201035573 六、發明說明： 【發明所屬之技術領域】 本發明是有關於一種基板的檢查修補設備，特別是指 一種兼具點燈測試及雷射修補功能的點燈檢查設備。 【先前技術】 如圖1至圖3所示，現有一種結合有點燈檢查及雷射 修補功能的設備（申請案號第95219152號專利案），包含 Ο201035573 VI. Description of the Invention: [Technical Field] The present invention relates to an inspection and repairing apparatus for a substrate, and more particularly to a lighting inspection apparatus having both a lighting test and a laser repair function. [Prior Art] As shown in Figs. 1 to 3, there is a device (application No. 95219152) which incorporates a spot lamp inspection and a laser repair function, and includes Ο
一機台1、一可沿該機台1前、後滑移的承載盤2、一安裝 在該承載盤2的夾持單元3、一設置在該承載盤2内側底部 的抹針單元4及一設置在該機台1上方的雷射修補單元5。 該承載盤2具有一矩形框體201、多數橫設在該矩形框體 2〇1中的支撐桿202及一固設在該等支撐桿2〇2上的平板 203。該夹持單元3具有多數設於該矩形框體2〇ι内部的壓 板301及多數驅動該等壓板3〇1位移的橫移壓缸，該探 針單元4具有多數昇降壓缸4〇1及多數受該等昇降壓缸4〇ι 驅動的探針4G2。該雷設修補單元5具有—固設在該機台【 的懸架501、一可沿該懸架5〇1滑移的定位座5〇2及安裝在 該定位座502的-雷射修補槍503、_攝影感光器5〇4。a machine table 1, a carrier disk 2 that can be slid along the front and rear of the machine table 1, a clamping unit 3 mounted on the carrier disk 2, a squeegee unit 4 disposed at the bottom of the inner side of the carrier disk 2, and A laser repair unit 5 disposed above the machine 1. The carrier tray 2 has a rectangular frame 201, a plurality of support bars 202 disposed transversely in the rectangular frame 2〇1, and a flat plate 203 fixed to the support bars 2〇2. The clamping unit 3 has a plurality of pressing plates 301 disposed inside the rectangular frame 2〇 and a plurality of traverse cylinders for driving the displacement of the pressing plates 3〇1. The probe unit 4 has a plurality of lifting and lowering cylinders 4〇1 and Most of the probes 4G2 are driven by the lift cylinders 4〇. The lightning repairing unit 5 has a suspension 501 fixed to the machine, a positioning seat 5〇2 slidable along the suspension 5〇1, and a laser repairing gun 503 mounted on the positioning seat 502. _Photographic photoreceptor 5〇4.
當一面板6放置在該承載盤2的平板2〇3，利用該夹持 =元3的壓板3()1可將該面板6推抵定位，再利用該探針 單元4的昇降壓缸4()1驅動該等探針4()2朝該面板6底面 的電極端產生觸通，則可使該面板6的故障處呈亮點。且 利用該承載盤2帶動面板6往一第_*方向χΜ㈣1 合該雷射修補搶503在該懸架501沿一垂直於第一方向X 3 201035573 的第二方向γ位移’即可對故障點進行修補。 上述設備具有下列缺失： 一、由於該平板203的尺寸固定、該等支撐桿2〇2的 位置及跨距固定，當面板6的尺寸小於該平板2〇3時，古亥 等探針402可能被該平板2〇3 _，而無法_“ ，因此，上述設備無法廣泛地運用於不同尺寸之面板6 '、 卜二、對故障點進行修補時，該承載盤2會帶動面板6 沿第-方向X來回位移，面才反6容易因晃動而影響穩定度 〇 三、由於該等壓板301是受到該等橫移壓缸3〇2的驅 動才能對面板6產生祕，當聽6的尺寸較小，則該等 橫移壓缸3G2的行程大，會有較長的長度凸伸在該承載盤2 的外部，增加整座設備的體積。 【發明内容】 因此，本發明之目的，即在提供一種可適用於不同尺 寸且穩定度高之點燈檢查設備。 於是，本發明之點燈檢查設備，適用於對一基板進行 點燈測式’該基板具有一底面，該底面具有多數鄰近周緣 ㈣極^該點燈檢查設備包含一機架及設置在該機架的 ^撐單兀一夾持單元、—探針單元。該支樓單元由多 數石-第-方向延伸的支撐件共同界定出一沿水平設置的 承托面’該承托面可支撑該基板之底面，該等支撐件可沿 第方向的第二方向在該機架上調整間隔距離 。該夾持單元具有-可定出一基準線之定位組、一與該定 201035573 位組相對設置的推抵組及二相對設置且 ^ -Mt -frf y 牡孩疋位组鱼When a panel 6 is placed on the flat plate 2〇3 of the carrier tray 2, the panel 6 can be pushed and positioned by the pressing plate 3()1 of the clamping=element 3, and the lifting and lowering cylinder 4 of the probe unit 4 is used again. (1) driving the probes 4() 2 to make a contact with the electrode end of the bottom surface of the panel 6, the fault of the panel 6 can be made bright. And using the carrier 2 to drive the panel 6 to a _* direction 四(4)1, the laser repair rush 503 is displaced in the second direction γ of the suspension 501 in a direction perpendicular to the first direction X 3 201035573 repair. The above device has the following defects: 1. Since the size of the flat plate 203 is fixed, the positions and spans of the support rods 2〇2 are fixed, when the size of the panel 6 is smaller than the flat plate 2〇3, the probe 402 of Guhai may be By the plate 2〇3 _, but not _", therefore, the above equipment can not be widely used for panels of different sizes 6 ', Bu 2, when repairing the fault point, the carrier 2 will drive the panel 6 along the first - The direction X is shifted back and forth, and the surface is reversed. 6 is easy to affect the stability due to shaking. Third, since the pressing plate 301 is driven by the traverse cylinder 3〇2, the panel 6 can be secreted. If the stroke is large, the stroke of the traverse cylinder 3G2 is large, and a long length protrudes outside the carrier tray 2, thereby increasing the volume of the entire apparatus. [Invention] Therefore, the object of the present invention is Providing a lighting inspection apparatus that can be applied to different sizes and high stability. Thus, the lighting inspection apparatus of the present invention is suitable for lighting a substrate. The substrate has a bottom surface having a plurality of adjacent peripheral edges. (4) Extreme ^The light inspection The device comprises a frame and a clamping unit disposed on the frame, and a probe unit. The branch unit is defined by a plurality of stone-first-direction extending supports to define a horizontally disposed bearing. The support surface supports the bottom surface of the substrate, and the support members can adjust the separation distance on the frame in the second direction of the first direction. The clamping unit has a positioning group that can define a reference line. , a set of the corresponding set of the 201035573 group and the second set and ^ -Mt -frf y
〇 間的夾制組，該基準線沿該第一方向延伸且供 :二其中一邊抵靠定位，該推抵組具有多數與該基準線 二：使基板沿第二方向定位的推抵件，該等夾制組各且 2户數間隔設置的夾制件，該等夾制件可沿_垂直於該第 :、二方㈣第三方向昇降，且與該切單元的支料錯 開设置，可沿該第一方向對該基板另外兩個邊夾制定位。 該探針單元具有一安裝於該推抵組的第一探針組及二安裝 於該等夾制組的第二探針組，該第―、二探針組可沿第^ 方向相對於該基板的電極端產生接觸或遠離。 一 本發明之功效：利用該支標單元與該夾持單元的配合 可使該基板被夾持定位，再搭配該探針單元檢測出缺陷點 ’即可達到準確檢測之目的。 【實施方式】 有關本發明之前述及其他技術内容、特點與功效，在 以下配合參考圖式之一個較佳實施例的詳細說明中將可 清楚的呈現。 如圖4及圖5所示，本發明點燈檢查設備之較佳實施 例，適用於對一液晶基板100進行點燈測試及雷射修補， 該液晶基板1〇〇具有平行設置的一第一、二長邊11〇、12〇 、銜接於該第一、二長邊110、120之間的一第一、二短邊 130、14〇、一朝上的修補面15〇及一與該修補面15〇相反 的底面160，該底面160具有多數鄰近周緣的電極端161。 該點燈檢查設備包含一機架10及設置在該機架1〇的一支 201035573 撐單兀20、-夾持單元3〇、一探針單元4〇、一雷射修補翠 元50、一打光單元6〇。 該機架1〇具有-沿-第-方向X延伸的第-長側邊11 、一與該第—長側邊11相反的第二長側邊12、-銜接在該 第一、二長側邊11、12之間且沿-垂直該第-方向X之第 二方向γ延伸的第-短側邊13及—與該第—短側邊13相 反的第二短側邊14。 如圖4及圖6所示，該支撐單元2()具有二沿該第—方 向X延伸的支撐件21、—對分職置在該第―、二短側邊 13' 14且沿該第二方向γ延伸的導座。及―對分別設置在 該等導座22的第-驅動件23。該等支揮件21各具有二可 滑動地跨設在該科座22上的移動塊2ιι、—連結在該等 移動塊211之間的橫桿212及多數設於該橫桿212中段且可 對該基板HK)吹氣或吸真空的氣孔213，且料橫桿扣可 共同界定出—沿水平設置的承托面24,該承托面24可支撐 該基板_之底面16〇(見圖5)，該等第—驅動件23可: 動該等支撐件21沿第二方向γ產 刀口 Y產生位移，並可在該導座22 上調整間隔距離，該等第—驅動件 他勒仟23各具有一固設在該等 導座、22側面的齒條231、—對安裝在該等移動塊2U外側 的馬達232及一對受該尊黾；告κ名 馬達232驅動且與該等齒條231 嚙合的齒輪233。 如圖4、圖7、圖8、圖ΐΛπ- 及圖10所不，該夹持單元 3〇具有一固設在該第一長側硌 笛至… 長側邊11的固定框桿31、-對應該 第一長側邊12且與該固定拖护 尤框杯31平行設置的活動長框桿 201035573 όΖ -驅動件Γ驅動該活動長框桿32沿第：方向丫位移的第 ==、、：對分別對應該第一、二短側邊㈣的活 —對用以驅動該等活動短轉34沿第-方向 X相對驅近或遠離的第r動 Η且可定出-其二 固設在該固定框桿 土，、.· L之疋位組36、一與該定位組36相 對;：置且安裝在該活動長框桿32的推抵組37、二相對設置 =褒在該等該活動短框桿34並位於定位組36與該推抵 ❹ 、之間的央制組38、—用以㈣該等推抵件37沿第- 組整位置的第四驅動件39及一對用以驅動該等夾制 、、·化弟二方向丫調整位置的第五驅動件39,。 该基準線L是沿第一方向χ延伸且供該基板⑽的第 一長邊110抵靠定位（見圖5)。 該等第二、三驅動件33、35各具有一導螺桿33卜351 及一用以驅動該導螺桿331、351的伺服馬達 該疋位組36具有二間隔設置的定位塊361。 ★該推抵組37具有二與該基準線L配合以使基板刚沿 第方向Y疋位的推抵件371，該等推抵件371各具有一第 一滑塊372及-設置在該第—滑塊372上的推抵部奶。 該等夹制組38可沿該第一方向χ對該基板ι〇〇的第一 、-短邊130、140夾制定位（如圖5所示），並各具有多 數間隔設置且與該等支樓件21錯開設置的夾制件381，該 等夾制件381各具有—第二滑塊382、一固設在該第二滑塊 3Μ的第-壓缸383、-受該第一壓缸383驅動可沿一垂直 於該第一、二方向Χ、Υ的第三方向Ζ昇降的連接件384及 7 201035573 文裝在该連接件384上的夹制部385。 該等第四、五驅動件39、39’為線性馬達，各具有一呈 長桿狀的定子391、391，及多數分別固設在該第—、二滑塊 372、382且套設在該定子391、391，外部的動子M2、392, ’該第四驅動件39可驅動該等推抵件371沿第—方向义調 整間隔距離’該等第五驅動# 39，可驅動該等夹制件川 沿第二方向γ調整間隔距離。a sandwiching group of the turn, the reference line extending along the first direction and providing: two of the two are positioned against each other, the push-up group having a majority and the reference line: a pushing member for positioning the substrate in the second direction, Each of the clamping groups and the two households are arranged at intervals, and the clamping members can be raised and lowered along the third direction perpendicular to the third and fourth sides, and are arranged offset from the cutting materials of the cutting unit. The other two sides of the substrate can be positioned in the first direction. The probe unit has a first probe set mounted on the push group and a second probe set mounted on the clamp group, the first and second probe sets being opposite to the second direction The electrode ends of the substrate are brought into contact or away. The effect of the invention is that the cooperation of the branch unit and the clamping unit enables the substrate to be clamped and positioned, and the defect unit is detected by the probe unit to achieve accurate detection. The above and other technical contents, features, and advantages of the present invention will be apparent from the following detailed description of the preferred embodiments. As shown in FIG. 4 and FIG. 5, a preferred embodiment of the lighting inspection apparatus of the present invention is suitable for performing a lighting test and a laser repair on a liquid crystal substrate 100. The liquid crystal substrate 1 has a first set in parallel. , a long side 11 〇, 12 〇, a first and second short sides 130, 14 衔 between the first and second long sides 110, 120, an upward facing repair surface 15 〇 and a repair The face 15 is an opposite bottom face 160 having a plurality of electrode ends 161 adjacent the periphery. The lighting inspection device comprises a frame 10 and a 201035573 support unit 20 disposed on the frame 1 , a clamping unit 3 , a probe unit 4 , a laser repairing a green element 50 , The lighting unit is 6〇. The frame 1 has a first long side 11 extending in the - direction X, a second long side 12 opposite the first long side 11, and is coupled to the first and second long sides a first short side 13 extending between the sides 11, 12 and perpendicular to the second direction γ of the first direction X and a second short side 14 opposite the first short side 13. As shown in FIG. 4 and FIG. 6, the support unit 2() has two support members 21 extending along the first direction X, and a pair of positions on the first and second short sides 13' 14 and along the first A guide for the γ extension in the two directions. And the pair-to-drive member 23 provided on the guides 22, respectively. The support members 21 each have two moving blocks 2 ι slidably disposed on the base 22, a cross bar 212 coupled between the moving blocks 211, and a plurality of the cross bars 212 disposed at the middle of the cross bar 212 and The substrate HK) is blown or vacuumed to the air hole 213, and the cross bar buckle can jointly define a support surface 24 disposed horizontally, the support surface 24 can support the bottom surface 16 of the substrate_ 5), the first driving member 23 can: move the supporting members 21 to generate displacement in the second direction γ, the cutting edge Y, and adjust the spacing distance on the guide 22, the first driving member 23 each having a rack 231 fixed to the side of the guides 22, a motor 232 mounted on the outside of the moving block 2U, and a pair of the motor 232; The gear 231 is engaged by the rack 231. As shown in FIG. 4, FIG. 7, FIG. 8, FIG. π- and FIG. 10, the clamping unit 3 has a fixed frame rod 31 fixed to the first long side flute to the long side 11. The movable long frame rod 201035573 corresponding to the first long side 12 and arranged in parallel with the fixed dragging frame cup 31 όΖ - the driving member Γ drives the movable long frame rod 32 to be displaced in the first direction: ==, : for the first and second short sides (four) respectively - for driving the activities short turn 34 in the first direction X relative to the approaching or moving away from the r and can be determined - the second fixed In the fixed frame soil, the L-position group 36 of the L is opposite to the positioning group 36; the thrusting group 37 disposed on the movable long frame bar 32, and the two opposite setting=褒 are in the same The movable short frame bar 34 is located between the positioning group 36 and the pushing mechanism, and the fourth driving member 39 and the pair of (4) the pushing members 37 along the entire position of the first group. The fifth driving member 39 for driving the clamping position and the adjustment position of the two-way direction. The reference line L extends in the first direction and is positioned against the first long side 110 of the substrate (10) (see Figure 5). The second and third driving members 33, 35 each have a lead screw 33 351 and a servo motor for driving the lead screws 331, 351. The clamping group 36 has two positioning blocks 361 spaced apart. The pushing group 37 has two pushing members 371 which cooperate with the reference line L to cause the substrate to be just tilted in the first direction Y. The pushing members 371 each have a first slider 372 and are disposed in the first - Pushing the milk on the slider 372. The clamping group 38 can position the first, short side 130, 140 of the substrate ι in the first direction (as shown in FIG. 5), and each has a plurality of spacings and The splicing member 381 is staggered, and the clamping members 381 each have a second slider 382, a first pressure cylinder 383 fixed to the second slider 3, and the first pressure The cylinder 383 drives a connecting portion 385 which is mounted on the connecting member 384 along a connecting member 384 and 7 201035573 which are vertically raised and lowered in a direction perpendicular to the first and second directions Χ, Υ. The fourth and fifth driving members 39, 39' are linear motors each having a stator 391, 391 having a long rod shape, and a plurality of the stators 329 and 382 are respectively fixed to the first and second sliders 372 and 382. The stators 391, 391, the external movers M2, 392, 'the fourth drive member 39 can drive the push-on members 371 to adjust the distance along the first direction to the fifth drive #39, which can drive the clips The workpiece passes the second direction γ to adjust the separation distance.
如圖7、圖8、圖1〇及圖u所示，該探針單元4〇具^ 一安裝於該推抵組37的第—探針组41及二安裝於該等d 制組38的第二探針組42。該第—探針組4i具有多數分另 固叹在該等推抵件371之第—滑塊π上的壓力缸川、多 數受該等壓力缸411驅動的定位板412及多數凸設在該等沒 上的第-探針413,該等第一探針413設置在則 推抵部373下方，該等第一探針413受該壓力紅川驅動， 可沿第三方向z相對於該基板⑽的電極端i6i (如圖5所As shown in FIG. 7, FIG. 8, FIG. 1 and FIG. u, the probe unit 4 is mounted on the push probe group 37 and is mounted on the d group 38. Second probe set 42. The first probe group 4i has a plurality of pressure cylinders which are respectively sighed on the first slider π of the pushing members 371, and a plurality of positioning plates 412 driven by the pressure cylinders 411 and a plurality of protruding plates are disposed thereon. The first probe 413 is disposed under the pushing portion 373, and the first probe 413 is driven by the pressure Hongchuan, and is movable relative to the substrate along the third direction z. (10) electrode end i6i (as shown in Figure 5
接觸或遠離。該第二探針組42具有多數分別受該 、虹383驅動的第二壓& 421及多數安裝在該 側的第二探針422，該等連接件撕是利用該等 ==383連結於該第—厂驗如，且該等第二探針似 制部385下方，該等第二探針422受該第二 1驅動，可沿第三方向Z相對於該基板100的電極 端161(如圖5所示）產生接觸或遠離。 一、如圖4所示，該雷射修補單元5G具有—對固設在該第 一㈣邊11'12且沿第―方向X延伸的導軌51、-可 8 201035573 沿該等導軌5i滑動的η型懸架52、—可驅動該懸架52沿 該第一方向X在該機架10上移動的第六驅動件53、一架2 在該懸架52上的安裝座54、一可驅動該安裝座54沿該= 二方向X在該懸架52上移動的第七驅動件55及安裝在該 安裝座54的一雷射修補搶56、一攝影感光_ 該第= 、七驅動件53、55為線性馬達。 Ο Ο 如圖4及圖12所示，該打光單元6〇設置在該機架1〇 且位於該基板1GG下方’絲合該雷射修補單元5()設置， 並具有m向X設置於該固定框桿31的第八驅動件 、-受該第人驅動件61驅動的輸&設置在該承座 62且沿第二方向γ延伸的第九驅動件63、—受該第九驅動 件63驅動的光源產生件64。該第八驅動件61可以祠服馬 達配合螺桿或為線性馬達，該第九_件63可為伺服馬達 配合螺桿，且湘該第八、九驅動件61、63可驅動該光源 產生件64沿該第一、-方Λ γ v ^ 一方向X、Υ相對於基板1〇〇產生位 移。 如圖斗、圖Π及圖14所示，當欲對基板ι〇〇進行點燈 檢查及雷射修補時，該夾持單元30的推抵組37及夾制组 38朝外退移’料，該推抵組37的推抵部π肖應於該承 托面24,而該等夾制組38的第_麗缸如呈縮入狀態，使 得該等爽制部385的高度低於該等支樓件21的橫桿212底 緣。 將基板100送進該機 110尚未抵靠定位在該 接著，利用機械手臂（圖未示） 架10須部，該基板1〇〇的第一+邊 9 201035573 定位組36的基準線L上，此時，該支撐單元2〇的氣孔2i3 吹氣，機械手臂下降放片、移出。接著，如圖5及圖9所 不，該推抵組37的第一驅動件39驅動該等推抵件371對 應於該基板100的第二長邊120，且使該等第一探針413的 位置對應於第二長邊12G的電極端161，再啟動該等第二驅 動件33且驅動該等推抵件371推抵該基板1〇〇的第二長邊 120,且使基板100沿Y向移動，直到該第一長邊ιι〇抵靠 定位在該基準線L上。 繼續’如圖5、圖9及圖15所示，啟動該等第五驅動 件39’’並驅動該等夾制組38對應於該基板⑽的第一、 二短邊uo、14〇,且使該等第二探針422的位置對應於第 -、二短邊別、140的電極端161，再啟動該等夹制組％ 的第-壓缸383將該等夾制部如向上頂昇使得該等夹 制部奶的高度對應於該承推面24，且再啟動該等第三驅 動件35’使得該等推抵部385分別對第一、二短邊⑽、 140產生夾制’再操作該支擇單元的氣孔213吸真空以 固定該基板1〇〇。且在該施叔έ 在该推抵組37、夹制組38對該基板 1〇0產生推抵、夹制時，該第-、二探針組4卜42已被帶 動，且使第-、二探針413、422趨近於該基板ι〇〇的電極 端⑹，但並未與該等電極端161接觸，又如圖9及圖Μ W ㈣㈣等第二驅動件35域得該等夾制組38 即可使得該等第二探針組42恰對應於電極端 4 A u、圖17所示，啟動該壓力缸川及第二壓 42伸出’即可使得該等第一、二探針413、422抵 10 201035573 觸至該等電極端161，該基板100的缺陷點隨即發亮。 ' 接者，啟動該打光單元60，藉該光源產生器64打光， 再啟動該雷射修補單元60的第六、七驅動件53、55，且利 用〜攝如感光器57確認缺陷點，再利用該雷射修補搶 對發亮之缺陷點進行修補。 — 因此，本發明之功效可歸納如下： - 利用該支撐單元20的第一驅動件23可調整該等 支擇件21的間隔距離’且配合該夾持單元％的推抵組η 〇 、夾制組38也可分別沿第-方向X、第二方向γ產生位移 ，可廣泛地適用各種不同的基板 100。 二L對故障點進行修補時，是·該第六、七驅動件 53、55帶動該該雷射修補搶56及該射應感光器57相對於 該基板1〇0位移’基板100是固定於該支撐單元20上，所 以該基板100不會晃動，穩定度高。 三、湘該讀單元2G與夾持單元3G的配合可適用 ⑨各種尺相基板酬，且操作時零件不會外伸至該機架 Ο ίο外部。 值知提的是，即使本發明不設置該雷射修補單元π U 纟打光單元60’且該雷射修補單元50及打光單元6〇單獨 設置’則利用在該機架10上設置支撐單元2〇、炎持單元 30、探針單元40亦可完成點燈檢查。 惟以上所述者，僅為本發明之較佳實施例而已，當不 能以此限定本發明實施之範圍，即大凡依本發明申請專利 範圍及發明說明内容所作之簡單的等效變化與修飾，皆仍 11 201035573 屬本發明專利涵蓋之範圍内。 【圖式簡單說明】 圖1是現有一種結合有點燈檢查及雷射修補功能的設 備的立體組合圖； 圖2是該種設備的俯視示意圖； 圖3是沿圖2中之線皿-羾的一剖面圖； 圖4疋立體組合圖，說明本發明點燈檢查設備的一 較佳實施例； 圖5是本發明上述較佳實施例之一夾持定位示意圖， 說明一基板受—支料元及-㈣單元切及夾持定位； 圖6是本發明上述較佳實施例之支撐單元的立體組合 圖； 圖7是本發明上述較佳實施例之夾持單元的立體组合 圖； 圖8是本發明上述較佳實施例之一局部放大示意圖， 說明該夹持單元及二第三探針組的配置； 圖9是/發明上述較佳實施例之夾持單元俯視圖； 圖10疋沿圖9之線X -X的一剖面圖； 圖11是沿圖9中之線XI-XI的-剖面圖； 圖12疋本發明上述較佳實施例之-打光單元的立體組 合圖； '' /;立=.13疋本發明上述較佳實施例之失持單元的―操作前 圖 I本發明上述較佳實施例之夹持單元的另一操作 12 201035573 . 如不意圖， . 圖15是本發明上述較佳實施例之夹持單元的夾持操作 不意圖， 圖16是本發明上述較佳實施例之一探針單元的一操作 示意圖；及 圖17是本發明上述較佳實施例之探針單元的抵觸操作 示意圖。 〇Contact or stay away. The second probe set 42 has a plurality of second pressures & 421 driven by the rainbow 383 and a plurality of second probes 422 mounted on the side, and the connector tears are connected by using the == 383 The second probe 422 is driven by the second 1 and can be along the third direction Z with respect to the electrode end 161 of the substrate 100 (eg, under the second probe like portion 385). As shown in Figure 5) produces contact or away. 1. As shown in FIG. 4, the laser repairing unit 5G has a pair of guide rails 51, - 8 can be slid along the guide rails 5i, which are fixed to the first (four) side 11'12 and extend along the first direction X. An n-type suspension 52, a sixth driving member 53 for driving the suspension 52 to move on the frame 10 along the first direction X, a mounting seat 54 of the frame 2 on the suspension 52, and a mount capable of driving the mounting a seventh driving member 55 moving along the =2 direction X on the suspension 52 and a laser repairing 56 mounted on the mounting seat 54, a photographic photosensitive _ the first and seventh driving members 53, 55 are linear motor. As shown in FIG. 4 and FIG. 12, the light-receiving unit 6 is disposed in the frame 1 〇 and is located below the substrate 1GG and is configured to be screwed to the laser repairing unit 5 (), and has m-direction X disposed on An eighth driving member of the fixed frame lever 31, a drive driven by the first person driving member 61, and a ninth driving member 63 disposed at the socket 62 and extending in the second direction γ, by the ninth driving The light source generating member 64 driven by the member 63. The eighth driving member 61 can be compliant with the motor mating screw or a linear motor, and the ninth member 63 can be a servo motor mating screw, and the eighth and ninth driving members 61, 63 can drive the light source generating member 64 along the The first, - square Λ ν v ^ direction X, Υ is displaced relative to the substrate 1 。. As shown in FIG. 4, FIG. 14 and FIG. 14, when the substrate ITO is to be inspected for lighting and laser repaired, the pushing group 37 and the clamping group 38 of the clamping unit 30 are retracted outward. The pushing portion π of the pushing group 37 is applied to the supporting surface 24, and the first cylinder of the clamping group 38 is in a retracted state, so that the height of the refreshing portions 385 is lower than the The bottom edge of the crossbar 212 of the support member 21. Feeding the substrate 100 into the machine 110 has not yet been positioned against the bottom, using a mechanical arm (not shown) frame 10, the first + side 9 201035573 of the substrate 1 is positioned on the reference line L of the group 36, At this time, the air hole 2i3 of the support unit 2〇 is blown, and the robot arm is lowered and released. Then, as shown in FIG. 5 and FIG. 9 , the first driving member 39 of the pushing group 37 drives the pushing members 371 to correspond to the second long side 120 of the substrate 100 , and the first probes 413 are enabled. The position corresponds to the electrode end 161 of the second long side 12G, and the second driving members 33 are activated and the pushing members 371 are driven to push against the second long side 120 of the substrate 1 ,, and the substrate 100 is caused to be The Y direction moves until the first long side ιι is positioned against the reference line L. Continuing, as shown in FIG. 5, FIG. 9, and FIG. 15, the fifth driving members 39'' are activated and the clamping groups 38 are driven to correspond to the first and second short sides uo, 14A of the substrate (10), and The positions of the second probes 422 are corresponding to the electrode ends 161 of the first and second short sides, 140, and the first pressure cylinders 383 of the clamping group % are activated to lift the clamping portions upward. The heights of the clip portions correspond to the pushing surface 24, and the third driving members 35' are restarted such that the pushing portions 385 respectively sandwich the first and second short sides (10) and 140. The air hole 213 of the supporting unit is operated to suction a vacuum to fix the substrate 1〇〇. When the Schrödinger pushes and clamps the substrate 1〇0 in the pushing group 37 and the clamping group 38, the first and second probe groups 4b are driven, and the first, The two probes 413, 422 are close to the electrode end (6) of the substrate ι, but are not in contact with the electrode terminals 161, and the second driving member 35 such as FIG. 9 and FIG. The group 38 can be made such that the second probe set 42 corresponds to the electrode end 4 A u , as shown in FIG. 17 , the pressure cylinder is activated and the second pressure 42 is extended to make the first and second The probes 413, 422 abut 10 the 201035573 touches the electrode terminals 161, and the defect points of the substrate 100 are brightened. The pick-up unit activates the lighting unit 60, and the light source generator 64 lights up, and then activates the sixth and seventh driving members 53, 55 of the laser repairing unit 60, and confirms the defect point by using the photoreceptor 57. Then, the laser repair is used to repair the defects of the brightening. - Therefore, the effects of the present invention can be summarized as follows: - The spacing distance of the supporting members 21 can be adjusted by the first driving member 23 of the supporting unit 20 and the pushing group η 〇, the clamp of the clamping unit % is matched The group 38 can also be displaced in the first direction X and the second direction γ, respectively, and various substrates 100 can be widely applied. When the two L repairs the fault point, the sixth and seventh driving members 53, 55 drive the laser repair grab 56 and the photoreceptor 57 is displaced relative to the substrate 1'. The substrate 100 is fixed to Since the support unit 20 is provided, the substrate 100 does not shake and has high stability. Third, the cooperation between the reading unit 2G and the clamping unit 3G can be applied to 9 various scale phase substrates, and the parts will not protrude to the outside of the frame during operation. It is to be understood that even if the present invention does not provide the laser repair unit π U 纟 light-emitting unit 60 ′ and the laser repair unit 50 and the light-receiving unit 6 〇 are separately disposed, the support is provided on the frame 10 . The unit 2 〇, the illuminating unit 30, and the probe unit 40 can also perform the lighting inspection. The above is only the preferred embodiment of the present invention, and the scope of the invention is not limited thereto, that is, the simple equivalent changes and modifications made by the scope of the invention and the description of the invention are All still 11 201035573 is within the scope of the invention patent. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective assembled view of a conventional apparatus for combining a spot light inspection and a laser repair function; FIG. 2 is a top plan view of the apparatus; FIG. 3 is a wire-carrying device along the line of FIG. Figure 4 is a perspective view of a preferred embodiment of the lighting inspection apparatus of the present invention; Figure 5 is a schematic view of a clamping position of a preferred embodiment of the present invention, illustrating a substrate receiving material And (4) unit cutting and clamping positioning; FIG. 6 is a perspective assembled view of the supporting unit of the above preferred embodiment of the present invention; FIG. 7 is a perspective assembled view of the clamping unit of the above preferred embodiment of the present invention; FIG. 9 is a plan view of the clamping unit of the preferred embodiment of the present invention; FIG. 9 is a top view of the clamping unit of the above preferred embodiment; FIG. Figure 11 is a cross-sectional view taken along line XI-XI of Figure 9; Figure 12 is a perspective assembled view of the lighting unit of the above preferred embodiment of the present invention; '' /立=.13疋“Operation of the lost unit of the above preferred embodiment of the present invention” 1 is another operation 12 of the above-described preferred embodiment of the present invention. If not intended, FIG. 15 is a schematic view of the clamping operation of the above-described preferred embodiment of the present invention, and FIG. 16 is A schematic diagram of an operation of a probe unit according to a preferred embodiment of the present invention; and FIG. 17 is a schematic diagram of the interference operation of the probe unit of the above preferred embodiment of the present invention. 〇
13 201035573 【主要元件符號說明】 100…… •基板 231 · •…齒條 110…… •第一長邊 232 ··· —馬達 120…… -第二長邊 233… …·齒輪 13 0…… -第一短邊 ^4 * * * * * ， —承托面 ****** •第二短邊 3 0 1 — ‘…炎持單元 150°* — •修補面 l...... —基準線 160...... •底面 3 1 ". •…固定框桿 16 1…… -電極端 3 2 * * …1 …·活動長框桿 •第一方向 3 3 * ^ *1 …·第二驅動件 *♦»»»*»»· •第二方向 331… •…導螺桿 z ......... •第三方向 332… …·伺服馬達 1 Q *»»**»»* •機架 34"，* •…活動短框桿 11 !<♦*♦*[*}!♦ •第一長側邊 3 5…… —第三驅動件 1 Β·β*«·»κ*. -第二長側邊 351 - •…導螺桿 1 *K4V4K«« •第一短側邊 3 52 "- 。…伺服馬達 •第二短側邊 36..... —定位組 2 0，…*… ，支撐單元 361… •…定位塊 -支撐件 3 7 * * * * * •…推抵組 211 ***** •移動塊 371 ··· •…推抵件 212*·".· •橫桿 372… —第一滑塊 213…… •氣孔 373… •…推抵部 22……" •導座 3 8**"* —炎制組 -第一驅動件 381 * * …·夾制件 14 201035573 3 82 "** …第二滑塊 421.**** ••第二壓缸 383 ·… …第一壓缸 4 2 2 κ -κ ••第二探針 384 …' …連接件 50"""* ••雷射修補單元 3 85 — …夹制部 1 * Κ « Κ « II « -·導軌 Κ « X * Κ « …第四驅動件 5 2♦ • ·懸架 3 91 * … …定子 5 ^5 ·**»·»* ‘ ·第六驅動件 392 .… …動子 R « Κ * Κ « « ··安裝座 3 9，…κ …第五驅動件 55·，""* •第七驅動件 391，… …定子 56"**·* …雷射修補槍 392,… …動子 ••攝影感光器 »«»»»* …探針單元 6〇…… ••打光單元 41...... …第一探針組 1 Κ « Κ * « » Η •-第八驅動件 4 11 * … …壓力缸 »«»«»« 6 ••承座 412 ··· …定位板 63 ""… ••第九驅動件 413 ·… …第一探針 ••光源產生件 ^^ ^^ * * · « · Κ …第二探針組 〇 1513 201035573 [Description of main component symbols] 100... • Substrate 231 · •... Rack 110... • First long side 232 ··· —Motor 120... -Second long side 233...··Gear 13 0... - First short side ^4 * * * * * , - Support surface****** • Second short side 3 0 1 — '...Inflammation holding unit 150°* — • Repairing surface l..... - Reference line 160... • Bottom surface 3 1 ". •...Fixed frame rod 16 1... - Electrode end 3 2 * * ...1 ...·Active long frame rod • First direction 3 3 * ^ *1 ...·Second drive unit *♦»»»*»»· • Second direction 331... •... Lead screw z ......... • Third direction 332... ...·Servo motor 1 Q * »»**»»* • Rack 34",* •...Active Short Rod 11 !<♦*♦*[*}!♦ • First Long Side 3 5... - Third Drive 1 Β ·β*«·»κ*. -Second long side 351 - •... lead screw 1 *K4V4K«« • first short side 3 52 "- . ...servo motor • second short side 36..... - positioning group 2 0,...*..., support unit 361... •... positioning block-support 3 7 * * * * * •... push group 211 * **** • Moving block 371 ····...Pushing member 212*·".. • Cross bar 372... - First slider 213... • Air hole 373... •...Pushing portion 22..." • Guide 3 8**"* - Inflammatory group - First drive member 381 * * ... · Clamping member 14 201035573 3 82 "** ...Second slider 42.**** •• Second Pressure cylinder 383 ·...first pressure cylinder 4 2 2 κ -κ ••second probe 384 ...' ...connector 50"""*•• laser repair unit 3 85 — ... clamping part 1 * Κ « Κ « II « -· Κ Κ « X * Κ « ... 4th drive member 5 2♦ • Suspension 3 91 * ... stator 5 ^ 5 · **» ·»* ' · sixth drive 392 . ... mover R « Κ * Κ « « ·· mount 3 9,... κ ... fifth drive 55·, ""* • seventh drive 391, ... stator 56"**·* ... Laser Repair Gun 392,...Motion••Photoreceptor »«»»»* ...probe unit 6〇... ••Lighting unit 41......first probe set 1 Κ « Κ * « » Η •-eighth drive 4 11 * ...pressure cylinder »«» «»« 6 ••座座412···...positioning plate 63 ""... ••ninth drive member 413 ·...first probe••light source generator ^^ ^^ * * · « · Κ ...the second probe set 〇15