JPS5724538A - Preparation of semiconductor device - Google Patents
Preparation of semiconductor deviceInfo
- Publication number
- JPS5724538A JPS5724538A JP9923580A JP9923580A JPS5724538A JP S5724538 A JPS5724538 A JP S5724538A JP 9923580 A JP9923580 A JP 9923580A JP 9923580 A JP9923580 A JP 9923580A JP S5724538 A JPS5724538 A JP S5724538A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- photomask
- exposed
- mask pattern
- rays
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
- H01L21/0274—Photolithographic processes
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9923580A JPS5724538A (en) | 1980-07-18 | 1980-07-18 | Preparation of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9923580A JPS5724538A (en) | 1980-07-18 | 1980-07-18 | Preparation of semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5724538A true JPS5724538A (en) | 1982-02-09 |
Family
ID=14242012
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9923580A Pending JPS5724538A (en) | 1980-07-18 | 1980-07-18 | Preparation of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5724538A (ja) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6060724A (ja) * | 1983-09-14 | 1985-04-08 | Toshiba Corp | 半導体露光装置 |
| JPH0232526A (ja) * | 1988-07-22 | 1990-02-02 | Mitsubishi Electric Corp | 基板周縁露光装置 |
| JPH04121728U (ja) * | 1991-04-19 | 1992-10-30 | 太陽誘電株式会社 | 半導体装置の製造装置 |
| JPH0794450A (ja) * | 1993-06-29 | 1995-04-07 | Japan Storage Battery Co Ltd | 局所アッシング装置 |
-
1980
- 1980-07-18 JP JP9923580A patent/JPS5724538A/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6060724A (ja) * | 1983-09-14 | 1985-04-08 | Toshiba Corp | 半導体露光装置 |
| JPH0232526A (ja) * | 1988-07-22 | 1990-02-02 | Mitsubishi Electric Corp | 基板周縁露光装置 |
| JPH04121728U (ja) * | 1991-04-19 | 1992-10-30 | 太陽誘電株式会社 | 半導体装置の製造装置 |
| JPH0794450A (ja) * | 1993-06-29 | 1995-04-07 | Japan Storage Battery Co Ltd | 局所アッシング装置 |
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