CN1529199A - Method for manufacturing color filter substrate and structure thereof - Google Patents
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Abstract
Description
技术领域technical field
本发明涉及一种彩色滤光基板的制造方法及其结构,特别是涉及一种能够改善液晶显示面板的晶穴间距(cell gap)不均与提高面板耐荷重能力的彩色滤光基板(Color Filter)的制造方法及其结构。The present invention relates to a manufacturing method and structure of a color filter substrate, in particular to a color filter substrate capable of improving the unevenness of the cell gap of a liquid crystal display panel and improving the load bearing capacity of the panel. ) manufacturing method and its structure.
背景技术Background technique
由于显示器的需求与日剧增,因此业界全力投入相关显示器的发展。其中,又以阴极射线管(Cathode Ray Tube)因具有优异的显示品质与技术成熟性,因此长年独占显示器市场。然而,近来由于绿色环保概念的兴起对于其能源消耗较大与产生辐射量较大的特性,加上产品扁平化空间有限,因此无法满足市场对于轻、薄、短、小、美以及低消耗功率的市场趋势。因此,具有高画质、空间利用效率佳、低消耗功率、无辐射等优越特性的薄膜晶体管液晶显示器(Thin Film Transistor Liquid Crystal Display)已逐渐成为市场的主流。Due to the increasing demand for displays, the industry is fully committed to the development of related displays. Among them, the cathode ray tube (Cathode Ray Tube) has been monopolizing the display market for many years due to its excellent display quality and technological maturity. However, due to the rise of the concept of green environmental protection, the characteristics of large energy consumption and large radiation, and the limited space for product flattening, it cannot meet the market demand for light, thin, short, small, beautiful and low power consumption. market trends. Therefore, thin film transistor liquid crystal displays (Thin Film Transistor Liquid Crystal Displays) with superior characteristics such as high image quality, good space utilization efficiency, low power consumption, and no radiation have gradually become the mainstream of the market.
目前液晶显示器皆朝向全彩化、大尺寸、高分辨率以及低成本的方向发展,然而液晶显示装置的各种性能,如应答速度、透明度对比值及可视角等,均应与液晶层的膜厚有关。因此,一般均依液晶材料的光学性质,严密控制液晶层厚度而加入间隙物(spacer)。其中,间隙物可分为棒状间隙物、粒状间隙物与光阻间隙物(Photo-Spacer)。但是,其中棒状与粒状间隙物均需散布装置实施分布,但是该两种间隙物易成团块状,使得液晶层厚度无法均一,必须实施额外制程使其均匀分布,增加生产成本。因此,使用微影制程所制作的光阻间隙物,除了能够控制其分布位置之外,并且也能控制其高度,使得液晶层厚度能够保持均一。因此,近来受到业界所使用。在此,针对具有光阻间隙物的彩色滤光基板其制造流程进行说明。At present, liquid crystal displays are developing towards full color, large size, high resolution and low cost. However, various performances of liquid crystal display devices, such as response speed, transparency contrast value and viewing angle, etc., should be compared with the film of the liquid crystal layer. thick about. Therefore, generally according to the optical properties of the liquid crystal material, the thickness of the liquid crystal layer is strictly controlled and a spacer is added. Among them, the spacers can be divided into rod-shaped spacers, granular spacers and photo-spacers. However, both the rod-shaped and granular interstitials need a spreading device to distribute them. However, these two interstitials tend to form agglomerates, which makes the thickness of the liquid crystal layer not uniform. Additional processes must be implemented to make them uniformly distributed, which increases production costs. Therefore, the photoresist spacers produced by the lithography process can not only control their distribution position, but also control their height, so that the thickness of the liquid crystal layer can be kept uniform. Therefore, it has been used in the industry recently. Here, the manufacturing process of the color filter substrate with photoresist spacers will be described.
图1A至图1E是现有习知的彩色滤光基板的制造流程剖面示意图。请参阅图1A所示,首先,提供基板100,接着在基板100上形成黑矩阵102。请参阅图1B所示,然后在基板100与黑矩阵102之上形成彩色光阻层104,其中彩色光阻层104是由数个红色光阻区块、数个绿色光阻区块以及数个蓝色光阻区块所构成。请参阅图1C所示,随后在彩色光阻层104上形成覆盖层106(over coating)。请参阅图1D所示,之后在覆盖层106上形成电极层108。请参阅图1E所示,最后在电极层108表面上形成光阻间隙物110。1A to 1E are schematic cross-sectional views of the manufacturing process of a conventional color filter substrate. Please refer to FIG. 1A , first, a
因此,现有习知彩色滤光基板中的光阻间隙物是堆叠于电极层、覆盖层与彩色光阻层之上。而由于间隙物主要功能是保持液晶层厚度的均一,因此间隙物需具有刚性、完全弹性体、尺寸安定性佳等性质,换言之,其机械性质皆较一般的彩色光阻层或覆盖层来得佳。所以,当液晶显示面板在使用中或制造中遭受不正常的施力时,其彩色滤光基板上的彩色光阻层往往会比间隙物提早产生破坏或变形,而造成液晶显示面板的晶穴间距不均一,进而影响面板的显示效果。Therefore, the photoresist spacers in the conventional color filter substrate are stacked on the electrode layer, the covering layer and the color photoresist layer. Since the main function of the spacer is to keep the thickness of the liquid crystal layer uniform, the spacer must have properties such as rigidity, complete elasticity, and good dimensional stability. In other words, its mechanical properties are better than ordinary color photoresist layers or cover layers. . Therefore, when the liquid crystal display panel is subjected to abnormal force during use or manufacturing, the color photoresist layer on the color filter substrate will often be damaged or deformed earlier than the spacers, resulting in crystal holes in the liquid crystal display panel. The uneven spacing affects the display effect of the panel.
由此可见,上述现有的彩色滤光基板的制造方法及其结构仍存在有缺陷,而亟待加以进一步改进。为了解决现有的彩色滤光基板的制造方法及其结构的缺陷,相关厂商莫不费尽心思来谋求解决之道,但长久以来一直未见适用的设计被发展完成,此显然是相关业者急欲解决的问题。It can be seen that the above-mentioned existing manufacturing method and structure of the color filter substrate still have defects, and further improvement is urgently needed. In order to solve the defects of the existing manufacturing methods and structures of color filter substrates, relevant manufacturers have tried their best to find a solution, but no suitable design has been developed for a long time. This is obviously the urgent desire of the relevant industry solved problem.
有鉴于上述现有的彩色滤光基板的制造方法及其结构存在的缺陷,本发明人基于从事此类产品设计制造多年丰富的实务经验及专业知识,积极加以研究创新,以期创设一种新的彩色滤光基板的制造方法及其结构,能够改进一般现有的彩色滤光基板的制造方法及其结构,使其更具有实用性。经过不断的研究、设计,并经反复试作样品及改进后,终于创设出确具实用价值的本发明。In view of the above-mentioned existing defects in the manufacturing method and structure of the color filter substrate, the inventor actively researches and innovates based on years of rich practical experience and professional knowledge engaged in the design and manufacture of such products, in order to create a new The manufacturing method and structure of the color filter substrate can improve the general existing manufacturing method and structure of the color filter substrate, making it more practical. Through continuous research, design, and after repeated trial samples and improvements, the present invention with practical value is finally created.
发明内容Contents of the invention
本发明的目的在于,克服上述现有的彩色滤光基板的制造方法及其结构存在的缺陷,而提供一种新的彩色滤光基板的制造方法及其结构,所要解决的技术问题是使其可以克服当面板遭遇外界施力时,彩色光阻层往往比间隙物提早产生破坏或变形,而造成面板晶穴间距不均一的问题,可以改善当面板遭受外力时可能产生的面板晶穴间距的变化,而具有产业上的利用价值。The object of the present invention is to overcome the above-mentioned existing defects in the manufacturing method and structure of the color filter substrate, and provide a new manufacturing method and structure of the color filter substrate. The technical problem to be solved is to make it It can overcome the problem that when the panel is subjected to external force, the color photoresist layer is often damaged or deformed earlier than the spacer, which causes the problem of uneven spacing between the panel crystal cavities, and can improve the possible spacing of the panel crystal cavity when the panel is subjected to external forces. change, but has industrial utilization value.
本发明的另一目的在于,提供一种新的彩色滤光基板的制造方法及其结构,所要解决的技术问题是使其能够进一步提高面板的耐荷重能力,从而更加适于实用。Another object of the present invention is to provide a new manufacturing method and structure of a color filter substrate. The technical problem to be solved is to further improve the load-bearing capacity of the panel, so that it is more suitable for practical use.
本发明的彩色滤光基板的制造方法及其结构,可以改善当液晶显示面板遭到外界施力时,其彩色滤光基板上的彩色光阻层比间隙物提早产生破坏,而造成液晶面板的晶穴间距(cell gap)无法均一的问题。除此之外,并能提高液晶显示面板的耐荷重能力。The manufacturing method and structure of the color filter substrate of the present invention can improve the damage of the color photoresist layer on the color filter substrate earlier than the spacers when the liquid crystal display panel is subjected to external force, which causes the damage of the liquid crystal panel. The problem that the cell gap cannot be uniform. In addition, the load-bearing capacity of the liquid crystal display panel can be improved.
本发明的目的及解决其技术问题是采用以下技术方案来实现的。依据本发明提出的一种彩色滤光基板的制造方法,其包括以下步骤:在一基板上形成一黑矩阵,以围出复数个次画素区;在该基板上的该些次画素区中形成一彩色光阻层,并覆盖住部分该黑矩阵;图案化该彩色光阻层,以在预定形成间隙物处的该彩色光阻层中形成一开口;以及在该开口内形成一间隙物。The purpose of the present invention and the solution to its technical problems are achieved by adopting the following technical solutions. A method for manufacturing a color filter substrate according to the present invention includes the following steps: forming a black matrix on a substrate to surround a plurality of sub-pixel regions; forming a black matrix in the sub-pixel regions on the substrate. A color photoresist layer covering part of the black matrix; patterning the color photoresist layer to form an opening in the color photoresist layer where the spacer is predetermined to be formed; and forming a spacer in the opening.
本发明的目的及解决其技术问题还可采用以下技术措施进一步实现。The purpose of the present invention and its technical problems can also be further realized by adopting the following technical measures.
前述的彩色滤光基板的制造方法,其中所述的彩色光阻层中所形成的该开口是曝露出该黑矩阵。In the aforementioned manufacturing method of the color filter substrate, the opening formed in the color photoresist layer exposes the black matrix.
前述的彩色滤光基板的制造方法,其中所述的其中在形成该间隙物之前,更包括在该彩色光阻层以及该黑矩阵层上形成一电极层。The aforementioned manufacturing method of the color filter substrate further includes forming an electrode layer on the color photoresist layer and the black matrix layer before forming the spacer.
前述的彩色滤光基板的制造方法,其中在图案化该彩色光阻层之后,更包括:在该彩色光阻层上形成一覆盖层;以及图案化该覆盖层,以在预定形成间隙物处的该覆盖层中形成该开口。The aforementioned manufacturing method of the color filter substrate, after patterning the color photoresist layer, further includes: forming a cover layer on the color photoresist layer; The opening is formed in the covering layer.
前述的彩色滤光基板的制造方法,其中所述的其中在形成该覆盖层之后,更包括在该覆盖层上形成一电极层。The aforementioned manufacturing method of the color filter substrate further includes forming an electrode layer on the covering layer after forming the covering layer.
本发明的目的及解决其技术问题还采用以下的技术方案来实现。依据本发明提出的一种彩色滤光基板的结构,其包括:一黑矩阵,形成在一基板上,其中该黑矩阵会围出复数个次画素区;一彩色光阻层,形成在该基板上的该些次画素区中,并覆盖住部分该黑矩阵,其中该彩色光阻层中具有复数个开口;以及复数个间隙物,各该些间隙物是配置在该彩色光阻层中的各该些开口内。The purpose of the present invention and the solution to its technical problems are also achieved by the following technical solutions. According to the structure of a color filter substrate proposed by the present invention, it includes: a black matrix formed on a substrate, wherein the black matrix surrounds a plurality of sub-pixel regions; a color photoresist layer formed on the substrate In the sub-pixel regions above, and covering part of the black matrix, wherein the color photoresist layer has a plurality of openings; and a plurality of spacers, each of which is configured in the color photoresist layer Each of these openings.
本发明的目的及解决其技术问题还可采用以下技术措施进一步实现。The purpose of the present invention and its technical problems can also be further realized by adopting the following technical measures.
前述的彩色滤光基板的结构,其中所述的彩色光阻层中的该些开口是曝露出该黑矩阵。In the aforementioned structure of the color filter substrate, the openings in the color photoresist layer expose the black matrix.
前述的彩色滤光基板的结构,其更包括一电极层,覆盖在该彩色光阻层以及该黑矩阵层上。The aforementioned structure of the color filter substrate further includes an electrode layer covering the color photoresist layer and the black matrix layer.
前述的彩色滤光基板的结构,其更包括一覆盖层,形成在该彩色光阻层上。The aforementioned structure of the color filter substrate further includes a cover layer formed on the color photoresist layer.
前述的彩色滤光基板的结构,其更包括一电极层,形成在该覆盖层上。The aforementioned structure of the color filter substrate further includes an electrode layer formed on the covering layer.
本发明与现有技术相比具有明显的优点和有益效果。由以上技术方案可知,为了达到前述发明目的,本发明的主要技术内容如下:Compared with the prior art, the present invention has obvious advantages and beneficial effects. As can be seen from the above technical solutions, in order to achieve the aforementioned object of the invention, the main technical contents of the present invention are as follows:
本发明提出一种彩色滤光基板的制造方法。该方法包含下列步骤:首先在基板上形成黑矩阵,以围出数个次画素区。然后,在这些次画素区中形成彩色光阻层并覆盖住基板与部分黑矩阵,其中彩色光阻层是由数个红色光阻区块、数个绿色光阻区块以及数个蓝色光阻区块所构成。接着,图案化该彩色光阻层,以在预定形成间隙物处的彩色光阻层中形成开口。最后在开口内形成间隙物。The invention provides a method for manufacturing a color filter substrate. The method includes the following steps: firstly, a black matrix is formed on the substrate to enclose several sub-pixel regions. Then, a color photoresist layer is formed in these sub-pixel regions and covers the substrate and part of the black matrix, wherein the color photoresist layer is composed of several red photoresist blocks, several green photoresist blocks and several blue photoresist blocks. composed of blocks. Next, the color photoresist layer is patterned to form openings in the color photoresist layer where spacers are predetermined to be formed. Finally, spacers are formed within the openings.
在本发明一较佳实施例中,彩色光阻层中所形成的开口是曝露出黑矩阵。在另一较佳实施例中,在形成间隙物之前,更包括在彩色光阻层以及黑矩阵层上形成电极层。In a preferred embodiment of the present invention, the opening formed in the color photoresist layer exposes the black matrix. In another preferred embodiment, before forming the spacers, it further includes forming an electrode layer on the color photoresist layer and the black matrix layer.
本发明还提出一种彩色滤光基板的结构,主要是由基板、黑矩阵、彩色光阻层以及数个间隙物所构成。其中,黑矩阵配置于基板上,以围出数个次画素区。此外,彩色光阻层配置于基板上的这些次画素区中,且该彩色光阻层是覆盖住基板与部分黑矩阵。特别是,彩色光阻层中具有数个开口。而间隙物则是配置在彩色光阻层中的这些开口内。The invention also proposes a structure of a color filter substrate, which is mainly composed of a substrate, a black matrix, a color photoresist layer and several spacers. Wherein, the black matrix is arranged on the substrate to enclose several sub-pixel regions. In addition, the color photoresist layer is disposed in the sub-pixel regions on the substrate, and the color photoresist layer covers the substrate and part of the black matrix. In particular, there are several openings in the color photoresist layer. The spacers are disposed in the openings in the color photoresist layer.
在本发明一较佳实施例中,彩色光阻层中的这些开口是曝露出黑矩阵。在另一较佳实施例中,更包括一电极层,覆盖在彩色光阻层以及黑矩阵层上。In a preferred embodiment of the present invention, the openings in the color photoresist layer expose the black matrix. In another preferred embodiment, it further includes an electrode layer covering the color photoresist layer and the black matrix layer.
在本发明中,因彩色滤光基板的间隙物并非配置在彩色光阻层上,而是直接配置于刚性较佳的黑矩阵上,因此可以避免外界施力对彩色光阻层造成变形或破坏,而影响面板晶穴间距,进而影响面板的显示效果。In the present invention, since the spacer of the color filter substrate is not arranged on the color photoresist layer, but is directly arranged on the black matrix with better rigidity, it can avoid deformation or damage to the color photoresist layer caused by external force , which affects the panel crystal cavity spacing, and then affects the display effect of the panel.
借由上述技术方案,本发明的彩色滤光基板至少具有下列优点:With the above technical solution, the color filter substrate of the present invention has at least the following advantages:
一、本发明的彩色滤光基板可以改善当面板遭受外力时可能产生的面板晶穴间距的变化,且能进一步提高面板的耐荷重能力。1. The color filter substrate of the present invention can improve the variation of panel cavity spacing that may occur when the panel is subjected to external force, and can further improve the load bearing capacity of the panel.
二、由于本发明并非将光阻间隙物形成在彩色光阻层上,因此可以不需考虑彩色光阻层材料机械性质,而可增加间隙物的材料选择的灵活性。2. Since the present invention does not form the photoresist spacers on the color photoresist layer, it does not need to consider the mechanical properties of the material of the color photoresist layer, and can increase the flexibility of material selection for the spacers.
三、本发明不但可以适用于一般彩色滤光片且也能适用于共平面切换式彩色滤光片。3. The present invention is applicable not only to general color filters but also to coplanar switching color filters.
综上所述,本发明特殊的彩色滤光基板的制造方法及其结构,可以克服当面板遭遇外界施力时,彩色光阻层往往比间隙物提早产生破坏或变形,而造成面板晶穴间距不均一的问题,可以改善当面板遭受外力时可能产生的面板晶穴间距的变化,而具有产业上的利用价值;另其还能够进一步提高面板的耐荷重能力,从而更加适于实用。其具有上述诸多的优点及实用价值,并在同类制造方法及结构中未见有类似的方法及结构设计公开发表或使用而确属创新,其不论在制造方法、结构或功能上皆有较大的改进,在技术上有较大的进步,并产生了好用及实用的效果,且较现有的彩色滤光基板的制造方法及其结构具有增进的多项功效,从而更加适于实用,而具有产业的广泛利用价值,诚为一新颖、进步、实用的新设计。To sum up, the manufacturing method and structure of the special color filter substrate of the present invention can overcome the problem that when the panel encounters an external force, the color photoresist layer is often damaged or deformed earlier than the spacers, which causes the gap between the crystal holes of the panel. The problem of inhomogeneity can improve the variation of panel crystal cavity spacing that may occur when the panel is subjected to external force, and has industrial application value; in addition, it can further improve the load-bearing capacity of the panel, so that it is more suitable for practical use. It has the above-mentioned many advantages and practical value, and there is no similar method and structure design published or used in the same kind of manufacturing method and structure, so it is indeed innovative, no matter in the manufacturing method, structure or function. The improvement has made great progress in technology, and has produced useful and practical effects, and has improved multiple functions compared with the existing manufacturing method and structure of the color filter substrate, so it is more suitable for practical use. And it has wide application value in the industry, and it is a novel, progressive and practical new design.
上述说明仅是本发明技术方案的概述,为了能够更清楚了解本发明的技术手段,并可依照说明书的内容予以实施,以下以本发明的较佳实施例并配合附图详细说明如后。The above description is only an overview of the technical solutions of the present invention. In order to understand the technical means of the present invention more clearly and implement them according to the contents of the description, the preferred embodiments of the present invention and accompanying drawings are described in detail below.
附图说明Description of drawings
图1A至图1E是现有习知的彩色滤光片的制造流程剖面示意图。FIG. 1A to FIG. 1E are schematic cross-sectional views of the manufacturing process of a conventional color filter.
图2是依照本发明一较佳实施例的彩色滤光片的俯视图。FIG. 2 is a top view of a color filter according to a preferred embodiment of the present invention.
图3A至图3F是依照本发明一较佳实施例的彩色滤光片的制程流程剖面示意图。3A to 3F are schematic cross-sectional views of the process flow of a color filter according to a preferred embodiment of the present invention.
图4是依照本发明另一较佳实施例的彩色滤光片的结构剖面示意图。FIG. 4 is a schematic cross-sectional view of a color filter according to another preferred embodiment of the present invention.
图5是依照本发明又一较佳实施例的彩色滤光片的结构剖面示意图。FIG. 5 is a schematic cross-sectional view of a color filter according to another preferred embodiment of the present invention.
图6是依照本发明再一较佳实施例的彩色滤光片的结构剖面示意图。FIG. 6 is a schematic cross-sectional view of a color filter according to yet another preferred embodiment of the present invention.
100、200:基板 102、202:黑矩阵100, 200:
204:次画素区 106、206:彩色光阻层204:
106a、206a、206b、206c:开口 108、208:覆盖层106a, 206a, 206b, 206c: opening 108, 208: covering layer
110、210:电极层 112、212:间隙物110, 210: Electrode layer 112, 212: Spacers
具体实施方式Detailed ways
以下结合附图及较佳实施例,对依据本发明提出的彩色滤光基板的制造方法及其结构其具体制造方法、步骤、结构、特征及其功效,详细说明如后。The manufacturing method and structure of the color filter substrate according to the present invention and its specific manufacturing method, steps, structure, features and effects will be described in detail below with reference to the accompanying drawings and preferred embodiments.
图2是依照本发明一较佳实施例的彩色滤光基板的俯视图。图3A至图3F是依照本发明一较佳实施例的彩色滤光基板的制造流程剖面示意图,其中图3A至图3F是对应于图2中由I-I’的剖面处。FIG. 2 is a top view of a color filter substrate according to a preferred embodiment of the present invention. 3A to 3F are schematic cross-sectional views of the manufacturing process of a color filter substrate according to a preferred embodiment of the present invention, wherein FIG. 3A to FIG. 3F correspond to the section from I-I' in FIG. 2 .
请参阅图3A并配合参阅图2所示,首先在基板200上形成一黑矩阵材料层(图中未示),之后,对该黑矩阵材料层进行微影制程或微影制程加上蚀刻制程,以形成黑矩阵202,而围出数个次画数区204。其中,若黑矩阵202的组成材料为遮光树脂,则可使用微影制程形成该黑矩阵202,其厚度例如是1-2μm。若黑矩阵202的组成材料为铬金属,则可使用微影制程加上蚀刻制程形成黑矩阵202,其厚度例如是0.1-0.2μm。此外,基板200的材料可为玻璃与塑胶等透明基板。Please refer to FIG. 3A and refer to FIG. 2. First, a black matrix material layer (not shown) is formed on the
请参阅图3B并配合参阅图2所示,随后在基板200上的这些次画素区204中形成彩色光阻层206,覆盖住基板200与部分黑矩阵202。其中彩色光阻层206是由数个红色光阻区块(R)、数个绿色光阻区块(G)与数个蓝色光阻区块(B)所构成,其形成方法例如是先进行旋转涂布制程(spincoating)以及烘烤制程等步骤,形成一红色光阻层(图中未示),然后进行微影制程以保留特定区域处的红色光阻层(图中未示)。接着再利用旋转涂布与烘烤制程形成一绿色光阻层(图中未示),然后进行微影制程保留特定区域处的绿色光阻层(图中未示),之后重复上述步骤保留特定区域处的蓝色光阻层(图中未示)。而彩色光阻层206的红、绿与蓝色光阻区块的排列方式,例如为马赛克排列(Mosaic type)、条状排列(stripe type)、四画素排列(four pixels type)以及三角形排列(triangle type)等型态。Referring to FIG. 3B together with FIG. 2 , a
然后图案化该彩色光阻层206以形成开口206a,其中开口206a是曝露出黑矩阵202,且开口206a的位置是对应于薄膜晶体管面板上的薄膜晶体管所在位置(图中未示)。上述图案化彩色光阻层206的方法,例如进行曝光与显影制程,以在彩色光阻层206中形成开口206a。Then the
请参阅图3C并配合参阅图2所示,在本发明一较佳实施例中,在形成彩色光阻层206之后,更包括在黑矩阵202与彩色光阻层206上形成覆盖层208,其中覆盖层208的材料为丙烯(acrylic)与胺甲酸乙酯(urethane)树脂,其主要功能为防止液晶遭受污染与使彩色光阻层206的表面平坦化。Please refer to FIG. 3C and refer to FIG. 2 together. In a preferred embodiment of the present invention, after forming the
请参阅图3D并配合参阅图2所示,图案化覆盖层208以在先前所形成的开口206a处形成开口206b,其中开口206b是曝露出黑矩阵202,且开口206b的位置是对应于薄膜晶体管面板上的薄膜晶体管所在位置(图中未示)。上述图案化覆盖层208的方法例如进行曝光与显影制程。Referring to FIG. 3D and referring to FIG. 2, the
请参阅图3E图并配合参阅图2所示,之后在覆盖层208与黑矩阵202上形成电极层210。其中电极层210材料可为铟锡氧化物(ITO)、铟锌氧化物(IZO)等透明导电材质,其形成的方法例如是溅镀法,其厚度例如是0.15μm。Referring to FIG. 3E together with FIG. 2 , an
请参阅图3F并配合参阅图2所示,利用旋转涂布与烘烤制程在电极层210上形成一间隙物材料层(图中未示),之后进行曝光与显影制程以于彩色光阻层206的开口206b内形成间隙物212,上述的间隙物材料层的材质例如是光阻材料。Please refer to FIG. 3F and refer to FIG. 2 together. A spacer material layer (not shown) is formed on the
由上述的步骤所制得的彩色滤光基板如图3F所示,该结构主要是由基板200、黑矩阵202、彩色光阻层206、覆盖层208、电极层210以及数个间隙物212所构成。其中,黑矩阵202是配置于基板200上,以围出数个次画素区204。其中,彩色光阻层206是配置于这些次画素区204中且覆盖住基板200与部分黑矩阵202。此外,覆盖层208配置于黑矩阵202与彩色光阻层206之上。而在彩色光阻层206以及覆盖层208中具有开口206b,且开口206b是曝露出黑矩阵202。电极层210是形成于覆盖层208上。而这些间隙物212是位于这些开口206b内,覆盖住开口206b内的电极层210。The color filter substrate produced by the above steps is shown in FIG. 3F . constitute. Wherein, the
以上所述的彩色滤光基板是为具有覆盖层的设计,然而,本发明亦可以应用在没有覆盖层的彩色滤光基板中,现将其结构具体说明如下。请参阅图4所示,是依照本发明另一较佳实施例的彩色滤光基板的结构剖面示意图。该结构主要是由基板200、黑矩阵202、彩色光阻层206、电极层210以及数个间隙物212所构成。其中,黑矩阵202配置于基板200上,以形成数个次画素区204。当中,彩色光阻层206配置于这些次画素区204中且覆盖住基板200与部分黑矩阵202。且彩色光阻层206具有数个开口206c,且这些开口206c是曝露出黑矩阵202。此外,电极层210是形成于黑矩阵202与彩色光阻层206上,且间隙物212位于这些开口206c内,覆盖住开口206c内的电极层210。The above-mentioned color filter substrate is designed to have a cover layer, however, the present invention can also be applied to a color filter substrate without a cover layer, and its structure will now be described in detail as follows. Please refer to FIG. 4 , which is a schematic cross-sectional view of a color filter substrate according to another preferred embodiment of the present invention. The structure is mainly composed of a
倘若本发明是应用于共平面切换式(In-plane Switching,IPS)液晶显示器,则其彩色滤光基板上将不会形成有电极层,现将其详细的结构具体说明如下。请参阅图5所示,是依照本发明又一较佳实施例的彩色滤光基板的结构剖面示意图,该结构主要是由基板200、黑矩阵202、彩色光阻层206、覆盖层208以及数个间隙物212所构成。其中,黑矩阵202配置于基板200上,以围出数个次画素区204。当中,彩色光阻层206是配置于这些次画素区204中且覆盖住基板200与部分黑矩阵202上。此外,覆盖层208覆盖于黑矩阵202与彩色光阻层206之上。此外,彩色光阻层206与覆盖层208中具有数个开口206b,且开口206b是曝露出黑矩阵202。而间隙物212是形成于开口206b内。If the present invention is applied to an in-plane switching (IPS) liquid crystal display, no electrode layer will be formed on the color filter substrate, and its detailed structure will be described below. Please refer to FIG. 5 , which is a schematic cross-sectional view of a color filter substrate according to another preferred embodiment of the present invention. A
上述应用于共平面切换式液晶显示器的彩色滤光基板,亦可以是没有覆盖层的形式,现将其结构说明如下。请参阅图6所示,是依照本发明又一较佳实施例的彩色滤光基板的结构剖面示意图,该结构主要是由基板200、黑矩阵202、彩色光阻层206以及数个间隙物212所构成。其中,黑矩阵202配置于基板200上,以围出数个次画素区204。当中,彩色光阻层206配置于这些次画素区204中且覆盖住基板200与部分黑矩阵202。且彩色光阻层206具有数个开口206c,这些开口206c是曝露出黑矩阵202。此外,数个间隙物212位于这些开口206c内。The above-mentioned color filter substrate applied to the coplanar switching liquid crystal display may also be in the form of no covering layer, and its structure is described below. Please refer to FIG. 6, which is a schematic cross-sectional view of a color filter substrate according to another preferred embodiment of the present invention. The structure is mainly composed of a
以上所述,仅是本发明的较佳实施例而已,并非对本发明作任何形式上的限制,虽然本发明已以较佳实施例揭露如上,然而并非用以限定本发明,任何熟悉本专业的技术人员,在不脱离本发明技术方案范围内,当可利用上述揭示的方法及技术内容作出些许的更动或修饰为等同变化的等效实施例,但是凡是未脱离本发明技术方案的内容,依据本发明的技术实质对以上实施例所作的任何简单修改、等同变化与修饰,均仍属于本发明技术方案的范围内。The above description is only a preferred embodiment of the present invention, and does not limit the present invention in any form. Although the present invention has been disclosed as above with preferred embodiments, it is not intended to limit the present invention. Anyone familiar with this field Those skilled in the art, without departing from the scope of the technical solution of the present invention, can use the method and technical content disclosed above to make some changes or modifications to equivalent embodiments with equivalent changes, but any content that does not depart from the technical solution of the present invention, Any simple modifications, equivalent changes and modifications made to the above embodiments according to the technical essence of the present invention still fall within the scope of the technical solution of the present invention.
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