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JPS6454723A - Vapor growth device - Google Patents

Vapor growth device

Info

Publication number
JPS6454723A
JPS6454723A JP21164187A JP21164187A JPS6454723A JP S6454723 A JPS6454723 A JP S6454723A JP 21164187 A JP21164187 A JP 21164187A JP 21164187 A JP21164187 A JP 21164187A JP S6454723 A JPS6454723 A JP S6454723A
Authority
JP
Japan
Prior art keywords
inclined plane
susceptor
crystal
gas flow
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP21164187A
Other languages
English (en)
Inventor
Fumihiko Nakamura
Hiroharu Kawai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP21164187A priority Critical patent/JPS6454723A/ja
Publication of JPS6454723A publication Critical patent/JPS6454723A/ja
Pending legal-status Critical Current

Links

JP21164187A 1987-08-26 1987-08-26 Vapor growth device Pending JPS6454723A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21164187A JPS6454723A (en) 1987-08-26 1987-08-26 Vapor growth device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21164187A JPS6454723A (en) 1987-08-26 1987-08-26 Vapor growth device

Publications (1)

Publication Number Publication Date
JPS6454723A true JPS6454723A (en) 1989-03-02

Family

ID=16609141

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21164187A Pending JPS6454723A (en) 1987-08-26 1987-08-26 Vapor growth device

Country Status (1)

Country Link
JP (1) JPS6454723A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003104525A1 (ja) * 2002-06-10 2003-12-18 東京エレクトロン株式会社 処理装置及び処理方法
JP2008071917A (ja) * 2006-09-14 2008-03-27 Shin Etsu Handotai Co Ltd 気相成長用サセプタ、気相成長装置及び気相成長方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003104525A1 (ja) * 2002-06-10 2003-12-18 東京エレクトロン株式会社 処理装置及び処理方法
JP2008071917A (ja) * 2006-09-14 2008-03-27 Shin Etsu Handotai Co Ltd 気相成長用サセプタ、気相成長装置及び気相成長方法

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