MX9305342A - Detector de presion en un rango de baja a sobrepresion elevada. - Google Patents
Detector de presion en un rango de baja a sobrepresion elevada.Info
- Publication number
- MX9305342A MX9305342A MX9305342A MX9305342A MX9305342A MX 9305342 A MX9305342 A MX 9305342A MX 9305342 A MX9305342 A MX 9305342A MX 9305342 A MX9305342 A MX 9305342A MX 9305342 A MX9305342 A MX 9305342A
- Authority
- MX
- Mexico
- Prior art keywords
- diaphragm
- base plate
- support posts
- flex
- range
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
- G01L19/0618—Overload protection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Abstract
Un detector en un rango bajo incluye una placa base de material frágil y un placa de diafragma montada sobre la placa base u sellada al rededor de una periferia a la placa base. Se introducen las presiones para hacer que el diafragma se flexione hacia la placa base, y la flexión del diafragma es detectada por medio de indicadores de tensión para indicar una indicación de la presión. El diafragma se proporciona con una pluralidad de postes de soporte individuales sobre una superficie lateral de la placa base, de tal manera que cuando el diafragma se flexiona hacia la placa base, bajo sobrepresiones elevadas, los postes de soporte soportaran el diafragma contra el movimiento para evitar el fallo o rompimiento del diafragma. El numero de postes de soporte pueden variar según se desee. En una forma preferida de la invención, la placa base se proporciona con una capa muy delgada de dioxido de silicio, el cual es un buen aislante eléctrico y el cual el también sirve para ayudar en el manejo del movimiento ligero de los postes de soporte a medida que tocan la superficie de la placa base, para reducir el aumento de tensión en el diafragma a medida que aumenta la sobrepresión.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US07/938,954 US5333504A (en) | 1992-09-01 | 1992-09-01 | High overpressure low range pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| MX9305342A true MX9305342A (es) | 1994-06-30 |
Family
ID=25472280
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| MX9305342A MX9305342A (es) | 1992-09-01 | 1993-09-01 | Detector de presion en un rango de baja a sobrepresion elevada. |
Country Status (18)
| Country | Link |
|---|---|
| US (1) | US5333504A (es) |
| EP (1) | EP0670995B1 (es) |
| JP (1) | JP3327553B2 (es) |
| KR (1) | KR950703140A (es) |
| CN (1) | CN1051155C (es) |
| AU (1) | AU680430B2 (es) |
| BR (1) | BR9306946A (es) |
| CA (1) | CA2141688A1 (es) |
| DE (1) | DE69318847T2 (es) |
| FI (1) | FI950912A0 (es) |
| HU (1) | HUT70345A (es) |
| IL (1) | IL106838A (es) |
| MX (1) | MX9305342A (es) |
| NO (1) | NO950777L (es) |
| PL (1) | PL173699B1 (es) |
| RU (1) | RU2137099C1 (es) |
| SG (1) | SG43764A1 (es) |
| WO (1) | WO1994005986A1 (es) |
Families Citing this family (34)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19521275A1 (de) * | 1995-06-10 | 1996-12-12 | Leybold Ag | Gasdurchlaß mit selektiv wirkender Durchtrittsfläche sowie Verfahren zur Herstellung der Durchtrittsfläche |
| DE19521832A1 (de) * | 1995-06-16 | 1996-12-19 | Bosch Gmbh Robert | Druckmeßvorrichtung |
| US5824910A (en) * | 1997-04-16 | 1998-10-20 | The United States Of America As Represented By The Secretary Of The Navy | Miniature hydrostat fabricated using multiple microelectromechanical processes |
| US20020003274A1 (en) * | 1998-08-27 | 2002-01-10 | Janusz Bryzek | Piezoresistive sensor with epi-pocket isolation |
| US6006607A (en) * | 1998-08-31 | 1999-12-28 | Maxim Integrated Products, Inc. | Piezoresistive pressure sensor with sculpted diaphragm |
| US6346742B1 (en) | 1998-11-12 | 2002-02-12 | Maxim Integrated Products, Inc. | Chip-scale packaged pressure sensor |
| US6351996B1 (en) | 1998-11-12 | 2002-03-05 | Maxim Integrated Products, Inc. | Hermetic packaging for semiconductor pressure sensors |
| US6229190B1 (en) | 1998-12-18 | 2001-05-08 | Maxim Integrated Products, Inc. | Compensated semiconductor pressure sensor |
| US6425290B2 (en) | 2000-02-11 | 2002-07-30 | Rosemount Inc. | Oil-less differential pressure sensor |
| US6642594B2 (en) * | 2001-12-06 | 2003-11-04 | Kulite Semiconductor Products, Inc. | Single chip multiple range pressure transducer device |
| US6955073B2 (en) * | 2002-10-16 | 2005-10-18 | Alcon, Inc. | Pressure sensing in surgical console |
| US6868720B2 (en) * | 2002-10-16 | 2005-03-22 | Alcon, Inc. | Testing of pressure sensor in surgical cassette |
| US6941813B2 (en) * | 2003-06-30 | 2005-09-13 | Alcon, Inc. | Noninvasive pressure sensing assembly |
| JP5217163B2 (ja) * | 2004-05-12 | 2013-06-19 | セイコーエプソン株式会社 | 圧力センサ |
| US7997143B2 (en) | 2009-04-09 | 2011-08-16 | Kulite Semiconductor Products, Inc. | Internally switched multiple range transducer |
| US8760637B2 (en) | 2010-08-30 | 2014-06-24 | Alcon Research, Ltd. | Optical sensing system including electronically switched optical magnification |
| FR2982023B1 (fr) * | 2011-10-26 | 2015-03-06 | Auxitrol Sa | Structure micromecanique a membrane deformable et a protection contre de fortes deformations |
| US8806964B2 (en) | 2012-03-23 | 2014-08-19 | Honeywell International Inc. | Force sensor |
| US9003899B2 (en) | 2012-03-23 | 2015-04-14 | Honeywell International Inc. | Force sensor |
| US9003897B2 (en) | 2012-05-10 | 2015-04-14 | Honeywell International Inc. | Temperature compensated force sensor |
| DE102012109587A1 (de) * | 2012-10-09 | 2014-04-10 | Endress + Hauser Gmbh + Co. Kg | Differenzdrucksensor und Verfahren zu seiner Herstellung |
| US9410861B2 (en) * | 2014-03-25 | 2016-08-09 | Honeywell International Inc. | Pressure sensor with overpressure protection |
| CN103994854A (zh) * | 2014-04-22 | 2014-08-20 | 江苏森博传感技术有限公司 | 一种基于微机电系统技术的硅电容真空传感器 |
| US9719872B2 (en) * | 2015-09-29 | 2017-08-01 | Rosemount Inc. | High over-pressure capable silicon die pressure sensor with extended pressure signal output |
| US10060813B2 (en) | 2015-09-29 | 2018-08-28 | Rosemount Inc. | High over-pressure capable silicon die pressure sensor |
| US9963340B2 (en) * | 2015-12-03 | 2018-05-08 | Honeywell International Inc. | Pressure sensor die over pressure protection for high over pressure to operating span ratios |
| US10197462B2 (en) | 2016-05-25 | 2019-02-05 | Honeywell International Inc. | Differential pressure sensor full overpressure protection device |
| US10203258B2 (en) | 2016-09-26 | 2019-02-12 | Rosemount Inc. | Pressure sensor diaphragm with overpressure protection |
| US11371899B2 (en) | 2018-05-17 | 2022-06-28 | Rosemount Inc. | Measuring element with an extended permeation resistant layer |
| US11815412B2 (en) * | 2018-11-15 | 2023-11-14 | Intuitive Surgical Operations, Inc. | Strain sensor with contoured deflection surface |
| EP4031049A1 (en) | 2019-09-17 | 2022-07-27 | Intuitive Surgical Operations, Inc. | Compact, differential, coaxial inductive force sensor |
| WO2021076765A1 (en) | 2019-10-17 | 2021-04-22 | Intuitive Surgical Operations, Inc. | Surgical tool with nested shaft tubes |
| EP4261513A1 (en) * | 2022-04-14 | 2023-10-18 | Infineon Technologies Dresden GmbH & Co . KG | Pressure sensing device |
| US20240125658A1 (en) * | 2022-10-18 | 2024-04-18 | Measurement Specialties, Inc. | Membrane of a sensor with multiple ranges |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1226806B (de) * | 1960-11-29 | 1966-10-13 | Siemens Ag | Kraftmessdose |
| US3341794A (en) * | 1965-07-26 | 1967-09-12 | Statham Instrument Inc | Transducers with substantially linear response characteristics |
| US4093933A (en) * | 1976-05-14 | 1978-06-06 | Becton, Dickinson Electronics Company | Sculptured pressure diaphragm |
| US4236137A (en) * | 1979-03-19 | 1980-11-25 | Kulite Semiconductor Products, Inc. | Semiconductor transducers employing flexure frames |
| JPS58151536A (ja) * | 1982-03-05 | 1983-09-08 | Hitachi Ltd | 差圧検出器 |
| US5062302A (en) * | 1988-04-29 | 1991-11-05 | Schlumberger Industries, Inc. | Laminated semiconductor sensor with overpressure protection |
| US4905575A (en) * | 1988-10-20 | 1990-03-06 | Rosemount Inc. | Solid state differential pressure sensor with overpressure stop and free edge construction |
| US4879627A (en) * | 1988-12-30 | 1989-11-07 | United Technologies Corporation | Differential capacitive pressure sensor with over-pressure protection |
| US4930043A (en) * | 1989-02-28 | 1990-05-29 | United Technologies | Closed-loop capacitive accelerometer with spring constraint |
| US4930042A (en) * | 1989-02-28 | 1990-05-29 | United Technologies | Capacitive accelerometer with separable damping and sensitivity |
| DE58905475D1 (de) * | 1989-05-30 | 1993-10-07 | Siemens Ag | Drucksensor und Verfahren zu seiner Herstellung. |
| US4949581A (en) * | 1989-06-15 | 1990-08-21 | Rosemount Inc. | Extended measurement capability transmitter having shared overpressure protection means |
| DE4111119A1 (de) * | 1991-04-03 | 1992-10-08 | Univ Chemnitz Tech | Stapelbare mikromechanische kapazitive druckmesszelle |
-
1992
- 1992-09-01 US US07/938,954 patent/US5333504A/en not_active Expired - Lifetime
-
1993
- 1993-08-30 SG SG1996000673A patent/SG43764A1/en unknown
- 1993-08-30 HU HU9500617A patent/HUT70345A/hu unknown
- 1993-08-30 IL IL10683893A patent/IL106838A/xx not_active IP Right Cessation
- 1993-08-30 KR KR1019950700731A patent/KR950703140A/ko not_active IP Right Cessation
- 1993-08-30 AU AU48412/93A patent/AU680430B2/en not_active Ceased
- 1993-08-30 EP EP93921244A patent/EP0670995B1/en not_active Expired - Lifetime
- 1993-08-30 RU RU95106595A patent/RU2137099C1/ru active
- 1993-08-30 CA CA002141688A patent/CA2141688A1/en not_active Abandoned
- 1993-08-30 JP JP50736294A patent/JP3327553B2/ja not_active Expired - Fee Related
- 1993-08-30 WO PCT/US1993/008142 patent/WO1994005986A1/en active IP Right Grant
- 1993-08-30 BR BR9306946A patent/BR9306946A/pt not_active IP Right Cessation
- 1993-08-30 PL PL93307591A patent/PL173699B1/pl unknown
- 1993-08-30 DE DE69318847T patent/DE69318847T2/de not_active Expired - Lifetime
- 1993-08-31 CN CN93118813A patent/CN1051155C/zh not_active Expired - Lifetime
- 1993-09-01 MX MX9305342A patent/MX9305342A/es not_active IP Right Cessation
-
1995
- 1995-02-28 FI FI950912A patent/FI950912A0/fi unknown
- 1995-02-28 NO NO950777A patent/NO950777L/no not_active Application Discontinuation
Also Published As
| Publication number | Publication date |
|---|---|
| IL106838A (en) | 1997-08-14 |
| HUT70345A (en) | 1995-09-28 |
| CN1092164A (zh) | 1994-09-14 |
| DE69318847D1 (de) | 1998-07-02 |
| JPH08500903A (ja) | 1996-01-30 |
| AU680430B2 (en) | 1997-07-31 |
| FI950912A (fi) | 1995-02-28 |
| WO1994005986A1 (en) | 1994-03-17 |
| CN1051155C (zh) | 2000-04-05 |
| BR9306946A (pt) | 1999-01-12 |
| EP0670995A1 (en) | 1995-09-13 |
| US5333504A (en) | 1994-08-02 |
| EP0670995A4 (en) | 1996-05-01 |
| SG43764A1 (en) | 1997-11-14 |
| JP3327553B2 (ja) | 2002-09-24 |
| HU9500617D0 (en) | 1995-04-28 |
| EP0670995B1 (en) | 1998-05-27 |
| PL173699B1 (pl) | 1998-04-30 |
| PL307591A1 (en) | 1995-05-29 |
| RU95106595A (ru) | 1996-11-20 |
| AU4841293A (en) | 1994-03-29 |
| CA2141688A1 (en) | 1994-03-17 |
| RU2137099C1 (ru) | 1999-09-10 |
| NO950777D0 (no) | 1995-02-28 |
| KR950703140A (ko) | 1995-08-23 |
| NO950777L (no) | 1995-02-28 |
| FI950912A0 (fi) | 1995-02-28 |
| IL106838A0 (en) | 1994-08-26 |
| DE69318847T2 (de) | 1999-01-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FG | Grant or registration | ||
| MM | Annulment or lapse due to non-payment of fees |