, in not lance
In the case where shield, can be combined in any appropriate way, in order to avoid unnecessary repetition, the disclosure to it is various can
No further explanation will be given for the combination of energy.
In addition, any combination can also be carried out between a variety of different embodiments of the disclosure, as long as it is without prejudice to originally
Disclosed thought equally should be considered as disclosure disclosure of that.
Claims (10)
1. a kind of glass substrate macro inspection apparatus characterized by comprising
First frame (1)；
Platform (2) is fixed on first frame (1), for carrying glass substrate to be checked；
Backlight (3) is set in parallel on first frame (1) with the platform (2), and can be with the normal of its end face
For axis rotation；
Polaroid (31), the polaroid (31) are sticked in the side towards glass substrate of the backlight (3)；
First revolving part (4) is arranged on first frame (1), for driving the backlight (3) to rotate.
2. glass substrate macro inspection apparatus according to claim 1, which is characterized in that the first frame (1) construction
For cuboid framework, the platform (2) is fixed on the outside of first frame (1), and the backlight (3) is contained in described
The inside of one frame (1), and can be rotated within the scope of 0 ° -360 °.
3. glass substrate macro inspection apparatus according to claim 1, which is characterized in that the backlight (3) is positive more
Side shape plate or circular slab, the shaft of the backlight (3) are the vertical line at its geometric center.
4. glass substrate macro inspection apparatus according to any one of claim 1-3, which is characterized in that the glass base
Plate macro inspection apparatus further includes the second frame (5), and first frame (1) is rotatably arranged in second frame (5)
On, so that the glass substrate and the backlight (3) can be towards multiple directions.
5. according to glass substrate macro inspection apparatus described in right 4, which is characterized in that be provided on second frame (5)
Second revolving part (6), first frame (1) are connected on the output shaft of second revolving part (6).
6. glass substrate macro inspection apparatus according to claim 4, which is characterized in that the second frame (5) construction
For U-frame frame, first frame (1) is connected to the two sides of the U-frame frame, and can rotate within the scope of 0 ° -360 °.
7. glass substrate macro inspection apparatus according to claim 4, which is characterized in that the glass substrate macro -graph
Device further includes pallet (7), and second frame (5) is arranged on the pallet (7) in which can slide back and forth.
8. glass substrate macro inspection apparatus according to claim 7, which is characterized in that be provided on the pallet (7)
The sliding rail (8) that front and back extends, second frame (5) are arranged by the sliding block being slidably matched with the sliding rail (8) in the cunning
It on rail (8), is additionally provided with driven in translation part (9) on the pallet (7), second frame (5) is connected to the driven in translation
The power output end of part (9).
9. glass substrate macro inspection apparatus according to claim 1, which is characterized in that the backlight (3) includes LED
Lamp.
10. glass substrate macro inspection apparatus according to claim 1, which is characterized in that the polaroid (31) is removable
It is mounted on unloading on the backlight (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811603534.8A CN109632829B (en) | 2018-12-26 | 2018-12-26 | Glass substrate macroscopic inspection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811603534.8A CN109632829B (en) | 2018-12-26 | 2018-12-26 | Glass substrate macroscopic inspection device |
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| Publication Number | Publication Date |
|---|---|
| CN109632829A true CN109632829A (en) | 2019-04-16 |
| CN109632829B CN109632829B (en) | 2021-09-24 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811603534.8A Active CN109632829B (en) | 2018-12-26 | 2018-12-26 | Glass substrate macroscopic inspection device |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110286507A (en) * | 2019-06-27 | 2019-09-27 | 苏州精濑光电有限公司 | A kind of substrate detection apparatus |
| CN110286508A (en) * | 2019-06-29 | 2019-09-27 | 苏州精濑光电有限公司 | A kind of testing agency and detection method |
| CN110793977A (en) * | 2019-10-28 | 2020-02-14 | 芜湖东旭光电科技有限公司 | Glass substrate contrast detection device |
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| CN110286507A (en) * | 2019-06-27 | 2019-09-27 | 苏州精濑光电有限公司 | A kind of substrate detection apparatus |
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| CN110793977B (en) * | 2019-10-28 | 2022-05-31 | 芜湖东旭光电科技有限公司 | Glass substrate contrast detection device |
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|---|---|
| CN109632829B (en) | 2021-09-24 |
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