KR100935670B1 - 액정표시장치, 박막 트랜지스터 표시판 및 그의 제조 방법 - Google Patents
액정표시장치, 박막 트랜지스터 표시판 및 그의 제조 방법 Download PDFInfo
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- KR100935670B1 KR100935670B1 KR1020030021311A KR20030021311A KR100935670B1 KR 100935670 B1 KR100935670 B1 KR 100935670B1 KR 1020030021311 A KR1020030021311 A KR 1020030021311A KR 20030021311 A KR20030021311 A KR 20030021311A KR 100935670 B1 KR100935670 B1 KR 100935670B1
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
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- G02F1/136227—Through-hole connection of the pixel electrode to the active element through an insulation layer
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- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
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- H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
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- H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
- H10D86/451—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs characterised by the compositions or shapes of the interlayer dielectrics
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- H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
- H10D86/60—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133512—Light shielding layers, e.g. black matrix
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/133707—Structures for producing distorted electric fields, e.g. bumps, protrusions, recesses, slits in pixel electrodes
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
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- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1339—Gaskets; Spacers; Sealing of cells
- G02F1/13394—Gaskets; Spacers; Sealing of cells spacers regularly patterned on the cell subtrate, e.g. walls, pillars
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- G—PHYSICS
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136222—Colour filters incorporated in the active matrix substrate
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- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
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- G02F1/137—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells characterised by the electro-optical or magneto-optical effect, e.g. field-induced phase transition, orientation effect, guest-host interaction or dynamic scattering
- G02F1/139—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells characterised by the electro-optical or magneto-optical effect, e.g. field-induced phase transition, orientation effect, guest-host interaction or dynamic scattering based on orientation effects in which the liquid crystal remains transparent
- G02F1/1393—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells characterised by the electro-optical or magneto-optical effect, e.g. field-induced phase transition, orientation effect, guest-host interaction or dynamic scattering based on orientation effects in which the liquid crystal remains transparent the birefringence of the liquid crystal being electrically controlled, e.g. ECB-, DAP-, HAN-, PI-LC cells
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Abstract
Description
Claims (9)
- 절연 기판 위에 형성되어 있는 게이트선,상기 게이트 배선 위에 형성되어 있는 게이트 절연막,상기 게이트 절연막 위에 형성되어 있으며 상기 게이트 배선과 교차하는 데이터선,상기 게이트선 및 데이터선과 연결되어 있는 박막 트랜지스터,상기 박막 트랜지스터 위에 형성되어 있는 제1 보호막,상기 제1 보호막 위에 형성되어 있는 색필터,상기 색필터 위에 소정의 패턴으로 형성되어 있어서 화소간 경계를 형성하고 있는 제2 보호막,상기 색필터 위에 상기 색필터와 직접 접촉하며, 상기 박막 트랜지스터와 연결되어 있고, 가장자리는 상기 제2 보호막과 중첩되어 있는 화소 전극을 포함하는 박막 트랜지스터 표시판.
- 제1항에서,상기 게이트선과 나란하게 형성되어 있는 유지 전극선 및 상기 유지 전극선에 연결되어 있으며 상기 유지 전극선보다 폭이 넓은 유지 전극을 더 포함하고, 상기 화소 전극과 연결되는 상기 박막 트랜지스터의 드레인 전극은 상기 유지 전극과 중첩하고 있는 박막 트랜지스터 표시판.
- 제1항에서,상기 제2 보호막은 유기 절연 물질과 감광성이 있는 물질 및 무지 절연 물질 중 어느 하나의 물질로 이루어져 있는 박막 트랜지스터 표시판.
- 제1항에서,상기 색필터는 상기 박막 트랜지스터의 드레인 전극 위에서 제거되어 있으며 상기 화소 전극은 상기 색필터가 제거된 영역과 상기 제1 보호막을 관통하는 접촉구를 통하여 상기 드레인 전극과 연결되어 있는 박막 트랜지스터 표시판.
- 제1항에서,상기 화소 전극과 동일한 물질로 이루어져 있으며 상기 게이트선 및 상기 데이터선의 일단과 각각 접촉하는 제1 및 제2 접촉 보조 부재를 더 포함하는 박막 트랜지스터 표시판.
- 제1항에서,상기 박막 트랜지스터의 반도체층은 상기 데이터선 아래에 형성되어 있는 선형부를 포함하고,상기 선형부는 상기 데이터선과 실질적으로 동일한 평면 패턴을 가지는 박막 트랜지스터 표시판.
- 절연 기판 위에 게이트선 및 이와 연결된 게이트 전극을 포함하는 게이트 배선을 형성하는 단계,상기 게이트 배선을 덮는 게이트 절연막을 형성하는 단계,상기 게이트 절연막 위에 반도체층을 형성하는 단계,상기 반도체층과 중첩하는 소스 전극을 가지는 데이터선 및 상기 반도체층과 중첩하며 상기 소스 전극과 마주하는 드레인 전극을 형성하는 단계,상기 데이터선 및 드레인 전극 위에 제1 보호막을 형성하는 단계,상기 제1 보호막 위에 적, 녹, 청의 안료를 포함하는 감광성 물질을 이용하여 색필터를 형성하는 단계,상기 색필터 위에 소정의 패턴으로 형성되어서 화소간 경계를 형성하는 제2 보호막을 형성하는 단계,상기 색필터와 직접 접촉하도록 상기 색필터 위에 형성되어 있으며, 상기 드레인 전극과 전기적으로 연결되어 있고, 가장자리가 상기 제2 보호막과 중첩되어 있는 화소 전극을 형성하는 단계를 포함하는 박막 트랜지스터 표시판의 제조방법.
- 제7항에서,상기 제2 보호막은 유기 절연 물질, 감광성이 있는 물질 및 무기절연 물질 중 어느 하나의 물질 선택하여 형성하는 박막 트랜지스터 표시판의 제조방법.
- 제7항에서,상기 색필터는 상기 드레인 전극 위에서 제거하고, 상기 화소 전극은 상기 색필터가 제거된 영역과 상기 제1 보호막을 관통하는 접촉구를 통하여 상기 드레인 전극과 연결하는 박막 트랜지스터 표시판의 제조 방법.
Priority Applications (6)
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KR1020030021311A KR100935670B1 (ko) | 2003-04-04 | 2003-04-04 | 액정표시장치, 박막 트랜지스터 표시판 및 그의 제조 방법 |
JP2004109953A JP4977308B2 (ja) | 2003-04-04 | 2004-04-02 | 薄膜トランジスタ表示板及びその製造方法 |
TW093109237A TWI366052B (en) | 2003-04-04 | 2004-04-02 | Liquid crystal display, thin film transistor array panel therefor, and manufacturing method thereof |
US10/815,788 US7202498B2 (en) | 2003-04-04 | 2004-04-02 | Liquid crystal display, thin film transistor array panel therefor, and manufacturing method thereof |
CNB2004100477271A CN100378555C (zh) | 2003-04-04 | 2004-04-05 | 液晶显示器、所用的薄膜晶体管阵列板及其制造方法 |
US11/716,461 US7632692B2 (en) | 2003-04-04 | 2007-03-08 | Liquid crystal display, thin film transistor array panel therefor, and manufacturing method thereof |
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KR1020030021311A KR100935670B1 (ko) | 2003-04-04 | 2003-04-04 | 액정표시장치, 박막 트랜지스터 표시판 및 그의 제조 방법 |
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KR20040087067A KR20040087067A (ko) | 2004-10-13 |
KR100935670B1 true KR100935670B1 (ko) | 2010-01-07 |
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US (2) | US7202498B2 (ko) |
JP (1) | JP4977308B2 (ko) |
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CN (1) | CN100378555C (ko) |
TW (1) | TWI366052B (ko) |
Families Citing this family (43)
Publication number | Priority date | Publication date | Assignee | Title |
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US7612373B2 (en) * | 2004-06-30 | 2009-11-03 | Lg Display Co., Ltd. | Liquid crystal display device and method of manufacturing liquid crystal display device with color filter layer on thin film transistor |
TWI379113B (en) * | 2004-07-07 | 2012-12-11 | Samsung Display Co Ltd | Array substrate, manufacturing method thereof and display device having the same |
US20060023151A1 (en) * | 2004-08-02 | 2006-02-02 | Samsung Electronics Co., Ltd. | Liquid crystal display and panel therefor |
KR20060016920A (ko) * | 2004-08-19 | 2006-02-23 | 삼성전자주식회사 | 박막 트랜지스터 표시판 및 그 제조 방법 |
KR101282397B1 (ko) * | 2004-12-07 | 2013-07-04 | 삼성디스플레이 주식회사 | 표시 장치용 배선, 상기 배선을 포함하는 박막 트랜지스터표시판 및 그 제조 방법 |
KR101133760B1 (ko) * | 2005-01-17 | 2012-04-09 | 삼성전자주식회사 | 박막 트랜지스터 표시판 및 이를 포함하는 액정 표시 장치 |
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KR20040087067A (ko) | 2004-10-13 |
JP4977308B2 (ja) | 2012-07-18 |
TW200424719A (en) | 2004-11-16 |
CN1540426A (zh) | 2004-10-27 |
US20040195573A1 (en) | 2004-10-07 |
CN100378555C (zh) | 2008-04-02 |
US7202498B2 (en) | 2007-04-10 |
JP2004310099A (ja) | 2004-11-04 |
TWI366052B (en) | 2012-06-11 |
US7632692B2 (en) | 2009-12-15 |
US20070164286A1 (en) | 2007-07-19 |
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