201027081 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種探針卡之調針平台，尤指一種適用 於垂直式探針卡調針平台。 5 【先前技術】 探針卡（probe card)在半導體測試設備上使用一段時間 10 15 20 後，由於探針與待測半導體元件長期且頻繁的接觸，而造 成探針的偏斜或折曲。其若未經由校正則於其後所測得的 數據必將不正確。 S知之垂直式的探針卡’其探針是垂直嵌設於探針卡 其探針模組的基孔上，1，探針係套設於基孔並非完全密 合’故仍有細缝產生，若探針已偏斜時，探針與基孔間部 份區域的細縫會增加，因此，傳統係於探針模組下方 一光源，光線會穿透出細縫，如此，調校人員即可輕易於 探針模組上方目視檢測出細縫的透光程度而得知探針模组 上各1探針有無偏斜情形，並適時加讀h 、 %知的調針方法是將探針模組自探針卡上拆卸下來， 十模組架設於調針平台上以利調針。其中，調針所 ’一源可分成背光式、與侧光式的光源投射模式。 其優平台底部垂直照射探針模組， 而易於調針;照射至探針模組的每一基孔， 於疲勞，無法長it 度太強而使調針人員眼睛易 负0f間進行調針，而減低調針效率。 3 201027081 而側光式的優點是光線柔和，調針人員眼睛不易疲 勞，可進行長時間的調針工作；其缺點是光線強度較弱， 加上調針平台不能均勻反射光線以使光線平均照射於探 針模組的每一個基孔上，因而不利於調針。 5 如圖1所示，其係習知調針平台之剖視圖。其中， 盆形本體9包括-侧環壁91、—底盤％、及一組裝孔93。側 環壁91與底盤92共同形成一盆内空間94，組裝孔％穿設於 _独並連通於盆内側光源95賴於盆形本體9 之、卫裝孔93内，並將光線照射進入盆内空間94内使其内 10 相對光亮。 於圖1中，探針模組96是位於探針卡的中央部，被測之 探針模組96則均勻開設有基孔97,在基孔97上固設有探針 98 ,在進行調針動作時是將探針模組％自探針卡（圖未示） 上拆卸下來並置於盆形本體9上以利調整探針％。 15 由於習知盆形本體9之侧環壁91、及底盤92對側光源的 所照出的光線不一定有很好的反射性。如此，常造成側光 _ 源95只能局部照射於探針模組96局部的基孔97 ^而常會對 偏斜探針調針不完整的情形發生，進而影響測試品質。 因此亟待一種能夠將側光源95平均反射於探針模組％ 20之所有基孔97的調針辅助工具，以使調針工作能正確執行。 【發明内容】 本發明係關於一種垂直式探針卡調針平台，包括一盆 形本體、一反光元件、及一光源。 201027081 盆形本體其包括一側環壁、及一底板，側環壁直立環 繞固設於底板之外環緣，側環壁包括有一内環面，側環壁 之頂緣設有一承載部，底板包括有一上表面。 反光兀件包括有一環形反光層、及一底反光層，環形 5反光層環設於側環壁之内環面，底反光層組設於底板之上 表面上。光源其組設於側環壁之内環面上。 因此，若將光源穿設進入侧環壁並伸出内環面外而凸 出至盆内空間，光源之光線便可透過環形反光層與底反光 ® 層將其無數次反射，故可均勻地照射擺設於盆形本鱧上方 1〇的探針卡之底面，有利於調針者能正確判別偏斜之探針並 加以調針。 此外，盆形本體之侧環壁穿設有一組裝孔，光源是組 設於組裝孔内。盆形本體之側環壁之頂緣更設有一凸透 鏡，凸透鏡位於承載部下方。侧環壁之該承載部包括有一 15 環肩部。 再者’盆形本體之底板之上表面包括有一凹陷，反光 參元件之底反光層包括有一凹面鏡對應貼合於凹陷内。反光 元件之環形反光層及底反光層係分別選自下列群組：鍍銀 層、鍍銅層、銅銀合金層、硫酸銅層、及硫酸鋇層。 2〇 並且，光源包括有一蛇管燈。盆形本體之側環壁更開 設有至少一轴向凹槽。 【實施方式】 5 201027081 請同時參閱圖2、及圖3,圖2係本發明調針平 佳實施例之立.體圖；圖3係本發明調針平台第—較佳實施例 之剖視圖。如圖所示’其顯示為—種垂直式探針卡調針平 5 台’此調針平台包括一盆形本體i、一反光元件 源3。 九 如圖2，盆形本體丨其包括一側環壁丨丨、及—底板a， 側環壁11直立環繞固設於底板12之外環緣側環壁11包括 有一内環面in ’側環壁u更開設有至少一轴向凹槽114, • 以方便取走調針完成之探針模組4。底板12包括有一上表面 10 121 。 如圖2、及圖3’侧環壁u之頂緣設有一承載部ιΐ2用以 承載待測之垂直式探針卡之探針模組4，承載部112包括有 一環肩部113，以利穩固地放置探針模組4。 反光元件2包括有一環形反光層21、及一底反光層22, 15 環形反光層21環設於側環壁11之内環面Π1，底反光層22組 設於底板12之上表面121上’其中，反光元件2之環形反光 φ 層21及底反光層22係分別選自下列群組：鍍銀層、鍍銅層、 銅銀合金層、硫酸銅層、及硫酸鋇層。 光源3其組設於側環壁π之内環面111上，盆形本體 20 側環壁11穿設有一組裝孔13，光源3是組設於組裝孔13内， 並發出光線照射入盆形本體1之盆内空間14内，於本實施例 中，光源3是指一蛇管燈。 如圖3所示’蛇管燈光源穿設進入側環壁u並伸出内環 面111外而凸出至盆内空間14,蛇管燈之光線便可透過環形 6 201027081 反光層與底反光層將其無數次反射，故可均勻地照射擺設 於盆形本體上方的探針卡之底面，此時，若位於探針模組4 上的探針42未產生偏斜，則光線不能自基孔43透出；反之， 若位於探針模組4上的探針42產生偏斜，則光線會自基孔43 5 透出’因此調針者則可自基孔43檢驗有無透出的光線，以 判斷探針42是否偏斜並加以調針。 請參閱圖4，其係本發明調針平台第二較佳實 施例之剖視圖。本實施例與第一實施例之結構大 籲 致相同，惟不同處在於盆形本體1之側環壁11之頂緣更 10 設有一凸透鏡5,凸透鏡5位於承載部112下方，以強化反射 之光線’藉以聚光照射於探針模組4之底面41。 請參閱圖5 ’其係本發明調針平台第三較佳實施例之剖 視圖。於本例中，盆形本體1之底板12之上表面121包括有 一凹陷122 ’反光元件2之底反光層22包括有一凹面鏡221對 15 應貼合於凹陷122内，以產生凹面鏡效果而強化反射之光 線’藉以聚光照射於探針模組4之底面41。 〇 上述實施例僅係為了方便說明而舉例而已，本發明所 主張之權利範圍自應以申請專利範圍所述為準，而非僅限 於上述實施例。 20 【圖式簡單說明】 圖1係習知調針平台之剖視圖。 圖2係本發明調針平台第一較佳實施例之立體圖。 圖3係本發明調針平台第一較佳實施例之剖視圖。 7 201027081 圖4係本發明調針平 台第二較佳實施例之剖視圖。 圖5係本發明調針平台第三較佳實施例之剖視圖。 【主要元件符號說明】 盆形本體1 側環壁11 内環面111 承載部112 環肩部113 轴向凹槽114 底板12 上·表面121 凹陷122 組裝孔13 盆内空間14 反光元件2 環形反光層21 底反光層22 凹面鏡221 光源3 探針模組4 底面41 探針42 基孔43 凸透鏡5 盆形本體9 側環壁91 底盤92 紐·裝孔93 盆内空間94 側光源95 探針模組96 基孔97 探針98201027081 VI. Description of the Invention: [Technical Field] The present invention relates to a needle adjustment platform for a probe card, and more particularly to a vertical probe card adjustment platform. 5 [Prior Art] After a probe card is used on a semiconductor test equipment for a period of time 10 15 20 , the probe is deflected or bent due to long-term and frequent contact of the probe with the semiconductor component to be tested. If it is not corrected, the data measured after it will be incorrect. S knows that the vertical probe card's probe is vertically embedded in the base hole of the probe module of the probe card. 1. The probe is sleeved on the base hole and is not completely tight. If the probe is deflected, the sipe of the part between the probe and the base hole will increase. Therefore, a light source that passes under the probe module and the light will penetrate the slit, so that the adjuster It is easy to visually detect the light transmission degree of the slit above the probe module and know whether there is any deflection of each probe on the probe module, and timely add h, % know the needle adjustment method is to probe The needle module is detached from the probe card, and the ten modules are mounted on the needle adjustment platform to facilitate the adjustment of the needle. Among them, the source of the needle adjustment can be divided into a backlight type and a side light type light source projection mode. The bottom of the platform is vertically illuminating the probe module, and it is easy to adjust the needle; it is irradiated to each base hole of the probe module, and it is fatigued, and the length of the needle is too strong, so that the needle of the needle is easy to be negatively adjusted. , and reduce the efficiency of needle adjustment. 3 201027081 The advantage of the side light type is that the light is soft, the eye of the needle adjustment personnel is not easy to fatigue, and the needle adjustment work can be performed for a long time; the disadvantage is that the light intensity is weak, and the needle adjustment platform cannot uniformly reflect the light to make the light uniformly irradiated. Each of the base holes of the probe module is not conducive to the adjustment of the needle. 5 As shown in Figure 1, it is a cross-sectional view of a conventional needle adjustment platform. The basin-shaped body 9 includes a side ring wall 91, a chassis %, and an assembly hole 93. The side ring wall 91 and the bottom plate 92 together form a basin inner space 94, and the assembly hole % is disposed in the guard hole 93 which is connected to the pot inner side light source 95 and radiates light into the basin. The inner space 94 has its inner 10 relatively bright. In FIG. 1, the probe module 96 is located at the center of the probe card, and the probe module 96 to be tested is uniformly provided with a base hole 97, and the probe 98 is fixed on the base hole 97. When the needle is moved, the probe module % is detached from the probe card (not shown) and placed on the basin-shaped body 9 to adjust the probe %. 15 Because the side ring wall 91 of the conventional pot-shaped body 9 and the light illuminating the side light source of the chassis 92 are not necessarily highly reflective. In this way, the side light _ source 95 is usually only partially irradiated to the local hole 97 of the probe module 96, and the deflection probe is often incomplete, which affects the test quality. Therefore, a needle assisting tool capable of reflecting the side light source 95 evenly on all the base holes 97 of the probe module % 20 is required to enable the needle adjustment work to be performed correctly. SUMMARY OF THE INVENTION The present invention is directed to a vertical probe card adjustment platform comprising a basin body, a retroreflective element, and a light source. 201027081 The basin-shaped body comprises a side ring wall and a bottom plate, the side ring wall is erected and fixed on the outer ring edge of the bottom plate, the side ring wall comprises an inner ring surface, and the top edge of the side ring wall is provided with a bearing portion, the bottom plate Includes an upper surface. The reflective member includes an annular reflective layer and a bottom reflective layer. The annular reflective layer is disposed on the inner annular surface of the side ring wall, and the bottom reflective layer is disposed on the upper surface of the bottom plate. The light source is arranged on the inner annular surface of the side ring wall. Therefore, if the light source is inserted into the side ring wall and protrudes out of the inner ring surface to protrude into the inner space of the basin, the light of the light source can be reflected through the annular reflective layer and the bottom reflective layer to innumerable times, so that the light can be uniformly The bottom surface of the probe card placed on the top of the basin-shaped top is illuminating, which is convenient for the needle adjuster to correctly discriminate the deflected probe and adjust the needle. In addition, the side ring wall of the basin-shaped body is provided with an assembly hole, and the light source is assembled in the assembly hole. The top edge of the side ring wall of the basin body is further provided with a convex lens, and the convex lens is located below the carrying portion. The carrier portion of the side ring wall includes a 15 ring shoulder. Further, the upper surface of the bottom plate of the basin-shaped body includes a recess, and the reflective layer of the bottom of the reflective component includes a concave mirror correspondingly fitted into the recess. The annular light reflecting layer and the bottom light reflecting layer of the reflecting element are respectively selected from the group consisting of a silver plating layer, a copper plating layer, a copper silver alloy layer, a copper sulfate layer, and a barium sulfate layer. 2〇 Also, the light source includes a coil light. The side ring wall of the basin body is further provided with at least one axial groove. [Embodiment] 5 201027081 Please refer to FIG. 2 and FIG. 3 at the same time, FIG. 2 is a perspective view of a preferred embodiment of the needle adjustment of the present invention; and FIG. 3 is a cross-sectional view of a preferred embodiment of the needle adjustment platform of the present invention. As shown in the figure, it is shown as a vertical probe card, and the needle adjustment platform includes a basin-shaped body i and a light-reflecting component source 3. As shown in FIG. 2, the basin-shaped body includes a one-side ring wall and a bottom plate a. The side ring wall 11 is erected and fixed on the outer side of the bottom plate 12. The side ring wall 11 includes an inner ring surface in the side. The ring wall u is further provided with at least one axial groove 114, and is used for conveniently removing the probe module 4 which is completed by the needle adjustment. The bottom plate 12 includes an upper surface 10 121 . As shown in FIG. 2 and FIG. 3, the top edge of the side ring wall u is provided with a carrying portion ι 2 for carrying the probe module 4 of the vertical probe card to be tested, and the carrying portion 112 includes a ring shoulder 113 for The probe module 4 is placed firmly. The retroreflective element 2 includes an annular reflective layer 21 and a bottom reflective layer 22, 15 annular reflective layer 21 is disposed on the inner annular surface Π1 of the side annular wall 11, and the bottom reflective layer 22 is disposed on the upper surface 121 of the bottom plate 12. The annular reflective φ layer 21 and the bottom reflective layer 22 of the retroreflective element 2 are respectively selected from the group consisting of a silver plating layer, a copper plating layer, a copper silver alloy layer, a copper sulfate layer, and a barium sulfate layer. The light source 3 is disposed on the inner ring surface 111 of the side ring wall π, and the side ring wall 11 of the basin body 20 is provided with an assembly hole 13 which is assembled in the assembly hole 13 and emits light into the basin shape. In the basin inner space 14 of the body 1, in the present embodiment, the light source 3 refers to a coiled tube lamp. As shown in Figure 3, the 'snake tube light source passes through the side ring wall u and protrudes out of the inner ring surface 111 to protrude into the basin inner space 14. The light of the coil tube can pass through the ring 6 201027081, and the reflective layer and the bottom reflective layer will Since it is reflected innumerable times, the bottom surface of the probe card disposed above the basin body can be uniformly illuminated. At this time, if the probe 42 located on the probe module 4 is not deflected, the light cannot be from the base hole 43. If the probe 42 located on the probe module 4 is deflected, the light will be transmitted from the base hole 43 5 'so the needle can check the light from the base hole 43 to It is judged whether or not the probe 42 is skewed and the needle is adjusted. Referring to Figure 4, there is shown a cross-sectional view of a second preferred embodiment of the needle adjustment platform of the present invention. This embodiment is similar to the structure of the first embodiment, except that the top edge 10 of the side ring wall 11 of the basin body 1 is further provided with a convex lens 5, and the convex lens 5 is located below the carrying portion 112 to enhance reflection. The light ray is irradiated onto the bottom surface 41 of the probe module 4 by condensing light. Referring to Figure 5, a cross-sectional view of a third preferred embodiment of the needle adjustment platform of the present invention is shown. In this example, the upper surface 121 of the bottom plate 12 of the basin-shaped body 1 includes a recess 122. The bottom reflective layer 22 of the reflective member 2 includes a concave mirror 221 pair 15 which fits within the recess 122 to produce a concave mirror effect and enhance reflection. The light ray is irradiated onto the bottom surface 41 of the probe module 4 by condensing light. The above-described embodiments are merely examples for the convenience of the description, and the scope of the claims is intended to be limited by the scope of the claims. 20 [Simple description of the drawings] Fig. 1 is a cross-sectional view of a conventional needle adjustment platform. 2 is a perspective view of a first preferred embodiment of the needle adjustment platform of the present invention. Figure 3 is a cross-sectional view showing a first preferred embodiment of the needle adjustment platform of the present invention. 7 201027081 Figure 4 is a cross-sectional view showing a second preferred embodiment of the needle adjustment platform of the present invention. Figure 5 is a cross-sectional view showing a third preferred embodiment of the needle adjustment platform of the present invention. [Main component symbol description] Basin body 1 Side ring wall 11 Inner ring surface 111 Bearing portion 112 Ring shoulder 113 Axial groove 114 Base plate 12 Upper surface 121 recess 122 Assembly hole 13 Inner space 14 Reflective element 2 Ring reflection Layer 21 bottom reflective layer 22 concave mirror 221 light source 3 probe module 4 bottom surface 41 probe 42 base hole 43 convex lens 5 basin body 9 side ring wall 91 chassis 92 button hole 93 basin space 94 side light source 95 probe Group 96 base hole 97 probe 98
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