FI893826A0 - Molekylvakuumpump. - Google Patents

Molekylvakuumpump.

Info

Publication number: FI893826A0
Authority: FI; Finland
Prior art keywords: molekylvakuumpump
Prior art date: 1987-12-25

Application number

FI893826A

Other languages

English (en)

Inventor

Valery Borisovich Sholokhov

Konstantin Evgenievic Demikhov

Vladimir Pavlovich Sergeev

Vladimir Iliich Vikhrev

Sergei Nikolaevich

Original Assignee

Sholokhov Valery B

Demikhov Konstantin E

Sergeev Vladimir P

Vikhrev Vladimir I

Sergei Nikolaevich

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1987-12-25

Filing date

1989-08-14

Publication date

1989-08-14

1989-08-14 Application filed by Sholokhov Valery B, Demikhov Konstantin E, Sergeev Vladimir P, Vikhrev Vladimir I, Sergei Nikolaevich filed Critical Sholokhov Valery B

1989-08-14 Publication of FI893826A0 publication Critical patent/FI893826A0/fi

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Non-Positive Displacement Air Blowers (AREA)
Furnace Details (AREA)

FI893826A 1987-12-25 1989-08-14 Molekylvakuumpump. FI893826A0 (fi)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
PCT/SU1987/000155 WO1989006319A1 (en)	1987-12-25	1987-12-25	Molecular vacuum pump

Publications (1)

Publication Number	Publication Date
FI893826A0 true FI893826A0 (fi)	1989-08-14

Family

ID=21617166

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
FI893826A FI893826A0 (fi)	1987-12-25	1989-08-14	Molekylvakuumpump.

Country Status (6)

Country	Link
JP (1)	JPH02502743A (fi)
DE (1)	DE3791053T1 (fi)
FI (1)	FI893826A0 (fi)
FR (1)	FR2629877B1 (fi)
GB (1)	GB2232205B (fi)
WO (1)	WO1989006319A1 (fi)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
EP0408791B1 (de) *	1989-07-20	1994-03-16	Leybold Aktiengesellschaft	Reibungspumpe mit glockenförmigem Rotor
DE4438812A1 (de) *	1994-10-31	1996-05-02	Leybold Ag	Reibungsvakuumpumpe mit Kühlung
US6019581A (en) *	1995-08-08	2000-02-01	Leybold Aktiengesellschaft	Friction vacuum pump with cooling arrangement
DE19632874A1 (de) *	1996-08-16	1998-02-19	Leybold Vakuum Gmbh	Reibungsvakuumpumpe
DE29717079U1 (de) *	1997-09-24	1997-11-06	Leybold Vakuum GmbH, 50968 Köln	Compoundpumpe
DE19806507B4 (de) *	1998-02-17	2010-08-19	Wobben, Aloys, Dipl.-Ing.	Sogpumpe
JP4104098B2 (ja) *	1999-03-31	2008-06-18	エドワーズ株式会社	真空ポンプ
JP2001248587A (ja) *	1999-12-28	2001-09-14	Kashiyama Kogyo Kk	複合型真空ポンプ
DE10046766A1 (de) *	2000-09-21	2002-04-11	Leybold Vakuum Gmbh	Compound-Reibungsvakuumpumpe
DE10111525A1 (de) *	2001-03-09	2002-09-12	Leybold Vakuum Gmbh	Schraubenvakuumpumpe mit Rotoreinlauf und Rotorauslauf
DE10224604B4 (de)	2002-06-04	2014-01-30	Oerlikon Leybold Vacuum Gmbh	Evakuierungseinrichtung
DE102013203421A1 (de) *	2013-02-28	2014-08-28	Pfeiffer Vacuum Gmbh	Vakuumpumpe

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
BE790969A (fr) *	1971-11-16	1973-05-07	Cit Alcatel	Pivot pour pompes moleculaires rotatives
FR2224009A5 (fi) *	1973-03-30	1974-10-25	Cit Alcatel
FR2244370A5 (fi) *	1973-09-14	1975-04-11	Cit Alcatel
NL8105614A (nl) *	1981-12-14	1983-07-01	Ultra Centrifuge Nederland Nv	Hoog-vacuum moleculair pomp.
NL8303927A (nl) *	1983-11-16	1985-06-17	Ultra Centrifuge Nederland Nv	Hoog-vacuum moleculair pomp.
DE3613344A1 (de) *	1986-04-19	1987-10-22	Pfeiffer Vakuumtechnik	Turbomolekular-vakuumpumpe fuer hoeheren druck

1987
- 1987-12-25 JP JP63501740A patent/JPH02502743A/ja active Pending
- 1987-12-25 DE DE873791053T patent/DE3791053T1/de not_active Ceased
- 1987-12-25 GB GB8917441A patent/GB2232205B/en not_active Expired - Lifetime
- 1987-12-25 WO PCT/SU1987/000155 patent/WO1989006319A1/ru active Application Filing
1988
- 1988-04-11 FR FR888804766A patent/FR2629877B1/fr not_active Expired - Fee Related
1989
- 1989-08-14 FI FI893826A patent/FI893826A0/fi not_active Application Discontinuation

Also Published As

Publication number	Publication date
JPH02502743A (ja)	1990-08-30
FR2629877B1 (fr)	1992-04-17
GB2232205B (en)	1991-11-13
WO1989006319A1 (en)	1989-07-13
FR2629877A1 (fr)	1989-10-13
GB8917441D0 (en)	1990-08-22
DE3791053T1 (de)	1989-12-21
GB2232205A (en)	1990-12-05

Publication	Publication Date	Title
DE3880632D1 (de)	1993-06-03	Kuevette.
DE3881291D1 (de)	1993-07-01	Sehapparat.
DE3862564D1 (de)	1991-05-29	Erdanker.
FI77952B (fi)	1989-01-31	Ljusbaogsrelae.
DE3867976D1 (de)	1992-03-05	Polymergebundene antioxydationsmittel.
DE3883705D1 (de)	1993-10-07	Alkenylbicyclohexane.
DE3876873D1 (de)	1993-02-04	Weblitzenuebergabevorrichtung.
DE3785663D1 (de)	1993-06-03	Loetgeraet.
DE3876304D1 (de)	1993-01-14	Polysilacylobutasilazane.
DE3882446D1 (de)	1993-08-26	Polydisilacyclobutasilazane.
DE3870513D1 (de)	1992-06-04	Tennisball.
DE3888991D1 (de)	1994-05-19	Aminokohlenwasserstoff-substituierte Ketoximosilane.
FI77055B (fi)	1988-09-30	Vaermegradient-inkubator.
DE3877421D1 (de)	1993-02-25	Polyamidbenzazole.
DE3879348D1 (de)	1993-04-22	Fm-cw-radargeraet.
FI871292A0 (fi)	1987-03-24	Spetsdel foer doseringsbehaollare.
DE3862309D1 (de)	1991-05-16	Aminomethyltetrahydrofurane.
DE3878970D1 (de)	1993-04-15	Praeparative chromatographiesaeule.
FI86994B (fi)	1992-07-31	Korrosionsfasta vismut innehaollande zirkoniumlegeringar.
ES2023228B3 (es)	1992-01-01	Ciclopropancarboxamidas.
DE3860710D1 (de)	1990-11-08	Exklusiv-oder-schaltung.
DE3860307D1 (de)	1990-08-23	2-aminomethyltetrahydrofurane.
DE3866770D1 (de)	1992-01-23	Gerbstoff.
DE3867805D1 (de)	1992-02-27	Paraocclusaler loeffel.
DE3873615D1 (de)	1992-09-17	Polycyanoarylthioether.

Legal Events

Date	Code	Title	Description
2004-08-31	FA	Application withdrawn	Owner name: DEMIKHOV, KONSTANTIN EVGENIEVICH Owner name: SHARSHIN, SERGEI NIKOLAEVICH Owner name: SERGEEV, VLADIMIR PAVLOVICH Owner name: VIKHREV, VLADIMIR ILIICH Owner name: SHOLOKHOV, VALERY BORISOVICH

Date

Code

Title

Description

2004-08-31

Application withdrawn

Owner name: DEMIKHOV, KONSTANTIN EVGENIEVICH

Owner name: SHARSHIN, SERGEI NIKOLAEVICH

Owner name: SERGEEV, VLADIMIR PAVLOVICH

Owner name: VIKHREV, VLADIMIR ILIICH

Owner name: SHOLOKHOV, VALERY BORISOVICH