TWI746328B - Resin molding device and manufacturing method of resin molded product - Google Patents
Resin molding device and manufacturing method of resin molded product Download PDFInfo
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- TWI746328B TWI746328B TW109146362A TW109146362A TWI746328B TW I746328 B TWI746328 B TW I746328B TW 109146362 A TW109146362 A TW 109146362A TW 109146362 A TW109146362 A TW 109146362A TW I746328 B TWI746328 B TW I746328B
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- 238000000465 moulding Methods 0.000 title claims abstract description 170
- 229920005989 resin Polymers 0.000 title claims abstract description 162
- 239000011347 resin Substances 0.000 title claims abstract description 162
- 238000004519 manufacturing process Methods 0.000 title claims description 32
- 230000007246 mechanism Effects 0.000 claims abstract description 103
- 238000003825 pressing Methods 0.000 claims abstract description 38
- 238000013459 approach Methods 0.000 claims description 13
- 239000000758 substrate Substances 0.000 abstract description 103
- 238000005538 encapsulation Methods 0.000 abstract description 7
- 235000012431 wafers Nutrition 0.000 description 21
- 239000007788 liquid Substances 0.000 description 15
- 238000000034 method Methods 0.000 description 9
- 238000003860 storage Methods 0.000 description 9
- 239000000463 material Substances 0.000 description 6
- 239000003795 chemical substances by application Substances 0.000 description 5
- 229920002050 silicone resin Polymers 0.000 description 4
- 230000007723 transport mechanism Effects 0.000 description 4
- 238000000748 compression moulding Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000004806 packaging method and process Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229920001187 thermosetting polymer Polymers 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000001746 injection moulding Methods 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 230000008520 organization Effects 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 229920005992 thermoplastic resin Polymers 0.000 description 2
- 238000001721 transfer moulding Methods 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- 238000000265 homogenisation Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000010295 mobile communication Methods 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/12—Moulds or cores; Details thereof or accessories therefor with incorporated means for positioning inserts, e.g. labels
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/565—Moulds
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Casting Or Compression Moulding Of Plastics Or The Like (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Abstract
本發明的課題是提供一種即使不將彈性部件的彈性常數設定得過大,也可充分逼近成型物件物的樹脂成型裝置。該課題的解決方法為,一種樹脂成型裝置,其具有用於對作為成型對象物的基板5進行成型的成型模,其特徵在於,所述成型模具有上模100和用於決定與上模100下表面平行方向的基板5的位置的定位部件141,所述樹脂成型裝置進一步包括成型對象物保持機構150、成型對象物活塊機構110、推件203、按壓機構210。本發明的樹脂成型裝置可用於對成型物件物進行樹脂封裝等。The subject of the present invention is to provide a resin molding apparatus that can sufficiently approximate a molded object even if the elastic constant of the elastic member is not set too large. The solution to this problem is a resin molding apparatus having a molding die for molding a substrate 5 as a molding object, characterized in that the molding die includes an upper die 100 and an upper die 100 for determining The positioning member 141 for the position of the substrate 5 in the direction parallel to the lower surface. The resin molding apparatus further includes a molded object holding mechanism 150, a molded object block mechanism 110, a pusher 203, and a pressing mechanism 210. The resin molding apparatus of the present invention can be used for resin encapsulation of molded objects and the like.
Description
本發明關於樹脂成型裝置及樹脂成型品的製造方法。The present invention relates to a resin molding device and a method of manufacturing a resin molded product.
在樹脂成型品的製造中,有時會用到定位機構以決定作為樹脂成型的成型對象物的基板的位置。具體而言,如專利文獻1圖6~8所示,在傳遞樹脂成型裝置中,已知將配置於上模下表面的基板進行定位的定位機構。上述定位機構設有相對於定位用基準銷,將配置於上模的基板逼近以使其接觸的基板活塊機構。在該結構中,因為基板配置於上模的下表面,為了不使基板掉落,設有基板卡定機構,同時設有施加旋轉力的基板活塊機構。In the manufacture of resin molded products, a positioning mechanism is sometimes used to determine the position of a substrate that is a molded object of resin molding. Specifically, as shown in FIGS. 6 to 8 of
[先前技術文獻] 專利文獻1:特開2010-027890號公報。 [Prior Technical Literature] Patent Document 1: JP 2010-027890 A.
[發明要解決的課題][Problems to be Solved by Invention]
在專利文獻1的圖6~8所示的定位機構中,通過基板活塊機構的旋轉操作使基板移動,使用扭簧(彈性部件)以施加基板活塊機構的旋轉力。在像這樣使用了基板活塊機構的定位中,逼近力小,便會有作為成型對象物的基板不能充分逼近的風險。為了解決上述問題,可考慮增大扭簧的彈簧常數從而增強逼近力。In the positioning mechanism shown in FIGS. 6 to 8 of
但是,在專利文獻1所述的定位機構中,因為上模下方配置有成型物件物,需要將成型物件物插入基準銷和按壓卡定片之間。因此,需要使按壓部件向與逼近操作時的相反方向旋轉,彈性部件的彈簧常數一旦變大,便有妨礙成型物件物插入操作的風險。However, in the positioning mechanism described in
因此,本發明的目的是提供一種即使不將彈性部件的彈簧常數設定得過大,也可充分逼近成型物件物的樹脂成型裝置及樹脂成型品的製造方法。 [解決課題的方法] Therefore, the object of the present invention is to provide a resin molding apparatus and a method for manufacturing a resin molded product that can sufficiently approximate the molded object even if the spring constant of the elastic member is not set too large. [Methods to solve the problem]
為了達成所述目的,本發明的樹脂成型裝置是具有用於使成型物件物成型的成型模的樹脂成型裝置,其特徵在於: 所述成型模具有上模和定位部件,所述定位部件用於決定與所述上模的下表面平行方向上的所述成型對象物的位置, 所述樹脂成型裝置進一步包括成型對象物保持機構、成型對象物活塊機構、推件、按壓機構, 通過所述成型對象物保持機構可使所述成型對象物保持在所述上模下表面, 所述成型對象物活塊機構包括活塊可動部、彈性部件, 所述活塊可動部可以以與所述上模下表面平行方向上的旋轉軸為中心旋轉, 在所述上模的下方,可通過所述彈性部件的彈性向所述活塊可動部施加旋轉力並按壓所述成型對象物,以使所述成型對象物向所述定位部件靠近, 通過所述推件按壓上推所述活塊可動部的下表面的一部分,由此可向所述彈性部件施加應力,使所述活塊可動部向與所述成型物件物逼近操作時的相反方向旋轉, 通過所述按壓機構,所述活塊可動部可在所述旋轉軸的下方橫向地被按壓。 In order to achieve the above-mentioned object, the resin molding apparatus of the present invention is a resin molding apparatus having a molding die for molding a molded object, and is characterized in that: The forming mold has an upper mold and a positioning member, and the positioning member is used to determine the position of the molded object in a direction parallel to the lower surface of the upper mold, The resin molding apparatus further includes a molded object holding mechanism, a molded object block mechanism, a pusher, and a pressing mechanism, The molded object can be held on the lower surface of the upper mold by the molded object holding mechanism, The movable block mechanism of the molded object includes a movable block and an elastic member, The movable part of the movable block can rotate about a rotation axis in a direction parallel to the lower surface of the upper mold as a center, Below the upper mold, a rotational force can be applied to the movable part of the movable block by the elasticity of the elastic member and the molded object can be pressed so that the molded object approaches the positioning member, A part of the lower surface of the movable portion of the movable block is pushed up by the pusher, thereby applying a stress to the elastic member, so that the movable portion of the movable block is opposite to that during the approaching operation of the molded object Direction rotation, By the pressing mechanism, the movable block of the movable block can be laterally pressed below the rotating shaft.
本發明的樹脂成型品的製造方法是使用了樹脂成型裝置的樹脂成型品的製造方法,其特徵在於: 所述樹脂成型裝置是本發明的樹脂成型裝置, 所述樹脂成型品的製造方法包括調整所述成型物件物的位置的成型物件物位置調整步驟,和對所述成型物件物進行樹脂成型的樹脂成型步驟, 所述成型物件物位置調整步驟包括 第一成型物件物逼近步驟,在所述上模的下方,通過所述彈性部件的彈性向所述活塊可動部施加旋轉力並按壓所述成型物件物,進行第一成型物件物逼近操作,以使所述成型物件物向所述定位部件靠近, 活塊可動部上推步驟,通過所述推件按壓上推所述活塊可動部的下表面的一部分,由此向所述彈性部件施加應力,使所述活塊可動部向與所述第一成型物件物逼近操作時的相反方向旋轉, 第二成型物件物逼近步驟,通過所述按壓機構,所述活塊可動部在所述旋轉軸的下方橫向地被按壓,所述成型對象物向所述定位部件靠近。 [發明的效果] The method of manufacturing a resin molded product of the present invention is a method of manufacturing a resin molded product using a resin molding device, and is characterized in that: The resin molding device is the resin molding device of the present invention, The method of manufacturing the resin molded article includes a molded object position adjustment step of adjusting the position of the molded object, and a resin molding step of resin molding the molded object, The step of adjusting the position of the molded object includes The first molding object approaching step, under the upper mold, applying a rotational force to the movable part of the movable block through the elasticity of the elastic member and pressing the molding object to perform the first molding object approaching operation, So that the molded object approaches the positioning component, In the step of pushing up the movable part of the movable block, a part of the lower surface of the movable part of the movable block is pressed and pushed up by the pusher, thereby applying stress to the elastic member, causing the movable part of the movable block to face the first A shaped object rotates in the opposite direction when approaching, In the second molding object approaching step, the movable portion of the movable block is laterally pressed below the rotating shaft by the pressing mechanism, and the molding object approaches the positioning member. [Effects of the invention]
根據本發明,可提供一種即使不將彈性部件的彈簧常數設定得過大,也可充分逼近成型物件物的樹脂成型裝置及樹脂成型品的製造方法。According to the present invention, it is possible to provide a resin molding apparatus and a method for manufacturing a resin molded product that can sufficiently approximate the molded object even if the spring constant of the elastic member is not set too large.
接下來,將以舉例的方式對本發明進一步詳細地進行說明。但是,本發明並不受限於以下說明。Next, the present invention will be described in further detail by way of examples. However, the present invention is not limited to the following description.
在本發明的樹脂成型裝置中,例如所述成型對象物活塊機構可以配置於所述上模。In the resin molding apparatus of the present invention, for example, the molding target flap mechanism may be arranged on the upper mold.
本發明的樹脂成型裝置例如進一步具有搬送所述成型物件物的成型對象物搬送機構,所述按壓機構可以配置於所述成型對象物搬送機構。The resin molding apparatus of the present invention further includes, for example, a molded object conveying mechanism that conveys the molded object, and the pressing mechanism may be arranged in the molded object conveying mechanism.
本發明的樹脂成型裝置例如進一步具有支援所述成型物件物的成型對象物支援機構, 所述成型對象物支援機構包括成型對象物支援可動部、彈性部件, 所述成型對象物支援可動部可以以與所述上模下表面平行方向上的旋轉軸為中心旋轉。 The resin molding apparatus of the present invention further has, for example, a molded object support mechanism that supports the molded object. The molded object supporting mechanism includes a molded object supporting movable part and an elastic member, The molded object supporting movable portion may be rotated about a rotation axis in a direction parallel to the lower surface of the upper mold.
在本發明的樹脂成型裝置中,例如所述活塊可動部的旋轉軸可以位於所述成型對象物支援可動部的旋轉軸的上方。In the resin molding apparatus of the present invention, for example, the rotation axis of the movable block may be located above the rotation axis of the molding object supporting movable portion.
在本發明的樹脂成型品的製造方法中,例如所述成型物件物位置調整步驟進一步包括成型物件物溫度均勻化步驟,在所述第一成型物件物逼近步驟後,所述第二成型物件物逼近步驟前,使所述成型物件物的溫度均勻化。In the method of manufacturing a resin molded article of the present invention, for example, the step of adjusting the position of the molded article further includes a step of uniformizing the temperature of the molded article, and after the step of approaching the first molded article, the second molded article Before the approaching step, the temperature of the molded object is homogenized.
在本發明的樹脂成型品的製造方法中,例如所述成型物件物溫度均勻化步驟可以包括保持操作,通過所述成型對象物保持機構,將所述成型對象物保持在所述上模下表面。In the method of manufacturing a resin molded product of the present invention, for example, the step of uniformizing the temperature of the molded object may include a holding operation, and the molded object is held on the lower surface of the upper mold by the molded object holding mechanism .
在本發明的樹脂成型品的製造方法中,例如所述樹脂成型品可以是電子部件。In the method of manufacturing a resin molded article of the present invention, for example, the resin molded article may be an electronic component.
根據本發明,例如具有按壓機構,橫向地按壓活塊可動部,讓成型物件物向定位部件靠近,以及通過上述按壓機構進行第二成型物件物逼近操作,由此,可對成型物件物實現更精準的定位。另外,由此,例如可充分進行成型物件物的逼近操作,實現更精準的成型物件物的定位,而不妨礙向成型模配置成型物件物的操作。According to the present invention, for example, it has a pressing mechanism that presses the movable part of the movable block laterally to allow the molded object to approach the positioning member, and the second molded object is approached by the above-mentioned pressing mechanism, thereby, the molded object can be further changed. Precise positioning. In addition, as a result, for example, the approaching operation of the molded object can be fully performed, and a more accurate positioning of the molded object can be realized without hindering the operation of arranging the molded object to the molding die.
在本發明中,樹脂成型方法沒有特殊限制,例如可以是壓縮成型,可以是傳遞成型,也可以是射出成型等。In the present invention, the resin molding method is not particularly limited. For example, it may be compression molding, transfer molding, or injection molding.
在本發明中,“成型模”例如是金屬模具,但不限於此,也可以是陶瓷模具等。In the present invention, the "molding mold" is, for example, a metal mold, but is not limited to this, and may be a ceramic mold or the like.
在本發明中,樹脂成型品沒有特殊限制,例如可以是僅將樹脂成型的樹脂成型品,也可以是對晶片等部件進行了樹脂封裝的樹脂成型品。在本發明中,樹脂成型品例如如上所述,可以是電子部件等。In the present invention, the resin molded product is not particularly limited. For example, it may be a resin molded product in which only resin is molded, or a resin molded product in which components such as a wafer are resin-encapsulated. In the present invention, the resin molded product may be an electronic component or the like as described above.
在本發明中,成型前的樹脂材料和成型後的樹脂沒有特殊限制,例如可以是環氧樹脂和矽酮樹脂等熱固性樹脂,也可以是熱塑性樹脂。並且,還可以是部分包含熱固性樹脂或熱塑性樹脂的複合材料。在本發明中,成型前的樹脂材料的形態例如可以列舉顆粒樹脂、液狀樹脂、片狀樹脂、板狀樹脂、粉狀樹脂等。另外,在本發明中,液狀樹脂可以是在常溫下為液狀,包括通過加熱熔融而成為液狀的熔融樹脂。In the present invention, the resin material before molding and the resin after molding are not particularly limited. For example, they may be thermosetting resins such as epoxy resins and silicone resins, or thermoplastic resins. In addition, it may be a composite material partially containing thermosetting resin or thermoplastic resin. In the present invention, the form of the resin material before molding includes, for example, pellet resin, liquid resin, sheet resin, plate resin, and powder resin. In addition, in the present invention, the liquid resin may be in a liquid state at room temperature, and includes a molten resin that is melted by heating and becomes a liquid state.
並且,一般而言,“電子部件”有時指樹脂封裝前的晶片,有時指將晶片進行了樹脂封裝的狀態,但在本發明中,在僅稱“電子部件”的情況下,除非另外指明,表示所述晶片被樹脂封裝的電子部件(作為成品的電子部件)。在本發明中,“晶片”表示樹脂封裝前的晶片,具體而言是指例如積體電路(IC)、LED晶片、半導體晶片、電力控制用半導體元件等的晶片。在本發明中,為了與樹脂封裝後的電子部件進行區分,將樹脂封裝前的晶片簡稱為“晶片”。但是,本發明的“晶片”是樹脂封裝前的晶片即可,沒有特殊限制,可以不是晶片狀。In addition, generally speaking, "electronic components" sometimes refer to a wafer before resin encapsulation, and sometimes refer to a state where the wafer is resin-encapsulated. However, in the present invention, when only "electronic components" are referred to, unless otherwise stated Indicate, it means that the chip is resin-encapsulated electronic component (as a finished electronic component). In the present invention, “wafer” means a wafer before resin encapsulation, and specifically refers to a wafer such as an integrated circuit (IC), an LED wafer, a semiconductor wafer, and a semiconductor element for power control. In the present invention, in order to distinguish from electronic components after resin encapsulation, the wafer before resin encapsulation is simply referred to as "wafer". However, the "wafer" in the present invention may be a wafer before resin encapsulation, and there is no particular limitation, and it does not have to be a wafer shape.
在本發明中,“倒裝晶片”是指在IC晶片表面部的電極(焊盤)上具有被稱為凸點(bump)的瘤狀的突起狀電極的IC晶片,或該種晶片形態。該晶片例如可以向下(面向下(face down))接合在印刷基板等的佈線部上。所述倒裝晶片例如可以用作無引線接合用的晶片或接合方式的一種。In the present invention, the “flip chip” refers to an IC chip having bump-like protruding electrodes called bumps on the electrodes (pads) on the surface of the IC chip, or this kind of wafer form. This wafer can be bonded to a wiring part such as a printed circuit board downward (face down), for example. The flip chip can be used, for example, as a chip for wireless bonding or one of bonding methods.
在本發明中,樹脂成型的成型物件物沒有特殊限制,例如可以是基板。另外,在本發明中,例如可以是將安裝於基板(成型物件物)的部件(例如晶片、倒裝晶片等)進行樹脂封裝(樹脂成型),製造樹脂成型品。在本發明中,作為樹脂成型的成型對象物的基板(也稱為仲介層(interposer))沒有特殊限制,例如可以是引線框、佈線基板、晶圓、玻璃環氧基板、陶瓷基板、樹脂基板、金屬基板等。基板例如可以是在其一個面或兩個面上安裝有晶片的安裝基板。就所述晶片的安裝方法而言沒有特殊限制,例如可列舉引線接合、倒裝晶片接合等。在本發明中,例如可以通過對安裝基板進行樹脂封裝,來製造晶片被樹脂封裝的電子部件。並且,就通過本發明的樹脂成型裝置而被樹脂封裝的基板的用途而言,沒有特殊限制,例如可列舉LED用基板、移動通訊終端用高頻模組基板、電力控制用模組基板、機械控制用基板等。In the present invention, there is no particular limitation on the molded object molded by the resin, and may be, for example, a substrate. In addition, in the present invention, for example, a component (for example, a wafer, a flip chip, etc.) mounted on a substrate (molded object) may be resin-encapsulated (resin molding) to produce a resin molded product. In the present invention, the substrate (also referred to as an interposer) that is the molded object of resin molding is not particularly limited, and may be, for example, a lead frame, a wiring substrate, a wafer, a glass epoxy substrate, a ceramic substrate, and a resin substrate. , Metal substrate, etc. The substrate may be, for example, a mounting substrate on which a wafer is mounted on one or both surfaces. There is no particular limitation on the mounting method of the wafer, and examples thereof include wire bonding, flip chip bonding, and the like. In the present invention, for example, by resin-encapsulating the mounting substrate, it is possible to manufacture electronic components in which the chip is resin-encapsulated. In addition, there are no particular restrictions on the use of the resin-encapsulated substrate by the resin molding apparatus of the present invention. Examples include LED substrates, high-frequency module substrates for mobile communication terminals, module substrates for power control, and machine control. Substrate and so on.
下文中,將基於圖式對本發明的具體實施例進行說明。為了方便說明,各圖式進行了適當省略、誇張等示意性描述。 [實施例] Hereinafter, specific embodiments of the present invention will be described based on the drawings. For the convenience of description, schematic descriptions such as appropriate omissions, exaggerations, etc. are made in each drawing. [Example]
本實施例對本發明的樹脂成型裝置和樹脂成型品的製造方法的一例進行說明。In this embodiment, an example of the resin molding apparatus and the method of manufacturing a resin molded product of the present invention will be described.
圖1的下表面圖示出了本發明的樹脂成型裝置的一例的上模下表面的主要部分。另外,圖2的截面圖示出了與圖1相同的上模的主要部分的截面圖。圖式示出的上模是本發明的樹脂成型裝置的一部分。另外,在圖2中,為了便於說明,上下顛倒示出上模。即,圖2的上側是上模的下表面側(保持成型對象物的一側)。The bottom view of FIG. 1 shows the main part of the bottom surface of the upper mold of an example of the resin molding apparatus of the present invention. In addition, the cross-sectional view of FIG. 2 shows a cross-sectional view of the main part of the upper mold that is the same as that of FIG. 1. The upper mold shown in the drawing is a part of the resin molding apparatus of the present invention. In addition, in FIG. 2, for convenience of description, the upper mold is shown upside down. That is, the upper side of FIG. 2 is the lower surface side of the upper mold (the side that holds the molded object).
如圖1和圖2所示,上模100的主要構成部分是平板狀的上模基底部件101。上模基底部件101下表面設有成型對象物保持部件102、成型對象物活塊機構110、成型對象物支援機構120、作為定位部件的定位銷141、作為通過成型對象物活塊機構110而彈性變形的活塊構件的活塊銷131。成型對象物活塊機構110包括活塊可動部111、保持部112、作為彈性部件的扭簧113。活塊可動部111和扭簧113通過保持部112保持在上模100下表面。扭簧113的旋轉軸114朝向與上模100下表面平行的方向。活塊可動部111如後所述,可以以與上模100下表面平行方向的旋轉軸114為中心旋轉。成型對象物保持部件102設於上模基底部件101下表面的中央附近。成型對象物保持部件102為平板狀,作為樹脂成型的成型對象物的基板5可保持在成型對象物保持部件102下表面的中央附近的區域。活塊銷131和定位銷141分別安裝在上模基底部件101下表面,同時貫通成型對象物保持部件102,從成型對象物保持部件102下表面突出。活塊銷131和定位銷141以包圍保持成型對象物保持部件102下表面的基板5的區域的方式配置。上模基底部件101設有從其上表面貫通至下表面的貫通孔101a。成型對象物保持部件102設有從其上表面貫通至下表面的貫通孔102a。貫通孔101a和貫通孔102a連通。另外,該樹脂成型裝置進一步具有用於將基板5保持在成型對象物保持部件102下表面的成型對象物保持機構(圖1~5未示出)。如後所述,通過成型對象物保持機構,對貫通孔101a和貫通孔102a內部進行抽吸減壓,由此可將基板5吸附保持在成型對象物保持部件102下表面。另外,成型對象物保持機構沒有特殊限制,例如可以是真空泵等。As shown in FIGS. 1 and 2, the main constituent part of the
成型對象物支援機構120包括成型對象物支援可動部121,保持部122,作為彈性部件的扭簧123。成型對象物支援可動部121和扭簧123通過保持部122保持在上模100下表面。扭簧123的旋轉軸124朝向與上模100下表面平行方向。成型對象物支援可動部121如後所述,可以以與上模100下表面平行方向的旋轉軸124為中心旋轉。The molded
成型對象物支援機構120在基板5端部,支持基板5端部的下表面。以對應基板5的2個邊的方式設有2個成型對象物活塊機構110。如後所述,可通過成型對象物活塊機構110,通過活塊銷131橫向和縱向地對基板5端部施加力,以使基板5端面接觸定位銷141。The molding
接下來,參照圖3~6,說明作為使用了上述樹脂成型裝置的樹脂成型品的製造方法的一部分的成型物件物位置調整步驟的一例。Next, referring to FIGS. 3 to 6, an example of a step of adjusting the position of a molded article as a part of a method of manufacturing a resin molded article using the above-mentioned resin molding apparatus will be described.
首先,如圖3所示,通過成型對象物搬送機構200搬送基板5,同時使成型對象物搬送機構200位於上模100的下方。如圖所示,上述成型對象物搬送機構200具備載置基板5的成型對象物載置部202、按壓成型對象物活塊機構110的活塊可動部111或成型對象物支援機構120的成型對象物支援可動部121使其旋轉的推件203、橫向地按壓成型對象物活塊機構110的按壓機構210、支持上述部件的載荷基座201。按壓機構210具有按壓部件211、桿212、氣缸213。氣缸213安裝在載荷基座201上表面。按壓部件211經由桿212安裝於氣缸213,配置為朝向活塊可動部111橫向地突出。桿212可通過氣缸213的動力進退。通過桿212向活塊可動部111側前進,按壓部件211可向活塊可動部111方向移動,按壓活塊可動部111。另外,作為用於使按壓部件211可進退操作的動力源,此處舉出使用氣缸213的示例進行了說明,但也可使用伺服馬達等其他動力源。First, as shown in FIG. 3, the
另外,在圖3示出的狀態中,活塊可動部111將活塊銷131按壓向保持基板5的區域方向,使其彈性變形,從而基板5無法插入。另外,就成型對象物活塊機構110和成型對象物支援機構120的旋轉軸的位置而言,成型對象物活塊機構110的旋轉軸的位置在更上方,使活塊銷131容易橫向地移動。In addition, in the state shown in FIG. 3, the
接下來如圖4的箭頭X1所示,使載荷基座201上升。由此,2個推件203分別上推成型對象物活塊機構110的活塊可動部111或成型對象物支援機構120的成型對象物支援可動部121的外側端部(活塊可動部上推步驟)。通過上述上推,扭簧113被施加應力,活塊可動部111如該圖箭頭X2所示,向與後述的第一成型物件物逼近操作時的相反方向旋轉。由此,活塊可動部對活塊銷131的按壓解除,因此如圖所示,活塊銷131的彈性變形也得以解除。由此,定位銷141和活塊銷131之間的空間變大,可插入基板5。在上述狀態下,如圖4的箭頭X3所示,使成型對象物載置部202上升,基板5從活塊銷131和定位銷141之間插入,配置在上模100的下方。另外,扭簧113和123的彈簧常數(彈性常數)較佳設定為在此時的推件203上推操作時,可充分進行上推操作的程度。Next, as shown by arrow X1 in FIG. 4, the
接下來,如圖5的箭頭X4所示,使載荷基座201下降。由此,2個推件203分別與成型對象物活塊機構110的活塊可動部111或成型對象物支援機構120的成型對象物支援可動部121的外側端部分開,活塊可動部111和成型對象物支援可動部121回到原來的狀態。即,如圖5的箭頭X5所示,通過扭簧113的彈性,向活塊可動部111施加旋轉力,活塊可動部111的外側端部向下降方向旋轉。此處,通過推件203的上推操作向扭簧113施加應力,因此由於推件203下降,扭簧113產生彈力。由此,如箭頭X6所示,成型對象物活塊機構110的活塊可動部111的內側端部使活塊銷131彈性變形,活塊銷131按壓基板5。通過上述按壓,使基板5移動以向定位銷141靠近(第一基板逼近步驟)。另外,同樣地,通過扭簧123的彈性向成型對象物支援可動部121施加旋轉力,成型對象物支援可動部121的外側端部向下降方向旋轉。由此,成型對象物支援可動部121的內側突出部的上表面接觸基板5端部的下表面,支持基板5端部的下表面。另外,在上述狀態下,上模100的成型對象物保持部件102和基板5之間形成有微小的間隙。另外,成型對象物載置部202的上下方向的位置構成為不因圖5的箭頭X4示出的載荷基座201的下降操作而變化,所以上模100的成型對象物保持部件102的下表面和成型對象物載置部202的上表面的距離不變。另外,在成型對象物載置部202中,以成型對象物支援可動部121不接觸而成型對象物支援可動部121的內側突出部的上表面可以支援基板5的端部的下表面的方式,形成有缺口形狀的避讓部。Next, as shown by arrow X4 in FIG. 5, the
進一步,如圖6所示,通過驅動按壓機構210的氣缸213,使桿212向活塊可動部111側前進。由此,如該圖的箭頭X7所示,按壓部件211向活塊可動部111移動。通過上述移動,在旋轉軸114的下方橫向地按壓活塊可動部111,如該圖的箭頭X8所示,使其向活塊銷131方向旋轉。由此,進行第二成型物件物逼近操作,即經由活塊銷131按壓基板5,讓基板5向定位部件141靠近(第二成型物件物逼近步驟)。例如,在圖5示出的第一成型物件物逼近步驟中,未能使基板5移動至接觸定位銷141時,在圖6示出的第二成型物件物逼近步驟中,可進行逼近操作直至基板5接觸到定位銷141。如上所述,可進行成型物件物位置調整步驟。然後,在第二基板逼近步驟後,如圖6的箭頭A1所示,通過成型對象物保持機構150對貫通孔101a和102a內部進行抽吸減壓。成型對象物保持機構150如上所述,沒有特殊限制,例如可以是真空泵等。由此,如圖所示,吸附基板5,將基板5保持在上模100的成型對象物保持部件102下表面。Furthermore, as shown in FIG. 6, by driving the
另外,在通過圖5示出的成型對象物活塊機構進行的第一成型物件物逼近步驟後,通過圖6示出的按壓機構進行的第二成型物件物逼近步驟前,可以進行為實現基板5溫度均勻化的成型物件物溫度均勻化步驟。具體而言,例如,可以通過在圖5示出的第一成型物件物逼近步驟和圖6示出的第二成型物件物逼近步驟之間留出時間,實現基板5的溫度均勻化。例如,可以通過在圖5示出的第一成型物件物逼近步驟和圖6示出的第二成型物件物逼近步驟之間通過上模100加熱基板5,實現基板5的溫度分佈均勻化。由此,例如,可在減小基板5的翹曲後,進行第二成型物件物逼近步驟。如果在減小基板5的翹曲後進行第二成型物件物逼近步驟,例如可降低由於基板5的變形引起的內部應力的產生。在通過上模100加熱基板5時,例如可在第一成型物件物逼近步驟後將基板5吸附保持在上模100,之後通過上模100加熱基板5,之後解除上模100對基板5的吸附後進行第二成型物件物逼近步驟。In addition, after the first molded object approaching step performed by the molded object block mechanism shown in FIG. 5, and before the second molded object approaching step performed by the pressing mechanism shown in FIG. 5 Steps to homogenize the temperature of the molded object for temperature homogenization. Specifically, for example, the temperature of the
另外,作為圖1~6的變形例,在按壓部件211中,與活塊可動部111抵接的一側的面的至少一部分可以傾斜。圖7示出了這樣的變形例。圖7與圖6相同,示出了第二成型物件物逼近步驟,和之後將基板5保持在上模100的成型對象物保持部件102下表面的步驟。在圖7示出的樹脂成型裝置中,在按壓部件211中,與活塊可動部111抵接一側的面的與活塊可動部111抵接的部分越往下越向活塊可動部111的相反方向傾斜。通過上述傾斜,例如,易於向活塊可動部111的旋轉方向施加力。此外,圖7的樹脂成型裝置與圖1~6的樹脂成型裝置相同。圖7示出的步驟可與圖6示出的步驟相同地進行。具體而言,如圖7的箭頭X7和X8所示,可以以與圖6中用相同符號示出的箭頭X7和X8相同的方式進行第二成型物件物逼近操作(第二成型物件物逼近步驟)。另外,如圖7的箭頭A1所示,可以以與圖6的箭頭A1相同的方式吸附基板5,將基板5保持在上模100的成型對象物保持部件102下表面。In addition, as a modified example of FIGS. 1 to 6, in the
上文使用圖1~7對本發明的樹脂成型裝置的一例和使用上述樹脂成型裝置的樹脂成型品的製造方法中成型物件物位置調整步驟的一例及其變形例進行了說明。在本發明中,例如通過成型物件物位置調整步驟包括第二成型物件物逼近步驟,即使不將彈性部件的彈性常數設定得過大,也可充分逼近成型物件物。因為不將彈性部件的彈性常數設定得過大即可,例如可抑制或防止給成型物件物插入操作帶來阻礙。另外,例如即使彈性部件的彈性常數隨時間的變化而減小,通過進行第二成型物件物逼近步驟,也可以將成型物件物充分逼近。In the foregoing, an example of the resin molding apparatus of the present invention and an example of the step of adjusting the position of the molded object in the method of manufacturing a resin molded article using the above-mentioned resin molding apparatus and its modification have been described using FIGS. 1 to 7. In the present invention, for example, by the step of adjusting the position of the molded object including the second step of approaching the molded object, even if the elastic constant of the elastic member is not set too large, the molded object can be approached sufficiently. Because the elastic constant of the elastic member does not need to be set too large, for example, it is possible to suppress or prevent hindrance to the insertion operation of the molded object. In addition, for example, even if the elastic constant of the elastic member decreases with time, the molded object can be sufficiently approximated by performing the second molded object approximation step.
另外,在本發明的樹脂成型品的製造方法中,成型物件物逼近步驟可以僅進行2次,但不限於此,也可以進行多次,可以是3次以上的任意次數。例如,除第一成型物件物逼近步驟和第二成型物件物逼近步驟外,還可以包括第三成型物逼近步驟、第四成型物件物逼近步驟。另外,在本發明的樹脂成型品的製造方法中,使用了按壓機構的成型物件物逼近步驟可以僅為第二成型物件物逼近步驟這一次,但不限於此,可以為2次以上的任意次數。例如,除第二成型物件物逼近步驟外,可以使用按壓機構進行第三成型物件物逼近步驟、第四成型物件物逼近步驟等。在進行2次以上使用了按壓機構的成型物件物逼近步驟時,第二次以後的成型物件物逼近步驟例如可以以與第二成型物件物逼近步驟(第一次使用了按壓機構的成型物件物逼近步驟)相同的方式進行。In addition, in the method of manufacturing a resin molded article of the present invention, the molded object approach step may be performed only twice, but it is not limited to this, and may be performed multiple times, and may be any number of times greater than three times. For example, in addition to the first molding object approaching step and the second molding object approaching step, it may also include a third molding object approaching step and a fourth molding object approaching step. In addition, in the method for manufacturing a resin molded article of the present invention, the molding object approaching step using the pressing mechanism may only be one time of the second molding object approaching step, but it is not limited to this, and may be any number of times or more. . For example, in addition to the second molded object approaching step, a pressing mechanism may be used to perform the third molded object approaching step, the fourth molded object approaching step, and so on. When the molding object approaching step using the pressing mechanism is performed twice or more, the second and subsequent molding object approaching steps can be, for example, the second molding object approaching step (the molding object using the pressing mechanism for the first time) Approximation step) in the same way.
另外,本發明的樹脂成型品的製造方法如上所述,除成型物件物位置調整步驟外,還包括對成型物件物進行樹脂成型的樹脂成型步驟。上述樹脂成型步驟沒有特殊限制,例如可以與一般的樹脂成型品的製造方法的樹脂成型步驟相同,或者可進行適當變化。另外,樹脂成型步驟的樹脂成型方法如上所述,沒有特殊限制,例如可以是壓縮成型,也可以是傳遞成型、射出成型等。In addition, as described above, the method of manufacturing a resin molded article of the present invention includes a resin molding step of resin molding the molded article in addition to the step of adjusting the position of the molded article. The above-mentioned resin molding step is not particularly limited, and, for example, it may be the same as the resin molding step of a general resin molded product manufacturing method, or may be appropriately changed. In addition, the resin molding method of the resin molding step is as described above and is not particularly limited. For example, it may be compression molding, transfer molding, injection molding, or the like.
另外,本發明的樹脂成型品的製造方法可以包括成型物件物位置調整步驟和樹脂成型步驟以外的任意步驟,也可以不包括。In addition, the method of manufacturing a resin molded article of the present invention may include any steps other than the step of adjusting the position of the molded article and the resin molding step, or not.
圖1~7示出了本發明的樹脂成型裝置的一部分(主要示出了上模和成型對象物搬送機構)。本發明的樹脂成型裝置的整體構成沒有特殊限制,圖8的平面圖示意性地示出了其中一例。圖8示出的樹脂成型裝置1例如是使用了壓縮成型法的樹脂成型裝置。該圖示出了使用作為樹脂材料的液狀樹脂的示例。液狀樹脂例如可以是矽酮樹脂等。但是,如上所述,在本發明中,成型前的樹脂材料的形態是任意的,不限於液狀樹脂,例如,如上所述,可列舉顆粒狀樹脂、片狀樹脂、板狀樹脂、粉狀樹脂等。另外,樹脂材料的種類也如上所述,是任意的,不限於矽酮樹脂。1 to 7 show a part of the resin molding apparatus of the present invention (mainly showing an upper mold and a molding object conveying mechanism). The overall configuration of the resin molding apparatus of the present invention is not particularly limited, and the plan view of FIG. 8 schematically shows one example. The
圖8的樹脂成型裝置1,具備供給及收納作為成型對象物的基板的基板供給·收納模組2、和3個成型模組3A、3B、3C、以及樹脂供給模組4作為各元件。作為元件的基板供給·收納模組2和成型模組3A、3B、3C以及樹脂供給模組4分別相對於其他元件可以彼此裝卸,且可以更換。The
基板供給·收納模組2設有供給封裝前基板5的封裝前基板供給部6、收納已封裝基板(樹脂成型品)7的已封裝基板收納部8、交接封裝前基板5和已封裝基板7的基板載置部9、搬送封裝前基板5和已封裝基板7的基板搬送機構10。基板搬送機構10設有相機11,拍攝封裝前基板5在供給至成型模的模具表面時的定位狀態。作為拍攝元件,相機11搭載了CCD(感光耦合元件(Charge Coupled Device))圖像感測器或CMOS(互補式金屬氧化物半導體(Complementary Metal Oxide Semiconductor))圖像感測器。預定位置S1是基板搬送機構10不運行狀態下待機的位置。The substrate supply and
各成型模組3A、3B、3C設有可升降的下模12,與下模12相對而配置的上模(圖8中未示出,參考圖1~7)。上模和下模12一起構成成型模。各成型模組3A、3B、3C具有用於對上模和下模12進行開合模的合模機構13(圖中雙點劃線表示的部分)。下模12設有型腔14,該型腔為作為樹脂材料的液狀樹脂被供給並固化的空間。下模12設有供給長形脫模膜的脫模膜供給機構15。另外,此處對型腔14設於下模12的構造進行了說明,但型腔可設於上模,也可設於上模和下模。Each molding module 3A, 3B, 3C is provided with a lower mold 12 that can be raised and lowered, and an upper mold disposed opposite to the lower mold 12 (not shown in FIG. 8, refer to FIGS. 1 to 7). The upper mold and the lower mold 12 together constitute a forming mold. Each of the molding modules 3A, 3B, and 3C has a mold clamping mechanism 13 (a portion indicated by a two-dot chain line in the figure) for opening and closing the upper mold and the lower mold 12. The lower mold 12 is provided with a
樹脂供給模組4設有向成型模供給液狀樹脂的分配器16、和搬送分配器16的樹脂搬送機構17。分配器16具備向前端部排出液狀樹脂的樹脂排出部18。預定位置R1是樹脂搬送機構17不運行狀態下待機的位置。The
圖8示出的分配器16是使用預先混合了主劑和固化劑的液狀樹脂的單液型分配器。主劑例如使用具有熱固化性的矽酮樹脂或環氧樹脂。也可以使用在排出液狀樹脂時混合主劑和固化劑而使用的兩液混合型分配器。The
樹脂供給模組4設有控制部19。控制部19包括儲存設於基板搬送機構10的相機11拍攝的圖像資料的記憶體20、基於拍攝的圖像資料進行影像處理和演算處理等資料處理的處理器21、和用於控制樹脂成型裝置1所需的功能等。The
控制部19控制封裝前基板5和已封裝基板7的搬送、封裝前基板5的定位、液狀樹脂的供給、成型模的加熱、成型模的開合等。換言之,控制部19控制基板供給·收納模組2、成型模組3A、3B、3C、樹脂供給模組4的各操作。The
配置控制部19的位置沒有限制,可以配置於基板供給·收納模組2、成型模組3A、3B、3C、樹脂供給模組4中的至少一個,也可以配置於各模組的外部。另外,控制部19也可以構成為多個控制部,根據控制物件的操作,使至少一部分分離開。The position of the
通過本發明的樹脂成型裝置或樹脂成型品的製造方法製造的樹脂成型品沒有特殊限制,例如較佳樹脂封裝LED晶片等部件的微透鏡。在上述微透鏡中,需要將通過樹脂成型而形成的微透鏡與樹脂封裝部件進行精確地對準。即,需要精確對準配置了樹脂封裝部件的基板的位置。根據本發明,即使不將彈性部件的彈性常數設定得過大,也可以充分逼近基板,因此可精密且正確地進行基板對準。但是,通過本發明的樹脂成型裝置或樹脂成型品的製造方法製造的樹脂成型品是任意的,不限於微透鏡,例如可以是對晶片、引線等任意部件進行了樹脂封裝的任意電子部件。晶片的種類、形態等沒有特殊限制,例如可以是上述各種形態(包括倒裝晶片)的至少一種。The resin molded product manufactured by the resin molding apparatus or the resin molded product manufacturing method of the present invention is not particularly limited, and for example, a microlens of a component such as a resin-encapsulated LED chip is preferable. In the above-mentioned microlens, it is necessary to precisely align the microlens formed by resin molding and the resin encapsulation component. That is, it is necessary to precisely align the position of the substrate on which the resin-encapsulated component is arranged. According to the present invention, even if the elastic constant of the elastic member is not set too large, the substrate can be approached sufficiently, so that the substrate alignment can be performed precisely and accurately. However, the resin molded product manufactured by the resin molding apparatus or resin molded product manufacturing method of the present invention is arbitrary and is not limited to microlenses. For example, it may be any electronic component in which any components such as wafers and leads are resin-encapsulated. The type and form of the wafer are not particularly limited, and for example, it may be at least one of the above-mentioned various forms (including flip chip).
進一步,本發明不受上述實施例的限制,在不脫離本發明主旨的範圍內,根據需要能夠任意且適當地進行組合、改變或選擇使用。Further, the present invention is not limited by the above-mentioned embodiments, and can be combined, changed, or selected arbitrarily and appropriately as required within the scope not departing from the gist of the present invention.
本案主張以2020年1月21日申請的日本申請專利申請2020-007873為基礎的優先權,其公開的所有內容納入在本說明書中。This case claims priority based on the Japanese patent application 2020-007873 filed on January 21, 2020, and all the contents disclosed are incorporated in this specification.
1: 樹脂成型裝置 2:基板供給·收納模組 3A、3B、3C:成型模組 4 :樹脂供給模組 5:封裝前基板(基板、成型對象物) 6:封裝前基板供給部 7 :已封裝基板(樹脂成型品) 8 :已封裝基板收納部 9 :基板載置部 10:基板搬送機構 11:相機 12 :下模 13 :合模機構 14:型腔 15:脫模膜供給機構 16:分配器 17 :樹脂搬送機構 18 :樹脂排出部 19:控制部 20:記憶體 21:處理器 100:上模 101:上模基底部件 101a :貫通孔 102:成型對象物保持部件 102a:貫通孔 110:成型對象物活塊機構 111:活塊可動部 112:保持部 113:扭簧(彈性部件) 114:旋轉軸 120:成型對象物支援機構 121:成型對象物支援可動部 122:保持部 123:扭簧(彈性部件) 124:旋轉軸 131:活塊銷 141:定位銷(定位部件) 150:成型對象物保持機構 200:成型對象物搬送機構 201:載荷基座 202:成型對象物載置部 203:推件 210:按壓機構 211:按壓部件 212: 桿 213:氣缸 A1、X1~X8:箭頭 1: Resin molding device 2: Board supply and storage module 3A, 3B, 3C: molding module 4: Resin supply module 5: Substrate before packaging (substrate, molding object) 6: Substrate supply part before packaging 7: Packaged substrate (resin molded product) 8: Packaged substrate storage section 9: Board placement section 10: Substrate transport mechanism 11: Camera 12: Lower die 13: Clamping mechanism 14: Cavity 15: Release film supply mechanism 16: Distributor 17: Resin transport mechanism 18: Resin discharge part 19: Control Department 20: Memory 21: Processor 100: upper die 101: Upper die base part 101a: Through hole 102: Molded object holding part 102a: Through hole 110: Molding object block mechanism 111: movable part of live block 112: Holding part 113: Torsion spring (elastic part) 114: Rotation axis 120: Molding object support organization 121: Movable part for molding object support 122: Holding Department 123: Torsion spring (elastic part) 124: Rotation axis 131: Live block pins 141: Positioning pin (positioning part) 150: Molding object holding mechanism 200: Molding object conveying mechanism 201: Load base 202: Molding object placement part 203: Push pieces 210: pressing mechanism 211: Pressing parts 212: Rod 213: Cylinder A1, X1~X8: Arrow
圖1是本發明的樹脂成型裝置的一例的上模的主要部分的下表面圖。FIG. 1 is a bottom view of the main part of an upper mold of an example of the resin molding apparatus of the present invention.
圖2是與圖1相同的上模的主要部分的截面圖。Fig. 2 is a cross-sectional view of the main part of the same upper mold as in Fig. 1.
圖3是示出本發明的樹脂成型品的製造方法的一例的一個步驟的步驟截面圖,是示出使成型對象物搬送機構位於與圖1和圖2相同的上模的下方的狀態的主要部分截面圖。3 is a step cross-sectional view showing one step of an example of the method of manufacturing a resin molded article of the present invention, and is a main view showing a state in which the molded object conveying mechanism is located below the same upper mold as in FIGS. 1 and 2 Partial cross-sectional view.
圖4是示出與圖3相同的樹脂成型品的製造方法的另一步驟的步驟截面圖,是說明伴隨成型對象物搬送機構上升的操作的主要部分截面圖。4 is a step cross-sectional view showing another step of the method of manufacturing a resin molded article similar to that of FIG. 3, and is a cross-sectional view of a main part for explaining an operation accompanying the ascending of the molded object conveying mechanism.
圖5是示出與圖3相同的樹脂成型品的製造方法中又一步驟的步驟截面圖,是說明第一成型物件物逼近步驟中的伴隨成型對象物搬送機構下降的操作的主要部分截面圖。5 is a cross-sectional view of a step showing still another step in the method of manufacturing a resin molded product that is the same as that of FIG. 3, and is a cross-sectional view of a main part for explaining the operation accompanying the lowering of the molded object conveying mechanism in the first molding object approaching step .
圖6是示出與圖3相同的樹脂成型品的製造方法中的又一步驟的步驟截面圖,是說明第二成型物件物逼近步驟中的通過按壓機構進行的逼近操作的主要部分截面圖。6 is a step sectional view showing still another step in the method of manufacturing a resin molded article similar to FIG. 3, and is a main part sectional view illustrating the approaching operation by the pressing mechanism in the second molding object approaching step.
圖7是示出圖1~6的樹脂成型裝置和樹脂成型品的製造方法的變形例的步驟截面圖,是說明第二成型物件物逼近步驟中的通過按壓機構進行的逼近操作的主要部分截面圖。7 is a step cross-sectional view showing a modification of the resin molding apparatus and the method of manufacturing a resin molded product of FIGS. 1 to 6 and is a cross-section of a main part explaining the approaching operation by the pressing mechanism in the second molding object approaching step picture.
圖8是示意地例示本發明的樹脂成型裝置整體結構的平面圖。Fig. 8 is a plan view schematically illustrating the overall structure of the resin molding apparatus of the present invention.
2:基板供給·收納模組
100:上模
102:成型對象物保持部件
102a:貫通孔
110:成型對象物活塊機構
111:活塊可動部
112:保持部
113:扭簧
114:旋轉軸
120:成型對象物支援機構
121:成型對象物支援可動部
122:保持部
123:扭簧
124:旋轉軸
131:活塊銷
141:定位銷
150:成型對象物保持機構
200:成型對象物搬送機構
201:載荷基座
202:成型對象物載置部
203:推件
210:按壓機構
211:按壓部件
212:桿
213:氣缸
A1、X7、X8:箭頭
2: Board supply and storage module
100: upper die
102: Molded
Claims (8)
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JP6867229B2 (en) * | 2017-05-26 | 2021-04-28 | アピックヤマダ株式会社 | Resin mold mold |
JP6482616B2 (en) * | 2017-08-21 | 2019-03-13 | Towa株式会社 | Resin molding apparatus and resin molded product manufacturing method |
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2020
- 2020-01-21 JP JP2020007873A patent/JP7203778B2/en active Active
- 2020-12-18 CN CN202011513505.XA patent/CN113211686B/en active Active
- 2020-12-28 TW TW109146362A patent/TWI746328B/en active
-
2021
- 2021-01-13 MY MYPI2021000219A patent/MY196310A/en unknown
Patent Citations (4)
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JP2010027890A (en) * | 2008-07-22 | 2010-02-04 | Towa Corp | Compression molding method and metallic mold for semiconductor chip |
US20160035592A1 (en) * | 2013-03-18 | 2016-02-04 | Nitto Denko Corporation | Adhering device and method for producing electronic device |
TW201717337A (en) * | 2015-11-09 | 2017-05-16 | Towa Corp | Resin-sealing device and resin-sealing method |
TW201838043A (en) * | 2017-02-08 | 2018-10-16 | 日商信越工程股份有限公司 | Resin sealing device and resin sealing method |
Also Published As
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TW202131421A (en) | 2021-08-16 |
JP2021112905A (en) | 2021-08-05 |
MY196310A (en) | 2023-03-24 |
JP7203778B2 (en) | 2023-01-13 |
CN113211686A (en) | 2021-08-06 |
CN113211686B (en) | 2023-04-07 |
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