CN207320087U - A kind of process equipment Work fixing device - Google Patents

Abstract

The utility model discloses a workpiece fixing device for processing equipment, which comprises a fixing plate, the bottom of the fixing plate is provided with a base, the bottom of the fixing plate is fixedly connected with a fixing block, and the bottom of the fixing block is provided with a second A groove, the inside of the first groove is provided with a connecting block, the bottom of the connecting block is movably connected with a workpiece, the top of the base is provided with a second groove, and the workpiece extends away from one end of the connecting block To the inside of the second groove, power cords are movably connected to both sides of the bottom of the fixing plate. The utility model can fix the connecting block through the arrangement of the first spring and the movable ball through the cooperation of the movable ball and the movable groove, and can fix the surface of one end of the bottom of the workpiece through the arrangement of the second spring and the splint to prevent the Shaking occurs, which affects the operation, and at the same time solves the problem that the workpiece cannot be effectively fixed and the processing efficiency is reduced.

Description

A workpiece fixing device for processing equipment

technical field

The utility model relates to the technical field of processing equipment, in particular to a workpiece fixing device for processing equipment.

Background technique

Hitherto, in the manufacturing steps of semiconductor devices, film formation or etching processing is performed on workpieces, and processing equipment for processing such substrates is provided with a base, which is a holder for holding semiconductor substrates during processing, such as China The patent discloses "Workpiece holder for processing equipment and processing equipment using the same" (Patent No.: 03107447.2), which includes: a ceramic body having electrodes and a heater circuit and capable of holding a workpiece: a tubular member , which has an end portion connected to the ceramic body: a seal, which is placed inside the tubular member and divides the inner space of the tubular member into two regions: the region at the first end portion (“seal portion”) and the The area on the opposite side ("opposite area"): and power conductive elements, which pass through the seal to the seal area side from the opposite area side, and are electrically connected to electrodes and heater circuits, while the device is in semiconductor device fabrication The workpiece cannot be fixed effectively, which reduces the efficiency of processing.

Utility model content

The purpose of this utility model is to provide a workpiece fixing device for processing equipment, which can fix the connecting block through the cooperation of the movable ball and the movable groove, and has the advantages of effectively fixing the workpiece and improving the processing efficiency. The workpiece cannot be fixed effectively, which reduces the problem of processing efficiency.

In order to achieve the above purpose, the utility model provides the following technical solutions: a workpiece fixing device for processing equipment, including a fixing plate, the bottom of the fixing plate is provided with a base, and the bottom of the fixing plate is fixedly connected with a fixing block. The bottom of the fixed block is provided with a first groove, the inside of the first groove is provided with a connecting block, the bottom of the connecting block is movably connected with a workpiece, and the top of the base is provided with a second groove, so The end of the workpiece away from the connecting block extends to the inside of the second groove, both sides of the bottom of the fixing plate are movably connected with power lines, and both sides of the top of the base are provided with connecting plates, and the connecting plates are The middle part is fixedly connected with a fixing sleeve, and the bottom of the power cord passes through the fixing sleeve and extends to the outside of the fixing sleeve;

Both sides of the inner cavity of the first groove are fixedly connected with a first spring, and the end of the first spring far away from the inner wall of the first groove is fixedly connected with a movable ball, and both sides of the connecting block are provided with movable balls. The ball is used in conjunction with the movable groove, and one end of the movable ball extends to the inside of the movable groove, and the two sides of the inner cavity of the second groove are fixedly connected with a second spring, and the second spring is away from the inner wall of the second groove. One end is fixedly connected with a splint, and the splint is located on both sides of one end of the workpiece.

Preferably, a clamping pad is fixedly connected to the top of the inner cavity of the first groove, and the clamping pad is in contact with the surface of one end of the connecting block.

Preferably, a gasket is fixedly connected inside the fixing sleeve, and the gasket is in contact with the surface of one end of the power cord.

Preferably, connecting rods are fixedly connected to both sides of the top of the base, and the end of the connecting rod away from the base is fixedly connected to one side of the connecting plate.

Preferably, a protection pad is provided on the side of the splint away from the second spring, and one side of the protection pad is fixedly connected to the side of the splint away from the second spring through a fixing member.

Preferably, the number of the fixed blocks is three and arranged linearly.

Compared with the prior art, the beneficial effects of the utility model are as follows:

1. Through the setting of the first spring and the movable ball, the utility model can fix the connecting block through the cooperation of the movable ball and the movable groove, and through the setting of the second spring and the splint, the surface of one end of the workpiece bottom can be fixed to prevent Shaking occurs during processing, which affects the operation, and at the same time solves the problem that the workpiece cannot be effectively fixed and the processing efficiency is reduced.

2. The utility model can support the connecting plate and the fixing sleeve through the setting of the connecting rod, and fix the power cord at the same time, and can seal and fix the power cord through the setting of the sealing gasket.

3. The utility model can fix the connection block through the setting of the clamping pad to prevent shaking when the workpiece is fixed. Through the setting of the protective pad, one end of the bottom of the workpiece can be fixed by cooperating with the splint to prevent the workpiece from being processed and fixed. Looseness occurs, affecting operation.

To sum up: the utility model solves the problem that the work cannot be effectively carried out through the cooperation of the first groove, the connecting block, the workpiece, the second groove, the first spring, the movable ball, the movable groove, the second spring and the splint. Fixed an issue that reduced processing efficiency.

Description of drawings

Fig. 1 is the structural representation of the utility model;

Fig. 2 is a partial top view structure diagram of the fixing sleeve of the utility model;

Fig. 3 is an enlarged schematic diagram of a partial structure of the utility model A.

In the figure: 1 fixed plate, 2 base, 3 fixed block, 4 first groove, 5 connecting block, 6 workpiece, 7 second groove, 8 power cord, 9 connecting plate, 10 fixed sleeve, 11 first spring , 12 movable balls, 13 movable grooves, 14 second springs, 15 splints, 16 clamping pads, 17 sealing pads, 18 connecting rods, 19 protective pads.

Detailed ways

(In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front" , "Back", "Left", "Right", "Vertical", "Horizontal", "Top", "Bottom", "Inner", "Outer", "Clockwise", "Counterclockwise", etc. The orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the referred equipment or elements must have a specific orientation or be constructed in a specific orientation. and operation, and therefore cannot be construed as a limitation of the present utility model.

In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be interpreted as indicating or implying relative importance or implicitly specifying the quantity of indicated technical features. Thus, a feature defined as "first" and "second" may explicitly or implicitly include one or more of these features. In the description of the present utility model, "plurality" means two or more, unless otherwise specifically defined. )

The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. example. Based on the embodiments of the present utility model, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the scope of protection of the present utility model.

Please refer to Figure 1-3, a workpiece fixing device for processing equipment, including a fixed plate 1, a base 2 is arranged at the bottom of the fixed plate 1, and connecting rods 18 are fixedly connected to both sides of the top of the base 2, and the connecting rods 18 The end far away from the base 2 is fixedly connected to one side of the connecting plate 9. Through the setting of the connecting rod 18, the connecting plate 9 and the fixing sleeve 10 can be supported, and the power cord 8 can be fixed at the same time. The bottom of the fixing plate 1 is fixedly connected There are fixed blocks 3, the number of fixed blocks 3 is three, and they are arranged linearly, the bottom of the fixed block 3 is provided with a first groove 4, and the top of the inner cavity of the first groove 4 is fixedly connected with a clamping pad 16. The tight pad 16 is in contact with the surface of one end of the connecting block 5, and by setting the clamping pad 16, the connecting block 5 can be fixed to prevent the workpiece 6 from shaking when it is fixed.

In addition, the inside of the first groove 4 is provided with a connecting block 5, the bottom of the connecting block 5 is movably connected with the workpiece 6, the top of the base 2 is provided with a second groove 7, and the end of the workpiece 6 away from the connecting block 5 extends to the first In the inside of the second groove 7, both sides of the bottom of the fixed plate 1 are movably connected with a power cord 8, both sides of the top of the base 2 are provided with a connecting plate 9, and the middle part of the connecting plate 9 is fixedly connected with a fixed sleeve 10, and the fixed sleeve The inside of 10 is fixedly connected with a sealing gasket 17, and the sealing gasket 17 is in contact with the surface of one end of the power cord 8. Through the setting of the sealing gasket 17, the power cord 8 can be sealed and fixed, and the bottom of the power cord 8 runs through the fixing sleeve 10 and extending to the outside of the fixing sleeve 10.

Both sides of the first groove 4 inner cavity are fixedly connected with a first spring 11, and one end of the first spring 11 away from the inner wall of the first groove 4 is fixedly connected with a movable ball 12, and both sides of the connecting block 5 are provided with movable balls. The ball 12 cooperates with the movable groove 13 used, and one end of the movable ball 12 extends to the inside of the movable groove 13, and the both sides of the inner chamber of the second groove 7 are fixedly connected with a second spring 14, and the second spring 14 is far away from the second groove. One end of groove 7 inner wall is fixedly connected with clamping plate 15, and clamping plate 15 is provided with protection pad 19 away from the side of second spring 14, and one side of protection pad 19 and clamping plate 15 are fixedly connected by fixture away from the side of second spring 14, Through the setting of the protective pad 19, one end of the bottom of the workpiece 6 is fixed by cooperating with the splint 15, so as to prevent the workpiece 6 from loosening during processing and fixing, which will affect the operation.

Secondly, and the clamping plate 15 is positioned at the both sides of one end of the workpiece 6, by the setting of the first spring 11 and the movable ball 12, the connecting block 5 can be fixed by the cooperation of the movable ball 12 and the movable groove 13, and the connecting block 5 can be fixed by the second spring 14 and the clamping plate The setting of 15 can fix the surface of the bottom end of the workpiece 6 to prevent shaking during processing and affect the operation, and at the same time solve the problem that the workpiece cannot be fixed effectively and the processing efficiency is reduced.

During use, the connecting block 5 on the top of the workpiece 6 is snapped into the inside of the first groove 4, the movable groove 13 is in contact with the movable ball 12, and the first spring 11 is opened to drive the movable ball 12 to snap into the movable groove 13 to carry out the connecting block 5 Fix, and then one end of the bottom of the workpiece 6 is snapped into the second groove 7, and the second spring 14 drives the splint 15 to move to fix one end of the bottom of the workpiece 6. At the same time, the power cord 8 passes through the fixing sleeve 10 and passes through the gasket 17 pairs. The power cord 8 is sealed and fixed.

Although the embodiments of the present invention have been shown and described, those skilled in the art can understand that various changes and modifications can be made to these embodiments without departing from the principle and spirit of the present invention , replacements and modifications, the scope of the present utility model is defined by the appended claims and their equivalents.

Claims (6)

1. a kind of process equipment Work fixing device, including fixed plate (1), it is characterised in that：The bottom of the fixed plate (1) Pedestal (2) is provided with, the bottom of the fixed plate (1) is fixedly connected with fixed block (3), and the bottom of the fixed block (3) opens up There is the first groove (4), first groove (4) is internally provided with contiguous block (5), and the bottom activity of the contiguous block (5) is even Workpiece (6) is connected to, the second groove (7), the one end of the workpiece (6) away from contiguous block (5) are offered at the top of the pedestal (2) The inside of the second groove (7) is extended to, the both sides of fixed plate (1) bottom are connected with power cord (8), the pedestal (2) both sides at the top of are both provided with connecting plate (9), and fixing sleeve (10), the electricity are fixedly connected with the middle part of the connecting plate (9) The bottom of source line (8) is through fixing sleeve (10) and extends to the outside of fixing sleeve (10)；

The both sides of first groove (4) inner cavity have been fixedly connected with the first spring (11), and first spring (11) is away from the One end of one groove (4) inner wall is fixedly connected with movable balls (12), and the both sides of the contiguous block (5) offer and movable balls (12) loose slot (13) being used cooperatively, and one end of movable balls (12) extends to the inside of loose slot (13), described second is recessed The both sides of groove (7) inner cavity have been fixedly connected with second spring (14), remote second groove (7) inner wall of the second spring (14) One end is fixedly connected with clamping plate (15), and clamping plate (15) is located at the both sides of workpiece (6) one end.

A kind of 2. process equipment Work fixing device according to claim 1, it is characterised in that：First groove (4) clamp pad (16) is fixedly connected with the top of inner cavity, the clamp pad (16) is in contact with the surface of contiguous block (5) one end.

A kind of 3. process equipment Work fixing device according to claim 1, it is characterised in that：The fixing sleeve (10) Inside be fixedly connected with gasket (17), the gasket (17) is in contact with the surface of power cord (8) one end.

A kind of 4. process equipment Work fixing device according to claim 1, it is characterised in that：Pedestal (2) top The both sides in portion have been fixedly connected with connecting rod (18), the one end of the connecting rod (18) away from pedestal (2) and the one of connecting plate (9) Side is fixedly connected.

A kind of 5. process equipment Work fixing device according to claim 1, it is characterised in that：The clamping plate (15) is remote Side from second spring (14) is provided with neonychium (19), side and remote second bullet of clamping plate (15) of the neonychium (19) The side of spring (14) is fixedly connected by fixing piece.

A kind of 6. process equipment Work fixing device according to claim 1, it is characterised in that：The fixed block (3) Quantity be three, and linear arrangement.