DE3891201T1 - Vakuum-molekularpumpe - Google Patents

Vakuum-molekularpumpe

Info

Publication number: DE3891201T1
Authority: DE; Germany
Prior art keywords: molecular pump; vacuum molecular; vacuum; pump; molecular
Prior art date: 1988-01-05
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Withdrawn

Application number

DE883891201T

Other languages

English (en)

Inventor

Valerij Borisovic Solochov

Konstantin Evgenevic Demichov

Vladimir Ilic Vichrev

Vladimir Pavlovic Sergeev

Sergej Nikolaevic Sarsin

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Individual

Original Assignee

Individual

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1988-01-05

Filing date

1988-01-05

Publication date

1990-01-11

1988-01-05 Application filed by Individual filed Critical Individual

1990-01-11 Publication of DE3891201T1 publication Critical patent/DE3891201T1/de

Status Withdrawn legal-status Critical Current

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Non-Positive Displacement Air Blowers (AREA)
Applications Or Details Of Rotary Compressors (AREA)
Crystals, And After-Treatments Of Crystals (AREA)

DE883891201T 1988-01-05 1988-01-05 Vakuum-molekularpumpe Withdrawn DE3891201T1 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
PCT/SU1988/000001 WO1989006320A1 (en)	1988-01-05	1988-01-05	Molecular vacuum pump

Publications (1)

Publication Number	Publication Date
DE3891201T1 true DE3891201T1 (de)	1990-01-11

Family

ID=21617173

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE883891201T Withdrawn DE3891201T1 (de)	1988-01-05	1988-01-05	Vakuum-molekularpumpe

Country Status (6)

Country	Link
JP (1)	JPH02502840A (de)
DE (1)	DE3891201T1 (de)
FI (1)	FI894157A0 (de)
FR (1)	FR2630167B1 (de)
GB (1)	GB2221255B (de)
WO (1)	WO1989006320A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
IT1238201B (it) *	1989-11-03	1993-07-09	Varian Spa	Metodo di fabbricazione mediante elettroerosione di una girante o di un rotore a una o piu' giranti di una turbopompa, particolarmente di una pompa turbomolecolare, e prodotti cosi' ottenuti.
DE4216237A1 (de) *	1992-05-16	1993-11-18	Leybold Ag	Gasreibungsvakuumpumpe
DE19846188A1 (de)	1998-10-07	2000-04-13	Leybold Vakuum Gmbh	Reibungsvakuumpumpe mit Stator und Rotor
DE19937392A1 (de) *	1999-08-07	2001-02-08	Leybold Vakuum Gmbh	Reibungsvakuumpumpe mit pumpaktiven Elementen

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US1626621A (en) *	1925-08-28	1927-05-03	Middendorf George	Compressor for refrigerators or the like
FR1293546A (fr) *	1961-02-09	1962-05-18	Alsacienne Constr Meca	Perfectionnements aux pompes moléculaires rotatives
BE790969A (fr) *	1971-11-16	1973-05-07	Cit Alcatel	Pivot pour pompes moleculaires rotatives
FR2244370A5 (de) *	1973-09-14	1975-04-11	Cit Alcatel
NL8105614A (nl) *	1981-12-14	1983-07-01	Ultra Centrifuge Nederland Nv	Hoog-vacuum moleculair pomp.
DE3613344A1 (de) *	1986-04-19	1987-10-22	Pfeiffer Vakuumtechnik	Turbomolekular-vakuumpumpe fuer hoeheren druck
JPS6341695A (ja) *	1986-08-07	1988-02-22	Seiko Seiki Co Ltd	タ−ボ分子ポンプ

1988
- 1988-01-05 JP JP63501741A patent/JPH02502840A/ja active Pending
- 1988-01-05 GB GB8917836A patent/GB2221255B/en not_active Expired - Lifetime
- 1988-01-05 DE DE883891201T patent/DE3891201T1/de not_active Withdrawn
- 1988-01-05 WO PCT/SU1988/000001 patent/WO1989006320A1/ru active Application Filing
- 1988-04-13 FR FR888804896A patent/FR2630167B1/fr not_active Expired - Fee Related
1989
- 1989-09-04 FI FI894157A patent/FI894157A0/fi not_active Application Discontinuation

Also Published As

Publication number	Publication date
WO1989006320A1 (en)	1989-07-13
JPH02502840A (ja)	1990-09-06
FI894157A0 (fi)	1989-09-04
GB2221255A (en)	1990-01-31
GB8917836D0 (en)	1989-11-01
GB2221255B (en)	1991-10-16
FR2630167B1 (fr)	1990-08-31
FR2630167A1 (fr)	1989-10-20

Publication	Publication Date	Title
DE69125044D1 (de)	1997-04-17	Vakuumpumpe
DE68914320D1 (de)	1994-05-11	Zusammengestellte Vakuumpumpe.
DE59007218D1 (de)	1994-10-27	Magnetgelagerte Vakuumpumpe.
DE69310993D1 (de)	1997-07-03	Turbomolekularvakuumpumpen
DE3891263T1 (de)	1990-03-15	Turbomolekular-vakuumpumpe
DE68920690D1 (de)	1995-03-02	Sauggerät.
DE3669356D1 (de)	1990-04-12	Vakuumpumpe.
DE68903355D1 (de)	1992-12-10	Vakuumpumpen.
DE69004566D1 (de)	1993-12-16	Vakuumpumpeneinheit.
DE68900798D1 (de)	1992-03-12	Luftpumpe.
DE68903862D1 (de)	1993-01-28	Vakuumpumpenanlagen.
DE3768593D1 (de)	1991-04-18	Hochvakuumpumpe.
IT8821185A0 (it)	1988-07-01	Turbopompa molecolare.
DE68906929D1 (de)	1993-07-15	Turbomolekularpumpe.
DE3791053T1 (de)	1989-12-21	Vakuum-molekularpumpe
DK603489D0 (da)	1989-11-29	Fortraengningspumpe
DE68903822D1 (de)	1993-01-21	Vakuumpumpe mit mehreren abschnitten.
FI98949B (fi)	1997-05-30	Pumppu
DE69401600D1 (de)	1997-03-13	Vakuumpumpe
DE3891201T1 (de)	1990-01-11	Vakuum-molekularpumpe
DE69008574D1 (de)	1994-06-09	Saugpumpe.
DE3891280T1 (de)	1990-04-05	Turbomolekular-vakuumpumpe
DE3865009D1 (de)	1991-10-24	Mehrstufige vakuumpumpe.
DE69303133D1 (de)	1996-07-18	Vakuumpumpe
FI912043A0 (fi)	1991-04-26	Pump foer automatisk och laongsam utstroemning fraon en laekemedelflaska.

Legal Events

Date	Code	Title	Description
1995-01-12	8139	Disposal/non-payment of the annual fee