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KR19980024008A - 클린 룸 - Google Patents

클린 룸 Download PDF

Info

Publication number
KR19980024008A
KR19980024008A KR1019970014470A KR19970014470A KR19980024008A KR 19980024008 A KR19980024008 A KR 19980024008A KR 1019970014470 A KR1019970014470 A KR 1019970014470A KR 19970014470 A KR19970014470 A KR 19970014470A KR 19980024008 A KR19980024008 A KR 19980024008A
Authority
KR
South Korea
Prior art keywords
air
chemical
clean room
air conditioning
ceiling
Prior art date
Application number
KR1019970014470A
Other languages
English (en)
Korean (ko)
Inventor
히토시 나가후네
타카아키 후쿠모토
하쿠시 시부야
코지 에자키
Original Assignee
기다오까 다까시
미쓰비시 뎅끼 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 기다오까 다까시, 미쓰비시 뎅끼 가부시끼가이샤 filed Critical 기다오까 다까시
Publication of KR19980024008A publication Critical patent/KR19980024008A/ko

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)
KR1019970014470A 1996-09-20 1997-04-18 클린 룸 KR19980024008A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP249529 1996-09-20
JP8249529A JPH1096332A (ja) 1996-09-20 1996-09-20 クリーンルーム

Publications (1)

Publication Number Publication Date
KR19980024008A true KR19980024008A (ko) 1998-07-06

Family

ID=17194345

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019970014470A KR19980024008A (ko) 1996-09-20 1997-04-18 클린 룸

Country Status (5)

Country Link
JP (1) JPH1096332A (zh)
KR (1) KR19980024008A (zh)
CN (1) CN1135331C (zh)
DE (1) DE19723954A1 (zh)
TW (1) TW365641B (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100376349B1 (ko) * 1999-07-14 2003-03-15 엔이씨 일렉트로닉스 코포레이션 클린룸용 팬 필터 유닛
KR100643252B1 (ko) * 2004-05-26 2006-11-10 알프스 덴키 가부시키가이샤 클린유닛

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2951949B1 (ja) * 1998-07-03 1999-09-20 富士電機総設株式会社 クリーンルームの局所空調システム
JP3375294B2 (ja) * 1998-12-17 2003-02-10 東京エレクトロン株式会社 処理装置、処理システムおよび該装置における清浄エアの供給方法
JP3476395B2 (ja) * 1999-09-24 2003-12-10 Ｎｅｃエレクトロニクス株式会社 クリーンルーム及びクリーンルームの空調方法
DE10029200A1 (de) * 2000-02-21 2001-08-23 Data Disc Robots Gmbh Prozeßklimatisierung
JP2002147811A (ja) 2000-11-08 2002-05-22 Sharp Corp クリーンルーム
JP3631993B2 (ja) * 2001-11-21 2005-03-23 株式会社織部精機製作所 防災シェルターシステム
DE102004049520A1 (de) * 2004-10-11 2006-04-13 Alfred Reinicke Verfahren und Anlage zur Belüftung von Reinräumen
CN100434642C (zh) * 2005-12-05 2008-11-19 亚翔系统集成科技（苏州）有限公司 用于液晶显示器的制作工序导向模块化厂房
CN100472142C (zh) * 2006-06-12 2009-03-25 亚翔工程股份有限公司 无尘室及其空调方法
JP4378652B2 (ja) * 2007-01-10 2009-12-09 株式会社ダイフク 浄化空気通風式の物品保管設備
US9435552B2 (en) 2007-12-14 2016-09-06 Ge-Hitachi Nuclear Energy Americas Llc Air filtration and handling for nuclear reactor habitability area
DE102007062813B4 (de) 2007-12-21 2009-11-12 Khs Ag Trennwand, insbesondere zur Einhausung von Verpackungsmaschinen für Lebensmittel
DE102008005606B3 (de) 2008-01-22 2010-04-15 Khs Ag Vorrichtung zur Abdichtung von Vertikalfugen zwischen plattenförmigen Wandelementen
JP5408909B2 (ja) * 2008-06-05 2014-02-05 株式会社竹中工務店 クリーンルーム
CN104748265B (zh) * 2015-03-10 2017-09-26 芜湖锐进医疗设备有限公司 医用电动锯钻净化室空气净化系统
CN105666528B (zh) * 2016-03-29 2018-12-07 威格气体纯化科技（苏州）股份有限公司 无尘室循环过滤装置、无尘室及手套箱
CN106760700A (zh) * 2016-11-28 2017-05-31 中国铁塔股份有限公司长春市分公司 一种基站机房
CN106760675B (zh) * 2017-01-22 2019-01-18 中联西北工程设计研究院有限公司 超净空间的高精度温控室及温控方法
JP6911799B2 (ja) * 2018-03-15 2021-07-28 信越半導体株式会社 シリコン多結晶充填作業用のクリーンブース
CN110469160B (zh) * 2019-08-12 2024-08-27 中国电子工程设计院有限公司 一种具有二次加湿系统的洁净室布置结构及洁净生产厂房
KR102686948B1 (ko) * 2019-07-23 2024-07-19 차이나 일렉트로닉스 엔지니어링 디자인 인스티튜트 컴퍼니 리미티드 파티션 모드로 제어 가능한 청정 작업장
US11649975B2 (en) 2019-12-04 2023-05-16 Hitachi Global Life Solutions, Inc. Air conditioning system
BE1031344B1 (nl) * 2023-02-15 2024-09-16 Abn Cleanroom Tech N V Inrichting en werkwijze voor het ventileren van een klimaatkamer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100376349B1 (ko) * 1999-07-14 2003-03-15 엔이씨 일렉트로닉스 코포레이션 클린룸용 팬 필터 유닛
KR100643252B1 (ko) * 2004-05-26 2006-11-10 알프스 덴키 가부시키가이샤 클린유닛

Also Published As

Publication number Publication date
CN1177709A (zh) 1998-04-01
TW365641B (en) 1999-08-01
DE19723954A1 (de) 1998-03-26
CN1135331C (zh) 2004-01-21
JPH1096332A (ja) 1998-04-14

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Patent event code: PA01091R01D

Comment text: Patent Application

Patent event date: 19970418

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Patent event date: 19970418

Comment text: Request for Examination of Application

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Patent event date: 19990929

Patent event code: PE09021S01D

E601 Decision to refuse application
PE0601 Decision on rejection of patent

Patent event date: 20000613

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Patent event date: 19990929

Comment text: Notification of reason for refusal

Patent event code: PE06011S01I