TWI828702B - 樹脂模製裝置及樹脂模製方法 - Google Patents
樹脂模製裝置及樹脂模製方法 Download PDFInfo
- Publication number
- TWI828702B TWI828702B TW108120048A TW108120048A TWI828702B TW I828702 B TWI828702 B TW I828702B TW 108120048 A TW108120048 A TW 108120048A TW 108120048 A TW108120048 A TW 108120048A TW I828702 B TWI828702 B TW I828702B
- Authority
- TW
- Taiwan
- Prior art keywords
- workpiece
- resin
- mold
- molding
- holding part
- Prior art date
Links
- 238000000465 moulding Methods 0.000 title claims abstract description 208
- 229920005989 resin Polymers 0.000 title claims description 282
- 239000011347 resin Substances 0.000 title claims description 282
- 238000000034 method Methods 0.000 title claims description 10
- 230000007246 mechanism Effects 0.000 claims abstract description 17
- 230000002093 peripheral effect Effects 0.000 claims description 23
- 238000001179 sorption measurement Methods 0.000 claims description 11
- 210000000078 claw Anatomy 0.000 claims description 10
- 230000009021 linear effect Effects 0.000 claims description 6
- 230000009471 action Effects 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims description 5
- 239000007787 solid Substances 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 2
- 230000008569 process Effects 0.000 claims description 2
- 238000009423 ventilation Methods 0.000 description 29
- 235000012431 wafers Nutrition 0.000 description 21
- 239000004065 semiconductor Substances 0.000 description 12
- 239000000758 substrate Substances 0.000 description 9
- 230000000903 blocking effect Effects 0.000 description 8
- 238000005381 potential energy Methods 0.000 description 8
- 238000001721 transfer moulding Methods 0.000 description 8
- 238000000748 compression moulding Methods 0.000 description 7
- 238000004140 cleaning Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000003860 storage Methods 0.000 description 4
- 238000013459 approach Methods 0.000 description 3
- 230000006837 decompression Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 1
- 229920001328 Polyvinylidene chloride Polymers 0.000 description 1
- 208000027418 Wounds and injury Diseases 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 229920000840 ethylene tetrafluoroethylene copolymer Polymers 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 208000014674 injury Diseases 0.000 description 1
- 230000009191 jumping Effects 0.000 description 1
- 229920009441 perflouroethylene propylene Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- -1 polypropylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000005033 polyvinylidene chloride Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000002893 slag Substances 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/14—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
- B29C45/14008—Inserting articles into the mould
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C31/00—Handling, e.g. feeding of the material to be shaped, storage of plastics material before moulding; Automation, i.e. automated handling lines in plastics processing plants, e.g. using manipulators or robots
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/20—Opening, closing or clamping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/50—Removing moulded articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/02—Transfer moulding, i.e. transferring the required volume of moulding material by a plunger from a "shot" cavity into a mould cavity
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/14—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
- B29C45/14065—Positioning or centering articles in the mould
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/17—Component parts, details or accessories; Auxiliary operations
- B29C45/26—Moulds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/17—Component parts, details or accessories; Auxiliary operations
- B29C45/26—Moulds
- B29C45/34—Moulds having venting means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/36—Moulds for making articles of definite length, i.e. discrete articles
- B29C2043/3602—Moulds for making articles of definite length, i.e. discrete articles with means for positioning, fastening or clamping the material to be formed or preforms inside the mould
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/14—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
- B29C45/14065—Positioning or centering articles in the mould
- B29C2045/14155—Positioning or centering articles in the mould using vacuum or suction
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Injection Moulding Of Plastics Or The Like (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018-151906 | 2018-08-10 | ||
JP2018151906A JP7068094B2 (ja) | 2018-08-10 | 2018-08-10 | ワーク搬送装置、樹脂搬送装置及び樹脂モールド方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW202012138A TW202012138A (zh) | 2020-04-01 |
TWI828702B true TWI828702B (zh) | 2024-01-11 |
Family
ID=69547792
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW108120048A TWI828702B (zh) | 2018-08-10 | 2019-06-11 | 樹脂模製裝置及樹脂模製方法 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP7068094B2 (ja) |
KR (1) | KR102706847B1 (ja) |
CN (1) | CN110815707B (ja) |
TW (1) | TWI828702B (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7430125B2 (ja) * | 2020-08-28 | 2024-02-09 | Towa株式会社 | 成形型、樹脂成形装置、及び樹脂成形品の製造方法 |
JP7341105B2 (ja) * | 2020-08-28 | 2023-09-08 | Towa株式会社 | 樹脂成形装置、及び樹脂成形品の製造方法 |
JP7341106B2 (ja) * | 2020-08-28 | 2023-09-08 | Towa株式会社 | 樹脂成形装置、及び樹脂成形品の製造方法 |
JP7444452B2 (ja) | 2020-10-26 | 2024-03-06 | アピックヤマダ株式会社 | 樹脂封止装置及びワーク搬送方法 |
JP7394798B2 (ja) | 2021-02-09 | 2023-12-08 | Towa株式会社 | 搬送機構、樹脂成形装置及び樹脂成形品の製造方法 |
CN113977820B (zh) * | 2021-11-04 | 2023-06-23 | 株洲时代瑞唯减振装备有限公司 | 一种硫化机模具的开合模方法和便于脱模的硫化机模具 |
JP7579829B2 (ja) * | 2022-07-20 | 2024-11-08 | Towa株式会社 | 樹脂成形装置、及び樹脂成形品の製造方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5987737A (en) * | 1995-07-25 | 1999-11-23 | Mitsubishi Denki Kabushiki Kaisha | Gate break device and gate break method |
CN101167172A (zh) * | 2005-04-29 | 2008-04-23 | 飞科公司 | 用于提供和卸除具有电子元件的承载器的方法和设备 |
CN104576475A (zh) * | 2013-10-17 | 2015-04-29 | 东和株式会社 | 半导体基板供给方法及半导体基板供给装置 |
TW201801882A (zh) * | 2016-04-28 | 2018-01-16 | Towa股份有限公司 | 樹脂密封裝置及樹脂密封方法 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06830A (ja) * | 1992-06-22 | 1994-01-11 | Toshiba Corp | モールドシステム |
JP3473149B2 (ja) * | 1995-02-16 | 2003-12-02 | 三菱化学株式会社 | 樹脂製ディスク基板の製造方法 |
JP3642637B2 (ja) * | 1996-08-20 | 2005-04-27 | アピックヤマダ株式会社 | 樹脂モールド装置 |
JP3517770B2 (ja) * | 1997-09-11 | 2004-04-12 | 株式会社名機製作所 | ディスク成形方法 |
JP3825161B2 (ja) * | 1997-12-02 | 2006-09-20 | 株式会社サイネックス | 半導体モールド装置 |
JP3609824B1 (ja) * | 2003-10-30 | 2005-01-12 | 第一精工株式会社 | 樹脂封止成形装置 |
JP2011116063A (ja) * | 2009-12-04 | 2011-06-16 | Nippon Densan Corp | 樹脂成型品の製造方法および装置並びにターンテーブルの製造方法 |
JP6058431B2 (ja) * | 2013-03-08 | 2017-01-11 | アピックヤマダ株式会社 | 樹脂モールド装置、および樹脂モールド方法 |
SG11201508166RA (en) * | 2013-05-29 | 2015-12-30 | Apic Yamada Corp | Resin molding apparatus and resin molding method |
JP6062810B2 (ja) * | 2013-06-14 | 2017-01-18 | アピックヤマダ株式会社 | 樹脂モールド金型及び樹脂モールド装置 |
JP6151610B2 (ja) | 2013-09-06 | 2017-06-21 | アピックヤマダ株式会社 | モールド金型及び樹脂モールド装置並びに樹脂モールド方法 |
JP5947331B2 (ja) * | 2014-04-30 | 2016-07-06 | エムテックスマツムラ株式会社 | 樹脂成形装置およびそれを用いたチップオンテープ型半導体装置の製造装置 |
JP6744780B2 (ja) * | 2016-08-09 | 2020-08-19 | アピックヤマダ株式会社 | 樹脂モールド装置 |
-
2018
- 2018-08-10 JP JP2018151906A patent/JP7068094B2/ja active Active
-
2019
- 2019-06-11 TW TW108120048A patent/TWI828702B/zh active
- 2019-08-08 KR KR1020190096567A patent/KR102706847B1/ko active Active
- 2019-08-09 CN CN201910734984.9A patent/CN110815707B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5987737A (en) * | 1995-07-25 | 1999-11-23 | Mitsubishi Denki Kabushiki Kaisha | Gate break device and gate break method |
CN101167172A (zh) * | 2005-04-29 | 2008-04-23 | 飞科公司 | 用于提供和卸除具有电子元件的承载器的方法和设备 |
CN104576475A (zh) * | 2013-10-17 | 2015-04-29 | 东和株式会社 | 半导体基板供给方法及半导体基板供给装置 |
TW201801882A (zh) * | 2016-04-28 | 2018-01-16 | Towa股份有限公司 | 樹脂密封裝置及樹脂密封方法 |
Also Published As
Publication number | Publication date |
---|---|
JP7068094B2 (ja) | 2022-05-16 |
JP2020026088A (ja) | 2020-02-20 |
KR102706847B1 (ko) | 2024-09-19 |
KR20200018314A (ko) | 2020-02-19 |
CN110815707A (zh) | 2020-02-21 |
TW202012138A (zh) | 2020-04-01 |
CN110815707B (zh) | 2024-03-26 |
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