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GB2232205B - Molecular vacuum pump - Google Patents

Molecular vacuum pump

Info

Publication number
GB2232205B
GB2232205B GB8917441A GB8917441A GB2232205B GB 2232205 B GB2232205 B GB 2232205B GB 8917441 A GB8917441 A GB 8917441A GB 8917441 A GB8917441 A GB 8917441A GB 2232205 B GB2232205 B GB 2232205B
Authority
GB
United Kingdom
Prior art keywords
vacuum pump
molecular vacuum
molecular
pump
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
GB8917441A
Other languages
English (en)
Other versions
GB8917441D0 (en
GB2232205A (en
Inventor
Konstantin Evgenievic Demikhov
Vladimir Pavlovich Sergeev
Vladimir Iliich Vikhrev
Sergei Nikolaevich Sharshin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of GB8917441D0 publication Critical patent/GB8917441D0/en
Publication of GB2232205A publication Critical patent/GB2232205A/en
Application granted granted Critical
Publication of GB2232205B publication Critical patent/GB2232205B/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00Axial-flow pumps
    • F04D19/02Multi-stage pumps
    • F04D19/04Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046Combinations of two or more different types of pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00Axial-flow pumps
    • F04D19/02Multi-stage pumps
    • F04D19/04Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044Holweck-type pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Furnace Details (AREA)
GB8917441A 1987-12-25 1987-12-25 Molecular vacuum pump Expired - Lifetime GB2232205B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/SU1987/000155 WO1989006319A1 (en) 1987-12-25 1987-12-25 Molecular vacuum pump

Publications (3)

Publication Number Publication Date
GB8917441D0 GB8917441D0 (en) 1990-08-22
GB2232205A GB2232205A (en) 1990-12-05
GB2232205B true GB2232205B (en) 1991-11-13

Family

ID=21617166

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8917441A Expired - Lifetime GB2232205B (en) 1987-12-25 1987-12-25 Molecular vacuum pump

Country Status (6)

Country Link
JP (1) JPH02502743A (fi)
DE (1) DE3791053T1 (fi)
FI (1) FI893826A0 (fi)
FR (1) FR2629877B1 (fi)
GB (1) GB2232205B (fi)
WO (1) WO1989006319A1 (fi)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0408791B1 (de) * 1989-07-20 1994-03-16 Leybold Aktiengesellschaft Reibungspumpe mit glockenförmigem Rotor
DE4438812A1 (de) * 1994-10-31 1996-05-02 Leybold Ag Reibungsvakuumpumpe mit Kühlung
US6019581A (en) * 1995-08-08 2000-02-01 Leybold Aktiengesellschaft Friction vacuum pump with cooling arrangement
DE19632874A1 (de) * 1996-08-16 1998-02-19 Leybold Vakuum Gmbh Reibungsvakuumpumpe
DE29717079U1 (de) * 1997-09-24 1997-11-06 Leybold Vakuum GmbH, 50968 Köln Compoundpumpe
DE19806507B4 (de) * 1998-02-17 2010-08-19 Wobben, Aloys, Dipl.-Ing. Sogpumpe
JP4104098B2 (ja) * 1999-03-31 2008-06-18 エドワーズ株式会社 真空ポンプ
JP2001248587A (ja) * 1999-12-28 2001-09-14 Kashiyama Kogyo Kk 複合型真空ポンプ
DE10046766A1 (de) * 2000-09-21 2002-04-11 Leybold Vakuum Gmbh Compound-Reibungsvakuumpumpe
DE10111525A1 (de) * 2001-03-09 2002-09-12 Leybold Vakuum Gmbh Schraubenvakuumpumpe mit Rotoreinlauf und Rotorauslauf
DE10224604B4 (de) * 2002-06-04 2014-01-30 Oerlikon Leybold Vacuum Gmbh Evakuierungseinrichtung
DE102013203421A1 (de) * 2013-02-28 2014-08-28 Pfeiffer Vacuum Gmbh Vakuumpumpe

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2255618A1 (de) * 1971-11-16 1973-05-24 Cit Alcatel Stehender zapfen bzw. pivotzapfen fuer drehende molekularpumpen
FR2244370A5 (fi) * 1973-09-14 1975-04-11 Cit Alcatel
EP0081890B1 (en) * 1981-12-14 1985-10-09 Ultra-Centrifuge Nederland N.V. High-vacuum molecular pump
DE3613344A1 (de) * 1986-04-19 1987-10-22 Pfeiffer Vakuumtechnik Turbomolekular-vakuumpumpe fuer hoeheren druck

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2224009A5 (fi) * 1973-03-30 1974-10-25 Cit Alcatel
NL8303927A (nl) * 1983-11-16 1985-06-17 Ultra Centrifuge Nederland Nv Hoog-vacuum moleculair pomp.

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2255618A1 (de) * 1971-11-16 1973-05-24 Cit Alcatel Stehender zapfen bzw. pivotzapfen fuer drehende molekularpumpen
FR2244370A5 (fi) * 1973-09-14 1975-04-11 Cit Alcatel
EP0081890B1 (en) * 1981-12-14 1985-10-09 Ultra-Centrifuge Nederland N.V. High-vacuum molecular pump
DE3613344A1 (de) * 1986-04-19 1987-10-22 Pfeiffer Vakuumtechnik Turbomolekular-vakuumpumpe fuer hoeheren druck

Also Published As

Publication number Publication date
DE3791053T1 (de) 1989-12-21
FR2629877B1 (fr) 1992-04-17
GB8917441D0 (en) 1990-08-22
FR2629877A1 (fr) 1989-10-13
GB2232205A (en) 1990-12-05
JPH02502743A (ja) 1990-08-30
WO1989006319A1 (en) 1989-07-13
FI893826A0 (fi) 1989-08-14

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19931225