ATE308495T1 - Verfahren zur herstellung von octafluorocyclobutan - Google Patents
Verfahren zur herstellung von octafluorocyclobutanInfo
- Publication number
- ATE308495T1 ATE308495T1 AT02729558T AT02729558T ATE308495T1 AT E308495 T1 ATE308495 T1 AT E308495T1 AT 02729558 T AT02729558 T AT 02729558T AT 02729558 T AT02729558 T AT 02729558T AT E308495 T1 ATE308495 T1 AT E308495T1
- Authority
- AT
- Austria
- Prior art keywords
- octafluorocyclobutane
- impurities
- present
- crude
- purification process
- Prior art date
Links
- 239000004341 Octafluorocyclobutane Substances 0.000 title abstract 7
- BCCOBQSFUDVTJQ-UHFFFAOYSA-N octafluorocyclobutane Chemical compound FC1(F)C(F)(F)C(F)(F)C1(F)F BCCOBQSFUDVTJQ-UHFFFAOYSA-N 0.000 title abstract 7
- 235000019407 octafluorocyclobutane Nutrition 0.000 title abstract 7
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 239000012535 impurity Substances 0.000 abstract 5
- 238000000746 purification Methods 0.000 abstract 2
- 239000003463 adsorbent Substances 0.000 abstract 1
- 239000003795 chemical substances by application Substances 0.000 abstract 1
- 238000004140 cleaning Methods 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 238000002360 preparation method Methods 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C17/00—Preparation of halogenated hydrocarbons
- C07C17/38—Separation; Purification; Stabilisation; Use of additives
- C07C17/395—Separation; Purification; Stabilisation; Use of additives by treatment giving rise to a chemical modification of at least one compound
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C23/00—Compounds containing at least one halogen atom bound to a ring other than a six-membered aromatic ring
- C07C23/02—Monocyclic halogenated hydrocarbons
- C07C23/06—Monocyclic halogenated hydrocarbons with a four-membered ring
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C17/00—Preparation of halogenated hydrocarbons
- C07C17/26—Preparation of halogenated hydrocarbons by reactions involving an increase in the number of carbon atoms in the skeleton
- C07C17/263—Preparation of halogenated hydrocarbons by reactions involving an increase in the number of carbon atoms in the skeleton by condensation reactions
- C07C17/269—Preparation of halogenated hydrocarbons by reactions involving an increase in the number of carbon atoms in the skeleton by condensation reactions of only halogenated hydrocarbons
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C17/00—Preparation of halogenated hydrocarbons
- C07C17/38—Separation; Purification; Stabilisation; Use of additives
- C07C17/389—Separation; Purification; Stabilisation; Use of additives by adsorption on solids
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001006459A JP4767423B2 (ja) | 2001-01-15 | 2001-01-15 | オクタフルオロシクロブタンの精製方法および製造方法並びにその用途 |
| US26432201P | 2001-01-29 | 2001-01-29 | |
| PCT/JP2002/000148 WO2002055458A2 (en) | 2001-01-15 | 2002-01-11 | Process for purifying octafluorocyclobutane, process for preparing the same, and use thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE308495T1 true ATE308495T1 (de) | 2005-11-15 |
Family
ID=26607698
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT02729558T ATE308495T1 (de) | 2001-01-15 | 2002-01-11 | Verfahren zur herstellung von octafluorocyclobutan |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US6815568B2 (de) |
| EP (1) | EP1307416B1 (de) |
| KR (1) | KR100516574B1 (de) |
| CN (1) | CN1276902C (de) |
| AT (1) | ATE308495T1 (de) |
| DE (1) | DE60207031T2 (de) |
| RU (1) | RU2245316C2 (de) |
| WO (1) | WO2002055458A2 (de) |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI288025B (en) * | 2000-09-14 | 2007-10-11 | Showa Denko Kk | Adsorbent for purifying perfluorocarbon, process for producing same, high purity octafluoropropane and octafluorocyclobutane, and use thereof |
| AU2003246253B8 (en) * | 2002-07-30 | 2010-01-07 | Honda Giken Kogyo Kabushiki Kaisha | Activated carbon, method for production thereof, polarized electrode and electrical double layer capacitor |
| CN104529691B (zh) * | 2014-12-30 | 2016-05-04 | 中国船舶重工集团公司第七一八研究所 | 一种全氟烷烃中杂质的催化转化方法 |
| CN105777483A (zh) * | 2016-01-28 | 2016-07-20 | 广东华特气体股份有限公司 | 一种高纯度八氟环丁烷的纯化方法及系统 |
| CN106345264B (zh) * | 2016-07-19 | 2018-10-30 | 浙江博瑞电子科技有限公司 | 一种使用杂质分解剂的有机氟气体的提纯方法 |
| CN106215852B (zh) * | 2016-07-19 | 2019-10-22 | 浙江博瑞电子科技有限公司 | 一种含氟有机气体纯化的方法 |
| CN107694509B (zh) * | 2017-10-24 | 2020-09-04 | 苏州金宏气体股份有限公司 | 一种去除八氟环丁烷中的六氟丙烯的吸附剂及其制备方法 |
| WO2020235425A1 (ja) * | 2019-05-20 | 2020-11-26 | 日本ゼオン株式会社 | 全水素原子がフッ素原子又は塩素原子で置換されている二重結合を有する直鎖炭化水素の分離方法 |
| CN110845299A (zh) * | 2019-10-05 | 2020-02-28 | 泰兴梅兰新材料有限公司 | 一种脱除八氟环丁烷中全氟烯烃的方法 |
| CN111004088A (zh) * | 2019-11-29 | 2020-04-14 | 中船重工（邯郸）派瑞特种气体有限公司 | 一种纯化八氟环丁烷气体的方法和装置 |
| US11274069B2 (en) | 2020-08-13 | 2022-03-15 | L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude | Mono-substituted cyclopentadienes and metal cyclopentadienyl complexes and synthesis methods thereof |
| US12083493B2 (en) | 2021-03-04 | 2024-09-10 | American Air Liquide, Inc. | Selective adsorption of halocarbon impurities containing cl, br and i in fluorocarbons or hydrofluorocarbons using adsorbent supported metal oxide |
| CN113406250B (zh) * | 2021-06-21 | 2023-01-31 | 北京卫星环境工程研究所 | 一种检测八氟异丁烯微泄漏装置及其检测泄漏量的方法 |
| CN113754513A (zh) * | 2021-08-25 | 2021-12-07 | 泰兴梅兰新材料有限公司 | 一种去除八氟环丁烷中少量含氟烯烃的方法及其去除装置 |
| CN113717028A (zh) * | 2021-09-06 | 2021-11-30 | 苏州金宏气体股份有限公司 | 脱除八氟环丁烷中氟碳烯烃的方法 |
| CN113717027A (zh) * | 2021-09-06 | 2021-11-30 | 苏州金宏气体股份有限公司 | 八氟环丁烷的提纯方法 |
| KR102616155B1 (ko) | 2022-03-14 | 2023-12-20 | (주)원익머트리얼즈 | 옥타플루오로시클로부탄(c4f8)의 정제방법 |
| CN114935629B (zh) * | 2022-05-18 | 2022-12-20 | 福建德尔科技股份有限公司 | 电子级八氟环丁烷的分析方法 |
| KR102612966B1 (ko) | 2022-07-04 | 2023-12-15 | (주)원익머트리얼즈 | 신규의 옥타플루오로시클로부탄(c4f8) 정제방법 |
| CN115043702B (zh) * | 2022-07-26 | 2023-12-22 | 浙江人行道化工有限公司 | 八氟环丁烷及其提纯方法 |
| KR20250015017A (ko) | 2023-07-24 | 2025-02-03 | (주)원익머트리얼즈 | 디보란 정제방법 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2384449A (en) | 1943-09-03 | 1945-09-11 | Kinetic Chemicals Inc | Separating fluorine compounds |
| US2384821A (en) * | 1944-05-11 | 1945-09-18 | Kinetic Chemicals Inc | Octafluorocyclobutane and pyrolytic process for its production |
| US3696156A (en) * | 1970-04-03 | 1972-10-03 | Du Pont | Process for purification of fluoroperhalocarbons |
| JPS58214149A (ja) | 1982-06-07 | 1983-12-13 | Hitachi Ltd | 微細パタ−ン形成方法 |
| DE68916756D1 (de) | 1988-11-22 | 1994-08-18 | Du Pont | Verfahren zur Reinigung von gesättigten Halokohlenwasserstoffen. |
| JPH0482847A (ja) | 1990-07-20 | 1992-03-16 | Mitsubishi Cable Ind Ltd | パーフルオロカーボンの精製方法 |
| US5904862A (en) | 1996-06-26 | 1999-05-18 | Lam Research Corporation | Methods for etching borophosphosilicate glass |
| JPH10182516A (ja) | 1996-12-25 | 1998-07-07 | Daikin Ind Ltd | オクタフルオロシクロブタンの精製方法 |
| US5811357A (en) | 1997-03-26 | 1998-09-22 | International Business Machines Corporation | Process of etching an oxide layer |
| US5904566A (en) | 1997-06-09 | 1999-05-18 | Taiwan Semiconductor Manufacturing Company, Ltd. | Reactive ion etch method for forming vias through nitrogenated silicon oxide layers |
| US6329292B1 (en) | 1998-07-09 | 2001-12-11 | Applied Materials, Inc. | Integrated self aligned contact etch |
| US6333440B1 (en) * | 2000-04-07 | 2001-12-25 | E. I. Du Pont De Nemours And Company | Process for perfluorocyclobutane purification |
| TWI288025B (en) * | 2000-09-14 | 2007-10-11 | Showa Denko Kk | Adsorbent for purifying perfluorocarbon, process for producing same, high purity octafluoropropane and octafluorocyclobutane, and use thereof |
-
2002
- 2002-01-11 AT AT02729558T patent/ATE308495T1/de not_active IP Right Cessation
- 2002-01-11 KR KR10-2002-7012067A patent/KR100516574B1/ko not_active IP Right Cessation
- 2002-01-11 US US10/221,443 patent/US6815568B2/en not_active Expired - Fee Related
- 2002-01-11 WO PCT/JP2002/000148 patent/WO2002055458A2/en active IP Right Grant
- 2002-01-11 DE DE60207031T patent/DE60207031T2/de not_active Expired - Lifetime
- 2002-01-11 CN CNB028000811A patent/CN1276902C/zh not_active Expired - Fee Related
- 2002-01-11 RU RU2002127779/04A patent/RU2245316C2/ru not_active IP Right Cessation
- 2002-01-11 EP EP02729558A patent/EP1307416B1/de not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| EP1307416B1 (de) | 2005-11-02 |
| RU2002127779A (ru) | 2004-02-20 |
| KR100516574B1 (ko) | 2005-09-22 |
| WO2002055458A2 (en) | 2002-07-18 |
| KR20020082875A (ko) | 2002-10-31 |
| CN1503770A (zh) | 2004-06-09 |
| CN1276902C (zh) | 2006-09-27 |
| DE60207031D1 (de) | 2005-12-08 |
| DE60207031T2 (de) | 2006-07-27 |
| RU2245316C2 (ru) | 2005-01-27 |
| US20030132099A1 (en) | 2003-07-17 |
| WO2002055458A3 (en) | 2003-02-20 |
| US6815568B2 (en) | 2004-11-09 |
| EP1307416A2 (de) | 2003-05-07 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |