TWI499784B - Probe insertion auxiliary and method of probe insertion - Google Patents

Description

Needle assist device and needle implantation method

The present invention relates to a needle-assisting device, and more particularly to an auxiliary device for assisting a probe card implant.

Semiconductor devices are fabricated through various processes including wafer fabrication, wafer testing, die packaging, and the like. Wafer testing classifies the semiconductor devices into acceptable products by contacting the probe pins of a probe card with the electrode pads of the semiconductor device and then allowing a current to flow through the electrode pads of the semiconductor devices. And unacceptable products.

1 is a schematic view of a probe card. The probe card 10 shown in the figure is provided with a probe head 12, which can be further subdivided into an upper cover 14, a spacer film 16, a lower cover 18 and a probe 20. Each probe 20 penetrates through the upper cover 14 , the spacer film 16 and the lower cover 18 at the same time, and the probe 20 is disposed corresponding to the arrangement pattern of the electrode pads 24 on the semiconductor wafer 22 . In addition, the probe card 10 further includes a substrate 26 and a circuit board 28. The substrate 26 contacts the circuit board 28 on the other side of the probe 20 for converting the signal of the probe 20 to the circuit board 28. It is worth noting that the spacing between the individual probes 20 is only about 50 to 100 μm, and it can be seen from Figure 1 that the shape of the probe 20 is non-linear and that there is a very large bend 30 on the probe.

At present, the needle is manually passed through the lower cover and the spacer film. When all the probes pass through, the upper cover is covered. However, because the density between the probe and the probe is too high, and the probe has a bend, it is difficult for the needle implanter to pass the spacer film and the lower cover accurately through the experience and the naked eye. jobs.

In view of this, the present invention provides a implant aid that allows the implanter to easily implant the probe into the probe tip.

According to a preferred embodiment of the present invention, the present invention provides a implant aid, comprising: a base, a clamp is disposed on the base, the clip has two clamping portions, and the two clamping portions define a groove for receiving A probe holder is disposed, and the two clamping portions and the base form an accommodating space and a light source is disposed in the accommodating space to uniformly illuminate the probe holder.

According to another preferred embodiment of the present invention, the present invention provides a method for implanting a needle, comprising: firstly, providing a needle assisting device, the needle assisting device comprising: a base, a clamp disposed on the base, and the clip having two clips a holding portion, the two clamping portions define a recess for accommodating a probe base, and the two clamping portions and the base form an accommodating space, and a light source is disposed in the accommodating space, and then a probe is placed Into the groove, wherein the probe holder has a plurality of holes, the light source illuminates each hole, and finally the needle implantation step.

As the wafer shrinks, the probes and the lower cover holes of the subsequent detection wafers become smaller, thereby increasing the difficulty of needle insertion and needle replacement. However, the present invention utilizes a light source to illuminate the aperture of the lower cover plate. The position of the cover hole is more clearly displayed, which increases the convenience of the needle implanter.

Figure 2 is a schematic view of the needle assisting device of the present invention. As shown in FIG. 2, the needle assisting device 100 has a base 40. The base 40 can have a rectangular shape with a wide side and a short side, but is not limited thereto. The two frames 42 and 44 form a body group 46. The two frames 42 and 44 are respectively located above opposite ends of the base 40, for example, above the opposite short sides of the base 40, and a set of cross bars 48, 50 are disposed between the two frames 42 and 44 so that each The ends of the root rails 48, 50 are respectively fixed on the opposite surfaces of the two frames 42, 44. In addition, the clamps 56 formed by the two clamping portions 52, 54 are disposed on the base 40, and the clamps 56 are located on the two frames. Between the bodies 42, 44, the two clamping portions 52, 54 are respectively penetrated by the two cross bars 48, 50, so that the two clamping portions 52, 54 can slide freely along the extending direction of the cross bars 48, 50. Changing the relative position, the relative positions of the tops of the two gripping portions 52, 54 define a resizable recess 58 for receiving a probe holder (not shown). In addition, a fixing portion 60, 62 is respectively disposed on the clamping portions 52, 54. After the clamping portions 52, 54 are adjusted to a suitable relative position, the relative positions of the clamping portions 52, 54 can be fixed by the fixing portions 60, 62. . Furthermore, the frame bodies 42, 44 can limit the moving position of the clamping portions 52, 54 between the frame bodies 42, 44.

The groove 58 includes a first area A and a second area B. The first area A has a shape complementary to a circle, such as an arc, so that the shape of the groove formed by the first area A can accommodate a circular shape. The needle hub; the second region B has a shape complementary to the rectangle, such as a straight line or an angle, such that the second region B of the recess 58 is shaped to accommodate a rectangular probe holder. In addition, the recess 58 has a bottom surface 64 for supporting the probe holder and a side surface 66 for engaging the probe holder in the recess 58. According to a preferred embodiment of the present invention, The width of the bottom surface 64 is preferably 5 mm, and the width of the side surface 66 is preferably 3 mm.

It is to be noted that the recess 58 formed by the two clamping portions 52, 54 and the base 40 form an accommodating space 68. The accommodating space 68 can be disposed with a light source 70 for uniformly illuminating the concave portion. The probe holder in the slot 58 and the switch 72 of the light source 70 can be extended from the housing space 68 beyond the needle assistor 100. Light source 70 can be any light source such that sufficient light can pass through the probe holder to the implantor's eye. FIG. 3 is an enlarged schematic view of the light source. For example, the light source 70 may be an LED array, and the light source 70 may be arranged in an array by a wide-angle LED 74 having a smaller size to a range of 4 cm by 4 cm. LED light source, or use a light bulb as a light source. In addition, at least a polarizer 76 and at least one alignment film 78 are disposed above the light source 70. According to a preferred embodiment of the present invention, the six alignment films 78 and the one polarizer 76 can form a uniform light source for the LED array.

Fig. 4a-7b is a schematic view showing a method of implanting a needle using the needle assisting device of the present invention. Figure 4b is a schematic view of the probe holder in the direction of AA' tangential in Figure 4a. Figure 5b is a schematic view of the probe holder and the light source along the tangential direction of BB' in Figure 5a. Figure 7b is a schematic view of the probe holder in the direction of CC' tangential direction in Figure 7a.

As shown in Figures 4a and 4b, first, a needle assisting device 100 and a probe holder 80 as described in Fig. 2 above are provided, wherein the probe holder 80 includes a spacer film 84 and a lower cover 82. The lower cover 82 has a plurality of holes 86 that have been designed, and the circular probe base is illustrated in Fig. 4a. However, the probe holders of different products may have different shapes.

Then, as shown in FIGS. 5a and 5b, the relative positions of the clamping portions 52, 54 are adjusted and the probe holder 80 is placed in the groove 58 in the upward direction of the cover plate 82, and the clamping portion 52 is again placed. 54 is fixed by the fixing portions 60, 62. The probe holder 80 in Fig. 5a is circular, and the circular probe holder 80 is fixed by the first region A of the recess 58. The light source 70 switch 72 is then turned on such that the light source 70 first passes through the spacer film 84 and then through the aperture 86 of the lower cover 82 and finally into the eye of the implanter. Figure 6 is a schematic view showing the rectangular probe holder placed in the needle assisting device. Referring to Figure 6, the probe base 80 can also be rectangular. When the rectangular probe holder 80 is placed in the recess 58, the recess is used. The second zone B portion of the slot 58 secures the probe holder 80.

Next, as shown in Figures 7a and 7b, a probe 121 is passed through the hole 86 of the lower cover 82, and then the spacer film 84 is pierced. At this time, at least one of the holes 86 has no probe 121, and the probe 121 can be a vertical probe as a probe of other shapes. When the needle is implanted, the light source 70 penetrates the hole 86 of the lower cover 82 and generates a bright spot, so that the implanter can be guided through the light source 70 to correctly confirm the implantation. Position, so you can quickly complete the needle movement without the need for an experienced needle. When all the probes are implanted, the upper cover can be covered, and the upper cover, the spacer film, the lower cover and the probe constitute the probe head. Will finish again The probe head is loaded into the probe card.

Since the probe will directly contact the electrode pads of the wafer during the process of detecting the wafer, the probe will have a certain degree of wear and damage. When the probe wear reaches the scrapping standard specified in the factory or the damage occurs, the probe needs to be changed and needled. In addition, the probe card of the new device also needs to be implanted. The needle assisting device of the present invention can be applied to various types of probe holders. Needle implanters can adjust the size of the groove on the needle aid according to the probe holder of different sizes, without using other fixed bases. In addition, because the needle-assisting device is provided with a light source to illuminate the hole of the lower cover plate and the spacer film, the needle-clamping staff can clearly distinguish the position of the hole and reduce the difficulty of needle-planting and needle-changing.

The above are only the preferred embodiments of the present invention, and all changes and modifications made to the scope of the present invention should be within the scope of the present invention.

10‧‧‧ probe card

12‧‧‧ probe head

14‧‧‧Upper cover

16‧‧‧Separate film

18‧‧‧Under cover

20, 121‧‧ ‧ probe

22‧‧‧Semiconductor Wafer

24‧‧‧electrode pads

26‧‧‧Substrate

28‧‧‧ boards

30‧‧‧bend

40‧‧‧Base

42, 44‧‧‧ ‧ body

46‧‧‧ ‧ body group

48, 50‧‧‧ crossbar

52, 54‧‧‧ gripping department

56‧‧‧Clamp

58‧‧‧ Groove

60, 62‧‧‧ fixed department

64‧‧‧ bottom

66‧‧‧ side

68‧‧‧ accommodating space

70‧‧‧Light source

72‧‧‧ switch

74‧‧‧LED

76‧‧‧ polarizer

78‧‧‧Alignment film

80‧‧‧ probe holder

82‧‧‧Under cover

84‧‧‧ spacer film

86‧‧‧ hole

100‧‧‧Needle aid

Figure 1 is a schematic diagram of the probe card.

Figure 2 is a schematic view of the needle assisting device of the present invention.

Figure 3 is an enlarged schematic view of the light source.

Fig. 4a-7b is a schematic view showing a method of implanting a needle using the needle assisting device of the present invention.

40. . . Base

42, 44. . . Frame

46. . . Frame group

48, 50. . . Crossbar

52, 54. . . Grip

56. . . Fixture

58. . . Groove

60, 62. . . Fixed part

64. . . Bottom

66. . . Side

68. . . Housing space

70. . . light source

72. . . switch

100. . . Needle assist

Claims (19)

a needle assisting device comprising: a base; a clamp disposed on the base, the clip having two clamping portions, the two clamping portions defining a recess for receiving a probe holder, and the two clips The holder and the base form an accommodating space; and a light source is disposed in the accommodating space to uniformly illuminate the probe holder, wherein the probe holder comprises a plurality of holes, at least one of the holes There are no probes in it. The needle assist device of claim 1, wherein the light source comprises a plurality of LEDs. The needle assist device of claim 2, wherein the LEDs further comprise at least one polarizer and at least one alignment film. The needle assist device of claim 1, wherein the light source comprises a plurality of light bulbs. The needle assist device of claim 4, wherein the bulb further comprises at least one polarizer and at least one alignment film. The needle assist device of claim 1, wherein the size of the groove is adjustable. The needle assisting device of claim 6, wherein the relative orientation of the two clamping portions is adjusted Position to change the size of the groove. The needle assisting device of claim 1, wherein the two clamping portions are respectively provided with a fixing portion for fixing the relative positions of the two clamping portions. The needle assist device of claim 1, wherein the groove comprises a first zone and a second zone. The needle assist device of claim 9, wherein the first region has a shape complementary to a circle to accommodate a circular probe holder. The needle assist device of claim 9, wherein the second region has a shape complementary to the rectangle to accommodate a rectangular probe holder. A method for implanting a needle includes: providing a needle assisting device, the needle assisting device comprising: a base; a clamp disposed on the base, the clip having two clamping portions, the two clamping portions defining a groove, And the two clamping portions and the base form an accommodating space; and a light source is disposed in the accommodating space; a probe holder is placed in the groove, wherein the probe holder has a plurality of holes, and the light source is illuminated Illuminating the holes; and performing a needle implantation step, wherein the implanting step includes inserting a probe through the holes one. The needle insertion method of claim 12, wherein the probe holder comprises a spacer film and a lower cover. The method of implanting needle according to claim 13, wherein the lower cover plate comprises the holes. The needle insertion method of claim 14, wherein the implanting step comprises first inserting the probe through one of the holes of the lower cover and then penetrating the spacer film. The needle implantation method of claim 12, wherein the light source comprises a plurality of LEDs. The needle implantation method of claim 12, wherein the light source comprises a plurality of light bulbs. The method of implanting a needle according to claim 12, wherein the light source further comprises at least one polarizer and at least one alignment film. The needle insertion method of claim 12, wherein the relative position of the two clamping portions is adjusted to change the size of the groove.