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TWI694895B - Polishing apparatus - Google Patents

Polishing apparatus Download PDF

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Publication number
TWI694895B
TWI694895B TW108103390A TW108103390A TWI694895B TW I694895 B TWI694895 B TW I694895B TW 108103390 A TW108103390 A TW 108103390A TW 108103390 A TW108103390 A TW 108103390A TW I694895 B TWI694895 B TW I694895B
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TW
Taiwan
Prior art keywords
unit
polishing
gripper
polished
rail
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TW108103390A
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Chinese (zh)
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TW201932243A (en
Inventor
金泰成
千成年
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南韓商未來股份有限公司
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Publication of TW201932243A publication Critical patent/TW201932243A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/08Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00Other grinding machines or devices
    • B24B27/0069Other grinding machines or devices with means for feeding the work-pieces to the grinding tool, e.g. turntables, transfer means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/34Accessories
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/34Accessories
    • B24B37/345Feeding, loading or unloading work specially adapted to lapping
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/12Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

一種研磨裝置,包括:一個以上的第一研磨單元,包括至少一個第一主軸,沿第一方向配置成一列;一個以上的第一平台單元,配置到與所述第一研磨單元對應的位置,裝設研磨對象體;以及第一移送單元,具備第一抓持器,所述第一抓持器沿所述第一方向延伸的第一軌道、沿所述第一軌道移動且沿與所述第一方向交叉的第二方向延伸的第二軌道、及連接到所述第二軌道而通過所述第二軌道的移動朝所述第一方向移動或沿所述第二軌道朝所述第二方向移動來將所述研磨對象體搬送到所述第一平台單元。A grinding device includes: more than one first grinding unit, including at least one first spindle, arranged in a row along a first direction; more than one first platform unit, arranged to a position corresponding to the first grinding unit, A grinding object is installed; and a first transfer unit is provided with a first gripper, the first gripper extends along a first track in the first direction, moves along the first track, and moves along with the A second rail extending in a second direction crossing the first direction, and connected to the second rail to move toward the first direction by movement of the second rail or toward the second along the second rail The direction moves to convey the object to be polished to the first stage unit.

Description

研磨裝置Grinding device

本發明是有關於一種研磨裝置。The invention relates to a grinding device.

最近,隨著如手機(行動電話(Mobile Phone))、個人數位助理(Personal Digital Assistant,PDA)、電腦、大型電視(Television,TV)的各種電子設備的發展,對可應用在這些電子設備的平面顯示器裝置的要求逐漸增加。目前正在積極地研究液晶顯示裝置(Liquid Crystal Display,LCD)、電漿顯示面板(Plasma Display Panel,PDP)、場發射顯示裝置(Field Emission Display,FED)、真空螢光顯示器(Vacuum Fluorescent Display,VFD)、有機發光二極體(Organic Light Emitting Diodes,OLED)等這些平面顯示器裝置,但由於量產化技術、驅動元件的容易性、高畫質的實現的原因,目前最廣泛使用液晶顯示裝置(LCD),但最近因為技術的發展而使各種裝置的運用有進一步增加的趨勢。Recently, with the development of various electronic devices such as mobile phones (Mobile Phones), personal digital assistants (PDAs), computers, and large televisions (Televisions, TVs), the application of these electronic devices The requirements for flat display devices are gradually increasing. Currently, liquid crystal display (LCD), plasma display panel (PDP), field emission display (FED), and vacuum fluorescent display (Vacuum Fluorescent Display, VFD) are being actively researched ), organic light emitting diodes (Organic Light Emitting Diodes, OLED) and other flat display devices, but due to mass production technology, the ease of driving elements, and the realization of high image quality, liquid crystal display devices are currently the most widely used ( LCD), but recently due to technological developments, the use of various devices has further increased.

使用在這些平面顯示器裝置的基板通常呈安裝各種元件的下部面板與在這些下部面板的上部另外結合上部面板的複合基板的形態。複合基板以下部面板的尺寸大於上部面板的尺寸的方式形成而呈下部面板突出到上部面板的一側面的形態,在像上述內容一樣突出的下部面板的一側另外配置用以與外部設備進行電連接的連接端子。The substrates used in these flat display devices are generally in the form of a lower panel on which various elements are mounted and a composite substrate in which an upper panel is additionally joined to the upper part of these lower panels. The composite substrate is formed in such a way that the size of the lower panel is larger than the size of the upper panel, and the lower panel protrudes to one side of the upper panel. On the side of the lower panel protruding as described above, it is additionally arranged for powering with external devices Connection terminal for connection.

如上所述的複合基板通常由鋼化玻璃材質製作而以其強度增加的方式構成,儘管如此,在複合基板的切割過程中,存在如下問題:因通過滾輪(wheel)實現的機械切割製程而在加工面產生微小龜裂等,從而其硬度變差。尤其,這些微小龜裂主要沿複合基板的邊緣線產生,最近,為了防止這種情況而對複合基板的邊緣線部位執行倒角加工的作業等。The composite substrate as described above is usually made of tempered glass material to increase its strength. However, in the cutting process of the composite substrate, there are the following problems: due to the mechanical cutting process achieved by the wheel (wheel) Minor cracks or the like occur on the machined surface, and its hardness deteriorates. In particular, these minute cracks mainly occur along the edge line of the composite substrate. Recently, in order to prevent this, a chamfering operation is performed on the edge line portion of the composite substrate.

這種邊緣線的倒角加工作業通常通過利用研磨機對邊緣線進行研磨(grinding)的方式進行,以往,通過將複合基板逐個裝載到研磨裝置上進行研磨後再次卸載的方式進行作業。然而,這種研磨方式的倒角作業存在需持續將複合基板裝載/卸載等作業複雜而生產性下降等問題。The chamfering operation of such edge lines is usually performed by grinding the edge lines with a grinder. Conventionally, the composite substrates are loaded on the grinding device one by one, and then unloaded again after grinding. However, the chamfering operation of this polishing method has a problem that it is necessary to continuously load and unload the composite substrate and the work is complicated, and the productivity is degraded.

[發明要解決的問題][Problems to be solved by the invention]

本發明的實施例提供一種可提高生產性的研磨裝置。Embodiments of the present invention provide a grinding device that can improve productivity.

[解決問題的手段][Means for solving the problem]

本發明的一實施例提供一種研磨裝置,其包括:第一移送單元,具備沿第一方向延伸的第一軌道、沿與所述第一方向交叉的第二方向延伸的第二軌道、及沿所述第一軌道與第二軌道移送研磨對象體的第一抓持器(gripper);第一平台單元,裝設並固定由所述第一抓持器移送的研磨對象體;以及第一研磨單元,配置到與所述第一平台單元對應的位置,包括至少一個第一主軸(spindle),為了對所述研磨對象體進行研磨而可朝所述第一平台單元移動。An embodiment of the present invention provides a grinding apparatus including a first transfer unit including a first rail extending in a first direction, a second rail extending in a second direction crossing the first direction, and The first rail and the second rail transport a first gripper (gripper) of the object to be polished; a first platform unit that installs and fixes the object to be polished that is transferred by the first gripper; and the first polishing The unit, configured to a position corresponding to the first platform unit, includes at least one first spindle (spindle), and is movable toward the first platform unit for polishing the object to be polished.

在本發明的一實施例中,在具備兩個以上的所述第二軌道的情況下,第二軌道可相互平行地配置。In an embodiment of the present invention, when two or more second rails are provided, the second rails may be arranged parallel to each other.

在本發明的一實施例中,所述第一抓持器可朝與所述第一方向及所述第二方向交叉的第三方向抬高或降低所述研磨對象體。In an embodiment of the present invention, the first gripper can raise or lower the object to be polished in a third direction that intersects the first direction and the second direction.

在本發明的一實施例中,所述研磨裝置還可包括第一相機單元,所述第一相機單元鄰接地配置到所述第一軌道,感測由所述第一抓持器抓持的所述研磨對象體的對準狀態。In an embodiment of the present invention, the grinding device may further include a first camera unit, the first camera unit is disposed adjacent to the first track, and senses the gripping by the first gripper The alignment state of the object to be polished.

在本發明的一實施例中,所述研磨裝置還可包括:第二移送單元,具備沿所述第一方向延伸且平行於所述第一軌道的第三軌道、沿所述第二方向延伸的第四軌道、及沿所述第三軌道與所述第四軌道移送研磨對象體的第二抓持器;第二平台單元,裝設並固定由所述第二抓持器移送的研磨對象體;以及第二研磨單元,配置到與所述第二平台單元對應的位置,包括至少一個第二主軸(spindle),為了對所述研磨對象體進行研磨而可朝所述第二平台單元移動。In an embodiment of the present invention, the grinding apparatus may further include: a second transfer unit including a third track extending in the first direction and parallel to the first track, and extending in the second direction A fourth rail, and a second gripper that transfers the object to be polished along the third and fourth rails; a second platform unit that installs and fixes the object to be transferred that is transferred by the second gripper Body; and a second grinding unit, configured to correspond to the position of the second platform unit, including at least one second spindle (spindle), in order to grind the object to be polished and movable toward the second platform unit .

在本發明的一實施例中,所述第二研磨單元能夠以平行於所述第一方向的假想延長線為基準而與所述第一研磨單元對稱地配置。In an embodiment of the present invention, the second polishing unit can be arranged symmetrically with the first polishing unit with reference to an imaginary extension line parallel to the first direction.

在本發明的一實施例中,所述第一研磨單元與所述第二研磨單元為相同的研磨單元In an embodiment of the invention, the first grinding unit and the second grinding unit are the same grinding unit

在本發明的一實施例中,所述第一相機單元能夠根據所述研磨對象體的尺寸調整位置。In an embodiment of the invention, the first camera unit can adjust the position according to the size of the object to be polished.

在本發明的一實施例中,所述第二軌道的個數可與所述第一平台單元的個數不同。In an embodiment of the invention, the number of the second rails may be different from the number of the first platform units.

在本發明的一實施例中,所述第一抓持器能夠以與多個第一平台單元對應的方式具備多個抓持器部。In an embodiment of the present invention, the first gripper can be provided with a plurality of gripper portions corresponding to the plurality of first platform units.

在本發明的一實施例中,所述第一抓持器以與多個所述第一平台單元對應的方式具備多個抓持器部。In an embodiment of the present invention, the first gripper includes a plurality of gripper portions corresponding to the plurality of first platform units.

在本發明的一實施例中,所述研磨對象體在通過所述第一軌道朝所述第一方向移送後,可通過所述第二軌道朝所述第二方向移送,朝所述第三方向下降而裝設到所述第一平台單元。In an embodiment of the present invention, after the object to be polished is transferred in the first direction through the first track, the object to be polished may be transferred in the second direction through the second track and toward the third Installed to the first platform unit in a downward direction.

本發明的另一實施例提供一種研磨裝置,其包括:一個以上的第一研磨單元,包括至少一個第一主軸(spindle),沿第一方向配置;一個以上的第一平台單元,配置到與所述第一研磨單元對應的位置,裝設研磨對象體;以及第一移送單元,具備第一抓持器,所述第一抓持器沿所述第一方向延伸的第一軌道、沿所述第一軌道移動且沿與所述第一方向交叉的第二方向延伸的第二軌道、及連接到所述第二軌道而通過所述第二軌道的移動朝所述第一方向移動或沿所述第二軌道朝所述第二方向移動來將所述研磨對象體搬送到所述第一平台單元。Another embodiment of the present invention provides a grinding apparatus, including: more than one first grinding unit, including at least one first spindle (spindle), configured along a first direction; more than one first platform unit, configured to The object to be polished is installed at a position corresponding to the first polishing unit; and the first transfer unit is provided with a first gripper, and the first gripper extends along the first track along the first direction The first track moves and extends in a second direction that crosses the first direction, and a second track connected to the second track moves toward or along the first direction by movement of the second track The second rail moves in the second direction to transport the object to be polished to the first platform unit.

在本發明的一實施例中,所述研磨裝置還可包括第一相機單元,所述第一相機單元配置到所述第一抓持器朝第一方向移動的路徑上,感測由所述第一抓持器抓持的所述研磨對象體的對準狀態而產生所述研磨對象體的對準資訊。In an embodiment of the present invention, the grinding device may further include a first camera unit, the first camera unit is configured to a path where the first gripper moves in a first direction, The alignment state of the object to be polished held by the first gripper generates alignment information of the object to be polished.

在本發明的一實施例中,所述研磨裝置還可包括從所述第一相機單元接收所述對準資訊且根據所述對準資訊修正所述研磨對象體的位置的第一調整單元。此時,所述第一抓持器可將由所述第一調整單元修正位置的所述研磨對象體裝設到所述第一平台單元。In an embodiment of the invention, the grinding device may further include a first adjustment unit that receives the alignment information from the first camera unit and corrects the position of the grinding target body according to the alignment information. At this time, the first gripper may attach the object to be polished whose position is corrected by the first adjustment unit to the first platform unit.

根據附圖、權利要求書及發明的詳細說明,除上述內容以外的其他觀點、特徵、優點變明確。Based on the drawings, claims, and detailed description of the invention, other viewpoints, features, and advantages than the above are made clear.

[發明效果][Effect of the invention]

本發明的實施例的研磨裝置可通過抓持器沿第一軌道及第二軌道移動而有效率地將研磨對象體移載到多個固定的平台單元。由此,本發明的實施例的研磨裝置可設定用以將研磨對象體搬入及搬出的最佳的移動路徑,從而可提高製程效率。另外,本發明的實施例的研磨裝置可在一個研磨單元配置多個主軸而同時進行加工,從而可實現量產。另外,在本發明的實施例的研磨裝置中,裝設有研磨對象體的固定平台單元無需朝研磨單元所在的一側移動,因此移動時無研磨對象體的位置變更的危險,從而可實現更穩定且準確的研磨。The polishing apparatus of the embodiment of the present invention can efficiently transfer the polishing object to a plurality of fixed platform units by moving the gripper along the first rail and the second rail. Thus, the polishing apparatus of the embodiment of the present invention can set an optimal moving path for carrying in and out the object to be polished, thereby improving process efficiency. In addition, the polishing apparatus of the embodiment of the present invention can be configured with multiple spindles in one polishing unit to perform processing simultaneously, thereby enabling mass production. In addition, in the polishing apparatus of the embodiment of the present invention, the fixed platform unit provided with the object to be polished does not need to move toward the side where the polishing unit is located, so there is no risk of the position of the object to be polished being changed during the movement, so that more Stable and accurate grinding.

為讓本發明的上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。In order to make the above-mentioned features and advantages of the present invention more obvious and understandable, the embodiments are specifically described below in conjunction with the accompanying drawings for detailed description as follows.

以下,參照附圖,詳細地對下述實施例進行說明,在參照附圖進行說明時,相同或對應的組成元件賦予相同的符號,省略其重複說明。Hereinafter, the following embodiments will be described in detail with reference to the drawings. In the description with reference to the drawings, the same or corresponding constituent elements are given the same symbols, and their repeated descriptions are omitted.

本實施例可實施各種變換,將特定實施例示意在圖中,並在詳細說明中詳細地進行說明。參照與附圖一併在下文詳細地進行說明的內容而本實施例的效果、特徵、及達成上述效果與特徵的方法變明確。然而,本實施例能夠以各種形態實現,並不限定於下文所示的實施例。Various changes can be implemented in this embodiment, and specific embodiments are illustrated in the drawings and explained in detail in the detailed description. The effects and features of the present embodiment and the method of achieving the above-mentioned effects and features will become clear with reference to the contents described in detail below together with the drawings. However, this embodiment can be implemented in various forms, and is not limited to the embodiments shown below.

在下述實施例中,第一、第二等術語用於將一個組成元件區分於其他組成元件的目的,並無限定性含義。In the following embodiments, terms such as first and second are used for the purpose of distinguishing one constituent element from other constituent elements, and have no limiting meaning.

在下述實施例中,只要未在文中明確地表示其他含義,則單數的表達包括複數的表達。In the following embodiments, expressions in the singular include expressions in the plural as long as they do not express other meanings explicitly in the text.

在下述實施例中,包括或具有等術語表示存在說明書中所記載的特徵或組成元件,並非預先排除一個以上的其他特徵或組成元件的附加可能性。In the following embodiments, the terms including or having indicate that there are features or constituent elements described in the description, and do not preclude the additional possibility of more than one other feature or constituent element.

在下述實施例中,當記載為單元、區域、組成元件等部分位於另一部分上方或上部時,不僅包括位於另一部分的正上方的情況,而且還包括在所述另一部分中間介置有其他單元、區域、組成元件等的情況。In the following embodiments, when a part described as a unit, a region, a component, etc. is located above or above another part, it includes not only the case directly above the other part, but also includes another unit interposed between the other part , Areas, components, etc.

在下述實施例中,只要未在文中明確地表示其他含義,則連接或結合等術語並非必須表示兩個部件的直接及/或固定連接或結合,並不排除在兩個部件之間介置有其他部件的情況。In the following embodiments, as long as other meanings are not expressly expressed in the text, terms such as connection or combination do not necessarily indicate direct and/or fixed connection or combination of the two components, and do not exclude the interposition between the two components. The situation of other parts.

表示存在說明書中所記載的特徵或組成元件,並非預先排除一個以上的其他特徵或組成元件的附加可能性。It means that there are features or constituent elements described in the specification, and it does not exclude more than one other features or constituent elements in advance.

為了便於說明,在圖中可放大或縮小組成元件的尺寸。例如,為了便於說明而任意地表示圖中所示的各構成的尺寸及厚度,因此下述實施例並非必須限定於圖中所示的內容。For ease of explanation, the size of the component elements can be enlarged or reduced in the figures. For example, the size and thickness of each structure shown in the drawings are arbitrarily shown for convenience of description, so the following embodiments are not necessarily limited to the contents shown in the drawings.

圖1是概略性地表示本發明的第一實施例的研磨裝置10的俯視圖,圖2是用以對研磨裝置10在圖1的第一位置A1的動作進行說明的概念圖,圖3是用以對研磨裝置10在圖1的第二位置A2的動作進行說明的概念圖。1 is a plan view schematically showing a polishing device 10 according to a first embodiment of the present invention, FIG. 2 is a conceptual diagram for explaining the operation of the polishing device 10 at the first position A1 of FIG. 1, and FIG. 3 is a A conceptual diagram illustrating the operation of the polishing device 10 at the second position A2 in FIG. 1.

參照圖1至圖3,本發明的第一實施例的研磨裝置10可包括第一研磨單元110、第一平台單元120及第一移送單元130。Referring to FIGS. 1 to 3, the grinding apparatus 10 of the first embodiment of the present invention may include a first grinding unit 110, a first platform unit 120 and a first transfer unit 130.

第一研磨單元110可包括至少一個第一主軸(spindle)111。第一主軸111可執行對研磨對象體M進行研磨的功能,在旋轉軸部件的末端部安裝用以對研磨對象體M進行研磨的研磨工具。第一主軸111可使如上所述的研磨工具旋轉而對研磨對象體M進行研磨,例如可對研磨對象體M的側面進行研磨。或者,第一主軸111可像圖1中研磨加工後的研磨對象體M'一樣以研磨加工前的研磨對象體M的一區域形成為固定的形狀的方式對研磨對象體M進行研磨。The first grinding unit 110 may include at least one first spindle 111. The first main shaft 111 can perform the function of polishing the object M to be polished, and a polishing tool for polishing the object M to be polished is attached to the end of the rotating shaft member. The first spindle 111 can rotate the polishing tool as described above to polish the object M, for example, the side surface of the object M can be polished. Alternatively, the first spindle 111 may polish the polishing object M so that a region of the polishing object M before polishing is formed into a fixed shape like the polishing object M'after polishing in FIG. 1.

另一方面,第一研磨單元110可包括多個第一主軸111,多個第一主軸111配置到一個第一本體部112。如圖1所示,第一研磨單元110可包括兩個第一主軸111,但本發明的技術思想並不限制於此,當然可具備多於兩個的第一主軸111。此時,多個第一主軸111可相對於第一方向在如上所述的第一本體部112的下部配置成一列,其可與第一研磨單元110排列的方向一致。On the other hand, the first grinding unit 110 may include a plurality of first spindles 111 that are configured to one first body portion 112. As shown in FIG. 1, the first grinding unit 110 may include two first spindles 111, but the technical idea of the present invention is not limited thereto, and of course more than two first spindles 111 may be provided. At this time, the plurality of first spindles 111 may be arranged in a row at the lower portion of the first body portion 112 as described above with respect to the first direction, which may coincide with the direction in which the first polishing units 110 are arranged.

第一研磨單元110還可包括使第一本體部112朝第一方向移動的第一方向移送部(未圖示)、使第一本體部112朝第二方向移動的第二方向移送部(未圖示)、及使第一本體部112朝第三方向移動的第三方向移送部(未圖示)。第一方向移送部(未圖示)、第二方向移送部(未圖示)及第三方向移送部(未圖示)可利用分別相對於第一方向、第二方向及第三方向使第一本體部112移動的馬達、油壓缸、空壓缸或線性致動器等構成。此處,第一方向至第三方向可為彼此垂直的方向。第一研磨單元110可通過朝第二方向移動而遠離或靠近第一平台單元120。換句話說,可通過第二方向移送部(未圖示)調節第一本體部112與第一平台單元120的垂直距離。The first polishing unit 110 may further include a first direction transfer portion (not shown) that moves the first body portion 112 in the first direction, and a second direction transfer portion (not shown) that moves the first body portion 112 in the second direction (Illustration)), and a third direction transfer unit (not shown) that moves the first body portion 112 in the third direction. The first direction transfer unit (not shown), the second direction transfer unit (not shown), and the third direction transfer unit (not shown) can use the first direction, the second direction, and the third direction to make the first A motor, a hydraulic cylinder, an air cylinder, or a linear actuator that moves the body portion 112 is configured. Here, the first direction to the third direction may be directions perpendicular to each other. The first grinding unit 110 may move away from or approach the first platform unit 120 by moving in the second direction. In other words, the vertical distance between the first body portion 112 and the first platform unit 120 can be adjusted by the second direction transfer portion (not shown).

第一研磨單元110可通過利用第一方向移送部(未圖示)及第二方向移送部(未圖示)使第一本體部112移動而一次對在第一本體部112的下部配置成一列的一個以上的第一主軸111的位置進行調節。第一研磨單元110在一個第一本體部112具備多個第一主軸111的情況下,可利用多個第一主軸111同時對裝設到多個第一平台單元120的多個研磨對象體M進行研磨。另外,第一研磨單元110對一個第一本體部112的移動進行控制,由此可一次對多個第一主軸111的移動進行控制,從而可提高製程效率。The first polishing unit 110 can be arranged in a row at a lower portion of the first body portion 112 by moving the first body portion 112 using the first direction transferring portion (not shown) and the second direction transferring portion (not shown) The position of more than one first spindle 111 is adjusted. In the case where one first body portion 112 includes a plurality of first spindles 111, the first polishing unit 110 can use the plurality of first spindles 111 to simultaneously treat a plurality of objects to be polished M attached to the plurality of first stage units 120. Perform grinding. In addition, the first polishing unit 110 controls the movement of one first body portion 112, so that the movement of the plurality of first spindles 111 can be controlled at one time, thereby improving the process efficiency.

作為另一實施例,第一研磨單元110還可包括可調節多個第一主軸111的各位置的第一調節元件(未圖示)。第一調節元件(未圖示)可獨立地調節各第一主軸111的上下左右的移動。As another embodiment, the first grinding unit 110 may further include a first adjustment element (not shown) that can adjust the positions of the plurality of first spindles 111. The first adjustment element (not shown) can independently adjust the movement of each first main shaft 111 up, down, left, and right.

另一方面,在具備多個第一研磨單元110的情況下,可沿第一方向配置成一列。此時,能夠以具備到各第一研磨單元110的第一主軸111朝向相同的方向的方式配置多個第一研磨單元110。另外,能夠以第一主軸111的各零點位置位於同一直線上的方式配置多個第一研磨單元110。On the other hand, when a plurality of first polishing units 110 are provided, they may be arranged in a row along the first direction. In this case, the plurality of first polishing units 110 can be arranged so that the first main shaft 111 of each first polishing unit 110 faces the same direction. In addition, it is possible to arrange a plurality of first polishing units 110 so that each zero point position of the first spindle 111 is on the same straight line.

第一平台單元120可配置到與第一主軸111對應的位置,在上部裝設研磨對象體M。第一平台單元120可與第一主軸111的個數對應,可分別在所述第一平台單元裝設研磨對象體M。然而,本發明的技術思想並不限制於此,作為另一實施例,第一平台單元120以與第一研磨單元110的個數對應的方式具備,也可具備多個在第一平台單元120上裝設研磨對象體M的裝設區域。此時,具備到第一平台單元120的裝設區域的個數可與具備到一個第一研磨單元110的第一主軸111的個數對應。The first stage unit 120 may be disposed at a position corresponding to the first main shaft 111, and the object M to be polished is installed on the upper portion. The first platform unit 120 may correspond to the number of first spindles 111, and the object M to be polished may be installed on the first platform unit, respectively. However, the technical idea of the present invention is not limited to this. As another embodiment, the first platform unit 120 is provided in a manner corresponding to the number of the first polishing units 110, or may be provided in plurality on the first platform unit 120 The installation area where the object to be polished M is mounted. At this time, the number of installation areas provided to the first stage unit 120 may correspond to the number of first spindles 111 provided to one first polishing unit 110.

第一平台單元120作為固定(fix)單元,為了裝載(loading)或卸載(unloading)研磨對象體M而下文敘述的第一抓持器133可朝第一平台單元120移動、或為了對研磨對象體M進行研磨而僅第一主軸111朝第一平台單元120移動而第一平台單元120不移動。The first platform unit 120 serves as a fixing unit, and the first gripper 133 described below can be moved toward the first platform unit 120 for loading or unloading the polishing object M, or for The body M is ground and only the first spindle 111 moves toward the first stage unit 120 and the first stage unit 120 does not move.

另一方面,第一移送單元130可具備第一軌道131、第二軌道132及第一抓持器133。On the other hand, the first transfer unit 130 may include a first rail 131, a second rail 132, and a first gripper 133.

第一軌道131可沿第一方向延伸。第一軌道131可沿第一研磨單元110配置,具體而言,可沿多個第一主軸111的排列方向以面向第一主軸111的方式配置。The first rail 131 may extend in the first direction. The first rail 131 may be arranged along the first grinding unit 110, specifically, may be arranged so as to face the first spindle 111 along the arrangement direction of the plurality of first spindles 111.

第二軌道132可設置到第一軌道131與第一平台單元120之間。第二軌道132可沿與第一方向交叉的第二方向延伸,如圖所示,第二軌道132可從第一軌道131朝垂直的方向延伸。第二軌道132的個數與第一平台單元120的個數對應,在具備兩個以上的第二軌道132的情況下,可沿第一方向平行地配置。The second rail 132 may be disposed between the first rail 131 and the first platform unit 120. The second rail 132 may extend in a second direction crossing the first direction. As shown, the second rail 132 may extend from the first rail 131 in a vertical direction. The number of second rails 132 corresponds to the number of first platform units 120, and when two or more second rails 132 are provided, they can be arranged in parallel along the first direction.

如上所述的構造是第一平台單元120與第一主軸111的個數對應的情況的實施方式。作為另一實施例,如上所述,在以與第一研磨單元110的個數對應的方式具備第一平台單元120的情況下,第二軌道132的個數可與具備到第一平台單元120的裝設區域的個數對應。第二軌道132可從第一軌道131延伸到可在第一平台單元120上裝設研磨對象體M的位置。第一抓持器133可沿第一軌道131及第二軌道132移動而將研磨對象體M搬送到第一平台單元120或搬出。The structure described above is an embodiment in the case where the first stage unit 120 corresponds to the number of first spindles 111. As another embodiment, as described above, when the first platform unit 120 is provided in a manner corresponding to the number of first polishing units 110, the number of second rails 132 may be the same as that provided to the first platform unit 120 Corresponds to the number of installation areas. The second rail 132 may extend from the first rail 131 to a position where the object M to be polished can be installed on the first stage unit 120. The first gripper 133 can move along the first rail 131 and the second rail 132 to transfer the object M to the first stage unit 120 or out.

第一抓持器133在抓持引入到研磨裝置10的研磨對象體M後,可沿第一軌道131及第二軌道132移動而將所述研磨對象體M搬送到第一平台單元120、或在抓持研磨結束的研磨對象體M'後,沿第二軌道132及第一軌道131移動而從第一平台單元120搬出。第一抓持器133可具備為一個而執行搬送功能及搬出功能,也可具備為2個,即搬送抓持器及搬出抓持器。或者,也可具備多於2個的抓持器。然而,在具備兩個以上的第一抓持器133的情況下,第一抓持器133可通過預先設定的程式沿第一軌道131及第二軌道132移動,以便不干涉彼此的移動。After grasping the object M to be polished introduced into the polishing device 10, the first gripper 133 can move along the first rail 131 and the second rail 132 to transfer the object M to the first platform unit 120, or After grasping the polishing target object M′ after the polishing, it moves along the second rail 132 and the first rail 131 and is carried out from the first stage unit 120. The first gripper 133 may be equipped with a transfer function and a transfer function for one, or two, namely, a transfer gripper and a transfer-out gripper. Alternatively, more than two grippers may be provided. However, when more than two first grippers 133 are provided, the first gripper 133 can move along the first rail 131 and the second rail 132 by a preset program so as not to interfere with each other's movement.

作為又一實施例,能夠以從第一軌道131向第一平台單元120之間延伸的方式具備第二軌道132。此時,第二軌道132的個數可不與第一平台單元120的個數或裝設區域的個數對應。例如,能夠以與兩個第一平台單元120對應的方式具備一個第二軌道132。當在兩個第一平台單元120之間設置一個第二軌道132時,下文敘述的第一抓持器133能夠以與如上所述的兩個第一平台單元120對應的方式具備兩個抓持器部(未圖示)。兩個抓持器部(未圖示)的間隔可與兩個第一平台單元120的間隔對應。由此,第一抓持器133在同時抓持兩個研磨對象體M後,可沿第二軌道132移動而將研磨對象體M搬送到各第一平台單元120或搬出。As yet another embodiment, the second rail 132 can be provided so as to extend from the first rail 131 toward the first platform unit 120. At this time, the number of second rails 132 may not correspond to the number of first platform units 120 or the number of installation areas. For example, one second rail 132 can be provided corresponding to the two first platform units 120. When a second rail 132 is provided between the two first platform units 120, the first gripper 133 described below can be provided with two grips in a manner corresponding to the two first platform units 120 described above Device (not shown). The interval between the two gripper parts (not shown) may correspond to the interval between the two first platform units 120. Thereby, the first gripper 133 can simultaneously move the two polishing objects M, and then move along the second rail 132 to transport the polishing objects M to each first stage unit 120 or out.

參照圖2及圖3,第一抓持器133可朝與第一方向及第二方向交叉的第三方向抬高或降低研磨對象體M。換句話說,第一抓持器133可抓持研磨對象體M而朝相對於地面的高度方向移動。第一抓持器133還可具備高度調節單元135,高度調節單元135可利用馬達、油壓缸、空壓缸或線性致動器等構成。2 and 3, the first gripper 133 may raise or lower the object M to be polished in a third direction crossing the first direction and the second direction. In other words, the first gripper 133 can grip the object M to be polished and move in the height direction relative to the ground. The first gripper 133 may further include a height adjustment unit 135. The height adjustment unit 135 may be composed of a motor, a hydraulic cylinder, an air cylinder, a linear actuator, or the like.

另一方面,本發明的第一實施例的研磨裝置10還可具備第一相機單元140及第一輸送帶單元C1。On the other hand, the polishing apparatus 10 of the first embodiment of the present invention may further include a first camera unit 140 and a first conveyor belt unit C1.

第一相機單元140可鄰接地配置到第一軌道131,感測由第一抓持器133抓持的研磨對象體M的對準狀態(align)。具體而言,如圖1及圖2所示,第一抓持器133可在第一位置A1抓持引入的研磨對象體M。研磨對象體M可從除第一軌道131以外的其他位置引入,研磨裝置10可通過第一輸送帶單元C1使研磨對象體M從引入的位置朝作為第一軌道131下方的第一位置A1移動。因此,第一位置A1可為第一輸送帶單元C1與第一軌道131交叉的位置。The first camera unit 140 may be adjacently arranged to the first rail 131 and sense the alignment state of the object to be polished M held by the first gripper 133. Specifically, as shown in FIGS. 1 and 2, the first gripper 133 can grip the introduced object M at the first position A1. The object to be polished M can be introduced from a position other than the first rail 131, and the polishing device 10 can move the object to be polished M from the introduced position toward the first position A1 that is below the first rail 131 through the first conveyor belt unit C1 . Therefore, the first position A1 may be a position where the first conveyor belt unit C1 crosses the first rail 131.

第一相機單元140位於由第一抓持器133抓持研磨對象體M的第一位置A1,從而可確認第一抓持器133中的研磨對象體M的對準狀態。第一相機單元140以第一軌道131為基準而對稱地配置來拍攝被第一抓持器133抓持的研磨對象體M,由此可準確地感測研磨對象體M的對準狀態。The first camera unit 140 is located at the first position A1 where the first gripper 133 grips the polishing object M, so that the alignment state of the polishing object M in the first gripper 133 can be confirmed. The first camera unit 140 is symmetrically arranged with the first rail 131 as a reference to photograph the polishing object M grasped by the first gripper 133, whereby the alignment state of the polishing object M can be accurately sensed.

另一方面,本發明的第一實施例的研磨裝置10還可包括第二研磨單元210、第二平台單元220及第二移送單元230。此處,第二研磨單元210、第二平台單元220及第二移送單元230分別為與第一研磨單元110、第一平台單元120及第一移送單元130相同的構成,為了便於說明,省略重複的說明。On the other hand, the polishing apparatus 10 of the first embodiment of the present invention may further include a second polishing unit 210, a second platform unit 220, and a second transfer unit 230. Here, the second polishing unit 210, the second platform unit 220, and the second transfer unit 230 have the same configuration as the first polishing unit 110, the first platform unit 120, and the first transfer unit 130, respectively. instruction of.

第二研磨單元210可包括第二本體部212及配置到第二本體部212的至少一個第二主軸211,沿第一方向配置成一列,與第一研磨單元110平行地配置。第二研磨單元210可與第一研磨單元110的個數相同,但並非必須如此。作為一實施例,第二研磨單元210能夠以平行於第一方向的假想延長線L為基準而與第一研磨單元110對稱地配置。因此,第二研磨單元210的第二主軸211與第一研磨單元110的第一主軸111能夠以假想延長線L為中心而以朝向外廓的方式配置。第二主軸211的個數可與第一主軸111的個數對應。The second grinding unit 210 may include a second body portion 212 and at least one second spindle 211 disposed on the second body portion 212, arranged in a row along the first direction, and arranged parallel to the first grinding unit 110. The number of second grinding units 210 may be the same as the number of first grinding units 110, but this is not necessarily the case. As an embodiment, the second polishing unit 210 can be arranged symmetrically with the first polishing unit 110 with reference to an imaginary extension line L parallel to the first direction. Therefore, the second main shaft 211 of the second polishing unit 210 and the first main shaft 111 of the first polishing unit 110 can be arranged so as to face the outline with the virtual extension line L as the center. The number of second spindles 211 may correspond to the number of first spindles 111.

第二平台單元220可配置到與第二主軸211對應的位置,裝設研磨對象體M。第二平台單元220可與第一平台單元120相同地以與第二主軸211的個數對應、或與第二研磨單元210的個數對應的方式配置。The second stage unit 220 may be arranged at a position corresponding to the second spindle 211, and the object M to be polished may be installed. Like the first stage unit 120, the second stage unit 220 may be configured to correspond to the number of second spindles 211 or the number of second grinding units 210.

第二移送單元230可具備第三軌道231、第四軌道232及第二抓持器233。The second transfer unit 230 may include a third rail 231, a fourth rail 232, and a second gripper 233.

第三軌道231可沿第一方向延伸且平行於第一軌道131。第三軌道231可沿第二研磨單元210配置,具體而言,可沿多個第二主軸211的排列方向以面向第二主軸211的方式配置。The third track 231 may extend in the first direction and be parallel to the first track 131. The third rail 231 may be arranged along the second grinding unit 210, specifically, may be arranged so as to face the second spindle 211 along the arrangement direction of the plurality of second spindles 211.

第四軌道232可設置到第三軌道231與第二平台單元220之間。第四軌道232可沿與第一方向交叉的第二方向延伸,如圖所示,第四軌道232可從第三軌道231朝垂直的方向延伸。第四軌道232的個數與第二平台單元220的個數對應,在具備兩個以上的第四軌道232的情況下,可沿第一方向平行地配置。The fourth rail 232 may be provided between the third rail 231 and the second platform unit 220. The fourth rail 232 may extend in a second direction crossing the first direction. As shown, the fourth rail 232 may extend from the third rail 231 in a vertical direction. The number of fourth rails 232 corresponds to the number of second platform units 220, and when there are more than two fourth rails 232, they can be arranged in parallel along the first direction.

第二抓持器233可沿第三軌道231及第四軌道232移動而將研磨對象體M搬送到第二平台單元220或搬出。第二抓持器233在抓持引入到研磨裝置10的研磨對象體M後,可沿第三軌道231及第四軌道232移動而將研磨對象體M搬送到第二平台單元220、或在抓持研磨結束的研磨對象體M'後,沿第四軌道232及第三軌道231移動而從第二平台單元220搬出。第二抓持器233可與第一抓持器133相同地朝第三方向抬高或降低研磨對象體M。The second gripper 233 can move along the third rail 231 and the fourth rail 232 to transfer the object to be polished M to the second stage unit 220 or out. After grasping the object to be polished M introduced into the polishing device 10, the second gripper 233 can move along the third rail 231 and the fourth rail 232 to transport the object to be polished M to the second platform unit 220, or to grip After holding the object M'to be polished, it moves along the fourth rail 232 and the third rail 231 and is carried out from the second stage unit 220. The second gripper 233 can raise or lower the grinding target body M in the third direction in the same manner as the first gripper 133.

作為另一實施例,能夠以從第三軌道231向第二平台單元220之間延伸的方式具備第四軌道232。此時,第四軌道232的個數可不與第二平台單元220的個數或裝設區域的個數對應。例如,能夠以與兩個第二平台單元220對應的方式具備一個第四軌道232。當在兩個第二平台單元220之間設置一個第四軌道232時,下文敘述的第二抓持器233能夠以與如上所述的兩個第二平台單元220對應的方式具備兩個抓持器部(未圖示)。兩個抓持器部(未圖示)的間隔可與兩個第二平台單元220的間隔對應。由此,第二抓持器233在同時抓持兩個研磨對象體M後,可沿第四軌道232移動而將研磨對象體M搬送到各第二平台單元220或搬出。As another embodiment, the fourth rail 232 can be provided so as to extend from the third rail 231 toward the second platform unit 220. At this time, the number of fourth rails 232 may not correspond to the number of second platform units 220 or the number of installation areas. For example, one fourth rail 232 can be provided corresponding to the two second platform units 220. When a fourth rail 232 is provided between the two second platform units 220, the second gripper 233 described below can be provided with two grips in a manner corresponding to the two second platform units 220 described above Device (not shown). The interval between the two gripper parts (not shown) may correspond to the interval between the two second platform units 220. As a result, the second gripper 233 can simultaneously move the two objects M to be polished, and then move along the fourth rail 232 to transport the objects M to or from each second stage unit 220.

另外,本發明的第一實施例的研磨裝置10還可具備第二相機單元240及第二輸送帶單元C2。In addition, the polishing apparatus 10 of the first embodiment of the present invention may further include a second camera unit 240 and a second conveyor unit C2.

第二相機單元240可鄰接地配置到第三軌道231,感測由第二抓持器233抓持的研磨對象體M的對準狀態。第二相機單元240能夠以假想延長線L為基準而與第一相機單元140對稱地配置。因此,配置第二相機單元240的位置可為第二輸送帶單元C2與第三軌道231交叉的位置。The second camera unit 240 may be adjacently arranged to the third rail 231 to sense the alignment state of the object to be polished M held by the second gripper 233. The second camera unit 240 can be arranged symmetrically with the first camera unit 140 with reference to the virtual extension line L. Therefore, the position where the second camera unit 240 is arranged may be a position where the second conveyor belt unit C2 crosses the third rail 231.

具有如上所述的構造的本發明的第一實施例的研磨裝置10可利用第一移送單元130或第二移送單元230將引入的研磨對象體M搬送到第一平台單元120或第二平台單元220或搬出。另外,所搬出的研磨對象體M'在利用第三輸送帶單元C3或第四輸送帶單元C4搬移到固定區域後,可朝外部(out)排出。The polishing apparatus 10 of the first embodiment of the present invention having the configuration as described above can use the first transfer unit 130 or the second transfer unit 230 to transfer the introduced polishing object M to the first platform unit 120 or the second platform unit 220 or move out. In addition, the carried-out object to be polished M′ can be discharged to the outside after being transferred to the fixed area by the third conveyor unit C3 or the fourth conveyor unit C4.

如上所述的第一實施例的研磨裝置10能夠以假想延長線L為中心而具有兩個研磨單元110、210,但本發明並不限定於此,也可包括一個研磨單元(未圖示)。更具體而言,在第一平台單元120與第二平台單元220之間定位一個研磨單元而視情況朝分別固定有所述一個研磨單元的第一平台單元120或第二平台單元220側移動來對研磨對象體M進行研磨,由此可更有效率地運行研磨裝置10。The polishing apparatus 10 of the first embodiment described above can have two polishing units 110 and 210 centering on the imaginary extension line L, but the present invention is not limited to this, and may include one polishing unit (not shown) . More specifically, one grinding unit is positioned between the first platform unit 120 and the second platform unit 220 and is moved toward the side of the first platform unit 120 or the second platform unit 220 to which the one grinding unit is fixed, as appropriate. By polishing the object M to be polished, the polishing device 10 can be operated more efficiently.

圖4及圖5是概略性地表示本發明的另一實施方式的研磨裝置10'、10''的俯視圖。4 and 5 are plan views schematically showing polishing apparatuses 10' and 10'' according to another embodiment of the present invention.

參照圖4,本發明的另一實施方式的研磨裝置10'具備與圖1的研磨裝置10相同的組成元件,與圖1的研磨裝置10不同而能夠以假想延長線為中心而以彼此面向的方式配置第一主軸111與第二主軸211。此時,第一軌道131與第三軌道231能夠以經過第一研磨單元110與第二研磨單元210之間的方式平行地配置。Referring to FIG. 4, a polishing apparatus 10 ′ according to another embodiment of the present invention includes the same constituent elements as the polishing apparatus 10 of FIG. 1. Unlike the polishing apparatus 10 of FIG. 1, the polishing apparatus 10 of FIG. The first spindle 111 and the second spindle 211 are configured in a manner. At this time, the first rail 131 and the third rail 231 can be arranged in parallel so as to pass between the first polishing unit 110 and the second polishing unit 210.

參照圖5,本發明的又一實施方式的研磨裝置10''與圖1的研磨裝置10及圖4的研磨裝置10'不同而第一研磨單元110與第二研磨單元210可不對稱地配置而彼此錯開地配置。通過這種構造,圖5的研磨裝置10''可不具備第三軌道231而僅在第一研磨單元110與第二研磨單元210之間具備沿第一方向延伸的第一軌道131。此時,第一軌道131可與沿與第一方向交叉的第二方向延伸的第2-1軌道132-1及第2-2軌道132-2連接。第2-1軌道132-1與第2-2軌道132-2分別從第一軌道131朝第一主軸111及第二主軸211延伸,因此可朝彼此相反的方向延伸。另外,第2-1軌道132-1與第2-2軌道132-2可沿第一軌道131交替地配置。Referring to FIG. 5, a polishing device 10 ″ according to still another embodiment of the present invention is different from the polishing device 10 of FIG. 1 and the polishing device 10 ′ of FIG. 4 and the first polishing unit 110 and the second polishing unit 210 may be configured asymmetrically. Configured staggered from each other. With this configuration, the polishing device 10 ″ of FIG. 5 may not include the third rail 231 but only include the first rail 131 extending in the first direction between the first polishing unit 110 and the second polishing unit 210. At this time, the first rail 131 may be connected to the 2-1 rail 132-1 and the 2-2 rail 132-2 extending in the second direction crossing the first direction. The 2-1 rail 132-1 and the 2-2 rail 132-2 extend from the first rail 131 toward the first main shaft 111 and the second main shaft 211, respectively, and thus can extend in opposite directions to each other. In addition, the 2-1th track 132-1 and the 2-2nd track 132-2 may be alternately arranged along the first track 131.

圖6是表示本發明的第二實施例的研磨裝置20的立體圖,圖7是圖6的研磨裝置20的俯視圖。圖8是圖6的第一移送單元130的立體示意圖。圖9是圖8的第一抓持器133及第一調整單元150的示意圖,圖10是圖7的第一相機單元140的示意圖。FIG. 6 is a perspective view showing the polishing device 20 of the second embodiment of the present invention, and FIG. 7 is a plan view of the polishing device 20 of FIG. 6. FIG. 8 is a schematic perspective view of the first transfer unit 130 of FIG. 6. 9 is a schematic diagram of the first gripper 133 and the first adjustment unit 150 of FIG. 8, and FIG. 10 is a schematic diagram of the first camera unit 140 of FIG. 7.

參照圖6至圖8,本發明的第二實施例的研磨裝置20與第一實施例的研磨裝置10的技術思想相同,作為具體實施例,其中同時抓持2個研磨對象體M1、M2而搬入或搬出。Referring to FIGS. 6 to 8, the second embodiment of the present invention has the same technical idea as the first embodiment of the polishing device 10, as a specific embodiment, in which two polishing objects M1, M2 are held simultaneously Move in or move out.

本發明的第二實施例的研磨裝置20可包括第一研磨單元110、第一平台單元120(參照圖11b)、第一移送單元130、第一相機單元140及第一調整單元150(參照圖9)。另外,第二實施例的研磨裝置20與第一實施例相同,還可包括與如上所述的構成對稱地配置的第二研磨單元210、第二平台單元220、第二移送單元230、第二相機單元240及第二調整單元(未圖示)。以下,為了便於說明,對相同的組成元件賦予相同的符號,以第一移送單元130為中心進行說明,省略重複的說明。The grinding device 20 of the second embodiment of the present invention may include a first grinding unit 110, a first stage unit 120 (refer to FIG. 11b), a first transfer unit 130, a first camera unit 140, and a first adjustment unit 150 (refer to FIG. 9). In addition, the polishing apparatus 20 of the second embodiment is the same as the first embodiment, and may further include a second polishing unit 210, a second stage unit 220, a second transfer unit 230, and a second symmetrically arranged as described above The camera unit 240 and the second adjustment unit (not shown). In the following, for convenience of description, the same constituent elements are given the same reference numerals, and the description will be centered on the first transfer unit 130, and repeated description will be omitted.

第一研磨單元110可包括至少2個第一主軸(spindle)111。第一主軸111可執行對研磨對象體M進行研磨的功能,在旋轉軸部件的末端部安裝用以對研磨對象體M進行研磨的研磨工具。第一主軸111可使如上所述的研磨工具旋轉而對研磨對象體M進行研磨,例如可對研磨對象體M的側面進行研磨。或者,第一主軸111可像圖7中研磨加工後的研磨對象體M'一樣以研磨加工前的研磨對象體M的一區域形成為固定的形狀的方式對研磨對象體M進行研磨。The first grinding unit 110 may include at least two first spindles 111. The first main shaft 111 can perform the function of polishing the object M to be polished, and a polishing tool for polishing the object M to be polished is attached to the end of the rotating shaft member. The first spindle 111 can rotate the polishing tool as described above to polish the object M, for example, the side surface of the object M can be polished. Alternatively, the first spindle 111 may polish the polishing object M so that a region of the polishing object M before polishing is formed into a fixed shape like the polishing object M'after polishing in FIG. 7.

作為一實施例,第一研磨單元110可包括2個第一主軸111,配置到一個第一本體部112。第一研磨單元110可利用與第一本體部112連接的第一方向移送部(未圖示)與第二方向移送部(未圖示)一次對2個第一主軸111的位置進行控制。另外,第一研磨單元110還可包括可調節2個第一主軸111的各位置的第一調節元件(未圖示)。第一調節元件(未圖示)可獨立地調節各第一主軸111的上下左右的移動。As an embodiment, the first grinding unit 110 may include two first spindles 111 configured to one first body portion 112. The first polishing unit 110 can control the positions of the two first spindles 111 at a time using a first direction transfer unit (not shown) and a second direction transfer unit (not shown) connected to the first body 112. In addition, the first grinding unit 110 may further include a first adjustment element (not shown) that can adjust the positions of the two first spindles 111. The first adjustment element (not shown) can independently adjust the movement of each first main shaft 111 up, down, left, and right.

第一平台單元120(參照圖11b)可具備為與第一研磨單元110的第一主軸111的個數對應的個數。如上所述,第二實施例的第一研磨單元110具備2個第一主軸111,因此第一平台單元120可具備為2個。第一平台單元120配置到與第一主軸111對應的位置,在上部裝設研磨對象體M,更具體而言,第一研磨對象體M1與第二研磨對象體M2可分別裝設到2個第一平台單元120的上部。The first stage unit 120 (refer to FIG. 11 b) may be provided with a number corresponding to the number of first spindles 111 of the first polishing unit 110. As described above, since the first polishing unit 110 of the second embodiment includes two first spindles 111, the number of first stage units 120 can be two. The first stage unit 120 is disposed at a position corresponding to the first main shaft 111, and the polishing object M is mounted on the upper portion. More specifically, the first polishing object M1 and the second polishing object M2 can be installed to two respectively The upper part of the first platform unit 120.

另一方面,第一移送單元130可具備第一軌道131、第二軌道132及第一抓持器133。第一移送單元130可像第一實施例的研磨裝置10一樣具備沿第一方向延伸的第一軌道131及從第一軌道131朝垂直的方向延伸的第二軌道132。此時,在第一實施例中,以第二軌道132的個數與第一平台單元120的個數對應的方式具備第二軌道132的情況為中心進行了說明,但在第二實施例中,以在第一抓持器133與第一軌道131之間連接一個第二軌道132而使第一抓持器133朝第一方向或第二方向移動的情況為中心進行說明。On the other hand, the first transfer unit 130 may include a first rail 131, a second rail 132, and a first gripper 133. The first transfer unit 130 may include a first rail 131 extending in the first direction and a second rail 132 extending in the vertical direction from the first rail 131 like the polishing apparatus 10 of the first embodiment. At this time, in the first embodiment, the case where the second rail 132 is provided so that the number of the second rails 132 corresponds to the number of the first platform units 120 has been mainly described, but in the second embodiment The description will be centered on the case where one second rail 132 is connected between the first gripper 133 and the first rail 131 to move the first gripper 133 in the first direction or the second direction.

第一軌道131可沿第一方向延伸。第一軌道131可沿第一研磨單元110的配置方向配置,具體而言,可沿多個第一主軸111的排列方向以面向第一主軸111的方式配置。The first rail 131 may extend in the first direction. The first rail 131 may be arranged along the arrangement direction of the first grinding unit 110, specifically, may be arranged so as to face the first spindle 111 along the arrangement direction of the plurality of first spindles 111.

第一抓持器133在同時抓持通過研磨裝置10的裝載部300引入的第一研磨對象體M1與第二研磨對象體M2後,可沿第一軌道131移動而將第一研磨對象體M1與第二研磨對象體M2搬送到第一平台單元120。第一抓持器133具備以第二軌道132為基準而沿第一方向相互對稱地配置的第一抓持部1331與第二抓持部1332,從而可分別抓持第一研磨對象體M1與第二研磨對象體M2。作為一實施例,第一抓持器133可隔以第二軌道132而與第一軌道131連接。此時,第二軌道132可沿與第一軌道131延伸的第一方向交叉的第二方向延伸。The first gripper 133 can simultaneously move the first polishing object M1 and the second polishing object M2 introduced through the loading unit 300 of the polishing device 10, and then move along the first rail 131 to move the first polishing object M1 The second object to be polished M2 is transferred to the first stage unit 120. The first gripper 133 includes a first grip portion 1331 and a second grip portion 1332 that are symmetrically arranged in the first direction with respect to the second rail 132 as a reference, so that the first polishing object M1 and Second polishing object M2. As an embodiment, the first gripper 133 may be connected to the first rail 131 via the second rail 132. At this time, the second rail 132 may extend in a second direction crossing the first direction in which the first rail 131 extends.

具體而言,如圖8所示,第二軌道132的一側可與第一軌道131連接而沿由所述第一軌道131引導的第一方向移動。此時,可在第二軌道132中與所述一側對向的另一側連接第一抓持器133,以可朝第二方向移動。第一抓持器133通過第二軌道132沿第一軌道131移動而一併朝第一方向移動,也可沿第二軌道132朝第二方向移動。Specifically, as shown in FIG. 8, one side of the second rail 132 may be connected to the first rail 131 to move in a first direction guided by the first rail 131. At this time, the first gripper 133 may be connected to the other side of the second rail 132 facing the one side so as to be movable in the second direction. The first gripper 133 moves along the first rail 131 by the second rail 132 and moves in the first direction together, and may also move in the second direction along the second rail 132.

另一方面,第一軌道131可沿第一方向延伸第一長度,以可使第一抓持器133將研磨對象體M1、M2搬送到排列的多個第一研磨單元110。另外,第二軌道132可沿第二方向延伸第二長度,以可使沿第一軌道131移動的第一抓持器133朝第一平台單元120移動。作為一實施例,第一移送單元130不僅執行利用如上所述的第一抓持器133搬送研磨對象體M1、M2的功能,而且可執行搬出研磨結束的研磨對象體M1’、M2’的功能。然而,本發明並不限制於此,作為另一實施例,第一移送單元130還可包括第一搬送抓持器137而將搬入與搬出分離來執行。On the other hand, the first rail 131 can extend a first length in the first direction, so that the first gripper 133 can transport the polishing objects M1 and M2 to the plurality of aligned first polishing units 110. In addition, the second rail 132 may extend a second length in the second direction, so that the first gripper 133 moving along the first rail 131 may move toward the first platform unit 120. As an embodiment, the first transfer unit 130 not only performs the function of transporting the polishing objects M1 and M2 using the first gripper 133 as described above, but also performs the function of transporting out the polishing objects M1' and M2' that have been polished . However, the present invention is not limited thereto. As another embodiment, the first transfer unit 130 may further include a first transfer gripper 137 to separate the transfer in and out.

具體而言,第一搬送抓持器137可與第一抓持器133相同地與第一軌道131連接而沿第一軌道131朝第一方向移動。此時,第一搬送抓持器137可隔以第六軌道136而與第一軌道131連接。第六軌道136可與第二軌道132相同地執行以第一搬送抓持器137可沿第二方向移動的方式進行引導的功能。Specifically, the first conveying gripper 137 may be connected to the first rail 131 in the same manner as the first gripper 133 and move in the first direction along the first rail 131. At this time, the first transport gripper 137 may be connected to the first rail 131 via the sixth rail 136. The sixth rail 136 may perform the function of guiding in such a manner that the first transport gripper 137 can move in the second direction, similar to the second rail 132.

第一搬送抓持器137具備以第六軌道136為基準而沿第一方向相互對稱地配置的第一搬送抓持部1371及第二搬送抓持部1372,從而可同時抓持研磨結束的第一研磨對象體M1’與第二研磨對象體M2’。第一搬送抓持器137在朝第一平台單元120移動而抓持研磨結束的第一研磨對象體M1’與第二研磨對象體M2’後,沿第六軌道136朝第二方向移動,之後停留在第一軌道131附近。此後,沿第一軌道131朝第一方向移動而通過卸載部400將第一研磨對象體M1’與第二研磨對象體M2’搬出到外部。The first conveying gripper 137 includes a first conveying grip 1371 and a second conveying grip 1372 that are symmetrically arranged in the first direction with respect to the sixth rail 136 as a reference, and can simultaneously grip the first A polishing object M1' and a second polishing object M2'. The first transport gripper 137 moves toward the first stage unit 120 to grip the first polishing object M1' and the second polishing object M2' after the polishing, and then moves in the second direction along the sixth rail 136, and then Stay near the first track 131. Thereafter, the first polishing object M1' and the second polishing object M2' are carried out to the outside through the unloading part 400 by moving along the first rail 131 in the first direction.

參照圖9,第一抓持器133可連接到第二軌道132,通過高度調節單元135朝與第一方向及第二方向交叉的第三方向抬高或降低第一研磨對象體M1及第二研磨對象體M2。換句話說,第一抓持器133可抓持第一研磨對象體M1及第二研磨對象體M2而朝相對於地面的高度方向移動。Referring to FIG. 9, the first gripper 133 may be connected to the second rail 132 and raise or lower the first abrasive object M1 and the second by the height adjustment unit 135 in a third direction crossing the first direction and the second direction Grind the object M2. In other words, the first gripper 133 can grip the first polishing object M1 and the second polishing object M2 and move in the height direction relative to the ground.

此時,第一調整單元150可與第一抓持器133連接,使第一抓持器133相對於與第三方向平行的第一旋轉軸Ax1旋轉。具體而言,第一調整單元150可配置到第一抓持部1331與第二抓持部1332之間而通過相對於第一旋轉軸Ax1的旋轉運動來同時使第一抓持部1331與第二抓持部1332旋轉。At this time, the first adjustment unit 150 may be connected to the first gripper 133 to rotate the first gripper 133 relative to the first rotation axis Ax1 parallel to the third direction. Specifically, the first adjustment unit 150 may be disposed between the first gripping portion 1331 and the second gripping portion 1332 to simultaneously rotate the first gripping portion 1331 and the first gripping portion 1331 through the rotational movement relative to the first rotation axis Ax1. The second grip 1332 rotates.

再次參照圖7及圖10,第一相機單元140可配置到在第一抓持器133抓持第一研磨對象體M1與第二研磨對象體M2後進行移動的移動路徑上。第一相機單元140可感測由第一抓持器133抓持的第一研磨對象體M1與第二研磨對象體M2的對準狀態(align)而產生第一對準資訊及第二對準資訊。另外,構成第一相機單元140的一對相機能夠以可根據研磨對象體的尺寸調整位置的方式構成。Referring again to FIGS. 7 and 10, the first camera unit 140 may be configured on a movement path that moves after the first gripper 133 grips the first polishing object M1 and the second polishing object M2. The first camera unit 140 may sense the alignment state (align) of the first polishing object M1 and the second polishing object M2 gripped by the first gripper 133 to generate first alignment information and second alignment News. In addition, the pair of cameras constituting the first camera unit 140 can be configured so that the position can be adjusted according to the size of the object to be polished.

具體而言,如圖10所示,第一相機單元140可包括相對於第一方向對稱地具備的一對相機而將第一研磨對象體M1與第二研磨對象體M2分別相對於第一方向與第二方向偏移的程度作為第一對準資訊及第二對準資訊產生。第一相機單元140可將以此方式產生的第一對準資訊及第二對準資訊提供到第一調整單元150。此後,第一調整單元150可通過所提供的資訊修正第一研磨對象體M1與第二研磨對象體M2的偏移而將各研磨對象體裝設到第一平台單元120上。Specifically, as shown in FIG. 10, the first camera unit 140 may include a pair of cameras provided symmetrically with respect to the first direction, and respectively align the first polishing object M1 and the second polishing object M2 with respect to the first direction The degree of deviation from the second direction is generated as the first alignment information and the second alignment information. The first camera unit 140 may provide the first alignment information and the second alignment information generated in this way to the first adjustment unit 150. After that, the first adjusting unit 150 can correct the offset of the first polishing object M1 and the second polishing object M2 according to the provided information, and mount each polishing object on the first platform unit 120.

以下,參照附圖,對利用第一相機單元140及第一調整單元150而第一抓持器133將第一研磨對象體M1及第二研磨對象體M2對準到第一平台單元120的方法進行說明。Hereinafter, referring to the drawings, a method for aligning the first polishing object M1 and the second polishing object M2 to the first stage unit 120 by using the first camera unit 140 and the first adjustment unit 150 and the first gripper 133 Be explained.

圖11a至圖11c是依次表示第一抓持器133將第一研磨對象體M1與第二研磨對象體M2裝設到第一平台單元120的過程的圖。FIGS. 11 a to 11 c are diagrams sequentially showing a process in which the first gripper 133 attaches the first polishing object M1 and the second polishing object M2 to the first stage unit 120.

參照圖11a,第一抓持器133可利用第一抓持部1331及第二抓持部1332分別抓持第一研磨對象體M1與第二研磨對象體M2。此時,最理想的是以第一研磨對象體M1與第二研磨對象體M2可立即裝設到第一平台單元120的程度的對準的狀態進行抓持。Referring to FIG. 11A, the first gripper 133 may use the first gripping portion 1331 and the second gripping portion 1332 to grip the first polishing object M1 and the second polishing object M2, respectively. At this time, it is most desirable to hold the first polishing target body M1 and the second polishing target body M2 in such a state that they can be immediately attached to the first stage unit 120.

然而,在實際抓持過程中,第一研磨對象體M1與第二研磨對象體M2會偏移而抓持,在以偏移的狀態立即裝設到第一平台單元120的情況下,存在在研磨過程中產生製程誤差的問題。因此,為了將這種製程誤差最小化,研磨裝置20利用第一相機單元140測定朝第一方向移動的第一研磨對象體M1與第二研磨對象體M2的對準狀態。第一相機單元140可像上述內容一樣相對於第一方向對稱地配置而依次測定第一研磨對象體M1與第二研磨對象體M2的偏移程度,產生包括偏移程度的第一對準資訊及第二對準資訊。However, in the actual gripping process, the first polishing object body M1 and the second polishing object body M2 will be shifted and gripped, and in the case of being immediately attached to the first stage unit 120 in a shifted state, there are There is a problem of process errors during the grinding process. Therefore, in order to minimize such process errors, the polishing device 20 uses the first camera unit 140 to measure the alignment state of the first polishing object M1 and the second polishing object M2 moving in the first direction. The first camera unit 140 may be arranged symmetrically with respect to the first direction as described above to sequentially measure the degree of deviation of the first grinding object M1 and the second grinding object M2 to generate first alignment information including the degree of deviation And second alignment information.

參照圖11b,第一抓持器133可通過第一軌道131及第二軌道132朝第一平台單元120上移動。此時,第一調整單元150可預先從第一相機單元140接收第一對準資訊及第二對準資訊,首先利用第一對準資訊修正第一研磨對象體M1的位置(P1→P1')。即,第一調整單元150可使第一抓持器133旋轉,以可使第一研磨對象體M1以從偏移的初始位置P1到對準的對準位置P1'裝設到第一平台單元120。另外,第一抓持器133也可在如上所述的過程中視需要朝第一方向或第二方向進行平移運動而調整位置。Referring to FIG. 11B, the first gripper 133 can move toward the first platform unit 120 through the first rail 131 and the second rail 132. At this time, the first adjustment unit 150 may receive the first alignment information and the second alignment information from the first camera unit 140 in advance, and first use the first alignment information to correct the position of the first polishing object M1 (P1→P1' ). That is, the first adjustment unit 150 can rotate the first gripper 133 so that the first object to be polished M1 can be attached to the first stage unit from the offset initial position P1 to the aligned alignment position P1′. 120. In addition, the first gripper 133 can also perform a translational movement in the first direction or the second direction as needed to adjust the position during the process described above.

參照圖11c,第一抓持器133在將第一研磨對象體M1裝設到第一平台單元120後,可通過相同的對準過程裝設第二研磨對象體M2。換句話說,第一調整單元150可利用從第一相機單元140接收到的第二對準資訊修正第二研磨對象體M2的位置(P2→P2')。即,第一調整單元150可使第一抓持器133旋轉,以可使第二研磨對象體M2以從偏移的初始位置P2到對準的對準位置P2'裝設到第一平台單元120。另外,第一抓持器133也可在如上所述的過程中視需要朝第一方向或第二方向進行平移運動而調整位置。Referring to FIG. 11c, after the first gripper 133 attaches the first object to be polished M1 to the first stage unit 120, the second object to be polished M2 can be attached through the same alignment process. In other words, the first adjustment unit 150 may use the second alignment information received from the first camera unit 140 to correct the position of the second polishing object M2 (P2→P2'). That is, the first adjustment unit 150 can rotate the first gripper 133 so that the second object to be polished M2 can be attached to the first stage unit from the offset initial position P2 to the aligned alignment position P2' 120. In addition, the first gripper 133 can also perform a translational movement in the first direction or the second direction as needed to adjust the position during the process described above.

如上所述,本發明的實施例的研磨裝置可通過抓持器沿第一軌道及第二軌道移動而有效率地將研磨對象體移載到多個固定的平台單元。由此,本發明的實施例的研磨裝置可設定用以將研磨對象體搬入及搬出的最佳的移動路徑,從而可提高製程效率。另外,本發明的實施例的研磨裝置可在一個研磨單元配置多個主軸而同時進行加工,從而可實現量產。As described above, the polishing device of the embodiment of the present invention can efficiently transfer the polishing object to a plurality of fixed platform units by moving the gripper along the first rail and the second rail. Thus, the polishing apparatus of the embodiment of the present invention can set an optimal moving path for carrying in and out the object to be polished, thereby improving process efficiency. In addition, the polishing apparatus of the embodiment of the present invention can be configured with multiple spindles in one polishing unit to perform processing simultaneously, thereby enabling mass production.

另外,本發明的實施例的研磨裝置可在通過第一調整單元對在抓持器抓持的過程中偏移的研磨對象體進行修正後裝設到第一平台單元,從而可實現準確的研磨加工。另外,無需在每個固定平台均構成用以測定研磨對象體的偏移程度的相機單元而構成一個相機單元來測定研磨對象體的偏移程度並對其進行修正,因此具有節省費用的效果。雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明的精神和範圍內,當可作些許的更動與潤飾,故本發明的保護範圍當視後附的申請專利範圍所界定者為準。In addition, the polishing device of the embodiment of the present invention can be installed on the first platform unit after correcting the polishing object body shifted by the gripper by the first adjustment unit, thereby achieving accurate polishing Processing. In addition, it is not necessary to form a camera unit for measuring the degree of deviation of the object to be polished on each fixed platform, and to constitute a camera unit to measure and correct the degree of deviation of the object to be polished, which has the effect of saving costs. Although the present invention has been disclosed as above with examples, it is not intended to limit the present invention. Any person with ordinary knowledge in the technical field can make some changes and modifications without departing from the spirit and scope of the present invention. The scope of protection of the present invention shall be subject to the scope defined in the appended patent application.

10、10'、10''、20‧‧‧研磨裝置 110‧‧‧第一研磨單元 111‧‧‧第一主軸 112‧‧‧第一本體部 120‧‧‧第一平台單元 130‧‧‧第一移送單元 131‧‧‧第一軌道 132‧‧‧第二軌道 132-1‧‧‧第2-1軌道 132-2‧‧‧第2-2軌道 133‧‧‧第一抓持器 135‧‧‧高度調節單元 136‧‧‧第六軌道 137‧‧‧第一搬送抓持器 140‧‧‧第一相機單元 150‧‧‧第一調整單元 210‧‧‧第二研磨單元 211‧‧‧第二主軸 212‧‧‧第二本體部 220‧‧‧第二平台單元 230‧‧‧第二移送單元 231‧‧‧第三軌道 232‧‧‧第四軌道 233‧‧‧第二抓持器 240‧‧‧第二相機單元 300‧‧‧裝載部 400‧‧‧卸載部 1331‧‧‧第一抓持部 1332‧‧‧第二抓持部 1371‧‧‧第一搬送抓持部 1372‧‧‧第二搬送抓持部 A1‧‧‧第一位置 A2‧‧‧第二位置 Ax1‧‧‧第一旋轉軸 C1‧‧‧第一輸送帶單元 C2‧‧‧第二輸送帶單元 C3‧‧‧第三輸送帶單元 C4‧‧‧第四輸送帶單元 L‧‧‧假想延長線 M、M'‧‧‧研磨對象體 M1、M1'‧‧‧第一研磨對象體 M2、M2'‧‧‧第二研磨對象體 P1、P2‧‧‧初始位置 P1'、P2'‧‧‧對準位置10, 10', 10``, 20‧‧‧ grinding device 110‧‧‧First grinding unit 111‧‧‧The first spindle 112‧‧‧The first body 120‧‧‧ First platform unit 130‧‧‧ First transfer unit 131‧‧‧ First Track 132‧‧‧The second track 132-1‧‧‧ track 2-1 132-2‧‧‧ track 2-2 133‧‧‧First gripper 135‧‧‧ Height adjustment unit 136‧‧‧Sixth track 137‧‧‧ First transport gripper 140‧‧‧ First camera unit 150‧‧‧ First adjustment unit 210‧‧‧Second grinding unit 211‧‧‧Second spindle 212‧‧‧Second body 220‧‧‧Second platform unit 230‧‧‧Second transfer unit 231‧‧‧ third track 232‧‧‧The fourth track 233‧‧‧Second gripper 240‧‧‧Second camera unit 300‧‧‧ Loading Department 400‧‧‧Unloading Department 1331‧‧‧First grasping department 1332‧‧‧Second grip 1371‧‧‧The first conveying and grasping department 1372‧‧‧Second conveying and grasping department A1‧‧‧First position A2‧‧‧Second position Ax1‧‧‧First rotation axis C1‧‧‧The first conveyor belt unit C2‧‧‧Second conveyor belt unit C3‧‧‧The third conveyor unit C4‧‧‧The fourth conveyor belt unit L‧‧‧Imaginary extension cord M, M'‧‧‧Object to be polished M1, M1'‧‧‧First object to be polished M2, M2'‧‧‧Second grinding object P1, P2‧‧‧ initial position P1', P2'‧‧‧Alignment position

圖1是概略性地表示本發明的第一實施例的研磨裝置的俯視圖。 圖2是用以對研磨裝置在圖1的第一位置的動作進行說明的概念圖。 圖3是用以對研磨裝置在圖1的第二位置的動作進行說明的概念圖。 圖4及圖5是概略性地表示本發明的另一實施方式的研磨裝置的俯視圖。 圖6是表示本發明的第二實施例的研磨裝置的立體圖。 圖7是圖6的研磨裝置的俯視圖。 圖8是圖6的第一移送單元的立體示意圖。 圖9是圖8的第一抓持器及第一調整單元的示意圖。 圖10是圖7的第一相機單元的示意圖。 圖11a至圖11c是依次表示第一抓持器將第一研磨對象體與第二研磨對象體裝設到第一平台單元的過程的圖。FIG. 1 is a plan view schematically showing a polishing device according to a first embodiment of the present invention. FIG. 2 is a conceptual diagram for explaining the operation of the polishing device at the first position in FIG. 1. FIG. 3 is a conceptual diagram for explaining the operation of the polishing device at the second position in FIG. 1. 4 and 5 are plan views schematically showing a polishing device according to another embodiment of the present invention. 6 is a perspective view showing a polishing device according to a second embodiment of the present invention. 7 is a plan view of the polishing device of FIG. 6. 8 is a schematic perspective view of the first transfer unit of FIG. 6. 9 is a schematic diagram of the first gripper and the first adjustment unit of FIG. 8. FIG. 10 is a schematic diagram of the first camera unit of FIG. 7. 11a to 11c are diagrams sequentially showing a process in which the first gripper attaches the first object to be polished and the second object to be polished to the first stage unit.

10‧‧‧研磨裝置 10‧‧‧Grinding device

110‧‧‧第一研磨單元 110‧‧‧First grinding unit

111‧‧‧第一主軸 111‧‧‧The first spindle

112‧‧‧第一本體部 112‧‧‧The first body

120‧‧‧第一平台單元 120‧‧‧ First platform unit

130‧‧‧第一移送單元 130‧‧‧ First transfer unit

131‧‧‧第一軌道 131‧‧‧ First Track

132‧‧‧第二軌道 132‧‧‧The second track

133‧‧‧第一抓持器 133‧‧‧First gripper

140‧‧‧第一相機單元 140‧‧‧ First camera unit

210‧‧‧第二研磨單元 210‧‧‧Second grinding unit

211‧‧‧第二主軸 211‧‧‧Second spindle

212‧‧‧第二本體部 212‧‧‧Second body

220‧‧‧第二平台單元 220‧‧‧Second platform unit

230‧‧‧第二移送單元 230‧‧‧Second transfer unit

231‧‧‧第三軌道 231‧‧‧ third track

232‧‧‧第四軌道 232‧‧‧The fourth track

233‧‧‧第二抓持器 233‧‧‧Second gripper

240‧‧‧第二相機單元 240‧‧‧Second camera unit

A1‧‧‧第一位置 A1‧‧‧First position

A2‧‧‧第二位置 A2‧‧‧Second position

C1‧‧‧第一輸送帶單元 C1‧‧‧The first conveyor belt unit

C2‧‧‧第二輸送帶單元 C2‧‧‧Second conveyor belt unit

C3‧‧‧第三輸送帶單元 C3‧‧‧The third conveyor unit

C4‧‧‧第四輸送帶單元 C4‧‧‧The fourth conveyor belt unit

L‧‧‧假想延長線 L‧‧‧Imaginary extension cord

M、M'‧‧‧研磨對象體 M, M'‧‧‧Object to be polished

Claims (11)

一種研磨裝置,包括:第一移送單元,具備沿第一方向延伸的第一軌道、沿與所述第一方向交叉的第二方向延伸的第二軌道、及沿所述第一軌道與所述第二軌道移送研磨對象體的第一抓持器;多個第一平台單元,裝設並固定由所述第一抓持器移送的所述研磨對象體;以及多個第一研磨單元,配置到與所述第一平台單元對應的位置,包括至少一個第一主軸,為了對所述研磨對象體進行研磨而能夠朝所述第一平台單元移動;第一相機單元,配置到所述第一抓持器朝所述第一方向移動的路徑上,感測由所述第一抓持器抓持的所述研磨對象體的對準狀態而產生所述研磨對象體的對準資訊;以及第一調整單元,從所述第一相機單元接收所述對準資訊且根據所述對準資訊修正所述研磨對象體的位置,所述第一調整單元連接到所述第一抓持器,以使所述第一抓持器旋轉,從而在所述研磨對象體被所述第一抓持器抓持的狀態下修正所述研磨對象體的位置,所述第一抓持器將由所述第一調整單元修正位置的所述研磨對象體裝設到所述第一平台單元。 A polishing device includes a first transfer unit including a first track extending in a first direction, a second track extending in a second direction crossing the first direction, and the first track and the A first gripper for transferring the object to be polished by the second track; a plurality of first platform units that install and fix the object to be transferred transferred by the first gripper; and a plurality of first polishing units To a position corresponding to the first platform unit, including at least one first main shaft, which can move toward the first platform unit for polishing the object to be polished; a first camera unit, configured to the first On the path of the gripper moving in the first direction, sensing the alignment state of the polishing target body gripped by the first gripper to generate the alignment information of the polishing target body; and An adjustment unit that receives the alignment information from the first camera unit and corrects the position of the object to be polished according to the alignment information, the first adjustment unit is connected to the first gripper, Rotating the first gripper to correct the position of the polishing object in a state where the polishing object is gripped by the first gripper, the first gripper will be controlled by the first gripper An object to be polished whose position is corrected by an adjustment unit is attached to the first platform unit. 如申請專利範圍第1項所述的研磨裝置,其中在具備兩個以上的所述第二軌道的情況下,多個所述第二軌道相互平行地配置。 The polishing device according to item 1 of the patent application range, wherein when there are two or more second rails, a plurality of second rails are arranged parallel to each other. 如申請專利範圍第1項所述的研磨裝置,其中所述第一抓持器朝與所述第一方向及所述第二方向交叉的第三方向抬高或降低所述研磨對象體。 The polishing device according to item 1 of the patent application range, wherein the first gripper raises or lowers the polishing object in a third direction crossing the first direction and the second direction. 如申請專利範圍第1項所述的研磨裝置,還包括:第二移送單元,具備沿所述第一方向延伸且平行於所述第一軌道的第三軌道、沿所述第二方向延伸的第四軌道、及沿所述第三軌道與所述第四軌道移送所述研磨對象體的第二抓持器;多個第二平台單元,裝設並固定由所述第二抓持器移送的所述研磨對象體;以及多個第二研磨單元,配置到與所述第二平台單元對應的位置,包括至少一個第二主軸,為了對所述研磨對象體進行研磨而能夠朝所述第二平台單元移動。 The polishing device according to item 1 of the patent application scope further includes: a second transfer unit including a third track extending in the first direction and parallel to the first track, and extending in the second direction A fourth rail and a second gripper for transferring the object to be polished along the third rail and the fourth rail; a plurality of second platform units installed and fixed for transfer by the second gripper The object to be polished; and a plurality of second polishing units, arranged at positions corresponding to the second platform unit, including at least one second spindle, and capable of facing the first object in order to polish the object to be polished Two platform units move. 如申請專利範圍第4項所述的研磨裝置,其中所述第二研磨單元以平行於所述第一方向的假想延長線為基準而與所述第一研磨單元對稱地配置。 The polishing device according to item 4 of the patent application range, wherein the second polishing unit is arranged symmetrically with the first polishing unit with reference to an imaginary extension line parallel to the first direction. 如申請專利範圍第4項所述的研磨裝置,其中所述第一研磨單元與所述第二研磨單元為相同的研磨單元。 The polishing device according to item 4 of the patent application scope, wherein the first polishing unit and the second polishing unit are the same polishing unit. 如申請專利範圍第1項所述的研磨裝置,其中所述第一相機單元能夠根據所述研磨對象體的尺寸調整位置。 The polishing device according to item 1 of the patent application range, wherein the first camera unit can adjust the position according to the size of the object to be polished. 如申請專利範圍第1項所述的研磨裝置,其中所述第二軌道的個數與所述第一平台單元的個數不同。 The grinding device according to item 1 of the patent application scope, wherein the number of the second rails is different from the number of the first platform units. 如申請專利範圍第1項所述的研磨裝置,其中所述第一抓持器以與多個所述第一平台單元對應的方式具備多個抓持器部。 The polishing device according to item 1 of the patent application range, wherein the first gripper includes a plurality of gripper portions corresponding to the plurality of first stage units. 如申請專利範圍第3項所述的研磨裝置,其中所述研磨對象體在通過所述第一軌道朝所述第一方向移送後,通過所述第二軌道朝所述第二方向移送,朝所述第三方向下降而裝設到所述第一平台單元。 The polishing device according to item 3 of the patent application scope, wherein the object to be polished is transferred to the second direction through the second track after being transferred to the first direction through the first track, toward The third direction descends and is attached to the first platform unit. 一種研磨裝置,包括:多個第一研磨單元,包括至少一個第一主軸,沿第一方向配置;多個第一平台單元,配置到與所述第一研磨單元對應的位置,裝設研磨對象體;第一移送單元,具備第一抓持器,所述第一抓持器沿所述第一方向延伸的第一軌道、沿所述第一軌道移動且沿與所述第一方向交叉的第二方向延伸的第二軌道、及連接到所述第二軌道而通過所述第二軌道的移動朝所述第一方向移動或沿所述第二軌道朝所述第二方向移動來將所述研磨對象體搬送到所述第一平台單元;第一相機單元,配置到所述第一抓持器朝所述第一方向移動的路徑上,感測由所述第一抓持器抓持的所述研磨對象體的對準狀態而產生所述研磨對象體的對準資訊;以及第一調整單元,從所述第一相機單元接收所述對準資訊且根據所述對 準資訊修正所述研磨對象體的位置,所述第一調整單元連接到所述第一抓持器,以使所述第一抓持器旋轉,從而在所述研磨對象體被所述第一抓持器抓持的狀態下修正所述研磨對象體的位置,所述第一抓持器將由所述第一調整單元修正位置的所述研磨對象體裝設到所述第一平台單元。 A grinding device, comprising: a plurality of first grinding units, including at least one first spindle, arranged along a first direction; a plurality of first platform units, arranged to a position corresponding to the first grinding unit, equipped with grinding objects Body; a first transfer unit, provided with a first gripper, the first gripper extends along the first direction of the first track, moves along the first track and crosses the first direction A second rail extending in the second direction and connected to the second rail to move the second rail toward the first direction or along the second rail toward the second direction The object to be polished is transported to the first platform unit; a first camera unit is arranged on a path of the first gripper moving in the first direction, sensing gripping by the first gripper The alignment state of the object to be polished generates alignment information of the object to be polished; and a first adjustment unit that receives the alignment information from the first camera unit and according to the pair Quasi-information corrects the position of the object to be polished, the first adjustment unit is connected to the first gripper to rotate the first gripper, so that The gripper corrects the position of the object to be polished while being gripped, and the first gripper attaches the object to be polished whose position is corrected by the first adjustment unit to the first platform unit.
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