KR20120098461A - 접합용 적층체 및 접합체 - Google Patents
접합용 적층체 및 접합체 Download PDFInfo
- Publication number
- KR20120098461A KR20120098461A KR1020120018579A KR20120018579A KR20120098461A KR 20120098461 A KR20120098461 A KR 20120098461A KR 1020120018579 A KR1020120018579 A KR 1020120018579A KR 20120018579 A KR20120018579 A KR 20120018579A KR 20120098461 A KR20120098461 A KR 20120098461A
- Authority
- KR
- South Korea
- Prior art keywords
- layer
- metal
- metal nanoparticle
- coating method
- sintered compact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 title description 28
- 239000002082 metal nanoparticle Substances 0.000 claims abstract description 170
- 239000011230 binding agent Substances 0.000 claims abstract description 62
- 239000002245 particle Substances 0.000 claims abstract description 20
- 229910044991 metal oxide Inorganic materials 0.000 claims abstract description 7
- 150000004706 metal oxides Chemical class 0.000 claims abstract description 7
- 239000002923 metal particle Substances 0.000 claims abstract description 6
- 238000000034 method Methods 0.000 claims description 87
- 239000000203 mixture Substances 0.000 claims description 86
- 229910052751 metal Inorganic materials 0.000 claims description 66
- 239000002184 metal Substances 0.000 claims description 66
- 238000000576 coating method Methods 0.000 claims description 50
- 238000005304 joining Methods 0.000 claims description 33
- 229910052709 silver Inorganic materials 0.000 claims description 26
- 239000004332 silver Substances 0.000 claims description 26
- 239000000758 substrate Substances 0.000 claims description 23
- 238000004519 manufacturing process Methods 0.000 claims description 19
- 150000002736 metal compounds Chemical class 0.000 claims description 18
- 150000002739 metals Chemical class 0.000 claims description 15
- 239000010931 gold Substances 0.000 claims description 13
- 239000011135 tin Substances 0.000 claims description 13
- 229910052718 tin Inorganic materials 0.000 claims description 12
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 11
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 11
- 229910052802 copper Inorganic materials 0.000 claims description 11
- 239000010949 copper Substances 0.000 claims description 11
- 229910052725 zinc Inorganic materials 0.000 claims description 11
- 239000011701 zinc Substances 0.000 claims description 11
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 10
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 10
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- 238000010304 firing Methods 0.000 claims description 9
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 9
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- 239000002994 raw material Substances 0.000 claims description 6
- 238000004528 spin coating Methods 0.000 claims description 6
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 claims description 5
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- 238000007645 offset printing Methods 0.000 claims description 5
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- 238000003756 stirring Methods 0.000 description 8
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 7
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 7
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- 229940100890 silver compound Drugs 0.000 description 7
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- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 6
- 238000002156 mixing Methods 0.000 description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 229920005989 resin Polymers 0.000 description 6
- 239000011347 resin Substances 0.000 description 6
- SQGYOTSLMSWVJD-UHFFFAOYSA-N silver(1+) nitrate Chemical compound [Ag+].[O-]N(=O)=O SQGYOTSLMSWVJD-UHFFFAOYSA-N 0.000 description 6
- 238000012360 testing method Methods 0.000 description 6
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 5
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- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 5
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- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 4
- 229910052787 antimony Inorganic materials 0.000 description 4
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 4
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- 239000001509 sodium citrate Substances 0.000 description 4
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- 229910015363 Au—Sn Inorganic materials 0.000 description 3
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Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B15/08—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F10/00—Individual photovoltaic cells, e.g. solar cells
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/85—Packages
- H10H20/855—Optical field-shaping means, e.g. lenses
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/85—Packages
- H10H20/855—Optical field-shaping means, e.g. lenses
- H10H20/856—Reflecting means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/838—Bonding techniques
- H01L2224/8384—Sintering
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
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- Photovoltaic Devices (AREA)
- Led Device Packages (AREA)
- Laminated Bodies (AREA)
- Die Bonding (AREA)
- Conductive Materials (AREA)
- Powder Metallurgy (AREA)
Abstract
Description
도 2 는 본 발명의 다른 실시형태인, 투명층을 포함하는 접합용 적층체의 단면도이다.
도 3 은 본 발명의 다른 실시형태인, 바인더층을 포함하는 접합용 적층체의 단면도이다.
도 4 는 본 발명의 다른 실시형태인, 접합체의 단면도이다.
4 : 접합체
11, 21, 31, 41 : 금속 나노 입자 소결체층
12, 22, 32,42 : 접합층
23, 43 : 투명층
34, 44 : 바인더층
45 : 제 1 피접합체
46 : 제 2 피접합체
Claims (17)
- 금속 나노 입자를 주원료로 하여 소결시킨 금속 나노 입자 소결체층과,
상기 금속 나노 입자 소결체층 상에 적층된, 금속 입자 또는 금속 산화물 입자를 포함하는 접합층을 구비하는 것을 특징으로 하는 접합용 적층체. - 제 1 항에 있어서,
상기 금속 나노 입자 소결체층이, 상기 접합층과는 반대측에 적층된 투명층을 구비하는 접합용 적층체. - 제 1 항에 있어서,
상기 금속 나노 입자 소결체층과, 상기 접합층 사이에 형성된 바인더층을 구비하는 접합용 적층체. - 제 1 항에 있어서,
상기 금속 나노 입자 소결체층이, 75 질량% 이상의 은을 포함하고, 또한, 금, 구리, 주석, 아연, 몰리브덴 및 망간 중 적어도 1 종의 제 2 금속을 포함하는 접합용 적층체. - 제 1 항에 있어서,
상기 금속 나노 입자 소결체층이, 바인더를 포함하는 접합용 적층체. - 제 1 항에 있어서,
상기 금속 나노 입자 소결체층의 두께가 0.01 ? 0.5 ㎛ 인 접합용 적층체. - 제 1 항에 있어서,
상기 각 층은, 습식 도공법에 의해 성막된 후, 130 ? 250 ℃ 에서 소성된 층인 접합용 적층체. - 제 3 항에 있어서,
상기 투명층 및 상기 바인더층이, 가열에 의해 경화되는 폴리머형 바인더 및 논폴리머형 바인더 중 적어도 1 종을 포함하는 접합용 적층체. - 제 7 항에 있어서,
상기 습식 도공법이, 스프레이 코팅법, 디스펜서 코팅법, 스핀 코팅법, 나이프 코팅법, 슬릿 코팅법, 잉크젯 코팅법, 스크린 인쇄법, 오프셋 인쇄법, 전사법 또는 다이 코팅법 중 어느 것인 접합용 적층체. - 제 4 항에 있어서,
상기 금속 나노 입자 소결체층 중에 있어서의 상기 제 2 금속의 함유량은, 상기 금속 나노 입자 소결체층 중에 있어서의 모든 금속의 총량에 대해, 0.02 질량% 이상 또한 25 질량% 미만인 접합용 적층체. - 제 1 피접합체와, 제 2 피접합체와, 상기 제 1 및 제 2 피접합체 사이에 형성된 제 1 항 내지 제 10 항 중 어느 한 항에 기재된 접합용 적층체를 구비하는 것을 특징으로 하는 접합체.
- 제 11 항에 있어서,
상기 제 1 피접합체가, 발광 가능 또는 광전 변환 가능한 소자이고, 상기 금속 나노 입자 소결체층이, 상기 제 1 피접합체로부터의 광을 반사 가능하고, 상기 제 2 피접합체가 기판인 접합체. - 제 12 항에 있어서,
상기 제 1 피접합체가 발광 가능한 소자로서, 발광원으로서 사용되는 접합체. - 제 12 항에 있어서,
상기 제 1 피접합체가 광전 변환 가능한 소자로서, 태양전지로서 사용되는 접합체. - 제 1 및 제 2 피접합체를, 접합용 적층체로 접합하여, 접합체를 제조하는 방법으로서,
상기 제 1 피접합체에, 금속 나노 입자를 포함하는 금속 나노 입자 소결체층용 조성물을 도포하고, 소성하여 금속 나노 입자 소결체층을 형성하는 공정과,
상기 제 2 피접합체에, 금속 입자 또는 금속 화합물의 입자를 포함하는 접합층용 조성물을 도포하는 공정과,
상기 도포된 접합층용 조성물의 층에, 상기 금속 나노 입자 소결체층을 향하여 상기 제 1 피접합체와 상기 제 2 피접합체를 중첩시키는 공정과,
상기 중첩된 제 1 및 제 2 피접합체를 가열함으로써, 상기 도포된 접합층용 조성물의 층을 소성하여 접합층을 형성하고, 제 1 및 제 2 피접합체를 접합하는 것을 특징으로 하는 접합체의 제조 방법. - 제 15 항에 있어서,
상기 도포 방법은, 스프레이 코팅법, 디스펜서 코팅법, 스핀 코팅법, 나이프 코팅법, 슬릿 코팅법, 잉크젯 코팅법, 스크린 인쇄법, 오프셋 인쇄법, 전사법 또는 다이 코팅법 중 어느 것에서 선택된 습식 도공법인 접합체의 제조 방법. - 제 15 항 또는 제 16 항에 있어서,
상기 금속 나노 입자 소결체층용 조성물 및 상기 접합층용 조성물의 소성 온도는, 모두 130 ? 250 ℃ 인 접합체의 제조 방법.
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JP5830302B2 (ja) * | 2011-08-11 | 2015-12-09 | 古河電気工業株式会社 | 加熱接合用材料、加熱接合用シート体、及び加熱接合用成形体 |
AT513747B1 (de) * | 2013-02-28 | 2014-07-15 | Mikroelektronik Ges Mit Beschränkter Haftung Ab | Bestückungsverfahren für Schaltungsträger und Schaltungsträger |
JP2015188035A (ja) * | 2014-03-27 | 2015-10-29 | セイコーエプソン株式会社 | 発光装置の製造方法、発光装置およびプロジェクター |
TWI683322B (zh) * | 2015-12-07 | 2020-01-21 | 日商哈利瑪化成股份有限公司 | 導電性糊劑之製造方法 |
WO2018042825A1 (ja) * | 2016-08-30 | 2018-03-08 | パナソニックIpマネジメント株式会社 | 色変換素子 |
JP6815133B2 (ja) * | 2016-08-31 | 2021-01-20 | 日東電工株式会社 | 加熱接合用シート、及び、ダイシングテープ付き加熱接合用シート |
JP2019065229A (ja) * | 2017-10-04 | 2019-04-25 | コニカミノルタ株式会社 | 混合液の製造方法、混合液を製造するシステム、インク組成物、画像形成方法および画像形成物 |
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