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DE3768593D1 - Hochvakuumpumpe. - Google Patents

Hochvakuumpumpe.

Info

Publication number
DE3768593D1
DE3768593D1 DE8787201531T DE3768593T DE3768593D1 DE 3768593 D1 DE3768593 D1 DE 3768593D1 DE 8787201531 T DE8787201531 T DE 8787201531T DE 3768593 T DE3768593 T DE 3768593T DE 3768593 D1 DE3768593 D1 DE 3768593D1
Authority
DE
Germany
Prior art keywords
vacuum pump
high vacuum
pump
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Revoked
Application number
DE8787201531T
Other languages
English (en)
Inventor
Johannes Emmanuel Moonen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ultra Centrifuge Nederland NV
Original Assignee
Ultra Centrifuge Nederland NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=19848399&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE3768593(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Ultra Centrifuge Nederland NV filed Critical Ultra Centrifuge Nederland NV
Application granted granted Critical
Publication of DE3768593D1 publication Critical patent/DE3768593D1/de
Anticipated expiration legal-status Critical
Revoked legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
DE8787201531T 1986-08-12 1987-08-12 Hochvakuumpumpe. Revoked DE3768593D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL8602052A NL8602052A (nl) 1986-08-12 1986-08-12 Hoogvacuumpomp.

Publications (1)

Publication Number Publication Date
DE3768593D1 true DE3768593D1 (de) 1991-04-18

Family

ID=19848399

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787201531T Revoked DE3768593D1 (de) 1986-08-12 1987-08-12 Hochvakuumpumpe.

Country Status (3)

Country Link
EP (1) EP0260733B1 (de)
DE (1) DE3768593D1 (de)
NL (1) NL8602052A (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0617036Y2 (ja) * 1988-02-17 1994-05-02 株式会社島津製作所 ターボ分子ポンプ
GB2226081A (en) * 1988-12-14 1990-06-20 Rolls Royce Plc Fluid friction pump or turbine
JPH03222895A (ja) * 1990-01-26 1991-10-01 Hitachi Koki Co Ltd ねじ溝真空ポンプ
GB9525337D0 (en) * 1995-12-12 1996-02-14 Boc Group Plc Improvements in vacuum pumps
GB9609281D0 (en) * 1996-05-03 1996-07-10 Boc Group Plc Improved vacuum pumps
DE19632375A1 (de) * 1996-08-10 1998-02-19 Pfeiffer Vacuum Gmbh Gasreibungspumpe
DE19756837C2 (de) * 1997-12-19 1999-09-30 K Busch Gmbh Druck & Vakuum Dr Molekular- und Viskositätspumpe
GB9927493D0 (en) * 1999-11-19 2000-01-19 Boc Group Plc Improved vacuum pumps
DE10149366A1 (de) * 2001-10-06 2003-04-17 Leybold Vakuum Gmbh Axial fördernde Reibungsvakuumpumpe
JP2003172291A (ja) * 2001-12-04 2003-06-20 Boc Edwards Technologies Ltd 真空ポンプ
JP3961273B2 (ja) * 2001-12-04 2007-08-22 Ｂｏｃエドワーズ株式会社 真空ポンプ
ITTO20030420A1 (it) 2003-06-05 2004-12-06 Varian Spa Metodo per la realizzazione di statori per pompe da vuot0 e statori cosi' ottenuti
DE102005008643A1 (de) * 2005-02-25 2006-08-31 Leybold Vacuum Gmbh Holweck-Vakuumpumpe
DE102013214662A1 (de) * 2013-07-26 2015-01-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP3657021B1 (de) * 2018-11-21 2020-11-11 Pfeiffer Vacuum Gmbh Vakuumpumpe
GB2601313A (en) * 2020-11-25 2022-06-01 Edwards Ltd Drag pumping mechanism for a turbomolecular pump
EP4212730A1 (de) * 2023-01-31 2023-07-19 Pfeiffer Vacuum Technology AG Vakuumpumpe mit optimierter holweck-pumpstufe zur kompensation temperaturbedingter leistungseinbussen

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL75723C (de) * 1900-01-01
US2730297A (en) * 1950-04-12 1956-01-10 Hartford Nat Bank & Trust Co High-vacuum molecular pump
DE1010235B (de) * 1955-04-22 1957-06-13 Arthur Pfeiffer Fa Molekularpumpe

Also Published As

Publication number Publication date
EP0260733A1 (de) 1988-03-23
NL8602052A (nl) 1988-03-01
EP0260733B1 (de) 1991-03-13

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8331 Complete revocation