GB2232205B - Molecular vacuum pump - Google Patents
Molecular vacuum pumpInfo
- Publication number
- GB2232205B GB2232205B GB8917441A GB8917441A GB2232205B GB 2232205 B GB2232205 B GB 2232205B GB 8917441 A GB8917441 A GB 8917441A GB 8917441 A GB8917441 A GB 8917441A GB 2232205 B GB2232205 B GB 2232205B
- Authority
- GB
- United Kingdom
- Prior art keywords
- vacuum pump
- molecular vacuum
- molecular
- pump
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Furnace Details (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/SU1987/000155 WO1989006319A1 (en) | 1987-12-25 | 1987-12-25 | Molecular vacuum pump |
Publications (3)
Publication Number | Publication Date |
---|---|
GB8917441D0 GB8917441D0 (en) | 1990-08-22 |
GB2232205A GB2232205A (en) | 1990-12-05 |
GB2232205B true GB2232205B (en) | 1991-11-13 |
Family
ID=21617166
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB8917441A Expired - Lifetime GB2232205B (en) | 1987-12-25 | 1987-12-25 | Molecular vacuum pump |
Country Status (6)
Country | Link |
---|---|
JP (1) | JPH02502743A (fi) |
DE (1) | DE3791053T1 (fi) |
FI (1) | FI893826A0 (fi) |
FR (1) | FR2629877B1 (fi) |
GB (1) | GB2232205B (fi) |
WO (1) | WO1989006319A1 (fi) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0408791B1 (de) * | 1989-07-20 | 1994-03-16 | Leybold Aktiengesellschaft | Reibungspumpe mit glockenförmigem Rotor |
DE4438812A1 (de) * | 1994-10-31 | 1996-05-02 | Leybold Ag | Reibungsvakuumpumpe mit Kühlung |
US6019581A (en) * | 1995-08-08 | 2000-02-01 | Leybold Aktiengesellschaft | Friction vacuum pump with cooling arrangement |
DE19632874A1 (de) * | 1996-08-16 | 1998-02-19 | Leybold Vakuum Gmbh | Reibungsvakuumpumpe |
DE29717079U1 (de) * | 1997-09-24 | 1997-11-06 | Leybold Vakuum GmbH, 50968 Köln | Compoundpumpe |
DE19806507B4 (de) * | 1998-02-17 | 2010-08-19 | Wobben, Aloys, Dipl.-Ing. | Sogpumpe |
JP4104098B2 (ja) * | 1999-03-31 | 2008-06-18 | エドワーズ株式会社 | 真空ポンプ |
JP2001248587A (ja) * | 1999-12-28 | 2001-09-14 | Kashiyama Kogyo Kk | 複合型真空ポンプ |
DE10046766A1 (de) * | 2000-09-21 | 2002-04-11 | Leybold Vakuum Gmbh | Compound-Reibungsvakuumpumpe |
DE10111525A1 (de) * | 2001-03-09 | 2002-09-12 | Leybold Vakuum Gmbh | Schraubenvakuumpumpe mit Rotoreinlauf und Rotorauslauf |
DE10224604B4 (de) * | 2002-06-04 | 2014-01-30 | Oerlikon Leybold Vacuum Gmbh | Evakuierungseinrichtung |
DE102013203421A1 (de) * | 2013-02-28 | 2014-08-28 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2255618A1 (de) * | 1971-11-16 | 1973-05-24 | Cit Alcatel | Stehender zapfen bzw. pivotzapfen fuer drehende molekularpumpen |
FR2244370A5 (fi) * | 1973-09-14 | 1975-04-11 | Cit Alcatel | |
EP0081890B1 (en) * | 1981-12-14 | 1985-10-09 | Ultra-Centrifuge Nederland N.V. | High-vacuum molecular pump |
DE3613344A1 (de) * | 1986-04-19 | 1987-10-22 | Pfeiffer Vakuumtechnik | Turbomolekular-vakuumpumpe fuer hoeheren druck |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2224009A5 (fi) * | 1973-03-30 | 1974-10-25 | Cit Alcatel | |
NL8303927A (nl) * | 1983-11-16 | 1985-06-17 | Ultra Centrifuge Nederland Nv | Hoog-vacuum moleculair pomp. |
-
1987
- 1987-12-25 WO PCT/SU1987/000155 patent/WO1989006319A1/ru active Application Filing
- 1987-12-25 GB GB8917441A patent/GB2232205B/en not_active Expired - Lifetime
- 1987-12-25 DE DE873791053T patent/DE3791053T1/de not_active Ceased
- 1987-12-25 JP JP63501740A patent/JPH02502743A/ja active Pending
-
1988
- 1988-04-11 FR FR888804766A patent/FR2629877B1/fr not_active Expired - Fee Related
-
1989
- 1989-08-14 FI FI893826A patent/FI893826A0/fi not_active Application Discontinuation
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2255618A1 (de) * | 1971-11-16 | 1973-05-24 | Cit Alcatel | Stehender zapfen bzw. pivotzapfen fuer drehende molekularpumpen |
FR2244370A5 (fi) * | 1973-09-14 | 1975-04-11 | Cit Alcatel | |
EP0081890B1 (en) * | 1981-12-14 | 1985-10-09 | Ultra-Centrifuge Nederland N.V. | High-vacuum molecular pump |
DE3613344A1 (de) * | 1986-04-19 | 1987-10-22 | Pfeiffer Vakuumtechnik | Turbomolekular-vakuumpumpe fuer hoeheren druck |
Also Published As
Publication number | Publication date |
---|---|
DE3791053T1 (de) | 1989-12-21 |
FR2629877B1 (fr) | 1992-04-17 |
GB8917441D0 (en) | 1990-08-22 |
FR2629877A1 (fr) | 1989-10-13 |
GB2232205A (en) | 1990-12-05 |
JPH02502743A (ja) | 1990-08-30 |
WO1989006319A1 (en) | 1989-07-13 |
FI893826A0 (fi) | 1989-08-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 19931225 |