KR950703140A - 고 초과압력 저범위 압력센서(high overpressure low range pressure sensor) - Google Patents
고 초과압력 저범위 압력센서(high overpressure low range pressure sensor) Download PDFInfo
- Publication number
- KR950703140A KR950703140A KR1019950700731A KR19950700731A KR950703140A KR 950703140 A KR950703140 A KR 950703140A KR 1019950700731 A KR1019950700731 A KR 1019950700731A KR 19950700731 A KR19950700731 A KR 19950700731A KR 950703140 A KR950703140 A KR 950703140A
- Authority
- KR
- South Korea
- Prior art keywords
- base plate
- diaphragm
- pressure sensor
- posts
- web portion
- Prior art date
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract 6
- 235000012239 silicon dioxide Nutrition 0.000 claims abstract 3
- 239000000377 silicon dioxide Substances 0.000 claims abstract 3
- 239000000463 material Substances 0.000 claims abstract 2
- 235000014653 Carica parviflora Nutrition 0.000 claims 1
- 241000243321 Cnidaria Species 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 239000000615 nonconductor Substances 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
- G01L19/0618—Overload protection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Abstract
저범위 압력센서(10)는 메짐성 재료의 베이스판(12)과, 베이스판(12)상에 장착되고 주변부(16)둘레가 베이스판(12)에 밀봉되는 진동판 어셈블리(14)를 포함한다. 중앙 진동판부(18)가 베이스판(12)을 향해 편향하도록 압력을 받게되고, 진동판(18)의 편향은 압력 표시를 제공도록 스트레인 게이지 (32)를 통해 감지된다. 진동판(18)에는 베이스판(12)을 접하는 측면상에 개별적인 복수의 지지포스트(36)가 제공되어서 진동판(18)이 고초과 압력하에서 베이스판(12)을 향해 편향될때, 지지포스트(36)는 진동판(18)의 고장 또는 파손을 방지하기 위해 이동에 대하여 진동판(18)을 지지하게 된다. 지지 포스트(36)의 숫자는 필요한 만큼 변화될 수 있다. 본 발명의 바람직한 형태에 있어서, 베이스판은 초과압력 증가로서 진동판(18)내의 응력 생성을 감소시키시 위해 지지포스트가 베이스판(12)의 표면과 접촉함에 따라 지지포스트(36)의 약간의 이동을 조정가능하고 양호한 전기 절연체인 이산화 실리콘의 매우 얇은층(40)으로 제공된다.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명에 따라 제조된 압력을 감지하기 위해 사용되는 전형적안 센서의 단면도이다,
제1A도는 진동판층이 제거된 베이스판 표면을 도시한 도면이다,
제2도는 제1도의 2-2선을 따라 절취된 제1도의 진동판 부분의 지지포스트를 도시한 도면이다,
제3도는 베이스층을 최소 접촉시에서 완전한 초과 압력 상태로의 지지포스트의 이동을 예시하는 도면이다,
제4도는 인접한 포스트가 없이 에칭되는 구성으로 개별 포스트의 에칭면의 세부를 도시한 단일 지지포스트의 세부 확대도이다,
제5도는 제4도의 5-5선을 따라 절취한 단면도이다.
Claims (9)
- 베이스판과, 베이스판에 고정되는 림과 베이스판을 향해 힘이 가해짐에 따라 편향가능한 중앙 진동판 웨브부를 포함하는 진동판을 구비하는 압력센서에 있어서, 상기편향 가능한 웨브부와 일체식으로 상기판들중 하나에 형성되고, 상기 편향가능한 웨브부가 사전 선택된 정도로 상기 베이스판을 향해 편향될때 정지부를 형성하는 복수의 포스트를 구비하는 것을 특징으로 하는 압력센서.
- 제1항에 있어서, 상기 포스트는 상기 진동판의 편향 가능한 웨브부와 일체식으로 형성되고, 베이스판과 결합하는 단부를 갖는 것을 특징으로 하는 압력센서.
- 제1항에 있어서, 상기포스트는 상기 진동판의 편향가능한 웨브부와 일체식으로 형성되고, 진동판이 상기 배이스판을 향해 사전 선택된 정도로 편항될때 베이스판의 접합면을 포함하는 외측 단부면을 갖는 것을 특징으로 하는 압력센서.
- 제3항에 있어서, 상기 베이스판 상에 형성되는 산호물층은 포스트가 베이스판에 접촉하므로써 포스트의 단부의 이동이 가능하도록 포스트와 상이한 재료로 이루어진 얕은충을 형성하는 것을 특징으로 하는 압력센서.
- 제4항에 있어서, 상기 베이스판은 실리콘으로 형성되고, 얕은층은 이산화 실리콘으로 형성되는 것을 특징으로 하는 압력센서.
- 제5항에 있어서, 상기 이산화 실리콘은 3미크론 두께인 것을 특징으로 하는 압력센서.
- 제6항에 있어서, 상기 베이스판은 림부재의 하부에 놓인 베이스판의 에지 에서보다 편향 가능한 웨브부의 중앙부와 일체식으로 이루어진 영역에 보다 큰 깊이로 리세스 되는 포스트오 접하는 면을 갖는 것을 특징으로 하는 압력센서.
- 제1항에 있어서, 진동판 웨브상에 복수의 최소한 4개의 포스트가 존재하는 것을 특징으로 하는 압력센서.
- 제1항에 있어서, 진동판 웨브부상에 16개의 포스트가 고르게 공간 이격되어 있는 것을 특지으로 하는 압력센서.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US07/938,954 US5333504A (en) | 1992-09-01 | 1992-09-01 | High overpressure low range pressure sensor |
| US07/938954 | 1992-09-01 | ||
| PCT/US1993/008142 WO1994005986A1 (en) | 1992-09-01 | 1993-08-30 | High overpressure low range pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR950703140A true KR950703140A (ko) | 1995-08-23 |
Family
ID=25472280
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019950700731A KR950703140A (ko) | 1992-09-01 | 1993-08-30 | 고 초과압력 저범위 압력센서(high overpressure low range pressure sensor) |
Country Status (18)
| Country | Link |
|---|---|
| US (1) | US5333504A (ko) |
| EP (1) | EP0670995B1 (ko) |
| JP (1) | JP3327553B2 (ko) |
| KR (1) | KR950703140A (ko) |
| CN (1) | CN1051155C (ko) |
| AU (1) | AU680430B2 (ko) |
| BR (1) | BR9306946A (ko) |
| CA (1) | CA2141688A1 (ko) |
| DE (1) | DE69318847T2 (ko) |
| FI (1) | FI950912A0 (ko) |
| HU (1) | HUT70345A (ko) |
| IL (1) | IL106838A (ko) |
| MX (1) | MX9305342A (ko) |
| NO (1) | NO950777L (ko) |
| PL (1) | PL173699B1 (ko) |
| RU (1) | RU2137099C1 (ko) |
| SG (1) | SG43764A1 (ko) |
| WO (1) | WO1994005986A1 (ko) |
Families Citing this family (34)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19521275A1 (de) * | 1995-06-10 | 1996-12-12 | Leybold Ag | Gasdurchlaß mit selektiv wirkender Durchtrittsfläche sowie Verfahren zur Herstellung der Durchtrittsfläche |
| DE19521832A1 (de) * | 1995-06-16 | 1996-12-19 | Bosch Gmbh Robert | Druckmeßvorrichtung |
| US5824910A (en) * | 1997-04-16 | 1998-10-20 | The United States Of America As Represented By The Secretary Of The Navy | Miniature hydrostat fabricated using multiple microelectromechanical processes |
| US20020003274A1 (en) * | 1998-08-27 | 2002-01-10 | Janusz Bryzek | Piezoresistive sensor with epi-pocket isolation |
| US6006607A (en) * | 1998-08-31 | 1999-12-28 | Maxim Integrated Products, Inc. | Piezoresistive pressure sensor with sculpted diaphragm |
| US6351996B1 (en) | 1998-11-12 | 2002-03-05 | Maxim Integrated Products, Inc. | Hermetic packaging for semiconductor pressure sensors |
| US6346742B1 (en) | 1998-11-12 | 2002-02-12 | Maxim Integrated Products, Inc. | Chip-scale packaged pressure sensor |
| US6229190B1 (en) | 1998-12-18 | 2001-05-08 | Maxim Integrated Products, Inc. | Compensated semiconductor pressure sensor |
| WO2001059418A1 (en) | 2000-02-11 | 2001-08-16 | Rosemount, Inc. | Oil-less differential pressure sensor |
| US6642594B2 (en) * | 2001-12-06 | 2003-11-04 | Kulite Semiconductor Products, Inc. | Single chip multiple range pressure transducer device |
| US6955073B2 (en) * | 2002-10-16 | 2005-10-18 | Alcon, Inc. | Pressure sensing in surgical console |
| US6868720B2 (en) * | 2002-10-16 | 2005-03-22 | Alcon, Inc. | Testing of pressure sensor in surgical cassette |
| US6941813B2 (en) * | 2003-06-30 | 2005-09-13 | Alcon, Inc. | Noninvasive pressure sensing assembly |
| WO2005108946A1 (ja) * | 2004-05-12 | 2005-11-17 | Toyo Communication Equipment Co., Ltd. | 圧力センサ |
| US7997143B2 (en) | 2009-04-09 | 2011-08-16 | Kulite Semiconductor Products, Inc. | Internally switched multiple range transducer |
| US8760637B2 (en) | 2010-08-30 | 2014-06-24 | Alcon Research, Ltd. | Optical sensing system including electronically switched optical magnification |
| FR2982023B1 (fr) * | 2011-10-26 | 2015-03-06 | Auxitrol Sa | Structure micromecanique a membrane deformable et a protection contre de fortes deformations |
| US8806964B2 (en) | 2012-03-23 | 2014-08-19 | Honeywell International Inc. | Force sensor |
| US9003899B2 (en) | 2012-03-23 | 2015-04-14 | Honeywell International Inc. | Force sensor |
| US9003897B2 (en) | 2012-05-10 | 2015-04-14 | Honeywell International Inc. | Temperature compensated force sensor |
| DE102012109587A1 (de) * | 2012-10-09 | 2014-04-10 | Endress + Hauser Gmbh + Co. Kg | Differenzdrucksensor und Verfahren zu seiner Herstellung |
| US9410861B2 (en) * | 2014-03-25 | 2016-08-09 | Honeywell International Inc. | Pressure sensor with overpressure protection |
| CN103994854A (zh) * | 2014-04-22 | 2014-08-20 | 江苏森博传感技术有限公司 | 一种基于微机电系统技术的硅电容真空传感器 |
| US10060813B2 (en) | 2015-09-29 | 2018-08-28 | Rosemount Inc. | High over-pressure capable silicon die pressure sensor |
| US9719872B2 (en) | 2015-09-29 | 2017-08-01 | Rosemount Inc. | High over-pressure capable silicon die pressure sensor with extended pressure signal output |
| US9963340B2 (en) * | 2015-12-03 | 2018-05-08 | Honeywell International Inc. | Pressure sensor die over pressure protection for high over pressure to operating span ratios |
| US10197462B2 (en) | 2016-05-25 | 2019-02-05 | Honeywell International Inc. | Differential pressure sensor full overpressure protection device |
| US10203258B2 (en) | 2016-09-26 | 2019-02-12 | Rosemount Inc. | Pressure sensor diaphragm with overpressure protection |
| CA3099745A1 (en) | 2018-05-17 | 2019-11-21 | Rosemount Inc. | Measuring element and measuring device comprising the same |
| US11815412B2 (en) * | 2018-11-15 | 2023-11-14 | Intuitive Surgical Operations, Inc. | Strain sensor with contoured deflection surface |
| WO2021055276A1 (en) | 2019-09-17 | 2021-03-25 | Intuitive Surgical Operations, Inc. | Compact, differential, coaxial inductive force sensor |
| US12185974B2 (en) | 2019-10-17 | 2025-01-07 | Intuitive Surgical Operations, Inc. | Surgical tool with nested shaft tubes |
| EP4261513A1 (en) * | 2022-04-14 | 2023-10-18 | Infineon Technologies Dresden GmbH & Co . KG | Pressure sensing device |
| US20240125658A1 (en) * | 2022-10-18 | 2024-04-18 | Measurement Specialties, Inc. | Membrane of a sensor with multiple ranges |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1226806B (de) * | 1960-11-29 | 1966-10-13 | Siemens Ag | Kraftmessdose |
| US3341794A (en) * | 1965-07-26 | 1967-09-12 | Statham Instrument Inc | Transducers with substantially linear response characteristics |
| US4093933A (en) * | 1976-05-14 | 1978-06-06 | Becton, Dickinson Electronics Company | Sculptured pressure diaphragm |
| US4236137A (en) * | 1979-03-19 | 1980-11-25 | Kulite Semiconductor Products, Inc. | Semiconductor transducers employing flexure frames |
| JPS58151536A (ja) * | 1982-03-05 | 1983-09-08 | Hitachi Ltd | 差圧検出器 |
| US5062302A (en) * | 1988-04-29 | 1991-11-05 | Schlumberger Industries, Inc. | Laminated semiconductor sensor with overpressure protection |
| US4905575A (en) * | 1988-10-20 | 1990-03-06 | Rosemount Inc. | Solid state differential pressure sensor with overpressure stop and free edge construction |
| US4879627A (en) * | 1988-12-30 | 1989-11-07 | United Technologies Corporation | Differential capacitive pressure sensor with over-pressure protection |
| US4930042A (en) * | 1989-02-28 | 1990-05-29 | United Technologies | Capacitive accelerometer with separable damping and sensitivity |
| US4930043A (en) * | 1989-02-28 | 1990-05-29 | United Technologies | Closed-loop capacitive accelerometer with spring constraint |
| EP0400165B1 (de) * | 1989-05-30 | 1993-09-01 | Siemens Aktiengesellschaft | Drucksensor und Verfahren zu seiner Herstellung |
| US4949581A (en) * | 1989-06-15 | 1990-08-21 | Rosemount Inc. | Extended measurement capability transmitter having shared overpressure protection means |
| DE4111119A1 (de) * | 1991-04-03 | 1992-10-08 | Univ Chemnitz Tech | Stapelbare mikromechanische kapazitive druckmesszelle |
-
1992
- 1992-09-01 US US07/938,954 patent/US5333504A/en not_active Expired - Lifetime
-
1993
- 1993-08-30 BR BR9306946A patent/BR9306946A/pt not_active IP Right Cessation
- 1993-08-30 JP JP50736294A patent/JP3327553B2/ja not_active Expired - Fee Related
- 1993-08-30 RU RU95106595A patent/RU2137099C1/ru active
- 1993-08-30 SG SG1996000673A patent/SG43764A1/en unknown
- 1993-08-30 HU HU9500617A patent/HUT70345A/hu unknown
- 1993-08-30 DE DE69318847T patent/DE69318847T2/de not_active Expired - Lifetime
- 1993-08-30 KR KR1019950700731A patent/KR950703140A/ko not_active IP Right Cessation
- 1993-08-30 EP EP93921244A patent/EP0670995B1/en not_active Expired - Lifetime
- 1993-08-30 IL IL10683893A patent/IL106838A/xx not_active IP Right Cessation
- 1993-08-30 PL PL93307591A patent/PL173699B1/pl unknown
- 1993-08-30 CA CA002141688A patent/CA2141688A1/en not_active Abandoned
- 1993-08-30 AU AU48412/93A patent/AU680430B2/en not_active Ceased
- 1993-08-30 WO PCT/US1993/008142 patent/WO1994005986A1/en active IP Right Grant
- 1993-08-31 CN CN93118813A patent/CN1051155C/zh not_active Expired - Lifetime
- 1993-09-01 MX MX9305342A patent/MX9305342A/es not_active IP Right Cessation
-
1995
- 1995-02-28 NO NO950777A patent/NO950777L/no not_active Application Discontinuation
- 1995-02-28 FI FI950912A patent/FI950912A0/fi unknown
Also Published As
| Publication number | Publication date |
|---|---|
| CN1092164A (zh) | 1994-09-14 |
| PL173699B1 (pl) | 1998-04-30 |
| AU4841293A (en) | 1994-03-29 |
| AU680430B2 (en) | 1997-07-31 |
| EP0670995A1 (en) | 1995-09-13 |
| SG43764A1 (en) | 1997-11-14 |
| NO950777D0 (no) | 1995-02-28 |
| DE69318847T2 (de) | 1999-01-21 |
| HU9500617D0 (en) | 1995-04-28 |
| RU95106595A (ru) | 1996-11-20 |
| MX9305342A (es) | 1994-06-30 |
| JP3327553B2 (ja) | 2002-09-24 |
| DE69318847D1 (de) | 1998-07-02 |
| IL106838A (en) | 1997-08-14 |
| IL106838A0 (en) | 1994-08-26 |
| NO950777L (no) | 1995-02-28 |
| EP0670995B1 (en) | 1998-05-27 |
| CA2141688A1 (en) | 1994-03-17 |
| FI950912A (fi) | 1995-02-28 |
| CN1051155C (zh) | 2000-04-05 |
| BR9306946A (pt) | 1999-01-12 |
| JPH08500903A (ja) | 1996-01-30 |
| US5333504A (en) | 1994-08-02 |
| WO1994005986A1 (en) | 1994-03-17 |
| PL307591A1 (en) | 1995-05-29 |
| EP0670995A4 (en) | 1996-05-01 |
| RU2137099C1 (ru) | 1999-09-10 |
| HUT70345A (en) | 1995-09-28 |
| FI950912A0 (fi) | 1995-02-28 |
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