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KR930000923A - 저농도의 기체상 하이드라이드의 안정성을 증진시키기 위해 그와 접촉되어 있는 금속 표면을 패시베이션시키는 방법 - Google Patents

저농도의 기체상 하이드라이드의 안정성을 증진시키기 위해 그와 접촉되어 있는 금속 표면을 패시베이션시키는 방법 Download PDF

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Publication number
KR930000923A
KR930000923A KR1019920009562A KR920009562A KR930000923A KR 930000923 A KR930000923 A KR 930000923A KR 1019920009562 A KR1019920009562 A KR 1019920009562A KR 920009562 A KR920009562 A KR 920009562A KR 930000923 A KR930000923 A KR 930000923A
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South Korea
Prior art keywords
metal surface
gas
hydride
gaseous
silicon
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KR1019920009562A
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English (en)
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KR100227064B1 (ko
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야오-엔리
리조스 존
카스퍼 게르하르트
Original Assignee
제라르 레비
레르 리퀴드, 소시에떼 아노님 뿌르 레뛰드 에 렉스플로아따시옹 데 프로세데 조르쥬 끌로드
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Publication of KR930000923A publication Critical patent/KR930000923A/ko
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Publication of KR100227064B1 publication Critical patent/KR100227064B1/ko

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/80—After-treatment
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B5/00—Drying solid materials or objects by processes not involving the application of heat
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C10/00—Solid state diffusion of only metal elements or silicon into metallic material surfaces
    • C23C10/06—Solid state diffusion of only metal elements or silicon into metallic material surfaces using gases
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/02—Pretreatment of the material to be coated
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Molecular Biology (AREA)
  • General Engineering & Computer Science (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
  • Silicon Compounds (AREA)
  • Preventing Corrosion Or Incrustation Of Metals (AREA)

Abstract

내용 없음

Description

저농도의 기체상 하이드라이드의 안정성을 증진시키기 위해 그와 접촉되어 있는 금속 표면을 패시베이션시키는 방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명에 따른 플로우 시스템의 도식적인 다이아그램을 나타낸 것이다.
제2도는 316L 스테인레스강류빙에서의 트래핑 시간과 1ppm AsH3/Ar의 손실과의 관계를 그래프로 나타낸 것이다.

Claims (14)

  1. a)금속 표면과 접해있는 가스를 불활성 가스를 이용하여 정화시켜 상기 정화된 가스를 제거하고, b)상기 금속 표면이 패시베이션되는데 충분한 시간동안, 실리콘, 게르마늄, 주석 또는 납의 기체상 하이드라이드의 유효량으로 된 일정량의 패시베이션재에 금속 표면을 노출시킨 다음, c)불활성 가스를 이용하여 상기 패시베이션제를 정화하는 단계로 이루어짐을 특징으로 하는, 한가지 이상의 저농도 기체상 하이드라이드를 함유하는 가스 혼합물의 안정성을 증진시키기 위해 그와 접해있는 금속 표면을 패시베이션시키는 방법.
  2. 제1항에 있어서, 상기 금속 표면이 강철, 철, 또는 알루미늄으로 된 것이 특징인 방법.
  3. 제1항에 있어서, 상기 금속 표면이 압축 가스 저장용 실린더인 것이 특징인 방법.
  4. 제1항에 있어서, 상기 정화된 가스가 공기인 것이 특징인 방법.
  5. 제1항에 있어서, 상기 불활성 가스가 질소, 아르곤, 크립톤, 크세논 또는 네온인 것이 특징인 방법.
  6. 제1항에 있어서, c)단계에 이어, 금속 표면에 흡착된 패시베이션제를 안정화시키기에 충분한 시간동안, 안정화시키기에 충분한 양의 산화 가스 또는 가스 혼합물에 금속 표면에 노출시키는 단계가 추가되는 것이 특징인 방법.
  7. 제1항에 있어서, 상기 한가지 이상의 저농도 기체상 하이드라이드가 포스핀, 아르신, 및 스티빈 중에서 선택되는 것이 특징인 방법.
  8. 제1항에 있어서, 상기 기체상 하이드라이드 패시베이션제가 SinH2n+2의 일반식을 갖는 실리콘 하이드라이드(여기서, n은 1 내지 약 10임);Ge2H6, Ge2H20, SnH4, SnH6및 PbH4중에서 선택되는 것이 특징인 방법.
  9. 제8항에 있어서, 상기 기체상 하이드라이드 패시베이션제가 일반식 SinH2n+2(여기서, n은 1내지 약 10임)의 실리콘 하이드라이드인 것이 특징인 방법.
  10. 제9항에 있어서, 상기 실리콘 하이드라이드가 SiH4인 것이 특징인 방법.
  11. 실리콘, 게르카늄, 주석 또는 납의 기체상 하이드라이드 유효량을 함유하는 패시베이션제로 처리된 내부 금속 표면을 갖는 저장 수단.
  12. 제11항에 있어서, 탱크 트랙터 트레일러 장비 또는 철로 탱크차량인 것이 특징인 저장 수단.
  13. 제11항에 있어서, 압축 가스 저장용 실린더인 것이 특징인 저장 수단.
  14. 제11항에 있어서, 도관, 파이프 또는 용기로 된 것이 특징인 저장 수단.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019920009562A 1991-06-03 1992-06-02 저농도의 기체상 하이드라이드의 안정성을 증진시키기 위해 그와 접촉되어 있는 금속 표면을 패시베이션 시키는 방법 KR100227064B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US70918391A 1991-06-03 1991-06-03
US709,183 1991-06-03
CN92109655A CN1039925C (zh) 1991-06-03 1992-08-21 钝化金属制气体容器内表面的方法和产品

Publications (2)

Publication Number Publication Date
KR930000923A true KR930000923A (ko) 1993-01-16
KR100227064B1 KR100227064B1 (ko) 1999-10-15

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KR1019920009562A KR100227064B1 (ko) 1991-06-03 1992-06-02 저농도의 기체상 하이드라이드의 안정성을 증진시키기 위해 그와 접촉되어 있는 금속 표면을 패시베이션 시키는 방법

Country Status (6)

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EP (1) EP0517576B1 (ko)
JP (1) JP3162480B2 (ko)
KR (1) KR100227064B1 (ko)
CN (1) CN1039925C (ko)
CA (1) CA2070145A1 (ko)
DE (1) DE69209149T2 (ko)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5479727A (en) 1994-10-25 1996-01-02 Air Products And Chemicals, Inc. Moisture removal and passivation of surfaces
CN1316246C (zh) * 2002-05-29 2007-05-16 液体空气乔治洛德方法利用和研究的具有监督和管理委员会的有限公司 含酸性气体和基质气体的已减湿组合物、含所述组合物的制品及其制备方法
JP4639904B2 (ja) 2005-03-30 2011-02-23 チッソ株式会社 蛍光活性を有するルシフェラーゼの活性増強方法
JP4609177B2 (ja) 2005-04-28 2011-01-12 チッソ株式会社 カルシウム結合型発光蛋白質溶液の発光時間延長方法
EP3095894B1 (en) * 2012-06-15 2018-05-09 Praxair Technology Inc. Cylinder preparation for maintaining stability of stored materials
US20150024152A1 (en) 2013-07-19 2015-01-22 Agilent Technologies, Inc. Metal components with inert vapor phase coating on internal surfaces
US10767259B2 (en) 2013-07-19 2020-09-08 Agilent Technologies, Inc. Components with an atomic layer deposition coating and methods of producing the same
CN105387337B (zh) * 2014-09-09 2018-10-16 中国石油天然气股份有限公司 一种铝合金气瓶及其处理方法
WO2016114850A1 (en) * 2015-01-14 2016-07-21 Agilent Technologies, Inc. Components with an atomic layer deposition coating and methods of producing the same
CN106185850B (zh) * 2016-07-15 2018-09-14 合肥正帆电子材料有限公司 电子级砷化氢、磷化氢及其混合物气体钢瓶的钝化处理工艺

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* Cited by examiner, † Cited by third party
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GB1530337A (en) * 1977-09-15 1978-10-25 Central Electr Generat Board Application of protective coatings to metal or metal with an oxide coating or to graphite
GB2107360B (en) * 1981-10-12 1985-09-25 Central Electr Generat Board Depositing silicon on metal
US4714632A (en) * 1985-12-11 1987-12-22 Air Products And Chemicals, Inc. Method of producing silicon diffusion coatings on metal articles
FR2633311A1 (fr) * 1988-06-24 1989-12-29 Kodak Pathe Procede de traitement de particules metalliques contre la corrosion et particules obtenues
GB2530337B (en) * 2014-09-22 2018-10-17 Bae Systems Plc Graphene Manufacture

Also Published As

Publication number Publication date
EP0517576B1 (en) 1996-03-20
KR100227064B1 (ko) 1999-10-15
EP0517576A1 (en) 1992-12-09
CN1082623A (zh) 1994-02-23
JP3162480B2 (ja) 2001-04-25
DE69209149T2 (de) 1996-09-05
JPH05214507A (ja) 1993-08-24
CA2070145A1 (en) 1992-12-04
DE69209149D1 (de) 1996-04-25
CN1039925C (zh) 1998-09-23

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