DE69922288D1 - Mikropumpe und Herstellungsverfahren für die Mikropumpe - Google Patents

Mikropumpe und Herstellungsverfahren für die Mikropumpe

Info

Publication number: DE69922288D1
Authority: DE; Germany
Prior art keywords: micropump; manufacturing process; manufacturing
Prior art date: 1998-03-05
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

DE69922288T

Other languages

English (en)

Other versions

DE69922288T2 (de

Inventor

Jun Shinohara

Kazuyoshi Furuta

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Seiko Instruments Inc

Original Assignee

Seiko Instruments Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1998-03-05

Filing date

1999-03-05

Publication date

2005-01-05

1998-03-05 Priority claimed from JP5390698A external-priority patent/JP2995400B2/ja

1998-03-16 Priority claimed from JP10065908A external-priority patent/JP2995401B2/ja

1999-03-05 Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc

2005-01-05 Application granted granted Critical

2005-01-05 Publication of DE69922288D1 publication Critical patent/DE69922288D1/de

2005-05-04 Publication of DE69922288T2 publication Critical patent/DE69922288T2/de

2019-03-06 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Reciprocating Pumps (AREA)

DE69922288T 1998-03-05 1999-03-05 Mikropumpe und Herstellungsverfahren für die Mikropumpe Expired - Lifetime DE69922288T2 (de)

Applications Claiming Priority (4)

Application Number	Priority Date	Filing Date	Title
JP5390698		1998-03-05
JP5390698A JP2995400B2 (ja)	1998-03-05	1998-03-05	マイクロポンプおよびマイクロポンプの製造方法
JP6590898		1998-03-16
JP10065908A JP2995401B2 (ja)	1998-03-16	1998-03-16	マイクロポンプおよびマイクロポンプの製造方法

Publications (2)

Publication Number	Publication Date
DE69922288D1 true DE69922288D1 (de)	2005-01-05
DE69922288T2 DE69922288T2 (de)	2005-05-04

Family

ID=26394631

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE69922288T Expired - Lifetime DE69922288T2 (de)	1998-03-05	1999-03-05	Mikropumpe und Herstellungsverfahren für die Mikropumpe

Country Status (3)

Country	Link
US (1)	US6247908B1 (de)
EP (1)	EP0949418B1 (de)
DE (1)	DE69922288T2 (de)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP3814132B2 (ja) *	1999-10-27	2006-08-23	セイコーインスツル株式会社	ポンプ及びその駆動方法
JP3629405B2 (ja) *	2000-05-16	2005-03-16	コニカミノルタホールディングス株式会社	マイクロポンプ
US6568286B1 (en) *	2000-06-02	2003-05-27	Honeywell International Inc.	3D array of integrated cells for the sampling and detection of air bound chemical and biological species
US6490960B1 (en) *	2001-07-11	2002-12-10	Xerox Corporation	Muscle-emulating PC board actuator
US6736796B2 (en) *	2001-11-26	2004-05-18	Nili-Med Ltd.	Fluid drug delivery device
US7291126B2 (en) *	2001-11-26	2007-11-06	Nilimedix Ltd.	Drug delivery device and method
US7311693B2 (en) *	2001-11-26	2007-12-25	Nilimedix Ltd.	Drug delivery device and method
JP4221184B2 (ja) *	2002-02-19	2009-02-12	日本碍子株式会社	マイクロ化学チップ
DE10238564B4 (de) *	2002-08-22	2005-05-04	Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.	Pipettiereinrichtung
DE10238600A1 (de)	2002-08-22	2004-03-04	Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.	Peristaltische Mikropumpe
ITTO20020859A1 (it) *	2002-10-04	2004-04-05	Varian Spa	Stadio di pompaggio vibrante per pompe da vuoto e pompa da vuoto a stadi di pompaggio vibranti.
EP1834658B1 (de)	2006-03-14	2009-12-30	F. Hoffmann-La Roche AG	Peristaltische Mikropumpe mit Volumenstromsensor
DE102006028986B4 (de) *	2006-06-23	2019-06-27	Albert-Ludwigs-Universität Freiburg	Konträrmembranantrieb zur Effizienzsteigerung von Mikropumpen
JP4946464B2 (ja)	2007-01-30	2012-06-06	ブラザー工業株式会社	液体移送装置及び液体移送装置の製造方法
US20090050299A1 (en) *	2007-08-21	2009-02-26	Tektronix, Inc.	Cooling facility for an electronic component
CN101389200B (zh) *	2007-09-14	2011-08-31	富准精密工业(深圳)有限公司	微型液体冷却系统及其微型流体驱动装置
DE102010051743B4 (de)	2010-11-19	2022-09-01	C. Miethke Gmbh & Co. Kg	Programmierbares Hydrocephalusventil
US9425027B2 (en) *	2011-05-15	2016-08-23	Varian Semiconductor Equipment Associates, Inc.	Methods of affecting material properties and applications therefor
US10344753B2 (en) *	2014-02-28	2019-07-09	Encite Llc	Micro pump systems
US10330095B2 (en)	2014-10-31	2019-06-25	Encite Llc	Microelectromechanical systems fabricated with roll to roll processing
CN107023461A (zh) *	2016-01-29	2017-08-08	研能科技股份有限公司	微型气压动力装置
US11454563B2 (en)	2016-08-05	2022-09-27	Encite Llc	Micro pressure sensor
AU2018236138A1 (en)	2017-03-13	2019-09-26	Stephen Alan MARSH	Micro pump systems and processing techniques
US10739170B2 (en) *	2017-08-04	2020-08-11	Encite Llc	Micro flow measurement devices and devices with movable features
US11046575B2 (en)	2017-10-31	2021-06-29	Encite Llc	Broad range micro pressure sensor
US11331618B2 (en)	2018-03-07	2022-05-17	Encite Llc	R2R microelectromechanical gas concentrator
TWI663507B (zh) *	2018-04-09	2019-06-21	中原大學	微型散熱系統
US11296619B2 (en)	2018-06-07	2022-04-05	Encite Llc	Micro electrostatic motor and micro mechanical force transfer devices
US20230293300A1 (en) *	2022-03-16	2023-09-21	Boston Scientific Scimed, Inc.	Fluid control system for an implantable inflatable device

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS59221485A (ja) *	1983-05-31	1984-12-13	Sharp Corp	ポンプ
JPS62283272A (ja)	1986-06-02	1987-12-09	Hitachi Metals Ltd	圧電式ガス流量制御弁
US4826131A (en) *	1988-08-22	1989-05-02	Ford Motor Company	Electrically controllable valve etched from silicon substrates
JPH0292510A (ja)	1988-09-30	1990-04-03	Mitsubishi Cable Ind Ltd	複合パッキングの製造方法
JPH02149778A (ja)	1988-11-30	1990-06-08	Seiko Epson Corp	圧電マイクロポンプ
CH679555A5 (de) *	1989-04-11	1992-03-13	Westonbridge Int Ltd
JPH0721079B2 (ja)	1989-09-06	1995-03-08	株式会社スリーボンド	ガスケット発泡体の形成方法
CH681168A5 (en) *	1989-11-10	1993-01-29	Westonbridge Int Ltd	Micro-pump for medicinal dosing
KR910012538A (ko)	1989-12-27	1991-08-08	야마무라 가쯔미	마이크로 펌프 및 그 제조 방법
DE4006152A1 (de) *	1990-02-27	1991-08-29	Fraunhofer Ges Forschung	Mikrominiaturisierte pumpe
US5094594A (en) *	1990-04-23	1992-03-10	Genomyx, Incorporated	Piezoelectric pumping device
DE69106240T2 (de)	1990-07-02	1995-05-11	Seiko Epson Corp	Mikropumpe und Verfahren zur Herstellung einer Mikropumpe.
JPH0466784A (ja)	1990-07-06	1992-03-03	Seiko Epson Corp	マイクロポンプおよびその製造方法
ATE119241T1 (de)	1990-07-10	1995-03-15	Westonbridge Int Ltd	Ventil, methode zur herstellung dises ventils und mit diesem ventil versehene mikropumpe.
JPH051669A (ja) *	1991-06-21	1993-01-08	Seiko Epson Corp	マイクロポンプ及びマイクロバルブの製造方法
US5288214A (en) *	1991-09-30	1994-02-22	Toshio Fukuda	Micropump
JPH05164052A (ja)	1991-12-13	1993-06-29	Olympus Optical Co Ltd	圧電ポンプ
JPH05263763A (ja)	1992-03-19	1993-10-12	Hitachi Ltd	圧電ポンプおよびその運転方法
DE69313766T2 (de)	1992-04-02	1998-02-26	Seiko Epson Corp	Mikrosteuervorrichtung fuer fluidum und verfahren zu deren herstellung
JPH07158757A (ja) *	1993-12-06	1995-06-20	Nippondenso Co Ltd	マイクロバルブ
CA2179063C (en) *	1993-12-28	2005-02-15	Harald Van Lintel	Micropump
CH689836A5 (fr) *	1994-01-14	1999-12-15	Westonbridge Int Ltd	Micropompe.
JPH0842457A (ja) *	1994-07-27	1996-02-13	Aisin Seiki Co Ltd	マイクロポンプ

1999
- 1999-03-04 US US09/262,436 patent/US6247908B1/en not_active Expired - Lifetime
- 1999-03-05 EP EP99104474A patent/EP0949418B1/de not_active Expired - Lifetime
- 1999-03-05 DE DE69922288T patent/DE69922288T2/de not_active Expired - Lifetime

Also Published As

Publication number	Publication date
EP0949418A2 (de)	1999-10-13
DE69922288T2 (de)	2005-05-04
EP0949418B1 (de)	2004-12-01
EP0949418A3 (de)	2000-05-31
US6247908B1 (en)	2001-06-19

Publication	Publication Date	Title
DE69922288D1 (de)	2005-01-05	Mikropumpe und Herstellungsverfahren für die Mikropumpe
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DE69823689D1 (de)	2004-06-09	Reinigungsverfahren für die nahrungsmittelindustrie
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Legal Events

Date	Code	Title	Description
2005-12-29	8364	No opposition during term of opposition