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CN100445836C - Liquid crystal display panel, array substrate and manufacturing method thereof - Google Patents

Liquid crystal display panel, array substrate and manufacturing method thereof Download PDF

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CN100445836C
CN100445836C CNB2007100075915A CN200710007591A CN100445836C CN 100445836 C CN100445836 C CN 100445836C CN B2007100075915 A CNB2007100075915 A CN B2007100075915A CN 200710007591 A CN200710007591 A CN 200710007591A CN 100445836 C CN100445836 C CN 100445836C
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array substrate
block
color
substrate according
manufacturing
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CN101013224A (en
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盛姿华
连伟智
黄夙鸿
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AUO Corp
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Abstract

一种阵列基板包括一基底、一黑色矩阵及多个色阻。黑色矩阵,形成于基底上,由多个区块组成,且部分区块的两端具有不同的厚度。多个色阻,设置于基底上,且每一色阻形成于两相邻的区块间,并分别覆盖上述两相邻区块的至少一端。其中,每一区块的两端分别被不同的色阻所覆盖。

Figure 200710007591

An array substrate includes a base, a black matrix and multiple color resists. The black matrix is formed on the base and is composed of multiple blocks, and two ends of some blocks have different thicknesses. A plurality of color resists are arranged on the base, and each color resist is formed between two adjacent blocks and covers at least one end of the two adjacent blocks respectively. Wherein, the two ends of each block are respectively covered by different color resists.

Figure 200710007591

Description

液晶显示面板与阵列基板及其制造方法 Liquid crystal display panel, array substrate and manufacturing method thereof

技术领域 technical field

本发明涉及一种阵列基板,尤其涉及一种具有色阻且应用于显示面板的阵列基板的结构。The present invention relates to an array substrate, in particular to a structure of an array substrate with color resistance and applied to a display panel.

背景技术 Background technique

随着显示科技的进步,与传统的CRT显示器相比,薄膜晶体管液晶显示器(thin film transistor liquid crystal display,TFT-LCD)由于具有轻、薄、低辐射以及体积小而不占空间的优势,目前已经成为显示器市场的主力产品,为顺应液晶显示产品的快速发展,液晶面板厂商的产业竞争日增。With the advancement of display technology, compared with traditional CRT displays, thin film transistor liquid crystal display (TFT-LCD) has the advantages of lightness, thinness, low radiation, and small size without occupying space. It has become the main product in the display market. In order to comply with the rapid development of liquid crystal display products, the industrial competition among LCD panel manufacturers is increasing day by day.

彩色滤光片(color filter,CF)是液晶显示器中,最重要的零组件之一,主要功能是使液晶显示器能产生彩色的画面。请参照图1A,图中显示了彩色滤光片1的俯视图,其主要元件包括了一黑色矩阵11以及黑色矩阵11定义的隔间内的多个色阻14。Color filter (color filter, CF) is one of the most important components in the liquid crystal display, and its main function is to enable the liquid crystal display to produce color images. Please refer to FIG. 1A , which shows a top view of a color filter 1 , its main components include a black matrix 11 and a plurality of color resists 14 in compartments defined by the black matrix 11 .

请参照图1B,图1B为图1A的剖面视图。图中显示了彩色滤光片1的基本结构。彩色滤光片1包括一基底10、一黑色矩阵11、多个色阻14及一导电层16。Please refer to FIG. 1B , which is a cross-sectional view of FIG. 1A . The basic structure of the color filter 1 is shown in the figure. The color filter 1 includes a substrate 10 , a black matrix 11 , a plurality of color resists 14 and a conductive layer 16 .

黑色矩阵11,形成于基底10上,且由多个区块12组成。色阻14也形成于基底10上,并位于两相邻的区块间,具有红色(R)、绿色(G)及蓝色(B)三种色阻14。其中,液晶显示器的色彩呈现,是因为背光的白光通过彩色滤光片1上的色阻14时,会分别产生红色、绿色及蓝色三种颜色,并通过这三种颜色的组合,而构成各种色彩。而黑色矩阵11的功能在于将红色、绿色及蓝色三种颜色色阻14隔开,并遮住三种颜色的部分光线,避免漏光影响色度,进而提高对比度。The black matrix 11 is formed on the substrate 10 and consists of a plurality of blocks 12 . The color resistance 14 is also formed on the substrate 10 and located between two adjacent blocks, and has three color resistances 14 of red (R), green (G) and blue (B). Among them, the color presentation of the liquid crystal display is because when the white light of the backlight passes through the color resistance 14 on the color filter 1, three colors of red, green and blue will be produced respectively, and through the combination of these three colors, a composition is formed. Various colors. The function of the black matrix 11 is to separate the three color resists 14 of red, green and blue, and cover part of the light of the three colors, so as to avoid light leakage from affecting the chromaticity, thereby improving the contrast.

然而,由于图像色度的需求不同,厂商必须将三种颜色的色度做些调整。一般来说,当彩色滤光片1中的色阻14膜厚不同时,所呈现出来的色度大小也会随之不同,膜厚愈高的色阻14,其所呈现出来的色度愈高。因此,厂商会依据需求,使不同颜色的色阻14具有不同的膜厚高度。例如:欲使显示画面偏蓝时,彩色滤光片所制作的色阻中,蓝色色阻14的膜厚高度会较红色色阻14及绿色色阻14高,而使得各色阻14间具有膜厚断差。However, due to the different requirements for image chromaticity, manufacturers must make some adjustments to the chromaticity of the three colors. Generally speaking, when the film thickness of the color resist 14 in the color filter 1 is different, the displayed chromaticity will also be different. high. Therefore, manufacturers will make the color resists 14 of different colors have different film thicknesses and heights according to requirements. For example: when it is desired to make the display screen look bluish, among the color resists made by color filters, the film thickness of the blue color resist 14 will be higher than that of the red color resist 14 and the green color resist 14, so that there is a film between each color resist 14 Thick break difference.

上述彩色滤光片1的各色色阻间的膜厚高度差异,虽可符合图像色度的需求,但是却会衍生出下列问题:Although the difference in film thickness and height between the color resists of the above color filter 1 can meet the requirements of image chromaticity, the following problems will arise:

一、经过色阻工艺后,色阻的膜面常会有牛角(Tusno)的形成,而导致膜面不均的状况。因此,在形成色阻之后,还会进行一平坦化步骤,对色阻的膜面进行研磨(Polish),以去除牛角,使色阻膜面平坦化。1. After the color resistance process, the film surface of the color resistance often has horns (Tusno) formed, resulting in uneven film surface. Therefore, after the color resist is formed, a planarization step is performed to polish the film surface of the color resist to remove horns and planarize the film surface of the color resist.

但是,由于色阻之间具有膜厚断差,导致在进行研磨(Polish)时,只能去除膜厚高度较高的色阻的牛角,而无法去除膜厚高度较低的色阻的牛角。故此,各色色阻间的膜厚高度差异,将造成彩色滤光片的色阻膜面无法完全平坦化的问题。However, due to the film thickness difference between the color resists, when polishing, only the corners of the color resists with a higher film thickness can be removed, but the corners of the color resists with a lower film thickness cannot be removed. Therefore, the film thickness height difference among the color resists will cause the problem that the color resist film surface of the color filter cannot be completely flattened.

二、制作色阻之后,彩色滤光片的上表面会形成一层导电层(ITO)。如此一来,当彩色滤光片与薄膜晶体管阵列基板对组的时候,才会有通电的功能。2. After the color resistance is made, a conductive layer (ITO) will be formed on the upper surface of the color filter. In this way, when the color filter is paired with the thin film transistor array substrate, it will have the function of electrification.

但是,由于各色色阻间具有膜厚高度的差异,会产生导电层不连续的状况。如图1B所示,由于蓝色(B)色阻14的膜厚高度较高,所以在镀上导电层16的过程中,有一侧边无法镀到导电层16。However, due to the difference in film thickness and height among the color resists, the conductive layer will be discontinuous. As shown in FIG. 1B , due to the high film thickness of the blue (B) color resist 14 , during the process of plating the conductive layer 16 , one side cannot be plated to the conductive layer 16 .

三、在cell工艺中,会在彩色滤光片上涂布(coating)一层配向膜层(如:PI),接着以磨刷(rubbing)的方式进行配向动作,使得液晶分子可朝预定方向倾斜排列。3. In the cell process, a layer of alignment film (such as: PI) will be coated on the color filter, and then the alignment action will be carried out by rubbing, so that the liquid crystal molecules can face the predetermined direction Slanted arrangement.

但是,由于各色色阻间具有膜厚高度的差异,将使得配向膜层上的配向不连续,而导致液晶无法顺利倾斜转动。However, due to the difference in film thickness and height among the color resists, the alignment on the alignment film layer will be discontinuous, resulting in the inability of the liquid crystal to tilt and rotate smoothly.

因此,鉴于上述现有技术中所仍然不足之处,对此提供一实际有效的解决方案,为当前技术所必需。Therefore, in view of the above-mentioned deficiencies in the prior art, it is necessary to provide a practical and effective solution to this problem.

发明内容 Contents of the invention

本发明的一目的在于改善阵列基板上各色阻间膜厚高度不均的问题,以使得所有色阻的膜面经过研磨(Polish)程序后,得以全面的平坦化。An object of the present invention is to solve the problem of uneven film thickness among color resists on the array substrate, so that the film surfaces of all color resists can be completely planarized after polishing.

本发明的另一目的在于改善阵列基板上各色阻间的膜厚断差,使得各色阻的膜厚高度一致,以避免产生导电层不连续的问题。Another object of the present invention is to improve the film thickness gap between the color resists on the array substrate, so that the film thicknesses of the color resists are at the same height, so as to avoid the problem of discontinuity of the conductive layer.

本发明的另一目的在于改善阵列基板上各色阻间的膜厚断差,使得各色阻的膜厚高度一致,以避免配向膜层配向不连续的问题发生。Another object of the present invention is to improve the film thickness gap among the color resists on the array substrate, so that the film thicknesses of the color resists are highly consistent, so as to avoid the problem of discontinuous alignment of the alignment film layer.

本发明的另一目的在于改善阵列基板上各色阻间的膜厚断差,使得各色阻的膜厚高度一致,以提升液晶显示面板的工艺良率。Another object of the present invention is to improve the film thickness gap among the color resists on the array substrate, so that the film thicknesses of the color resists are at the same height, so as to improve the process yield of the liquid crystal display panel.

本发明提供一种阵列基板,此阵列基板的结构包括一基底、一黑色矩阵及多个色阻。黑色矩阵,形成于基底上,由多个区块组成,且部分区块的两端具有不同的厚度。多个色阻,设置于基底上,且每一色阻形成于两相邻的区块间,并分别覆盖上述两相邻区块的至少一端。其中,每一区块的两端分别被不同的色阻所覆盖。The invention provides an array substrate. The structure of the array substrate includes a base, a black matrix and a plurality of color resists. The black matrix is formed on the base and is composed of multiple blocks, and two ends of some blocks have different thicknesses. A plurality of color resists are arranged on the base, and each color resist is formed between two adjacent blocks and covers at least one end of the two adjacent blocks respectively. Wherein, the two ends of each block are respectively covered by different color resists.

本发明提供一种液晶显示面板,包含上述阵列基板、一对向基板以及一液晶层位于该阵列基板以及该对向基板之间。The present invention provides a liquid crystal display panel, comprising the above-mentioned array substrate, an opposite substrate, and a liquid crystal layer located between the array substrate and the opposite substrate.

本发明提供一种阵列基板的制造方法,步骤如下所述:提供一基底。形成一黑色矩阵于基底上表面,黑色矩阵由多个区块组成,其中,部分区块的两端具有不同的厚度。形成多个色阻于基底上,每一色阻形成于两相邻的区块间,且分别覆盖上述两相邻区块的至少一端,其中每一区块的两端分别被不同的色阻所覆盖。The invention provides a manufacturing method of an array substrate, the steps are as follows: a base is provided. A black matrix is formed on the upper surface of the base, and the black matrix is composed of multiple blocks, wherein two ends of some blocks have different thicknesses. forming a plurality of color resistors on the substrate, each color resistor is formed between two adjacent blocks, and covers at least one end of the two adjacent blocks, wherein the two ends of each block are respectively covered by different color resistors cover.

关于本发明的优点与精神,以及更详细的实施方式可以通过以下的实施方式以及附图得到进一步的了解。The advantages and spirit of the present invention, as well as more detailed implementations, can be further understood through the following implementations and drawings.

附图说明 Description of drawings

通过以下详细的描述结合附图,将可轻易的了解上述内容及此项发明的诸多优点,其中:Through the following detailed description in conjunction with the accompanying drawings, the above contents and many advantages of this invention can be easily understood, wherein:

图1A为彩色滤光片的俯视图;Figure 1A is a top view of a color filter;

图1B为彩色滤光片的剖面视图;Figure 1B is a cross-sectional view of a color filter;

图2A至图2E为本发明的阵列基板的制造方法示意图;2A to 2E are schematic diagrams of the manufacturing method of the array substrate of the present invention;

图3为本发明液晶显示面板的第一实施例示意图;3 is a schematic diagram of a first embodiment of a liquid crystal display panel of the present invention;

图4为本发明液晶显示面板的第二实施例示意图;4 is a schematic diagram of a second embodiment of a liquid crystal display panel of the present invention;

图5A为本发明阵列基板的第一变化例;FIG. 5A is a first modification example of the array substrate of the present invention;

图5B为本发明阵列基板的第二变化例;FIG. 5B is a second modification example of the array substrate of the present invention;

图5C为本发明阵列基板的第三变化例;FIG. 5C is a third modification example of the array substrate of the present invention;

图5D为本发明阵列基板的第四变化例;5D is a fourth variation example of the array substrate of the present invention;

图5E为本发明阵列基板的第五变化例;FIG. 5E is a fifth variation example of the array substrate of the present invention;

图5F为本发明阵列基板的第六变化例;及FIG. 5F is a sixth variation example of the array substrate of the present invention; and

图5G为本发明阵列基板的第七变化例。FIG. 5G is a seventh modification example of the array substrate of the present invention.

其中附图标记为:Wherein reference sign is:

1:彩色滤光片     10:基底1: Color filter 10: Substrate

11:黑色矩阵      12:区块11: Black Matrix 12: Block

14:色阻          16:导电层14: Color resistance 16: Conductive layer

20:第一基底      22a:材料层20: First substrate 22a: Material layer

22:区块          221:第一次区块22: Block 221: The first block

222:第二次区块   223:第三次区块222: The second block 223: The third block

24:色阻          26:第一导电层24: Color resistance 26: The first conductive layer

27:第一配向膜层  29:调整层27: First alignment film layer 29: Adjustment layer

30:第二基底      32:有源元件阵列30: Second substrate 32: Active element array

36:第二导电层    37:第二配向膜层36: Second conductive layer 37: Second alignment film layer

40:第一基底      42:区块40: First base 42: Block

44:色阻          46:第一导电层44: Color resistance 46: The first conductive layer

47:第一配向膜层  49:平坦层47: First alignment film layer 49: Flat layer

50:对向基板      501:第二基底50: opposite substrate 501: second substrate

502:第二导电层   58:液晶层502: Second conductive layer 58: Liquid crystal layer

具体实施方式 Detailed ways

请参照图2A至图2E,其为本发明的阵列基板的制造方法示意图。请参照图2A,首先提供一第一基底20,并涂布或沉积一材料层22a于第一基底20上方。其中,此材料层22a的材料由Cr、CrO、Ni等金属或金属化合物、树脂、暗色有机材料及颜料(Pigment)所组成的族群中选出,材料层22a的用途是用以遮住不同颜色的部分光线,避免漏光影响色度,进而提高对比度。在较佳实施例中,上述树脂及颜料(Pigment)为黑色较佳。Please refer to FIG. 2A to FIG. 2E , which are schematic diagrams of the manufacturing method of the array substrate of the present invention. Referring to FIG. 2A , firstly, a first substrate 20 is provided, and a material layer 22 a is coated or deposited on the first substrate 20 . Wherein, the material of the material layer 22a is selected from the group consisting of Cr, CrO, Ni and other metals or metal compounds, resins, dark organic materials, and pigments (Pigment). The purpose of the material layer 22a is to cover different colors. part of the light to avoid light leakage affecting the chromaticity, thereby improving the contrast. In a preferred embodiment, the above-mentioned resin and pigment are preferably black.

接着,将材料层22a图案化而形成一矩阵于第一基底20上,在本实施例中,矩阵以黑色矩阵举例表示,此黑色矩阵由多个区块组成,制作过程请参照图2B。如图2B所示,涂布一光刻胶层62于该材料层22a上表面,接着利用一掩模64对材料层22a进行光刻蚀刻程序,以形成多个区块22。Next, the material layer 22a is patterned to form a matrix on the first substrate 20. In this embodiment, the matrix is represented by a black matrix as an example. The black matrix is composed of multiple blocks. Please refer to FIG. 2B for the manufacturing process. As shown in FIG. 2B , a photoresist layer 62 is coated on the upper surface of the material layer 22 a, and then a photolithographic etching process is performed on the material layer 22 a by using a mask 64 to form a plurality of blocks 22 .

其中,此掩模64为半色调掩模(half-tone mask)或多灰阶掩模(multi-tonemask)。由于上述两类掩模具有不同透光率的透光区,使得所蚀刻出来的部分区块的两端具有不同的厚度。Wherein, the mask 64 is a half-tone mask or a multi-tone mask. Since the above two types of masks have light-transmitting regions with different light transmittances, the two ends of the etched partial blocks have different thicknesses.

在一较佳实施例中,掩模64具有第一透光区64a、第二透光区64b及第三透光区64c三种透光区。透光率由小至大依序为第一透光区64a、第二透光区64b及第三透光区64c。曝光显影后第一透光区64a所对应的材料层22a全被蚀刻,第二透光区64b所对应的材料层22a被部分蚀刻,第三透光区64c所对应的材料层22a也被部分蚀刻或不蚀刻,若为部分蚀刻,则被蚀刻程度较轻微。In a preferred embodiment, the mask 64 has three kinds of light-transmitting regions: a first light-transmitting region 64a, a second light-transmitting region 64b and a third light-transmitting region 64c. The order of light transmittance from low to high is the first light transmission area 64a, the second light transmission area 64b and the third light transmission area 64c. After exposure and development, the material layer 22a corresponding to the first light-transmitting region 64a is completely etched, the material layer 22a corresponding to the second light-transmitting region 64b is partially etched, and the material layer 22a corresponding to the third light-transmitting region 64c is also partially etched. Etched or not etched, if partially etched, etched to a lesser degree.

因此,本实施例的区块22具有阶梯(step)状与矩形方块状两种型态,如图2C所示。相邻的第二透光区64b与第三透光区64c所对应形成的区块22的两端具有不同的厚度,且为阶梯状。而两端皆与第一透光区64a相邻的第三透光区64c所对应形成的区块22,则为均一厚度的矩形方块状区块22。Therefore, the blocks 22 in this embodiment have two types: step shape and rectangular block shape, as shown in FIG. 2C . The two ends of the blocks 22 formed correspondingly by the adjacent second transparent region 64 b and the third transparent region 64 c have different thicknesses and are stepped. The block 22 formed corresponding to the third light-transmitting region 64c whose both ends are adjacent to the first light-transmitting region 64a is a rectangular block-shaped block 22 with a uniform thickness.

请参照图2D,形成黑色矩阵之后,接着形成多个色阻24于第一基底20上,上述色阻24包括红色色阻(R)24、绿色色阻(G)24及蓝色色阻(B)24三种色阻,依序形成于第一基底20上。Please refer to FIG. 2D, after forming the black matrix, then form a plurality of color resistances 24 on the first substrate 20, the color resistances 24 include red color resistance (R) 24, green color resistance (G) 24 and blue color resistance (B) ) 24 three color resists are sequentially formed on the first substrate 20 .

每一色阻24形成于两相邻的区块22间,且分别覆盖上述两相邻区块22的至少一端,其中每一区块22的两端分别被不同的色阻24所覆盖。Each color resist 24 is formed between two adjacent blocks 22 and covers at least one end of the two adjacent blocks 22 respectively, wherein two ends of each block 22 are respectively covered by different color resists 24 .

在本发明实施例中,被同一色阻24所覆盖的相邻区块22的两端具有相等的厚度。如图2D所示,红色色阻(R)24、绿色色阻(G)24与蓝色色阻(B)24所覆盖的相邻区块22的两端具有相等的厚度。In the embodiment of the present invention, both ends of adjacent blocks 22 covered by the same color resist 24 have equal thicknesses. As shown in FIG. 2D , the two ends of the adjacent blocks 22 covered by the red color resist (R) 24 , the green color resist (G) 24 and the blue color resist (B) 24 have equal thicknesses.

值得注意的是,若在色度要偏蓝的情况下,及膜厚高度要一致的需求下,蓝色色阻(B)24所覆盖的相邻区块22的两端具有较低的厚度。因此,三种色阻24膜厚高度不但相等,而且形成于阵列基板的蓝色色阻(B)24具有比红色色阻(R)24、绿色色阻(G)24更大的体积,也即此阵列基板所能呈现的色度为偏蓝。It is worth noting that, if the chromaticity is bluish and the thickness of the film should be consistent, the two ends of the adjacent block 22 covered by the blue color resist (B) 24 have a relatively low thickness. Therefore, the film thicknesses of the three kinds of color resistance 24 are not only equal, but also the blue color resistance (B) 24 formed on the array substrate has a larger volume than the red color resistance (R) 24 and the green color resistance (G) 24, that is, The chromaticity that the array substrate can present is bluish.

当然,也可根据色度要偏红或偏绿等其它需求,来调整特定颜色色阻24所覆盖的相邻区块22的两端的厚度大小,以保持三种颜色色阻24的膜厚高度的均等。Of course, the thickness of the two ends of the adjacent blocks 22 covered by the color resistance 24 of a specific color can also be adjusted according to other requirements such as reddish or greenish chromaticity, so as to maintain the film thickness height of the color resistance 24 of the three colors equal.

也就是说,根据色度需求,不同颜色的色阻24具有不同的体积。当所有色阻24的膜厚高度相等时,体积愈大的色阻24所覆盖的相邻区块22的两端具有愈低的膜厚高度。That is to say, color resists 24 of different colors have different volumes according to chromaticity requirements. When the film thicknesses of all the color resists 24 are equal, the two ends of the adjacent blocks 22 covered by the larger color resists 24 have lower film thicknesses.

因此,本发明主要是利用半色调掩模(half-tone mask)或多灰阶掩模(multi-tone mask)制造出膜厚高度不同的区块22,因此控制各色阻24的膜厚高度。Therefore, the present invention mainly utilizes a half-tone mask or a multi-tone mask to manufacture blocks 22 with different film thickness and height, so as to control the film thickness and height of each color resist 24 .

一般来说,本发明实施例中,上述区块22的厚度为1至1.5微米。红色色阻(R)24、绿色色阻(G)24与蓝色色阻(B)24的厚度为1微米至2.5微米。Generally speaking, in the embodiment of the present invention, the thickness of the block 22 is 1 to 1.5 microns. The red color resist (R) 24 , the green color resist (G) 24 and the blue color resist (B) 24 have a thickness of 1 μm to 2.5 μm.

请继续参照图2E,当形成多个色阻24于第一基底20上之后,形成一第一导电层26于区块22及色阻24上,其中上述第一导电层26举例为ITO透明导电层。接着,在cell工艺中,会在第一导电层26上涂布(coating)一层配向膜层,例如PI膜层,并进行后续的配向及组装程序。Please continue to refer to FIG. 2E. After forming a plurality of color resists 24 on the first substrate 20, a first conductive layer 26 is formed on the block 22 and the color resists 24. The first conductive layer 26 is, for example, ITO transparent conductive layer. Next, in the cell process, an alignment film layer, such as a PI film layer, is coated on the first conductive layer 26, and subsequent alignment and assembly procedures are performed.

本发明的阵列基板可为一种彩色滤光片,可应用于色阻形成于有源元件阵列基板的对向基板上,及色阻形成于有源元件阵列上方(color filter on array,COA)两种液晶显示面板型态。The array substrate of the present invention can be a kind of color filter, which can be applied to the color filter formed on the opposite substrate of the active element array substrate, and the color filter formed on the active element array (color filter on array, COA) Two LCD panel types.

请参照图3,图3为色阻形成于有源元件阵列基板的对向基板上的液晶显示面板示意图。此液晶显示面板包括一有源元件阵列基板、一阵列基板以及设置于有源元件阵列基板与阵列基板之间的液晶层38。Please refer to FIG. 3 . FIG. 3 is a schematic diagram of a liquid crystal display panel in which the color resist is formed on the opposite substrate of the active element array substrate. The liquid crystal display panel includes an active element array substrate, an array substrate and a liquid crystal layer 38 disposed between the active element array substrate and the array substrate.

阵列基板,设置于有源元件阵列基板的上方,阵列基板的构造即与前述的构造相同,包括一第一基底20,一黑色矩阵及多个色阻24。The array substrate is arranged above the active element array substrate. The structure of the array substrate is the same as the above-mentioned structure, including a first base 20 , a black matrix and a plurality of color resists 24 .

黑色矩阵形成于第一基底20上,且黑色矩阵由多个区块22组成,其中部分区块22的两端具有不同的厚度。多个色阻24,设置于第一基底20上,且每一色阻24形成于两相邻的区块22间,并分别覆盖上述两相邻区块22的一端,其中每一区块22的两端分别被不同的色阻24所覆盖。此外,阵列基板更包括一第一导电层26及一第一配向膜层27,依序形成于黑色矩阵及色阻24上表面。The black matrix is formed on the first substrate 20, and the black matrix is composed of a plurality of blocks 22, wherein two ends of some blocks 22 have different thicknesses. A plurality of color resistances 24 are arranged on the first substrate 20, and each color resistance 24 is formed between two adjacent blocks 22, and covers one end of the two adjacent blocks 22 respectively, wherein each block 22 The two ends are respectively covered by different color resists 24 . In addition, the array substrate further includes a first conductive layer 26 and a first alignment film layer 27 , which are sequentially formed on the upper surface of the black matrix and the color resist 24 .

有源元件阵列基板包括一第二基底30,一有源元件阵列32,设置于第二基底30上。一第二导电层36及一第二配向膜层37依序形成于有源元件阵列32上。其中,所述有源元件阵列32举例为薄膜晶体管阵列。The active element array substrate includes a second base 30 and an active element array 32 disposed on the second base 30 . A second conductive layer 36 and a second alignment layer 37 are sequentially formed on the active device array 32 . Wherein, the active element array 32 is, for example, a thin film transistor array.

请参照图4,图4为色阻形成于有源元件阵列上方(color filter on array,COA)的液晶显示面板示意图。此液晶显示面板的特征在于,在阵列基板中具有一有源元件阵列形成于基底的上方,且位于色阻与黑色矩阵的下方。Please refer to FIG. 4 . FIG. 4 is a schematic diagram of a liquid crystal display panel in which color resistance is formed on an active element array (color filter on array, COA). The liquid crystal display panel is characterized in that an active element array is formed on the substrate and below the color resist and the black matrix in the array substrate.

如图4所示,此液晶显示面板包括一阵列基板、一对向基板50及一液晶层58。其中,对向基板50与阵列基板对向设置,液晶层58则设置于阵列基板与对向基板50之间。As shown in FIG. 4 , the liquid crystal display panel includes an array substrate, an opposite substrate 50 and a liquid crystal layer 58 . Wherein, the opposite substrate 50 is disposed opposite to the array substrate, and the liquid crystal layer 58 is disposed between the array substrate and the opposite substrate 50 .

阵列基板,包括一第一基底40,一有源元件阵列48、一黑色矩阵及多个色阻44。The array substrate includes a first substrate 40 , an active element array 48 , a black matrix and a plurality of color resists 44 .

有源元件阵列48形成于第一基底40上,有源元件阵列48举例为薄膜晶体管阵列。黑色矩阵形成于第一基底40上,且黑色矩阵由多个区块42组成,其中部分区块42的两端具有不同的厚度,如图4所示。多个色阻44,设置于第一基底40上,且每一色阻44形成于两相邻的区块42间,并分别覆盖上述两相邻区块42的一端,其中每一区块42的两端分别被不同的色阻44所覆盖。此外,阵列基板更包括一第一导电层46与有源元件阵列48连接、一平坦层49形成于黑色矩阵及多个色阻44上,及一第一配向膜层47形成于平坦层49上。The active device array 48 is formed on the first substrate 40, and the active device array 48 is, for example, a thin film transistor array. The black matrix is formed on the first substrate 40, and the black matrix is composed of a plurality of blocks 42, wherein two ends of some blocks 42 have different thicknesses, as shown in FIG. 4 . A plurality of color resistances 44 are arranged on the first substrate 40, and each color resistance 44 is formed between two adjacent blocks 42, and covers one end of the two adjacent blocks 42 respectively, wherein each block 42 The two ends are respectively covered by different color resists 44 . In addition, the array substrate further includes a first conductive layer 46 connected to the active element array 48, a flat layer 49 formed on the black matrix and a plurality of color resists 44, and a first alignment film layer 47 formed on the flat layer 49 .

而对向基板50则包括一第二基底501、以及依序形成于第二基底501上的一第二导电层502及一第二配向膜层503。The opposite substrate 50 includes a second base 501 , and a second conductive layer 502 and a second alignment layer 503 sequentially formed on the second base 501 .

在较佳实施例中,以上所述的第一基底20、40及第二基底30、501皆为透明绝缘基底。第一导电层26、46及第二导电层36、502皆为ITO透明导电层。第一配向膜层27、47及第二配向膜层37、503皆为PI膜层。In a preferred embodiment, the above-mentioned first substrates 20, 40 and second substrates 30, 501 are all transparent insulating substrates. Both the first conductive layers 26, 46 and the second conductive layers 36, 502 are ITO transparent conductive layers. Both the first alignment film layers 27 and 47 and the second alignment film layers 37 and 503 are PI film layers.

在上述实施例中,是利用半色调掩模(half-tone mask)来形成两端膜厚高度不同的阶梯状区块22,以控制色阻24膜厚。然而,也可利用其它技术手段来形成两端膜厚高度不同的区块22。In the above-mentioned embodiments, a half-tone mask is used to form the stepped blocks 22 with different film thicknesses at both ends, so as to control the film thickness of the color resist 24 . However, other technical means may also be used to form the block 22 with different film thicknesses and heights at both ends.

请参照图5A,可利用半色调掩模(half-tone mask)或多灰阶掩模(multi-tonemask)的设计,使部分区块22的一端具有一斜边(bevel edge)。Referring to FIG. 5A, a half-tone mask or a multi-tonemask design can be used to make one end of the partial block 22 have a bevel edge.

请参照图5B,在形成黑色矩阵于第一基底20上表面的过程中,先涂布或沉积一次材料层,并通过第一种掩模进行光刻蚀刻程序,来形成一第一次区块221于第一基底20上表面。接着,再涂布一次材料层,并通过第二种掩模进行光刻蚀刻程序,来形成一第二次区块222于第一次区块221的上表面。Please refer to FIG. 5B, in the process of forming the black matrix on the upper surface of the first substrate 20, first coat or deposit a material layer, and perform a photolithographic etching process through the first mask to form a first block 221 on the upper surface of the first substrate 20 . Next, a material layer is coated again, and a photolithographic etching process is performed through a second mask to form a second sub-block 222 on the upper surface of the first sub-block 221 .

其中,上述第二次区块222的大小是小于第一次区块221的大小,故两端膜厚高度不同的区块22也即由第一次区块221与第二次区块222所组成,在较佳实施例中,此区块22也为阶梯状。而两端膜厚高度均等的区块22则可根据上述两种掩模的透光区设计,选择性地与第一次区块221或第二次区块222一起形成。Wherein, the size of the above-mentioned second sub-block 222 is smaller than the size of the first sub-block 221, so the sub-block 22 with different film thickness and height at both ends is composed of the first sub-block 221 and the second sub-block 222. Composition, in a preferred embodiment, this block 22 is also stepped. The block 22 with equal film thickness and height at both ends can be selectively formed together with the first block 221 or the second block 222 according to the design of the light-transmitting area of the above two masks.

一般来说,上述第一次区块221的厚度为1微米至1.3微米,区块22的厚度为1.1微米至1.5微米。Generally, the thickness of the first block 221 is 1 micron to 1.3 microns, and the thickness of the block 22 is 1.1 micron to 1.5 microns.

请参照图5C,在另一实施例中,两端膜厚高度不同的区块22除了第一次区块221与第二次区块222之外,更可包括一第三次区块223。请同时参照图5B,形成第二次区块222之后,再涂布一次材料层,并通过第三种掩模进行光刻蚀刻程序,来形成第三次区块223于第一次区块221的上表面。Please refer to FIG. 5C , in another embodiment, in addition to the first sub-block 221 and the second sub-block 222 , the block 22 with different film thickness and height at both ends may further include a third sub-block 223 . Please refer to FIG. 5B at the same time. After the second block 222 is formed, a material layer is applied again, and a photolithographic etching process is performed through a third mask to form the third block 223 on the first block 221. of the upper surface.

其中,上述第三次区块223的大小是小于第一次区块221的大小,故两端膜厚高度不同的区块22也即由第一次区块221、第二次区块222及第三次区块223所组成,在较佳实施例中,此区块22也为阶梯状。而两端膜厚高度均等的区块22则可根据上述三种掩模的透光区设计,选择性地与第一次区块221、第二次区块222或第三次区块223一起形成。Wherein, the size of the above-mentioned third block 223 is smaller than the size of the first block 221, so the block 22 with different film thickness and height at both ends is composed of the first block 221, the second block 222 and the second block 221. The third block 223 is formed. In a preferred embodiment, this block 22 is also stepped. The block 22 with equal film thickness and height at both ends can be selectively combined with the first block 221, the second block 222 or the third block 223 according to the light-transmitting area design of the above three masks. form.

两端膜厚高度不同的区块22,除了可以用来降低膜厚高度较高的色阻24高度之外,也可用来增加膜厚高度较低的色阻24高度。请参照图5D,在本实施例中,原本红色色阻(R)24与绿色色阻(G)24的膜厚高度皆高于蓝色色阻(B)24(红色色阻(R)24与绿色色阻(G)24的体积较大)。因此,为使蓝色色阻(B)24的膜厚高度与红色色阻(R)24及绿色色阻(G)24一致,故使蓝色色阻(B)24所覆盖的相邻区块22的两端具有较高的厚度,以提高蓝色色阻(B)24的膜厚高度。The block 22 with different film thickness and height at both ends can not only be used to reduce the height of the color resist 24 with a higher film thickness, but also can be used to increase the height of the color resist 24 with a lower film thickness. Please refer to FIG. 5D, in this embodiment, the film thicknesses of the red color resistance (R) 24 and the green color resistance (G) 24 are higher than the blue color resistance (B) 24 (red color resistance (R) 24 and The green color resist (G)24 has a larger volume). Therefore, in order to make the film thickness height of the blue color resistance (B) 24 consistent with the red color resistance (R) 24 and the green color resistance (G) 24, the adjacent blocks 22 covered by the blue color resistance (B) 24 The two ends of have a higher thickness to increase the film thickness height of the blue color resist (B) 24 .

此实施例中,两端膜厚高度不同的区块22为一种阶梯状区块22,可利用半色调掩模(half-tone mask)来形成。或者,也可依序形成第一次区块221与第二次区块222来形成。In this embodiment, the block 22 with different film thickness and height at both ends is a stepped block 22, which can be formed by using a half-tone mask. Alternatively, the first block 221 and the second block 222 may also be formed sequentially.

使各色阻膜厚高度一致的方法,除了利用两端膜厚高度不同的区块来调整的外,也可搭配使用一调整层29,此调整层29形成于色阻与基底之间,可用来垫高色阻24的膜厚。The method of making the film thickness of each color resist film height consistent, in addition to using the blocks with different film thickness and height at both ends to adjust, can also use an adjustment layer 29. This adjustment layer 29 is formed between the color resist and the substrate, and can be used for The film thickness of the color resist 24 is increased.

请参照图5E至图5G,分别显示了调整层29在阵列基板中的位置型态。Please refer to FIG. 5E to FIG. 5G , which respectively show the position types of the adjustment layer 29 in the array substrate.

请参照图5E,调整层29形成于膜厚高度需增加的色阻24与第一基底20之间,并位于相邻的区块22间。如图所示,原本蓝色色阻(B)24的膜厚高度大于红色色阻(R)24及绿色色阻(G)24的膜厚高度,但在红色色阻(R)24与绿色色阻(G)24下方增加了调整层29之后,便能使所有色阻高度均等,且不影响原本的色度。Referring to FIG. 5E , the adjustment layer 29 is formed between the color resist 24 whose film thickness needs to be increased and the first substrate 20 , and is located between adjacent blocks 22 . As shown in the figure, the film thickness of the blue color resistance (B) 24 is greater than the film thickness of the red color resistance (R) 24 and the green color resistance (G) 24, but in the red color resistance (R) 24 and the green color resistance After the adjustment layer 29 is added under the resistor (G) 24, all the color resistors can be made to have the same height without affecting the original chromaticity.

请参照图5F,调整层29形成于膜厚高度需增加的色阻24与第一基底20之间,且其两端接触到相邻的区块22。如图所示,原本蓝色色阻(B)24的膜厚高度大于红色色阻(R)24及绿色色阻(G)24的膜厚高度,但在红色色阻(R)24与绿色色阻(G)24下方增加了调整层29之后,便能使所有色阻高度均等,且不影响原本的色度。Referring to FIG. 5F , the adjustment layer 29 is formed between the color resist 24 whose film thickness needs to be increased and the first substrate 20 , and its two ends are in contact with the adjacent blocks 22 . As shown in the figure, the film thickness of the blue color resistance (B) 24 is greater than the film thickness of the red color resistance (R) 24 and the green color resistance (G) 24, but in the red color resistance (R) 24 and the green color resistance After the adjustment layer 29 is added under the resistor (G) 24, all the color resistors can be made to have the same height without affecting the original chromaticity.

请参照图5G,调整层29形成于膜厚高度需增加的色阻24与第一基底20之间,且区块22至少有部分覆盖到调整层29,也就是说,部分区块22位于调整层29之上。如图所示,原本蓝色色阻(B)24及绿色色阻(G)24的膜厚高度大于红色色阻(R)24的膜厚高度,但在红色色阻(R)24与其相邻的区块22下方增加了调整层29之后,便能使所有色阻高度均等,且不影响原本的色度。Please refer to FIG. 5G , the adjustment layer 29 is formed between the color resist 24 whose film thickness needs to be increased and the first substrate 20, and the block 22 is at least partially covered to the adjustment layer 29, that is, part of the block 22 is located in the adjustment layer 29. above layer 29. As shown in the figure, originally the film thickness of the blue color resist (B) 24 and the green color resist (G) 24 is greater than the film thickness of the red color resist (R) 24, but the red color resist (R) 24 is adjacent to it After the adjustment layer 29 is added under the block 22, the height of all the color resists can be equalized without affecting the original chromaticity.

值得注意的是,调整层29的材料可为氧化铟锡、氧化铟锌、TiO2、GZO、ZaO或ZNO。在图5E与图5F两实施例中,调整层29与区块22的先后形成顺序并无限制;而在图5F的实施例中,由于部分的区块22位于调整层29上方,故必须先形成调整层29后,才接着形成区块22。It should be noted that the material of the adjustment layer 29 can be ITO, IZO, TiO 2 , GZO, ZaO or ZNO. In the two embodiments of FIG. 5E and FIG. 5F , there is no restriction on the order in which the adjustment layer 29 and the block 22 are formed; and in the embodiment of FIG. 5F , since part of the block 22 is located above the adjustment layer 29, it must After the adjustment layer 29 is formed, the block 22 is then formed.

综上所述,本发明的技术手段可有效地调整阵列基板上各色阻的膜厚高度,故具有下列优点:To sum up, the technical means of the present invention can effectively adjust the film thickness and height of each color resist on the array substrate, so it has the following advantages:

一、改善阵列基板上各色阻间膜厚高度不均的问题,以使得所有色阻的膜面经过研磨(Polish)程序后,得以全面的平坦化。1. Improve the problem of uneven film thickness among the various color resists on the array substrate, so that the film surfaces of all color resists can be completely planarized after the polishing process.

二、改善阵列基板上各色阻间的膜厚断差,使得各色阻的膜厚高度一致,以避免产生导电层不连续的问题。2. To improve the film thickness gap among the color resists on the array substrate, so that the film thicknesses of the color resists are at the same height, so as to avoid the problem of discontinuity of the conductive layer.

三、改善阵列基板上各色阻间的膜厚断差,使得各色阻的膜厚高度一致,以避免配向膜层配向不连续的问题发生。3. Improve the film thickness gap between the color resists on the array substrate, so that the film thicknesses of the color resists are at the same height, so as to avoid the problem of discontinuous alignment of the alignment film layer.

四、于改善阵列基板上各色阻间的膜厚断差,使得各色阻的膜厚高度一致,以提升液晶显示面板的工艺良率。4. To improve the film thickness gap between the color resists on the array substrate, so that the film thicknesses of the color resists are consistent in height, so as to improve the process yield of the liquid crystal display panel.

本发明虽以较佳实例阐明如上,然其并非用以限定本发明精神与发明实体仅止于上述实施例。对于本领域普通技术人员,当可轻易了解并利用其它元件或方式来产生相同的功效。是以,在不脱离本发明的精神与范围内所作的修改,均应包含在下述的权利要求书范围内。Although the present invention has been described above with preferred examples, it is not intended to limit the spirit and entities of the present invention to the above-mentioned examples. Those of ordinary skill in the art can easily understand and utilize other elements or methods to produce the same effect. Therefore, modifications made without departing from the spirit and scope of the present invention should be included in the scope of the following claims.

Claims (22)

1、一种阵列基板,包括:1. An array substrate, comprising: 一基底;a base; 一用于避免漏光影响色度的矩阵,形成于该基底上,该矩阵由多个区块组成,且部分该区块的两端具有不同的厚度;以及A matrix for preventing light leakage from affecting chromaticity is formed on the substrate, the matrix is composed of a plurality of blocks, and two ends of some of the blocks have different thicknesses; and 多个色阻,设置于该基底上,且每一该色阻形成于两相邻的该区块间,并分别覆盖上述两相邻该区块的至少一端。A plurality of color resists are arranged on the base, and each of the color resists is formed between two adjacent blocks and covers at least one end of the two adjacent blocks respectively. 2、根据权利要求1所述的阵列基板,其特征在于,更包括一有源元件阵列形成于该基底上。2. The array substrate according to claim 1, further comprising an array of active elements formed on the substrate. 3、根据权利要求1所述的阵列基板,其特征在于,被同一该色阻所覆盖的相邻该区块的两该端具有相等的厚度。3. The array substrate according to claim 1, wherein the two ends of the adjacent blocks covered by the same color resist have equal thicknesses. 4、根据权利要求1所述的阵列基板,其特征在于,至少上述部分该区块为阶梯状或具有斜边。4. The array substrate according to claim 1, wherein at least part of the blocks are stepped or have beveled sides. 5、根据权利要求1所述的阵列基板,其特征在于,上述部分该区块的厚度为1至1.5微米。5. The array substrate according to claim 1, wherein the thickness of said part of the block is 1 to 1.5 microns. 6、根据权利要求1所述的阵列基板,其特征在于,更包含一导电层,形成于该矩阵及该多个色阻上。6. The array substrate according to claim 1, further comprising a conductive layer formed on the matrix and the plurality of color resists. 7、根据权利要求1所述的阵列基板,其特征在于,该多个色阻包括一红色色阻、一绿色色阻以及一蓝色色阻。7. The array substrate according to claim 1, wherein the plurality of color-resistors comprise a red color-resist, a green color-resist and a blue color-resist. 8、根据权利要求7所述的阵列基板,其特征在于,该红色色阻、该绿色色阻以及该蓝色色阻中的至少一个的厚度为1至2.5微米。8. The array substrate according to claim 7, wherein at least one of the red color resist, the green color resist and the blue color resist has a thickness of 1 to 2.5 micrometers. 9、根据权利要求1所述的阵列基板,其特征在于,更包含一调整层,位于该色阻以及该基底之间。9. The array substrate according to claim 1, further comprising an adjustment layer located between the color resist and the substrate. 10、根据权利要求9所述的阵列基板,其特征在于,该调整层的材料包含氧化铟锡、氧化铟锌、TiO2、GZO、ZaO、ZNO或上述组合。10. The array substrate according to claim 9, wherein the material of the adjustment layer comprises indium tin oxide, indium zinc oxide, TiO 2 , GZO, ZaO, ZNO or a combination thereof. 11、一种阵列基板的制造方法,包括:11. A method for manufacturing an array substrate, comprising: 提供一基底;provide a base; 形成一用于避免漏光影响色度的矩阵于该基底上表面,该矩阵由多个区块组成,其中至少部分该区块的两端具有不同的厚度;以及forming a matrix on the upper surface of the substrate for preventing light leakage from affecting chromaticity, the matrix is composed of a plurality of blocks, wherein at least some of the blocks have different thicknesses at both ends; and 形成多个色阻于该基底上,每一该色阻形成于两相邻的该区块间,且分别覆盖上述两相邻该区块的至少一端。A plurality of color resists are formed on the substrate, each of the color resists is formed between two adjacent blocks, and covers at least one end of the two adjacent blocks respectively. 12、根据权利要求11所述的阵列基板的制造方法,其特征在于,上述形成该矩阵于该基底上表面的步骤,包括下列步骤:12. The method for manufacturing an array substrate according to claim 11, wherein the step of forming the matrix on the upper surface of the substrate comprises the following steps: 涂布一材料层于该基底上;coating a layer of material on the substrate; 涂布一光刻胶层于该材料层上表面;及coating a photoresist layer on the upper surface of the material layer; and 使用一掩模对该材料层进行光刻蚀刻程序,而形成该多个区块。A photolithographic etching process is performed on the material layer using a mask to form the plurality of blocks. 13、根据权利要求12所述的阵列基板的制造方法,其特征在于,上述掩模为一半色调掩模,使部分该区块的两端具有不同的厚度。13. The method for manufacturing an array substrate according to claim 12, wherein the mask is a half-tone mask, so that two ends of some of the blocks have different thicknesses. 14、根据权利要求12所述的阵列基板的制造方法,其特征在于,上述的该掩模为一多灰阶掩模,使部分该区块的两端具有不同的厚度。14 . The method for manufacturing an array substrate according to claim 12 , wherein the above-mentioned mask is a multi-gray scale mask, so that two ends of some of the blocks have different thicknesses. 15、根据权利要求11所述的阵列基板的制造方法,其特征在于,上述形成该矩阵于该基底上表面的步骤,包括下列步骤:15. The method for manufacturing an array substrate according to claim 11, wherein the step of forming the matrix on the upper surface of the substrate comprises the following steps: 形成一第一次区块于该基底上表面;及forming a first zone on the upper surface of the substrate; and 形成一第二次区块于该第一次区块的上表面,其中上述该区块由该第一次区块与该第二次区块所组成。A second block is formed on the upper surface of the first block, wherein the block is composed of the first block and the second block. 16、根据权利要求15所述的阵列基板的制造方法,其特征在于,该第一次区块的厚度为1至1.3微米。16. The method for manufacturing an array substrate according to claim 15, wherein the thickness of the first block is 1 to 1.3 microns. 17、根据权利要求15所述的阵列基板的制造方法,其特征在于,该区块的厚度为1.1至1.5微米。17. The method for manufacturing an array substrate according to claim 15, wherein the thickness of the block is 1.1 to 1.5 microns. 18、根据权利要求15所述的阵列基板的制造方法,其特征在于,上述该第二次区块的大小是小于该第一次区块的大小。18. The method for manufacturing an array substrate according to claim 15, wherein the size of the second sub-block is smaller than the size of the first sub-block. 19、根据权利要求15所述的阵列基板的制造方法,其特征在于,上述形成该第二次区块的步骤后,更包括形成一第三次区块于该第一次区块的上表面,其中上述该区块由该第一次区块、该第二次区块及该第三次区块所组成。19. The method for manufacturing an array substrate according to claim 15, further comprising forming a third sub-block on the upper surface of the first sub-block after the step of forming the second sub-block , wherein the aforementioned block is composed of the first block, the second block and the third block. 20、根据权利要求11所述的阵列基板的制造方法,其特征在于,该矩阵的材料由Cr、CrO、Ni、暗色有机材料、树脂及颜料所组成的族群中选出。20. The method for manufacturing an array substrate according to claim 11, wherein the material of the matrix is selected from the group consisting of Cr, CrO, Ni, dark organic materials, resins and pigments. 21、根据权利要求11所述的阵列基板的制造方法,其特征在于,上述形成多个色阻于该基底上的步骤后,更包括形成一导电层于该矩阵及该多个色阻上。21. The method for manufacturing an array substrate according to claim 11, further comprising forming a conductive layer on the matrix and the plurality of color resists after the step of forming a plurality of color resists on the substrate. 22、根据权利要求21所述的阵列基板的制造方法,其特征在于,上述形成该导电层的步骤后,更包括形成一配向膜层于该导电层上。22. The method for manufacturing an array substrate according to claim 21, further comprising forming an alignment film layer on the conductive layer after the step of forming the conductive layer.
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