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TW200709947A - Electrostatic actuator, droplet discharge head, method for driving droplet discharge head, and method for manufacturing electrostatic actuator - Google Patents

Electrostatic actuator, droplet discharge head, method for driving droplet discharge head, and method for manufacturing electrostatic actuator

Info

Publication number
TW200709947A
TW200709947A TW095126773A TW95126773A TW200709947A TW 200709947 A TW200709947 A TW 200709947A TW 095126773 A TW095126773 A TW 095126773A TW 95126773 A TW95126773 A TW 95126773A TW 200709947 A TW200709947 A TW 200709947A
Authority
TW
Taiwan
Prior art keywords
electrostatic actuator
discharge head
droplet discharge
diaphragm
driving
Prior art date
Application number
TW095126773A
Other languages
English (en)
Inventor
Yoshifumi Hano
Masahiro Fujii
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of TW200709947A publication Critical patent/TW200709947A/zh

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14314—Structure of ink jet print heads with electrostatically actuated membrane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14411—Groove in the nozzle plate
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
TW095126773A 2005-08-01 2006-07-21 Electrostatic actuator, droplet discharge head, method for driving droplet discharge head, and method for manufacturing electrostatic actuator TW200709947A (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2005223217 2005-08-01
JP2005223218 2005-08-01
JP2005223216 2005-08-01
JP2006161130A JP4424331B2 (ja) 2005-08-01 2006-06-09 静電アクチュエータ、液滴吐出ヘッド、液滴吐出ヘッドの駆動方法及び静電アクチュエータの製造方法

Publications (1)

Publication Number Publication Date
TW200709947A true TW200709947A (en) 2007-03-16

Family

ID=37401022

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095126773A TW200709947A (en) 2005-08-01 2006-07-21 Electrostatic actuator, droplet discharge head, method for driving droplet discharge head, and method for manufacturing electrostatic actuator

Country Status (4)

Country Link
US (2) US7661794B2 (zh)
EP (1) EP1749661A3 (zh)
JP (1) JP4424331B2 (zh)
TW (1) TW200709947A (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI450827B (zh) * 2007-07-31 2014-09-01 Hewlett Packard Development Co 致動器
TWI612330B (zh) * 2012-08-24 2018-01-21 王崇智 用於高電壓液滴致動之裝置

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7956497B2 (en) * 2006-09-29 2011-06-07 Sanyo Electric Co., Ltd. Electret device and electrostatic induction conversion apparatus comprising the same
JP4514782B2 (ja) * 2006-11-10 2010-07-28 三洋電機株式会社 エレクトレット素子および静電動作装置
JP4834682B2 (ja) * 2008-01-25 2011-12-14 株式会社日立製作所 液体プリズム及びそれを用いたプロジェクタ
US9085152B2 (en) * 2008-05-22 2015-07-21 Fujifilm Corporation Etching piezoelectric material
JP5200746B2 (ja) * 2008-08-05 2013-06-05 セイコーエプソン株式会社 静電アクチュエータ、液滴吐出ヘッド、液滴吐出装置、液滴吐出ヘッドのの製造方法
EP2342081B1 (en) * 2008-10-31 2014-03-19 Hewlett-Packard Development Company, L.P. Electrostatic liquid-ejection actuation mechanism
TWI449435B (zh) * 2009-08-06 2014-08-11 Merry Electronics Co Ltd 磁性振膜及其製造方法
FR2954582B1 (fr) * 2009-12-23 2017-11-03 Commissariat A L'energie Atomique Dispositif electromecanique a base d'electret, et son procede de fabrication
JP5987573B2 (ja) * 2012-09-12 2016-09-07 セイコーエプソン株式会社 光学モジュール、電子機器、及び駆動方法
JP6191257B2 (ja) * 2013-06-11 2017-09-06 株式会社リコー 分極処理装置、圧電素子の製造方法
CN107310271B (zh) * 2016-04-27 2019-04-26 东芝泰格有限公司 喷墨头及喷墨记录装置
JP7172044B2 (ja) * 2017-09-12 2022-11-16 セイコーエプソン株式会社 液体吐出ヘッド、液体吐出装置、圧電デバイス、および超音波センサー
JP7115275B2 (ja) * 2018-12-10 2022-08-09 セイコーエプソン株式会社 液体噴射ヘッドおよび液体噴射装置
CN113921398A (zh) * 2021-08-27 2022-01-11 华南师范大学 一种低功耗、高线性度和识别率的喷墨打印突触晶体管及其制备方法
CN113921616A (zh) * 2021-08-27 2022-01-11 华南师范大学 一种低压驱动喷墨打印柔性突触晶体管及其制备方法

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04344250A (ja) 1991-05-22 1992-11-30 Mita Ind Co Ltd インクジェットプリントシステムに用いるインク吐出装置
US5652609A (en) * 1993-06-09 1997-07-29 J. David Scholler Recording device using an electret transducer
US6977061B2 (en) * 1997-04-04 2005-12-20 Ethicon Endo-Surgery, Inc. Method and apparatus for sterilizing a lumen device
JP3472493B2 (ja) * 1998-11-30 2003-12-02 ホシデン株式会社 半導体エレクトレットコンデンサーマイクロホン
JP2000280490A (ja) 1999-03-30 2000-10-10 Fuji Xerox Co Ltd インクジェット記録ヘッドおよびインクジェット記録装置
JP2002248756A (ja) 2001-02-27 2002-09-03 Ricoh Co Ltd インクジェットヘッド
JP2003282360A (ja) 2002-03-26 2003-10-03 Uchitsugu Minami エレクトレット及びエレクトレット製造方法
WO2003086012A1 (fr) * 2002-04-11 2003-10-16 Rion Co.,Ltd Convertisseur electroacoustique
JP4138421B2 (ja) 2002-09-24 2008-08-27 株式会社リコー 液滴吐出ヘッド
JP4185379B2 (ja) 2003-02-24 2008-11-26 株式会社リコー 画像形成装置
JP2004255614A (ja) 2003-02-24 2004-09-16 Ricoh Co Ltd 液滴吐出ヘッド及びアクチュエータ
TWI314304B (en) * 2003-05-05 2009-09-01 Inventio Ag System for security checking or transport of persons by a lift installation and a method for operating this system
US7265448B2 (en) * 2004-01-26 2007-09-04 Marvell World Trade Ltd. Interconnect structure for power transistors
JP2005138385A (ja) 2003-11-06 2005-06-02 Seiko Epson Corp 液滴吐出ヘッドの製造方法、液滴吐出ヘッド及び液滴吐出装置
JP2005144594A (ja) 2003-11-14 2005-06-09 Ricoh Co Ltd アクチュエータ装置、アクチュエータ、液滴吐出装置、液滴吐出ヘッド
JP2005161706A (ja) 2003-12-03 2005-06-23 Seiko Epson Corp 液滴吐出ヘッド、その製造方法及び液滴吐出ヘッドを備えた液滴吐出装置
JP4419563B2 (ja) 2003-12-25 2010-02-24 パナソニック株式会社 エレクトレットコンデンサー
JP2005197826A (ja) * 2003-12-26 2005-07-21 Fujitsu Ltd ネットワーク上の複数ノードの一元管理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI450827B (zh) * 2007-07-31 2014-09-01 Hewlett Packard Development Co 致動器
TWI612330B (zh) * 2012-08-24 2018-01-21 王崇智 用於高電壓液滴致動之裝置

Also Published As

Publication number Publication date
EP1749661A3 (en) 2007-12-26
JP4424331B2 (ja) 2010-03-03
US20070024672A1 (en) 2007-02-01
US20090295877A1 (en) 2009-12-03
US8087754B2 (en) 2012-01-03
JP2007062361A (ja) 2007-03-15
EP1749661A2 (en) 2007-02-07
US7661794B2 (en) 2010-02-16

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