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DE3791053T1 - Vakuum-molekularpumpe - Google Patents

Vakuum-molekularpumpe

Info

Publication number
DE3791053T1
DE3791053T1 DE873791053T DE3791053T DE3791053T1 DE 3791053 T1 DE3791053 T1 DE 3791053T1 DE 873791053 T DE873791053 T DE 873791053T DE 3791053 T DE3791053 T DE 3791053T DE 3791053 T1 DE3791053 T1 DE 3791053T1
Authority
DE
Germany
Prior art keywords
molecular pump
vacuum molecular
vacuum
pump
molecular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE873791053T
Other languages
English (en)
Inventor
Valerij Borisovic Solochov
Konstantin Evgenevic Demichov
Vladimir Ilic Vichrev
Vladimir Pavlovic Sergeev
Sergej Nikolaevic Sarsin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of DE3791053T1 publication Critical patent/DE3791053T1/de
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Furnace Details (AREA)
DE873791053T 1987-12-25 1987-12-25 Vakuum-molekularpumpe Ceased DE3791053T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/SU1987/000155 WO1989006319A1 (en) 1987-12-25 1987-12-25 Molecular vacuum pump

Publications (1)

Publication Number Publication Date
DE3791053T1 true DE3791053T1 (de) 1989-12-21

Family

ID=21617166

Family Applications (1)

Application Number Title Priority Date Filing Date
DE873791053T Ceased DE3791053T1 (de) 1987-12-25 1987-12-25 Vakuum-molekularpumpe

Country Status (6)

Country Link
JP (1) JPH02502743A (de)
DE (1) DE3791053T1 (de)
FI (1) FI893826A0 (de)
FR (1) FR2629877B1 (de)
GB (1) GB2232205B (de)
WO (1) WO1989006319A1 (de)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE29717079U1 (de) * 1997-09-24 1997-11-06 Leybold Vakuum GmbH, 50968 Köln Compoundpumpe
DE10111525A1 (de) * 2001-03-09 2002-09-12 Leybold Vakuum Gmbh Schraubenvakuumpumpe mit Rotoreinlauf und Rotorauslauf
DE10224604A1 (de) * 2002-06-04 2003-12-18 Leybold Vakuum Gmbh Evakuierungseinrichtung
DE19806507B4 (de) * 1998-02-17 2010-08-19 Wobben, Aloys, Dipl.-Ing. Sogpumpe
EP2772650A3 (de) * 2013-02-28 2015-12-16 Pfeiffer Vacuum Gmbh Vakuumpumpe

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0408791B1 (de) * 1989-07-20 1994-03-16 Leybold Aktiengesellschaft Reibungspumpe mit glockenförmigem Rotor
DE4438812A1 (de) * 1994-10-31 1996-05-02 Leybold Ag Reibungsvakuumpumpe mit Kühlung
US6019581A (en) * 1995-08-08 2000-02-01 Leybold Aktiengesellschaft Friction vacuum pump with cooling arrangement
DE19632874A1 (de) * 1996-08-16 1998-02-19 Leybold Vakuum Gmbh Reibungsvakuumpumpe
JP4104098B2 (ja) * 1999-03-31 2008-06-18 エドワーズ株式会社 真空ポンプ
JP2001248587A (ja) * 1999-12-28 2001-09-14 Kashiyama Kogyo Kk 複合型真空ポンプ
DE10046766A1 (de) * 2000-09-21 2002-04-11 Leybold Vakuum Gmbh Compound-Reibungsvakuumpumpe

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2224009A5 (de) * 1973-03-30 1974-10-25 Cit Alcatel

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE790969A (fr) * 1971-11-16 1973-05-07 Cit Alcatel Pivot pour pompes moleculaires rotatives
FR2244370A5 (de) * 1973-09-14 1975-04-11 Cit Alcatel
NL8105614A (nl) * 1981-12-14 1983-07-01 Ultra Centrifuge Nederland Nv Hoog-vacuum moleculair pomp.
NL8303927A (nl) * 1983-11-16 1985-06-17 Ultra Centrifuge Nederland Nv Hoog-vacuum moleculair pomp.
DE3613344A1 (de) * 1986-04-19 1987-10-22 Pfeiffer Vakuumtechnik Turbomolekular-vakuumpumpe fuer hoeheren druck

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2224009A5 (de) * 1973-03-30 1974-10-25 Cit Alcatel

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE29717079U1 (de) * 1997-09-24 1997-11-06 Leybold Vakuum GmbH, 50968 Köln Compoundpumpe
DE19806507B4 (de) * 1998-02-17 2010-08-19 Wobben, Aloys, Dipl.-Ing. Sogpumpe
DE10111525A1 (de) * 2001-03-09 2002-09-12 Leybold Vakuum Gmbh Schraubenvakuumpumpe mit Rotoreinlauf und Rotorauslauf
DE10224604A1 (de) * 2002-06-04 2003-12-18 Leybold Vakuum Gmbh Evakuierungseinrichtung
US7264439B2 (en) 2002-06-04 2007-09-04 Oerlikon Leybold Vacuum Gmbh Evacuating device
DE10224604B4 (de) * 2002-06-04 2014-01-30 Oerlikon Leybold Vacuum Gmbh Evakuierungseinrichtung
EP2772650A3 (de) * 2013-02-28 2015-12-16 Pfeiffer Vacuum Gmbh Vakuumpumpe

Also Published As

Publication number Publication date
FR2629877A1 (fr) 1989-10-13
FI893826A0 (fi) 1989-08-14
GB2232205B (en) 1991-11-13
GB8917441D0 (en) 1990-08-22
JPH02502743A (ja) 1990-08-30
FR2629877B1 (fr) 1992-04-17
GB2232205A (en) 1990-12-05
WO1989006319A1 (en) 1989-07-13

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
8131 Rejection