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FR2595718B1 - Procede pour la production de couches d'ic adherentes pour l'accroissement de la duree de vie des outils de coupe ou analogues - Google Patents

Procede pour la production de couches d'ic adherentes pour l'accroissement de la duree de vie des outils de coupe ou analogues

Info

Publication number
FR2595718B1
FR2595718B1 FR878703442A FR8703442A FR2595718B1 FR 2595718 B1 FR2595718 B1 FR 2595718B1 FR 878703442 A FR878703442 A FR 878703442A FR 8703442 A FR8703442 A FR 8703442A FR 2595718 B1 FR2595718 B1 FR 2595718B1
Authority
FR
France
Prior art keywords
adhesive
layers
life
increasing
production
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR878703442A
Other languages
English (en)
Other versions
FR2595718A1 (fr
Inventor
Walter Peukert
Rainer Beckert
Bernd Bucken
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hochvakuum Dresden VEB
Original Assignee
Hochvakuum Dresden VEB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hochvakuum Dresden VEB filed Critical Hochvakuum Dresden VEB
Publication of FR2595718A1 publication Critical patent/FR2595718A1/fr
Application granted granted Critical
Publication of FR2595718B1 publication Critical patent/FR2595718B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/046—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material with at least one amorphous inorganic material layer, e.g. DLC, a-C:H, a-C:Me, the layer being doped or not
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/04—Diamond

Landscapes

  • Chemical & Material Sciences (AREA)
  • Metallurgy (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Laminated Bodies (AREA)
  • Formation Of Insulating Films (AREA)
  • Physical Vapour Deposition (AREA)
FR878703442A 1986-03-14 1987-03-13 Procede pour la production de couches d'ic adherentes pour l'accroissement de la duree de vie des outils de coupe ou analogues Expired - Lifetime FR2595718B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD86287876A DD258341A3 (de) 1986-03-14 1986-03-14 Verfahren zur herstellung haftfester ic-schichten

Publications (2)

Publication Number Publication Date
FR2595718A1 FR2595718A1 (fr) 1987-09-18
FR2595718B1 true FR2595718B1 (fr) 1990-08-17

Family

ID=5577174

Family Applications (1)

Application Number Title Priority Date Filing Date
FR878703442A Expired - Lifetime FR2595718B1 (fr) 1986-03-14 1987-03-13 Procede pour la production de couches d'ic adherentes pour l'accroissement de la duree de vie des outils de coupe ou analogues

Country Status (4)

Country Link
JP (1) JPS62228468A (fr)
DD (1) DD258341A3 (fr)
DE (1) DE3702242A1 (fr)
FR (1) FR2595718B1 (fr)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3832692A1 (de) * 1988-09-27 1990-03-29 Leybold Ag Dichtungselement mit einem absperrkoerper aus einem metallischen oder nichtmetallischen werkstoff und verfahren zum auftragen von hartstoffschichten auf den absperrkoerper
JP2572438B2 (ja) * 1989-01-30 1997-01-16 ホーヤ株式会社 ガラスプレス成形型の製造方法
GB9019219D0 (en) * 1990-09-01 1990-10-17 Atomic Energy Authority Uk Diamond-like carbon coatings
US5249554A (en) * 1993-01-08 1993-10-05 Ford Motor Company Powertrain component with adherent film having a graded composition
KR0134942B1 (ko) * 1993-06-11 1998-06-15 이다가끼 유끼오 비정질 경질 탄소막 및 그 제조 방법
BE1008229A3 (nl) * 1993-10-29 1996-02-20 Vito Werkwijze voor het aanbrengen van een tegen slijtage beschermende laag op een substraat.
GB2292154A (en) * 1994-08-10 1996-02-14 Minnesota Mining & Mfg Abrasive elements comprising adhesives cross-linked via silyl groups
US5669940A (en) * 1995-08-09 1997-09-23 Minnesota Mining And Manufacturing Company Abrasive article
JP2003501555A (ja) * 1999-06-08 2003-01-14 ナムローゼ・フェンノートシャップ・ベーカート・ソシエテ・アノニム ドープダイヤモンド状カーボン皮膜
DE19928498A1 (de) * 1999-06-22 2000-12-28 Nmi Univ Tuebingen Drehmomentübertragende Arbeitsflächen für Werkzeuge und Verfahren zu deren Herstellung
DE19952465C1 (de) * 1999-10-29 2001-03-01 Fraunhofer Ges Forschung Verfahren zur Herstellung einer haftfesten, diamantähnlichen Kohlenstoffschicht auf einer Substratoberfläche
DE10026477A1 (de) * 2000-05-27 2001-11-29 Abb Patent Gmbh Schutzüberzug für metallische Bauelemente
US8033550B2 (en) * 2005-05-26 2011-10-11 Sulzer Metaplas Gmbh Piston ring having hard multi-layer coating
RU2507302C2 (ru) 2009-06-18 2014-02-20 Зульцер Метаплас Гмбх Защитное покрытие, покрытый элемент, имеющий защитное покрытие, а также способ получения защитного покрытия

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1328776A (fr) * 1962-07-13 1963-05-31 Philips Nv Procédé pour recouvrir un fil de molybdène d'une couche de carbone et électrode de grille pourvue d'un tel fil
DE3316693A1 (de) * 1983-05-06 1984-11-08 Leybold-Heraeus GmbH, 5000 Köln Verfahren zum herstellen von amorphen kohlenstoffschichten auf substraten und durch das verfahren beschichtete substrate
US4698256A (en) * 1984-04-02 1987-10-06 American Cyanamid Company Articles coated with adherent diamondlike carbon films

Also Published As

Publication number Publication date
FR2595718A1 (fr) 1987-09-18
DD258341A3 (de) 1988-07-20
JPS62228468A (ja) 1987-10-07
DE3702242A1 (de) 1987-09-17

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Legal Events

Date Code Title Description
ST Notification of lapse