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TW373367B - Surface acoustic wave filter - Google Patents

Surface acoustic wave filter

Info

Publication number
TW373367B
TW373367B TW087100352A TW87100352A TW373367B TW 373367 B TW373367 B TW 373367B TW 087100352 A TW087100352 A TW 087100352A TW 87100352 A TW87100352 A TW 87100352A TW 373367 B TW373367 B TW 373367B
Authority
TW
Taiwan
Prior art keywords
piezoelectric substrate
substrate
lambda
pair
electrode fingers
Prior art date
Application number
TW087100352A
Other languages
English (en)
Inventor
Michio Kadota
Kazuhiko Morozumi
Haruo Morii
Original Assignee
Murata Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co filed Critical Murata Manufacturing Co
Application granted granted Critical
Publication of TW373367B publication Critical patent/TW373367B/zh

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6423—Means for obtaining a particular transfer characteristic
    • H03H9/6433—Coupled resonator filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
    • H03H3/10—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves for obtaining desired frequency or temperature coefficient
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02637—Details concerning reflective or coupling arrays
    • H03H9/02669—Edge reflection structures, i.e. resonating structures without metallic reflectors, e.g. Bleustein-Gulyaev-Shimizu [BGS], shear horizontal [SH], shear transverse [ST], Love waves devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6423—Means for obtaining a particular transfer characteristic
    • H03H9/6433—Coupled resonator filters
    • H03H9/644—Coupled resonator filters having two acoustic tracks
    • H03H9/6456—Coupled resonator filters having two acoustic tracks being electrically coupled
    • H03H9/6459—Coupled resonator filters having two acoustic tracks being electrically coupled via one connecting electrode
    • H03H9/6463—Coupled resonator filters having two acoustic tracks being electrically coupled via one connecting electrode the tracks being electrically cascaded
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02259—Driving or detection means
    • H03H9/02275—Comb electrodes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02614—Treatment of substrates, e.g. curved, spherical, cylindrical substrates ensuring closed round-about circuits for the acoustical waves
    • H03H9/02622—Treatment of substrates, e.g. curved, spherical, cylindrical substrates ensuring closed round-about circuits for the acoustical waves of the surface, including back surface
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02637—Details concerning reflective or coupling arrays
    • H03H9/02779—Continuous surface reflective arrays
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02842—Means for compensation or elimination of undesirable effects of reflections

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
TW087100352A 1997-01-20 1998-01-13 Surface acoustic wave filter TW373367B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP781297 1997-01-20
JP35779097A JP3233087B2 (ja) 1997-01-20 1997-12-25 弾性表面波フィルタ

Publications (1)

Publication Number Publication Date
TW373367B true TW373367B (en) 1999-11-01

Family

ID=26342185

Family Applications (1)

Application Number Title Priority Date Filing Date
TW087100352A TW373367B (en) 1997-01-20 1998-01-13 Surface acoustic wave filter

Country Status (6)

Country Link
US (1) US5977686A (zh)
EP (1) EP0854571B1 (zh)
JP (1) JP3233087B2 (zh)
KR (1) KR100280609B1 (zh)
DE (1) DE69839954D1 (zh)
TW (1) TW373367B (zh)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3289674B2 (ja) * 1998-05-21 2002-06-10 株式会社村田製作所 表面波フィルタ装置、共用器、通信機装置
JP3717034B2 (ja) * 1998-11-10 2005-11-16 株式会社村田製作所 弾性表面波素子
JP3298538B2 (ja) * 1999-02-16 2002-07-02 株式会社村田製作所 端面反射縦結合型ｓａｗ共振子フィルタ
JP3341699B2 (ja) * 1999-02-18 2002-11-05 株式会社村田製作所 端面反射型表面波装置
JP2000244275A (ja) * 1999-02-19 2000-09-08 Murata Mfg Co Ltd Ｓａｗ共振子フィルタ
JP3587354B2 (ja) * 1999-03-08 2004-11-10 株式会社村田製作所 横結合共振子型表面波フィルタ及び縦結合共振子型表面波フィルタ
JP2000295071A (ja) * 1999-04-07 2000-10-20 Murata Mfg Co Ltd 端面反射型表面波装置
JP3918433B2 (ja) * 1999-04-28 2007-05-23 セイコーエプソン株式会社 横２重モードｓａｗフィルタ
JP3568025B2 (ja) * 1999-05-14 2004-09-22 株式会社村田製作所 表面波装置及び通信機装置
US6429569B1 (en) * 1999-07-22 2002-08-06 Murata Manufacturing Co., Ltd. Surface acoustic wave device and communication apparatus
JP3397195B2 (ja) 2000-02-28 2003-04-14 株式会社村田製作所 端面反射型表面波フィルタ
JP3402311B2 (ja) * 2000-05-19 2003-05-06 株式会社村田製作所 弾性表面波装置
FR2811828B1 (fr) * 2000-07-13 2002-10-25 Thomson Csf Dispositif a ondes acoustiques comprenant des domaines de polarisation alternee
JP3797155B2 (ja) * 2000-09-06 2006-07-12 株式会社村田製作所 端面反射型表面波装置の周波数調整方法
US6873226B2 (en) * 2001-03-19 2005-03-29 Murata Manufacturing Co., Ltd. Edge-reflection surface acoustic wave filter
JP3744479B2 (ja) * 2001-09-28 2006-02-08 株式会社村田製作所 表面波装置及び通信機
JP4254772B2 (ja) * 2005-01-17 2009-04-15 セイコーエプソン株式会社 弾性表面波装置
JP2008078739A (ja) * 2006-09-19 2008-04-03 Fujitsu Media Device Kk 弾性波デバイスおよびフィルタ
JP6335492B2 (ja) * 2013-11-29 2018-05-30 太陽誘電株式会社 弾性波素子
CN110504943B (zh) * 2019-08-26 2023-01-13 江苏大学 一种叉指换能器阵列及制作方法
RU201785U1 (ru) * 2020-08-24 2021-01-13 Акционерное общество "Омский научно-исследовательский институт приборостроения" (АО "ОНИИП") Веерный фильтр на поверхностных акустических волнах
CN112803916A (zh) * 2021-02-20 2021-05-14 偲百创(深圳)科技有限公司 谐振器件和滤波器
RU208596U1 (ru) * 2021-08-04 2021-12-27 Акционерное общество "Омский научно-исследовательский институт приборостроения" (АО "ОНИИП") Трехпреобразовательный веерный фильтр на поверхностных акустических волнах

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5264751A (en) * 1989-10-20 1993-11-23 Thomson-Csf Unilateral surface wave transducer
JPH0426211A (ja) * 1990-05-21 1992-01-29 Murata Mfg Co Ltd 表面波装置
FR2695771B1 (fr) * 1992-09-15 1994-10-28 Thomson Csf Transducteur d'ondes unidirectionnel.
TW256966B (zh) * 1994-03-04 1995-09-11 Murata Manufacturing Co
JP3196499B2 (ja) * 1994-05-30 2001-08-06 株式会社村田製作所 表面波共振子
US5793147A (en) * 1994-05-30 1998-08-11 Murata Manufacturing Co., Ltd. Surface wave resonator having single component including a plurality of resonant units
JPH08204498A (ja) * 1995-01-24 1996-08-09 Murata Mfg Co Ltd 端面反射型表面波装置
JP3106912B2 (ja) * 1995-06-30 2000-11-06 株式会社村田製作所 端面反射型表面波装置の製造方法
JPH0969751A (ja) * 1995-08-30 1997-03-11 Murata Mfg Co Ltd 弾性表面波フィルタ

Also Published As

Publication number Publication date
US5977686A (en) 1999-11-02
EP0854571B1 (en) 2008-09-03
DE69839954D1 (de) 2008-10-16
JPH10261938A (ja) 1998-09-29
JP3233087B2 (ja) 2001-11-26
KR100280609B1 (ko) 2001-02-01
KR19980070645A (ko) 1998-10-26
EP0854571A2 (en) 1998-07-22
EP0854571A3 (en) 2000-07-26

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